JPH0338627U - - Google Patents

Info

Publication number
JPH0338627U
JPH0338627U JP9796589U JP9796589U JPH0338627U JP H0338627 U JPH0338627 U JP H0338627U JP 9796589 U JP9796589 U JP 9796589U JP 9796589 U JP9796589 U JP 9796589U JP H0338627 U JPH0338627 U JP H0338627U
Authority
JP
Japan
Prior art keywords
substrate
processed
width
transfer direction
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9796589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9796589U priority Critical patent/JPH0338627U/ja
Publication of JPH0338627U publication Critical patent/JPH0338627U/ja
Pending legal-status Critical Current

Links

JP9796589U 1989-08-24 1989-08-24 Pending JPH0338627U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9796589U JPH0338627U (enrdf_load_stackoverflow) 1989-08-24 1989-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9796589U JPH0338627U (enrdf_load_stackoverflow) 1989-08-24 1989-08-24

Publications (1)

Publication Number Publication Date
JPH0338627U true JPH0338627U (enrdf_load_stackoverflow) 1991-04-15

Family

ID=31647084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9796589U Pending JPH0338627U (enrdf_load_stackoverflow) 1989-08-24 1989-08-24

Country Status (1)

Country Link
JP (1) JPH0338627U (enrdf_load_stackoverflow)

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