JPH0339834U - - Google Patents
Info
- Publication number
- JPH0339834U JPH0339834U JP10138389U JP10138389U JPH0339834U JP H0339834 U JPH0339834 U JP H0339834U JP 10138389 U JP10138389 U JP 10138389U JP 10138389 U JP10138389 U JP 10138389U JP H0339834 U JPH0339834 U JP H0339834U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- chamber
- load lock
- cvd apparatus
- elevator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例の要部を示す断面図
で第２図のＡ部拡大図、第２図は該実施例の概略
側断面図、第３図は第２図のＢ矢視図、第４図は
従来例の概略説明図である。
１……反応室、２……ロードロツク室、８……
エレベータ機構、２０……台座、３１……ローレ
ツト螺子を示す。
FIG. 1 is a sectional view showing the main parts of an embodiment of the present invention, an enlarged view of part A in FIG. 2, a schematic side sectional view of the embodiment, and FIG. The perspective view, FIG. 4, is a schematic explanatory diagram of a conventional example. 1...Reaction chamber, 2...Loadlock chamber, 8...
Elevator mechanism, 20... pedestal, 31... knurled screw.
Claims (1)
ータ機構により、ボートを反応室に装入し、又ボ
ートを反応室からロードロツク室へ取出し得る様
にした縦型ＣＶＤ装置に於いて、反応室をロード
ロツク室内側より着脱可能とすると共に該反応室
を前記エレベータに乗載可能としたことを特徴と
する縦型ＣＶＤ装置。 In a vertical CVD apparatus, a load lock chamber is provided below the reaction chamber, and a boat can be loaded into the reaction chamber and taken out from the reaction chamber to the load lock chamber using an elevator mechanism. A vertical CVD apparatus characterized in that the reaction chamber can be attached and detached from the inside and that the reaction chamber can be mounted on the elevator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10138389U JPH0339834U (en) | 1989-08-30 | 1989-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10138389U JPH0339834U (en) | 1989-08-30 | 1989-08-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0339834U true JPH0339834U (en) | 1991-04-17 |
Family
ID=31650340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10138389U Pending JPH0339834U (en) | 1989-08-30 | 1989-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0339834U (en) |
-
1989
- 1989-08-30 JP JP10138389U patent/JPH0339834U/ja active Pending