JPH0344048A - Carrier tape for tab type semiconductor device - Google Patents

Carrier tape for tab type semiconductor device

Info

Publication number
JPH0344048A
JPH0344048A JP17924689A JP17924689A JPH0344048A JP H0344048 A JPH0344048 A JP H0344048A JP 17924689 A JP17924689 A JP 17924689A JP 17924689 A JP17924689 A JP 17924689A JP H0344048 A JPH0344048 A JP H0344048A
Authority
JP
Japan
Prior art keywords
lead
pattern
plating
width
carrier tape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17924689A
Other languages
Japanese (ja)
Inventor
Kimio Meguro
目黒 喜美男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP17924689A priority Critical patent/JPH0344048A/en
Publication of JPH0344048A publication Critical patent/JPH0344048A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a carrier tape for a TAB use capable of precisely measuring the thickness of plating, by making the width of an electrode leading-out pattern on a polyimide tape nearly equal to the widths of a lead tip part and an OLB part, and arranging non-plated floating pattern in the part adjacent to the above pattern. CONSTITUTION:An electrode leading-out pattern 4 whose width is nearly equal to the lead widths of a lead tip part 2 and an OLB part 3 is arranged, and on both sides of said pattern, a floating pattern A 6a and a floating pattern B 6b are formed, which are electrically floated and not subjected to electroplating. When the width of the lead tip part 2 is different from that of the electrode leading-out pattern 4 in the case of plating a lead 1, the plating depths are different from each other because of the difference of current density. Hence the width of the electrode leading-out pattern 4 is made equal to the widths of the lead tip part 2 and the OLB part 3. Further, since there are the floating patterns A 6a and B 6b without being plated on both sides, the plating thickness can be easily confirmed by measuring and comparing both of them and obtaining the difference.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はTAB (テープオートメテイッドボンディン
グ)型半導体装置用キャリアテープに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a TAB (tape automated bonding) type carrier tape for semiconductor devices.

〔従来の技術〕[Conventional technology]

従来のキャリアテープは、第3図に示すように、ポリイ
ミドテープなどにエツチングにより形成されたり−ド1
があり、このリード1は、ICチップをボンディングす
るリード先端部2と基板へ実装するときのOLB部(ア
ウターリードボンディング部)3と電極用引き出しパタ
ーン4よりなる。また、これらリード群は自動送りによ
りICチップのホンディングを行なうため、テープ上に
連続繰り返しにより形成され、キャリアテープを構成し
ている。
Conventional carrier tapes are formed by etching polyimide tape or the like, as shown in Figure 3.
The lead 1 consists of a lead tip 2 for bonding an IC chip, an OLB part (outer lead bonding part) 3 for mounting on a substrate, and an electrode extraction pattern 4. Further, these lead groups are continuously and repeatedly formed on the tape to form a carrier tape in order to carry out the bonding of IC chips by automatic feeding.

また、これらリード1は、キャリアテープ上にエツチン
グにて形成されたときは、それぞれリード別めっき電流
供給パターン8にて、めっき電流供給共通パターン7に
接続され、電気的に導通状態にある。
Further, when these leads 1 are formed by etching on the carrier tape, they are connected to the plating current supply common pattern 7 by the lead-specific plating current supply pattern 8, and are electrically conductive.

エツチング後、リード1側を一つの電極としてめっき電
流供給共通パターン7よりめっき電流を供給し、電解め
っきを行なうことにより、ICチツブや基板への実装の
ためのボンデインクのためのめっきがリード1に施され
る。
After etching, plating current is supplied from the plating current supply common pattern 7 using the lead 1 side as one electrode, and electrolytic plating is performed, whereby the lead 1 is plated for bonding ink for mounting on an IC chip or board. administered.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

リードのICチップや基板へのホンディングは、熱圧着
により行なわれる。熱圧着ボンデインクを行なうときの
条件パラメータとしては圧着時の力、温度および時間な
どあげられるが、前提条件として、リードのめっきの厚
さが一定である事が必須である。
The leads are bonded to the IC chip or substrate by thermocompression bonding. Conditional parameters when performing thermocompression bonding include the force, temperature, and time during compression, but as a prerequisite, it is essential that the thickness of the lead plating be constant.

リードのめっき厚が大きくばらついていると、定められ
た条件でホンディングを行っても、ボンディング強度の
不足する事があり、ががる状態が発生すると、使用され
る装置の信頼性が低下する。一定しためっき厚のリード
を得るためには、めっき時の条件が安定していることは
もちろんであるが、最終的にはめっき厚を測る必要があ
る。
If the lead plating thickness varies widely, even if bonding is performed under specified conditions, the bonding strength may be insufficient, and if a cracking condition occurs, the reliability of the equipment used will decrease. . In order to obtain a lead with a constant plating thickness, it goes without saying that the conditions during plating must be stable, but ultimately it is necessary to measure the plating thickness.

