JPH0343652U - - Google Patents

Info

Publication number
JPH0343652U
JPH0343652U JP10366289U JP10366289U JPH0343652U JP H0343652 U JPH0343652 U JP H0343652U JP 10366289 U JP10366289 U JP 10366289U JP 10366289 U JP10366289 U JP 10366289U JP H0343652 U JPH0343652 U JP H0343652U
Authority
JP
Japan
Prior art keywords
frame
layers
transparent film
attached
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10366289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10366289U priority Critical patent/JPH0343652U/ja
Publication of JPH0343652U publication Critical patent/JPH0343652U/ja
Pending legal-status Critical Current

Links

JP10366289U 1989-09-04 1989-09-04 Pending JPH0343652U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10366289U JPH0343652U (US20100268047A1-20101021-C00003.png) 1989-09-04 1989-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10366289U JPH0343652U (US20100268047A1-20101021-C00003.png) 1989-09-04 1989-09-04

Publications (1)

Publication Number Publication Date
JPH0343652U true JPH0343652U (US20100268047A1-20101021-C00003.png) 1991-04-24

Family

ID=31652485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10366289U Pending JPH0343652U (US20100268047A1-20101021-C00003.png) 1989-09-04 1989-09-04

Country Status (1)

Country Link
JP (1) JPH0343652U (US20100268047A1-20101021-C00003.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016072149A1 (ja) * 2014-11-04 2016-05-12 日本軽金属株式会社 ペリクル用支持枠および製造方法
KR20220056609A (ko) * 2020-10-28 2022-05-06 주식회사 에프에스티 극자외선 리소그라피용 펠리클 프레임 및 그 제조방법

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016072149A1 (ja) * 2014-11-04 2016-05-12 日本軽金属株式会社 ペリクル用支持枠および製造方法
KR20170080582A (ko) * 2014-11-04 2017-07-10 니폰게이긴조쿠가부시키가이샤 펠리클용 지지 프레임 및 제조 방법
US10642151B2 (en) 2014-11-04 2020-05-05 Nippon Light Metal Company, Ltd. Pellicle support frame and production method
KR20220056609A (ko) * 2020-10-28 2022-05-06 주식회사 에프에스티 극자외선 리소그라피용 펠리클 프레임 및 그 제조방법

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