JPH0335892Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a leak valve for introducing atmospheric air into the inside of a vacuum apparatus when the use of the vacuum apparatus is finished, when repairing the inside, or when replacing parts or samples. When introducing air into a vacuum device in this way, if it is introduced rapidly, the internal mechanism may be damaged due to sudden pressure changes, or problems may occur such as contamination due to scattering of powder, etc. . In addition, turbo molecular pumps continue to rotate for a long time due to inertia even after the power is turned off, so if air is suddenly introduced into the interior at the same time as the power is turned off, the rotor blades may be damaged or the bearings may be damaged. Lifespan is shortened.
For example, a needle valve has been used as a leak valve to prevent this, but it has the disadvantage that it requires careful attention in adjusting the amount of leakage and is not easy to handle. Therefore, the present invention eliminates the above-mentioned drawbacks in conventional leak valves.

The present invention involves arranging a disc having minute air circulation holes between the flanges formed at the tip of a leak valve connecting pipe in any vacuum device and the connecting pipe in a needle valve or other appropriate on-off valve, and An O-ring is fitted to the peripheral edge of the plate, and the collar is tightened with a tightening tool. Therefore, when the opening/closing valve is opened, the atmosphere flows into the vacuum device through the air circulation hole in the disk, and the amount of leakage is set depending on the size of the hole. Therefore, there is no difficulty in operating the on-off valve, such as requiring careful attention.
The valve can be opened easily. Furthermore, by opening the fastener and replacing the disk fitted with the O-ring, there are effects such as the ability to easily set the leakage amount to an arbitrary value.

The drawings show an embodiment of the present invention, and FIG. 1 is a partially longitudinal side view, and FIG. 2 is a sectional view taken along line AA in FIG. 1.
For example, a leak valve connecting pipe 3 is connected to a turbo molecular pump 2 connected to a rotary pump on the low vacuum side by a conduit 1, a collar 4 is provided at the tip thereof, and the back surface 5 of this collar is formed into a conical shape. be. Further, a flange 8 is provided at the tip of the connecting pipe 7 of the needle valve or other suitable on-off valve 6, and its back surface 9 is formed into a conical shape, and the flange 4 and 8 are opposed to each other with an O-ring 10 interposed therebetween. It's inserted. This O-ring 10
is fitted to the peripheral edge of the disc 11, a minute air circulation hole 12 having an arbitrary size is provided in the disc 11, and annular ribs 13, 14 are formed inside the O-ring 10, By fitting inside the connecting tubes 3 and 7, the axes of these connecting tubes and the disk 11 can be easily aligned.
Further, concave grooves 17 and 18 having trapezoidal cross sections are provided on the inner surfaces of a pair of semicircular fasteners 15 and 16, and one end of the grooves is connected with a link 19, and the other end is connected with a thumbscrew 20. It is designed to be tightened. That is, the pair of fasteners 15 and 16 are connected to the connecting pipe 3,
Fit the flanges 4 and 8 of 7 from both sides and tighten the thumbscrew 2.
It was tightened to 0. Note that valve 6 is needle 2
It has a structure in which the tip of the ring 1 faces the O-ring 22.

In such a leak valve, when introducing the atmosphere into the pump 2, an appropriate opening/closing valve 6 such as a needle valve is opened all at once without requiring any fine adjustment. Therefore, the inside of the connecting pipe 7 momentarily becomes atmospheric pressure, but the connecting pipe 7 and the connecting pipe 3 of the vacuum device
Since they are connected to each other only by the micro holes 12, outside air flows into the vacuum device such as the turbo molecular pump 2 at a slow rate with a small leakage amount determined by the size of the holes 12. Therefore, the on-off valve 6 can be opened all at once at any speed without requiring special care in operating the on-off valve 6, making the operation extremely easy. In addition, by preparing a plurality of discs 11 with different sizes of microholes 12, and loosening the wing screws 20 to unfasten the flanges 4 and 8, the discs 11
The leak rate can be set to a desired value by easily replacing the leak rate.

[Brief explanation of the drawing]

FIG. 1 is a partially longitudinal side view of an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along line AA in FIG. In the figure, 1 is a vacuum conduit, 2 is a turbo molecular pump, 3 is a leak valve connecting pipe, 4 is a collar, and 5 is a collar 4
, 6 is the on-off valve, 7 is the connecting pipe, 8 is the collar, 9
is the back of the brim 8, 10 is the O-ring, 11 is the disc,
12 is a small air circulation hole, 13 and 14 are brim, 1
5 and 16 are fasteners, 17 and 18 are grooves, 19 is a link, 20 is a screw, 21 is a needle, and 22 is an O-ring.

Claims (1)

[Scope of utility model registration request] A collar is provided at the tip of the leak valve connecting pipe in the vacuum device and at the tip of the connecting tube in the on-off valve that introduces the atmosphere into the vacuum device, and the back surface of at least one of the ribs is formed into a conical shape so that they are coaxial. An O-ring is fitted to the periphery of a disc which is opposed to each other and has a minute air flow hole, and the O-ring is inserted between the brim of the leak valve connecting pipe and the opening/closing valve connecting pipe. A leak valve for a vacuum device, in which a pair of fasteners each having a trapezoidal semicircular groove formed on the inner surface is fitted onto the flanges of the two connecting pipes from both sides to tighten them.