JPH0334967B2 - - Google Patents
Info
- Publication number
- JPH0334967B2 JPH0334967B2 JP61117497A JP11749786A JPH0334967B2 JP H0334967 B2 JPH0334967 B2 JP H0334967B2 JP 61117497 A JP61117497 A JP 61117497A JP 11749786 A JP11749786 A JP 11749786A JP H0334967 B2 JPH0334967 B2 JP H0334967B2
- Authority
- JP
- Japan
- Prior art keywords
- fine
- filter paper
- large number
- air
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010419 fine particle Substances 0.000 claims description 23
- 239000002245 particle Substances 0.000 claims description 14
- 230000000903 blocking effect Effects 0.000 claims description 12
- 239000000835 fiber Substances 0.000 claims description 9
- 239000003365 glass fiber Substances 0.000 claims description 9
- 238000009423 ventilation Methods 0.000 claims description 8
- 238000004887 air purification Methods 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 7
- 239000011148 porous material Substances 0.000 claims description 7
- 230000000306 recurrent effect Effects 0.000 claims description 2
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000428 dust Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 4
- 229920000544 Gore-Tex Polymers 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000010410 dusting Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004840 adhesive resin Substances 0.000 description 1
- 229920006223 adhesive resin Polymers 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Paper (AREA)
- Filtering Materials (AREA)
Description
（発明の利用分野）
本発明はLSI装置の製造などにおいて要求され
る高清浄度を持つ作業環境を実現するために用い
る空気清浄化用濾過体に関するものである。
（発明の背景）
電子工業、精密工業、製薬工業など塵埃の付着
が製品の性能などに致命的な影響を及ぼすものの
製造においては、高度な無塵化環境が要求されて
いる。これに伴い0.3μｍ径の粒子を99.97％以上
の効率で捕捉することができる精密濾過用の瀘紙
が開発され、空気清浄化用の高性能瀘紙として用
いられている。
これらの高性能瀘紙は、通常、細い硝子短繊維
を強度付与のための接着用の樹脂を混入した水中
に混合して抄紙したものを乾燥して製造されてい
る。
使用する繊維の太さは要求される性能に対応し
て選ばれる。
瀘紙は、濾過容量を大にするために紙厚を大き
くすることが一般に行われており、空気中の塵埃
は瀘紙の表面及び瀘紙中に捕捉されるようになつ
ている。
例えば、第１図に示すように、瀘紙１の厚さを
400μｍとした場合、空気中の塵埃は、その空気
入口側の表面及び入口側から約200μｍの範囲に
捕捉され、瀘紙外に出てくるものは殆どない。
しかしながら、本発明者が調べたところ、上記
のように空気中の塵埃を充分に除くことができる
瀘紙を用いた場合にも、使用条件によつては、瀘
紙の出口側から微細粒子が洩れてくることが判明
した。
そこで、本発明者は、市販の平均径が約0.4〜
0.7μｍの硝子短繊維を0.4mmの厚さに抄紙して作
られた、0.3μｍ径の粒子に対して99.97％の捕捉
効率をもつ瀘紙を４cm×４cmの大きさに切断し、
これを無塵の水、即ち純粋100c.c.中に１分間宛３
回浸漬して、純水中に流出してくる微細粒子を測
定したところ第１表に示す結果を得た。
(Field of Application of the Invention) The present invention relates to an air cleaning filter used to realize a working environment with high cleanliness required in the manufacture of LSI devices. (Background of the Invention) A highly dust-free environment is required in the manufacturing of electronic, precision, and pharmaceutical industries where the adhesion of dust has a fatal effect on product performance. Along with this, a filter paper for precision filtration that can capture particles with a diameter of 0.3 μm with an efficiency of 99.97% or more has been developed and is used as a high-performance filter paper for air purification. These high-performance filter papers are usually manufactured by mixing thin short glass fibers in water mixed with an adhesive resin for strength, and then drying the resulting paper. The thickness of the fibers used is selected according to the required performance. Filter paper is generally made thicker in order to increase its filtration capacity, and dust in the air is trapped on the surface of the filter paper and in the filter paper. For example, as shown in Figure 1, the thickness of filter paper 1 is
When the filter paper is set to 400 μm, dust in the air is captured on the surface of the air inlet side and within a range of about 200 μm from the inlet side, and almost no dust comes out of the filter paper. However, the inventor's research has revealed that even when filter paper that can sufficiently remove dust from the air as described above is used, fine particles may still come out from the outlet side of the filter paper depending on the usage conditions. It turned out that it was leaking. Therefore, the present inventor found that the average diameter of commercially available
A filter paper made by paper-making 0.7 μm short glass fibers to a thickness of 0.4 mm and having a capture efficiency of 99.97% for particles with a diameter of 0.3 μm was cut into a size of 4 cm x 4 cm.
Add this to dust-free water, i.e. pure 100c.c., for 1 minute.
