JPH034036Y2 - - Google Patents

Description

[Detailed description of the invention] This invention is useful when confirming the orientation flat (hereinafter referred to as OF) plane of a semiconductor single crystal ingot in the initial process of semiconductor manufacturing, and when measuring the orientation of the single crystal axis afterwards. It relates to a measuring jig used.

[Conventional technology]

In the manufacturing process of semiconductor devices, the semiconductor single crystal wafers used are controlled to have a constant crystal orientation due to the relationship with device characteristics. This control is carried out by cutting a portion of the outer periphery of a circular wafer flat and using this plane as a reference. This notched surface is called the OF surface, and at the initial stage of the semiconductor manufacturing process, that is, when it is in the state of a single crystal ingot, the OF surface is formed by grinding the determined side surface. OF
After the plane is formed, for confirmation, the OF plane is measured by X-ray diffraction, and the crystal axis orientation of the single crystal is also measured. Here, to confirm the OF plane, the OF plane on the side surface of the ingot is measured, and to measure the crystal axis, the ingot cross section is measured.

[Problem that the invention attempts to solve]

However, the measuring equipment used at this time is
Figures 6 and 7 show the results when confirming the OF plane and when measuring the crystal axis.
As shown in the figure, it is composed of workpiece mounting sections of different shapes, and therefore needs to be replaced. During replacement, the operation of removing and attaching the workpiece placement parts 10, 10' depends on the bolts 11, which is troublesome and time-consuming.Moreover, since the workpiece placement parts are heavy, there is danger, which reduces work efficiency and ultimately reduces work efficiency. This was reducing production efficiency.

[Means for solving problems]

The present invention was made to solve the above-mentioned problems, and includes a V-block type receiver 2 in which one or more straight grooves 1 with a slight width are bored in the depth direction on the slope and/or the upper surface. , has a cross-sectional shape that substantially matches the cross-sectional shape of the straight groove 1, is provided with a protrusion 3 that is slidable with respect to the straight groove, and has a protrusion 3 that is slidable on the slope of the V-block type receiver 2 and/or
Alternatively, a workpiece holder 4 having a polygonal cross section and having a surface other than the protrusion as one of its constituent surfaces that can slide in close contact with the upper surface, and a workpiece mounter 4 having a surface on the rear end of the upper surface thereof. A workpiece support 6 having an X-ray diffraction window 5 installed upright; Since the protrusion 3 can be engaged and slid, the workpiece mounting device can be attached to and detached from the V-block type receiver as appropriate.

[Effect]

In the present invention, the protrusion of the workpiece holder slides into engagement with a straight groove bored in the V-block type receiver. Therefore, the workpiece holder, which has one surface in close contact with the slope and/or top surface of the V-block type receiver, can be placed on the V-block type receiver with the straight groove as if it were a rail. It will fit.
When checking the OF surface, a workpiece holder is attached to the V-block type receiver (this is shown in Figures 1 and 2), and when measuring crystal orientation, the workpiece holder is used It is used with only the V-block type receiver with the holder removed (this is shown in Figures 4 and 5).

Hereinafter, the present invention will be explained in more detail by giving examples.

〔Example〕

OF
A silicon single crystal ingot 7 with a surface formed thereon is placed.
The OF surface was confirmed. Next, the workpiece mounting device was removed from the V-block type receiver, and the silicon single crystal ingot 7 was set on the V-block type receiver as shown in Figs. 4 and 5, and the crystal axis orientation was measured. Summer.

The time required from the completion of OF confirmation to the completion of removing the V-block receiver from the workpiece holder and completing the crystal axis orientation measurement was approximately 4 minutes per ingot, compared to the conventional 12 minutes. The time was reduced to 1/3, improving work efficiency.

The workpiece holder 4 is attached to the V-block type receiver 2 by inserting a protrusion provided at the bottom of the workpiece holder into a straight groove 1 drilled under the slope of the V-block type receiver. 3 is engaged and slid in the depth direction, and removal is done in the opposite manner.

In addition, the workpiece support 6 on the workpiece mounting device used when confirming the OF surface is provided with an X-ray diffraction window 5 through which X-rays 8 for measurement are incident and It is reflected and goes to the receiving side of the X-ray diffraction device.

[Effect of idea]

With the above-mentioned configuration, the present invention eliminates the need to replace jigs when checking the OF plane and when measuring the crystal orientation, and the workpiece mounting device can be removed from the mounting area as needed. Bye. This work is not as time-consuming and labor-intensive as in the past, such as removing bolts and moving heavy objects, and is dangerous. Since it is only necessary to attach or detach by engaging the protrusion of the mounting device, it is extremely simple, safe and efficient.

In addition, regarding the stability of the device, when the workpiece mounting device is mounted on the V-block type receiver, the workpiece
Since the block mounting device is slidably in close contact with the V-block type receiver on surfaces other than the protrusion, there is no wobbling.

[Brief explanation of the drawing]

Fig. 1 is a plan view showing the measurement state for confirming the OF surface using the present invention, Fig. 2 is a front view showing the measurement state for confirming the OF surface using the present invention, and Fig. 3 is a plan view showing the measurement state for confirming the OF surface using the present invention. , a perspective view of a workpiece mounting device used in an embodiment of the present invention, FIG. 4 is a plan view showing the measurement state of crystal orientation using the present invention, and FIG. Figure 6 is a front view showing the measurement state of orientation, Figure 6 is a vertical cross-sectional view of the main part of a conventional measuring device for confirming the OF plane, and Figure 7 is a vertical cross-sectional view of the main part of a conventional measuring device for measuring crystal orientation. FIG. 8 is a front view showing another measurement state for confirming the OF surface using the present invention. 1... Straight groove, 2... V block type receiver, 3...
... Protrusion, 4 ... Workpiece mounting device, 5 ... X-ray diffraction window, 6 ... Workpiece support, 7 ... Silicon single crystal ingot, 8 ... X-ray, 10, 10 '...Wa-
Placement part, 11...Bolt.

Claims (1)

[Claims for Utility Model Registration] A V-block type receiver in which one or more straight grooves with a slight width are bored in the depth direction on the slope and/or the upper surface, and a cross-sectional shape that substantially matches the cross-sectional shape of the straight groove. , and includes a protrusion that can slide in the linear groove, and a surface that can slide in close contact with the slope and/or upper surface of the V-block type receiver, other than the protrusion. a workpiece support having a polygonal cross-section; a workpiece support having an X-ray diffraction window provided upright on the rear end of the upper surface of the workpiece support; The straight groove and the protrusion are capable of engaging and sliding, so that the workpiece mounting device can be attached to and detached from the V-block type receiver as appropriate. A jig for measuring flat surfaces.