JPH033745U - - Google Patents
Info
- Publication number
- JPH033745U JPH033745U JP6435189U JP6435189U JPH033745U JP H033745 U JPH033745 U JP H033745U JP 6435189 U JP6435189 U JP 6435189U JP 6435189 U JP6435189 U JP 6435189U JP H033745 U JPH033745 U JP H033745U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- lower plate
- pin
- upper plate
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6435189U JPH033745U (da) | 1989-05-31 | 1989-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6435189U JPH033745U (da) | 1989-05-31 | 1989-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH033745U true JPH033745U (da) | 1991-01-16 |
Family
ID=31595219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6435189U Pending JPH033745U (da) | 1989-05-31 | 1989-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH033745U (da) |
-
1989
- 1989-05-31 JP JP6435189U patent/JPH033745U/ja active Pending