JPH034269U - - Google Patents

Info

Publication number
JPH034269U
JPH034269U JP6416889U JP6416889U JPH034269U JP H034269 U JPH034269 U JP H034269U JP 6416889 U JP6416889 U JP 6416889U JP 6416889 U JP6416889 U JP 6416889U JP H034269 U JPH034269 U JP H034269U
Authority
JP
Japan
Prior art keywords
hinge portion
single crystal
silicon single
acceleration sensor
crystal substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6416889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6416889U priority Critical patent/JPH034269U/ja
Publication of JPH034269U publication Critical patent/JPH034269U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP6416889U 1989-05-31 1989-05-31 Pending JPH034269U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6416889U JPH034269U (enrdf_load_stackoverflow) 1989-05-31 1989-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6416889U JPH034269U (enrdf_load_stackoverflow) 1989-05-31 1989-05-31

Publications (1)

Publication Number Publication Date
JPH034269U true JPH034269U (enrdf_load_stackoverflow) 1991-01-17

Family

ID=31594865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6416889U Pending JPH034269U (enrdf_load_stackoverflow) 1989-05-31 1989-05-31

Country Status (1)

Country Link
JP (1) JPH034269U (enrdf_load_stackoverflow)

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