JPH0339839U - - Google Patents
Info
- Publication number
- JPH0339839U JPH0339839U JP10092589U JP10092589U JPH0339839U JP H0339839 U JPH0339839 U JP H0339839U JP 10092589 U JP10092589 U JP 10092589U JP 10092589 U JP10092589 U JP 10092589U JP H0339839 U JPH0339839 U JP H0339839U
- Authority
- JP
- Japan
- Prior art keywords
- rotary table
- centrifugal dryer
- centrifugal
- wafer
- photoelectric sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10092589U JPH0339839U (ko) | 1989-08-29 | 1989-08-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10092589U JPH0339839U (ko) | 1989-08-29 | 1989-08-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0339839U true JPH0339839U (ko) | 1991-04-17 |
Family
ID=31649902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10092589U Pending JPH0339839U (ko) | 1989-08-29 | 1989-08-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0339839U (ko) |
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1989
- 1989-08-29 JP JP10092589U patent/JPH0339839U/ja active Pending