しかしながら、上述した従来のキャリアテープでは、全
てのリードにめっきが施されており、簡単にめっき厚を
測るのは困難であるという欠点を有している。
However, the above-mentioned conventional carrier tape has the disadvantage that all the leads are plated and it is difficult to easily measure the plating thickness.

すなわち、従来のテープのリードのめっき厚を測るには
、リードを切断し、断面を観察し、めっき厚を測る方法
があるが、これは、破損検査であり、また、テープ上に
繰り返し設けられた大量のリードを測定する事も困難で
ある。
In other words, the conventional method of measuring the plating thickness of tape leads is to cut the leads, observe the cross section, and measure the plating thickness. It is also difficult to measure large numbers of leads.

また、例えば、ダイアルゲージの様な機械的方式の測定
器にてリートのめっき前後のリード厚を測定する方法も
考えられるが、リートの幅は、般に1.00μm程度で
測定が困難であり、さらに、めっき電流供給共通パター
ンのような数mmの幅の大きなところのめっき前後の厚
さを測ることは可能であるが、リード先端部とOCB部
とはめっき電流密度の違いにより、めっき厚が異なり、
正確に必要な箇所のめっき厚は求まらない。
Another option is to use a mechanical measuring device such as a dial gauge to measure the thickness of the lead before and after plating, but the width of the lead is generally about 1.00 μm and difficult to measure. Furthermore, although it is possible to measure the thickness before and after plating at a large area with a width of several mm, such as the plating current supply common pattern, it is difficult to measure the plating thickness between the lead tip and the OCB part due to the difference in plating current density. are different,
It is not possible to determine the exact plating thickness at the required location.

本発明の目的は、リードのめっき厚の測定が可能で信頼
性の高いボンディングが得られるTAB型半導体装置用
キャリアテープを提供することにある。
An object of the present invention is to provide a carrier tape for a TAB type semiconductor device that allows measurement of lead plating thickness and provides highly reliable bonding.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は、TAB型半導体装置用キャリアテープにおい
て、引き出されるパターンの幅をリード先端部およびア
ウターリードボンティング部と同等の幅にした電極用引
き出しパターンを有する少なくとも1層のめっきを施し
たリードを有し、該リードに近接し該リードと同時に形
成されためっきの施されていない少くとも↑個のフロー
ティングパターンが設けられている。
The present invention provides a carrier tape for a TAB type semiconductor device that includes a lead coated with at least one layer of plating and having an electrode extraction pattern whose width is the same as that of the lead tip and the outer lead bonding part. At least ↑ unplated floating patterns are provided in the vicinity of the leads and formed at the same time as the leads.

〔実施例〕〔Example〕

次に、本発明の実施例について図面を参照して説明する
Next, embodiments of the present invention will be described with reference to the drawings.

第1図は本発明の第1の実施例である。FIG. 1 shows a first embodiment of the invention.

第1の実施例は、第1図に示すように、リード先端部2
よりOLBL12型極用引き出しパターン4および電極
5へとつながるリード1を形成する導通パターンがあり
、そのながで、リード先端部2とOLBL12型−ド幅
と同し程度の幅の電極用引き出しパターン4を設け、そ
の両横に電気的にフローティングで電解めっきのなされ
ないフローティングパターンA6a、B6bを設ける。
In the first embodiment, as shown in FIG.
There is a conductive pattern that forms a lead 1 that connects to an OLBL12 type electrode lead pattern 4 and an electrode 5, and along that line, there is a conductive pattern that forms a lead tip 2 and an electrode lead pattern with a width that is about the same as the OLBL12 type electrode width. 4, and floating patterns A6a and B6b, which are electrically floating and are not electrolytically plated, are provided on both sides thereof.

リード1のめっきにおいては、キャリアテープ上に形成
したリード1をリード別めっき電流供給パターン8でめ
っき電流供給共通パターン7に接続し、電解めっきの1
つの電極5としてめっき電流を供給するが、リード先端
部2と電極用引き出しパターン4の幅が異なると、電流
密度の差によりめっき厚が異なるため、電極引き出しパ
ターン4もリード先端部2やOLBL12型ターンの幅
を揃えている。
In plating lead 1, lead 1 formed on the carrier tape is connected to plating current supply common pattern 7 by lead-specific plating current supply pattern 8, and electrolytic plating 1
Plating current is supplied as two electrodes 5, but if the widths of the lead tip 2 and the electrode extraction pattern 4 are different, the plating thickness will be different due to the difference in current density. The width of the turns is the same.

さらに、その状態で、両横にめっきのないフローティン
グパターンA6a、B6bがあるため、両者を比較測定
する事によりその厚さの差を求めると、容易にめっき厚
が分がる。めっき厚の差の測定は、レーザ光の反射法な
どによる現状の技術水準の測定器にて十分可能である。
Furthermore, in this state, since there are floating patterns A6a and B6b without plating on both sides, the plating thickness can be easily determined by comparing and measuring the two to determine the difference in thickness. The difference in plating thickness can be sufficiently measured using a measuring device of the current state of the art, such as a laser beam reflection method.

