JPH0342316Y2 - - Google Patents

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a clamping mechanism for a vibration isolation table that can stop the vibration isolation table in a short time when replacing a workpiece.

(Prior art and its problems) A conventional vibration isolator has a structure in which a vibration isolator is supported by an air spring. On top of this vibration-isolating table were placed ultra-precision machines that were extremely sensitive to vibrations, such as electron microscopes and single-crystal pulling equipment.
To replace a workpiece on such an ultra-precision machine, exhaust the air spring to lower the air pressure in the air spring, lower the vibration isolation table and set it on the base, replace the workpiece in this state, and then They then supplied compressed air to increase the air pressure in the air springs, lifted the vibration isolation table together with ultra-precision machinery, and resumed work. However, with this method, the air pressure in the air spring is released once, and compressed air must be supplied again to increase the air pressure after the workpiece replacement work is completed, and it takes a considerable amount of time to reach stable air pressure, making it difficult to perform quick work. There was a problem in that it was not possible to restart.

(Purpose of the invention) The present invention was devised in view of the drawbacks of the conventional example, and its purpose is to quickly install the vibration isolation table on the base without changing the air pressure of the air spring. To provide a clamp mechanism for a vibration isolator that can be detached.

(Means for Solving the Problems) To achieve the above object; A vibration isolation table 3 is placed on a base 2 via a supporting air spring 1.

A predetermined gap δ is provided between a base 4 installed on a base 2 and a vibration isolation table 3.

Clamp 6 and vibration isolation table 3 set up from base 2
A clamping air spring 5 is arranged between.

A predetermined gap γ is provided between the clamping air spring 5 and the clamp 6 or between the clamping air spring 5 and the vibration isolation table 3.

The support air spring 1 and the clamp air spring 5 are connected to a compressed air source 8 via a switching valve 7 .

A clamp 6 mechanism for a vibration isolator, characterized in that a check valve 9 for stopping exhaustion of the support air spring 1 is provided in the supply/exhaust line of the support air spring 1.

; is adopted as a technical means.

Operation When replacing the work, the switching valve 7 is operated to switch the compressed air source 8 from the support air spring 1 to the clamp air spring 5, and the clamp air spring 5 is expanded.

On the other hand, the air supply to the support air spring 1 is cut off, but due to the action of the check valve 9, the air supply to the support air spring 1 is cut off.
No air leakage is prevented.

When compressed air is continued to be supplied to the clamping air spring 5, the clamping air spring 5 comes into contact with the clamp 6 installed upright from the base 2, and the supporting air spring 1
The vibration isolating table 3 is gradually pushed down against the pressure, and finally the vibration isolating table 3 is pressed against the base 4.

At this point, the vibration isolation table 3 is fixed on the base 4,
During this time, workpieces are exchanged.

When the workpiece replacement is completed, the switching valve 7 is turned on again.
to connect the compressed air source 8 from the clamp air spring 5 to the support air spring 1.

Then, the air in the clamping air spring 5 is released and it is separated from the clamp 6, and at the same time, the supporting air spring 1 lifts the vibration isolating table 3 to the reference height H, and the work is resumed.

(Embodiments) The present invention will be described below with reference to illustrated embodiments.
The support air spring 1 is composed of a pressure vessel 18 and a spring portion 17. A vibration isolation table 3 is placed on the base 2 and supported by one or more supporting air springs 1. In the case of one location, it is the center of the vibration isolation table 3. A base 4 is installed on the base 2, and a predetermined gap δ is provided between the base 4 and the vibration isolation table 3. 3 on both sides of the vibration isolation table 3
4 to 4 air springs 5 for clamping are installed. On the other hand, from the base 2 there is an inverted L-shaped clamp 6.
is erected, and a predetermined gap γ is provided between the clamp air spring 5 and the clamp air spring 5. Furthermore, a level sensor 10 composed of, for example, a three-way valve is arranged on the base 2, and a sensor lever 11 protruding from the level sensor 10 is in contact with the lower surface of the vibration isolation table 3. The switching valve 7 is, for example, a four-way valve, and is provided with a switching lever 11 and a switching solenoid 12. The compressed air source 8 is connected to the input 13 of the switching valve 7, and in the case of the figure, to the second I/O port 15. No.
The clamp supply/exhaust line led out from the 2I/O port 15 is branched and connected to the front, rear, left, and right clamp air springs 5 through a needle valve 16 for flow rate adjustment. On the other hand, the 1st I/
The O ports 14 are each connected to three or four level sensors 10 via check valves 9, and these level sensors 10 are connected to the pressure vessel 18 of the support air spring 1. .
The direction of the check valve 9 is set in a direction that prevents air from escaping from the support air spring 1 in the support supply/exhaust line.

