JPH0337293Y2 - - Google Patents

Description

[Detailed description of the invention] (Technical field of the invention) The invention relates to a mounting structure for a partition wall installed in a clean room, and more specifically, a vibration absorbing material is interposed between the lower surface of a ceiling frame that supports a filter and a cap. This article relates to a clean room partition wall mounting structure.

(Conventional technology) In order to maintain a constant air purification ability, clean rooms are equipped with external forces such as vibrations generated inside and outside the room.
Designed to avoid exposure to HEPA filters.
However, in reality, as shown in the partially omitted cross-sectional view of FIG. Partition wall 1
4 is installed directly inserted.

(Problem) In such a structure, when the partition wall 14 receives vibration directly or from the floor, the vibration immediately propagates to the filters 11, 11 via the cap 13 and the ceiling frame 12. In particular, when the cap 13 is made of aluminum or steel, the propagation of vibration is significant, which reduces the airtightness between the filter 11 and the ceiling frame 12 and between the ceiling frame 12 and the cap 13, and furthermore, the filter It also affects the cleaning ability of No. 11 itself.

(Means for solving the problems) This invention was devised in view of the above problems.
Rather than attaching the cap directly to the filter, a so-called vibration absorbing material is interposed between the two to absorb vibrations from the partition wall.

(Example) Hereinafter, the partition wall mounting structure of the present invention will be explained in detail based on the drawings.

FIG. 1 is a partially omitted sectional view illustrating the mounting structure of the partition wall.

1 is a filter, and the filters 1, 1 are placed on the upper surface of the ceiling frame 2. Further, the upper surface of the ceiling frame 2 is fixed via a nut 23 to a hanging bolt 22 from a ceiling structural member (not shown) of the clean room. A vibration absorbing material 3 is fixed to the lower surface 21 of this ceiling frame 2 via a plurality of screws B. The vibration absorbing material 3 is usually formed into a substantially hollow strip of soft vinyl chloride material or synthetic rubber material. That is, the vibration isolating material 3 is made of a material that has a high vibration absorbing ability, and also has a shape that exhibits the vibration absorbing ability. A cap 4 is attached to the lower part of the vibration absorbing material 3. The specific attachment means are as follows:
For example, an engaging piece 31 provided at the bottom of the vibration absorbing material 3,
31 and the engaging piece 4 provided on the upper surface 41 of the Kasagi 4
4 and 44 are fitted together. On the other hand, Kasagi 4
The upper surface 41 and the side surfaces 42, 42 form a substantially square cross section with a recess 43, and projecting strips 45, 45 are provided at the lower ends of the side surfaces 42, 42 in an opposing state. This cap 4 is usually integrally formed of extruded aluminum or steel. Recessed portion 43 of Yotsute Kasagi 4
If the upper end 51 of the partition wall 5 is inserted into the double protruding strip 4
It is installed in a state where it is sandwiched between 5 and 45.

In the partition wall mounting structure described above, even if an external force is directly or indirectly applied to the partition wall 5 and causes vibration, the partition wall 5 is held only by the protruding strips 45, 45 of the Kasagi 4, and the vibration is transmitted. There is also less vibration, and the lower surface 21 of the ceiling frame 2 and the
Since the vibration absorbing material 3 is interposed between the upper surfaces 41 of
The vibrations from the partition wall 5 are absorbed by the vibration absorbing material 3 and are not propagated to the ceiling frame 2. Therefore, airtightness is not impaired between the filter 1 and the ceiling frame 2, and between the lower surface 21 of the ceiling frame 2 and the upper surface 41 of the cap 4, and the cleaning ability of the filters 1, 1 can be fully demonstrated in the clean room.

In particular, the airtightness between the lower surface 21 of the ceiling frame 2 and the upper surface 41 of the cap 4 is achieved by connecting the vibration absorbing material 3 with a plurality of screws B,
Since it is fixed by B..., the airtightness becomes higher.

(Effects) The above partition wall mounting structure does not reduce the airtightness of the clean room even if vibrations occurring inside and outside the clean room are propagated to the partition wall, and the cleaning ability of the filter itself is not reduced. This makes it an ideal partition wall mounting structure for clean rooms for biotechnology and superpower semiconductors, which have been in particular demand in recent years.

[Brief explanation of the drawing]

FIG. 1 is a partially omitted sectional view showing a clean room partition wall mounting structure of the present invention, and FIG. 2 is a partially omitted sectional view showing a conventional clean room partition wall mounting structure. , In the figure, 1 and 1 are filters, 2 is a ceiling frame, 3 is a vibration absorbing material, 4 is a cap, 41 is a top surface, 42,
42 is a side wall, 45, 45 are projecting strips, and 5 is a partition wall.

Claims (1)

[Claims for Utility Model Registration] In a structure in which a partition wall is attached to the lower surface of a ceiling frame that supports a filter, a hollow vibration absorbing material made of a soft material is fixed with screws to the lower surface of the ceiling frame, and the vibration absorbing material A cap board having a substantially round-shaped cross section and having a recessed portion formed by an upper surface and a side surface is fitted below the cap board, and the upper end of the partition wall is held within the recessed portion of the cap board, and the vibration absorbing material is A pair of locking pieces are provided at the bottom, and a pair of locking pieces corresponding to the above-mentioned locking pieces are provided on the top of the cap, and by fitting both the locking pieces together, the concave portion of the cap is turned downward. A partition wall mounting structure for a clean room, characterized in that the upper end of the partition wall is inserted into the recess and held between two protruding strips.