また、電極用引き出しパターン4の両横にフローティン
グパターンA6a、B6bを設けているため、厚さ測定
時の基板となるポリイミドテープ9に傾きがあるときの
誤差の検出ができる。
Further, since the floating patterns A6a and B6b are provided on both sides of the electrode extraction pattern 4, it is possible to detect errors when the polyimide tape 9 serving as a substrate during thickness measurement has an inclination.

第2図は本発明の第2の実施例の平面図である。FIG. 2 is a plan view of a second embodiment of the invention.

第2の実施例は、第2図に示すように、リード先端部2
およびOLB部3と同程度の幅の電極用引き出しパター
ン4を2箇所設け、その間にフローティングパターン6
Cを位置させることにより、めっきの付いている電極用
引出しパターン4とめっきの無いフローティングパター
ン6Cの厚さの差により、めっき厚が測れる。
In the second embodiment, as shown in FIG.
Two electrode extraction patterns 4 having the same width as the OLB part 3 are provided, and a floating pattern 6 is provided between them.
By positioning C, the plating thickness can be measured from the difference in thickness between the plated electrode lead pattern 4 and the unplated floating pattern 6C.

本実施例では、ポリイミドテープ9に傾きのあった場合
は、フローティングパターン6Cの両横の電極用引出し
パターン4に厚さの差が生し検出できる。
In this embodiment, if the polyimide tape 9 is tilted, there will be a difference in thickness between the electrode lead patterns 4 on both sides of the floating pattern 6C, which can be detected.

〔発明の効果〕〔Effect of the invention〕

以」二説凹したように本発明は、ポリイミドテープ上の
電極用引き出しパターンをリード先端部やOLB部と同
じ程度の幅にし、さらに、そのとなりにめっきのないフ
ローティングパターンを設けることで、容易に精度良く
めっき厚の測れるTAB用キャリアテープを得ることか
できる効果かある。
As discussed above, the present invention makes the electrode extraction pattern on the polyimide tape about the same width as the lead tip and OLB part, and furthermore, provides a floating pattern without plating next to it, making it easy to use. It is possible to obtain a TAB carrier tape that can measure plating thickness with high precision.

とくに、TAB用キャリアテープは、例えば、100m
程度の長さのポリイミドテープに連続してリードが形成
されているので、このポリイミドテープを自動送りする
ことにより、自動的にテープ」二の全てめ位置のリード
めっきの厚さを測定でき、信頼性の高いキャリアテープ
を入手できる効果がある。
In particular, the carrier tape for TAB is, for example, 100m long.
Leads are formed continuously on a polyimide tape of approximately 300 mm length, so by automatically feeding this polyimide tape, the thickness of the lead plating at all positions on the tape can be automatically measured, making it reliable. This has the effect of making it possible to obtain carrier tape with high properties.

【図面の簡単な説明】[Brief explanation of drawings]

第]−図は本発明の第1の実施例の平面図、第2図は本
発明の第2の実施例の平面図、第3図は従来のTAB型
半導体装置用キャリアテープの一例の平面図である。
Figure 2 is a plan view of the first embodiment of the present invention, Figure 2 is a plan view of the second embodiment of the present invention, and Figure 3 is a plane view of an example of a conventional carrier tape for TAB type semiconductor devices. It is a diagram.

Claims (1)

【特許請求の範囲】[Claims] TAB型半導体装置用キャリアテープにおいて、引き出
されるパターンの幅をリード先端部およびアウターリー
ドボンディング部と同等の幅にした電極用引き出しパタ
ーンを有する少なくとも1層のめっきを施したリードを
有し、該リードに近接し該リードと同時に形成されため
っきの施されていない少くとも1個のフローティングパ
ターンを設けた事を特徴とするTAB型半導体装置用キ
ャリアテープ。
A carrier tape for a TAB type semiconductor device has a lead coated with at least one layer of plating and has an electrode lead-out pattern whose width is equal to the width of the lead tip and outer lead bonding part, and the lead is plated with at least one layer. A carrier tape for a TAB type semiconductor device, characterized in that at least one unplated floating pattern is formed adjacent to the lead at the same time as the lead.
JP17924689A 1989-07-11 1989-07-11 Carrier tape for tab type semiconductor device Pending JPH0344048A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17924689A JPH0344048A (en) 1989-07-11 1989-07-11 Carrier tape for tab type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17924689A JPH0344048A (en) 1989-07-11 1989-07-11 Carrier tape for tab type semiconductor device

Publications (1)

Publication Number Publication Date
JPH0344048A true JPH0344048A (en) 1991-02-25

Family

ID=16062490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17924689A Pending JPH0344048A (en) 1989-07-11 1989-07-11 Carrier tape for tab type semiconductor device

Country Status (1)

Country Link
JP (1) JPH0344048A (en)

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