Therefore, normally, the compressed air source 8 is connected to the first I/O port 14 side and compressed air is supplied to the support air spring 1 side to lift the vibration isolation table 3 to the reference height H and also to raise the level sensor 10. It is activated to adjust the amount of compressed air supplied to the support air spring 1 and maintain the reference height H. In this state, for example, observation using an electron microscope or photography is performed, or single crystal pulling work is performed. When this series of operations is completed, the work must be replaced, but in that case, the switching lever 1 of the switching valve 7 must be replaced.
1 (or by turning on the switch corresponding to the switching lever 11) to switch the connection of the switching valve 7. That is, as shown in the figure, the compressed air source 8 is
It is connected to the O port 15 and compressed air is supplied to the clamp air spring 5 to inflate it. At this time, the inflow amount of compressed air is determined according to the opening degree of the needle valve 16, and the expansion speed of the clamping air spring 5 is determined. On the other hand, on the supporting air spring 1 side, the level sensor 10 is placed in a free state, and the first I/O port 14 is connected to the first exhaust 19 in the switching valve 7, so that the air from the supporting air spring 1 is evacuated. However, the check valve 9 in the middle prevents air from leaking to the first exhaust 19, so that the amount of air in the support air spring 1 does not decrease. Now, compressed air is supplied to the aforementioned air spring 5 for the clamp and it continues to expand, but the air spring 5 for the clamp comes into contact with the clamp 6 which is set upright from the base 2, and gradually moves against the air spring 1 for support. Vibration isolation table 3
Press down and finally press the vibration isolation table 3 onto the base 4.
It becomes fixed. At this point, the vibration isolation table 3 is fixed on the base 4, and the workpiece is replaced during this time. When the workpiece replacement is completed, the switching solenoid 12 is operated to restore the connection state to the original state. That is, the compressed air source 8 is connected to the first I/O port 1.
4, and compressed air is supplied to the support air spring 1 from the forward direction of the check valve 9 through the level sensor 10 to inflate it. During this time, the clamping air spring 5 is connected to the second exhaust 20, and the air escapes from there and detaches from the clamp 6. At the same time, the supporting air spring 1 lifts the vibration isolating table 3 to the reference height H. The level sensor 10 also operates and work resumes. The level sensor 10 is the vibration isolation table 3
When the vibration isolation table 3 becomes lower than the reference height H, compressed air is supplied, and the vibration isolation table 3 reaches the reference height H.
If it becomes higher, the function is to remove excess air and return the vibration isolation table 3 to the standard height H. As a result, the vibration isolation table 3 is always accurately maintained at the reference height H.

(Effects of the present invention) As described above, the present invention arranges a vibration isolation table on a base via a supporting air spring, and a predetermined distance between the base installed on the base and the vibration isolation table. A gap is provided, and a clamping air spring is installed on the vibration isolating table. A predetermined gap is also provided between the clamp set upright from the base and the clamping air spring, and the supporting air spring and the clamping air spring are connected via a switching valve. is connected to the compressed air source, and a check valve is installed in the supply and exhaust line of the support air spring to stop the exhaust from the support air spring.When replacing the workpiece, the switching valve is activated to support the compressed air source. When the clamping air spring is switched from the supporting air spring to the clamping air spring and the clamping air spring is inflated, the vibration isolating table is pushed down against the supporting air spring, and is finally pressed and fixed to the base, allowing it to be used even on ultra-precision mechanical workpieces. It can be easily replaced, and during this time the air supply to the support air spring will be cut off, but the check valve will prevent air leakage from the support air spring to the support air spring. When the connection with the compressed air source is switched to the air spring, the supporting air spring immediately stands up and returns to the standard height in a very short time, which can significantly shorten the time required for workpiece replacement work. There are advantages to saying that.

[Brief explanation of the drawing]

FIG. 1: A front view schematically showing the piping system when the support air spring in the present invention is in operation. 1... Air spring for support, 2... Base, 3...
Vibration isolation table, 4...Base, 5...Air spring for clamp, 6...Clamp, 7...Switching valve, 8...
Compressed air source, 9...Check valve, 10...Level sensor, 11...Switching lever, 12...Switching solenoid, 13...Import, 14...1st I/
O port, 15...2nd I/O port, 16...needle valve, 17...spring part, 18...pressure vessel,
19...First exhaust, 20...Second exhaust, δ...Gap, γ...Gap, H...Reference height.

Claims (1)

[Scope of utility model registration request] A vibration isolator is placed on the base via a support air spring, a predetermined gap is created between the base installed on the base and the vibration isolator, and the clamp and vibration isolator are placed upright from the base. A clamping air spring is arranged between the clamping air spring and the clamp, and a predetermined gap is provided between the clamping air spring and the clamp or between the clamping air spring and the vibration isolating table, and the support air spring and the clamp are connected via a switching valve. A clamping mechanism for a vibration isolator, characterized in that the support air spring is connected to a compressed air source, and a check valve for stopping the exhaust of the support air spring is provided in the supply and exhaust line of the support air spring.