When the sample was immersed twice and the fine particles flowing out into pure water were measured, the results shown in Table 1 were obtained.
したがつて、本発明の目的は、硝子繊維により
形成され、0.3μｍ径の粒子を99.97％以上の効率
で捕捉することができる空気清浄化用の高性能瀘
紙から脱落してくる微粒子を除き、無塵の空気を
得るための空気清浄化用濾過体を提供することに
ある。
（発明の構成）
本発明の上記目的は、
(1) 硝子繊維により形成され、0.3μｍ径の粒子を
99.97％以上の効率で捕捉することができる空
気清浄化用の高性能瀘紙の空気流出側面に、該
高性能瀘紙内に含有又は表面に付着して繊維の
再発微粒子の通過を阻止しうる径の通気細孔を
多数有し、その開孔率が大きい薄い多孔質膜か
らなる微細粒子阻止体を重畳したことを特徴と
する空気清浄化用濾過体。
(2) 特許請求の範囲第１項においてその微細粒子
阻止体を微細な多数の結節と、これらを連結す
る微細な多数の繊維とこれらによつて囲まれた
多数の微細空〓とより成るボリ四弗化エチレン
製の連続多孔質膜で構成したことを特徴とする
空気清浄化用濾過体。
によつて構成される。
（発明の具体的構成）
以下、本発明を詳細に説明する。
第２図は本発明の空気清浄化用濾過体の例を示
すものであり、本発明を第２図にしたがつて詳細
に説明する。
第２図において、１は硝子繊維により形成さ
れ、0.3μｍ径の粒子を99.97％以上の効率で捕捉
することができる空気清浄化用の高性能瀘紙、２
は高性能瀘紙１内に含有又は表面に付着している
繊維の微粒子の通過を阻止しうる径の通気細孔を
多数有し、その開孔率が大きい薄い多孔質膜から
なる微細粒子阻止体である。微細粒子阻止体２
は、図に示すように高性能瀘紙１の空気流出側面
３に重畳されている。
通気細孔を多数有し、その開孔率が大きい薄い
多孔質膜からなる微細粒子阻止体としては、例え
ば多孔質の弗素樹脂製のゴアテツクス（ジヤパン
ゴアテツクス株式会社製商品名）を用いることが
できる。
上記ゴアテツクスはポリ四弗化エチレン、四弗
化エチレン−パーフロロアルキルエーテル樹脂な
どの弗素系樹脂フイルムに延伸加工等を施し、第
３図ａ及びｂに示す微細な多数の結節Ａと、これ
らを連結する微細な多数の繊維Ｂと、これらによ
つて囲まれた多数の細長い微細空〓即ち通気細孔
Ｃを形成させたものである。これらは無塵室内で
製造することによつて微細粒子をほぼ零としたも
のを得ることができる。
上記のようにして得られた通気細孔を多数有
し、その開孔率が大きい薄い多孔質膜からなる微
細粒子阻止体の特性一例を第２表に示す。
Therefore, the object of the present invention is to eliminate fine particles falling off from high-performance air purifying filter paper made of glass fibers and capable of trapping particles with a diameter of 0.3 μm with an efficiency of 99.97% or more. An object of the present invention is to provide an air purifying filter for obtaining dust-free air. (Structure of the Invention) The above-mentioned objects of the present invention are as follows: (1) To form particles of glass fiber and have a diameter of 0.3 μm.
On the air outflow side of a high-performance filter paper for air purification that can capture the air with an efficiency of 99.97% or more, it can be contained within the high-performance filter paper or attached to the surface to prevent the passage of recurrent fine particles of fibers. 1. A filter for air purification, characterized in that a fine particle blocking body made of a thin porous membrane having a large number of ventilation pores with a large diameter and a large porosity is superimposed thereon. (2) In claim 1, the fine particle blocking body is defined as a body consisting of a large number of fine nodules, a large number of fine fibers connecting these nodules, and a large number of fine voids surrounded by these. An air purifying filter comprising a continuous porous membrane made of tetrafluoroethylene. Consisting of: (Specific Configuration of the Invention) The present invention will be described in detail below. FIG. 2 shows an example of the air purifying filter of the present invention, and the present invention will be explained in detail with reference to FIG. In Figure 2, 1 is a high-performance filter paper for air purification that is made of glass fiber and can capture particles with a diameter of 0.3 μm with an efficiency of 99.97% or more;
is a fine particle blocking filter consisting of a thin porous membrane with a large porosity and a large number of ventilation pores with a diameter capable of blocking the passage of fine fiber particles contained in the high performance filter paper 1 or attached to its surface. It is the body. Fine particle blocker 2
is superimposed on the air outflow side surface 3 of the high performance filter paper 1 as shown in the figure. As the fine particle blocking body made of a thin porous membrane having many ventilation pores and a high porosity, for example, Goretex (trade name, manufactured by Japan Goretex Co., Ltd.) made of porous fluororesin may be used. I can do it. The above-mentioned Gore-Tex is made by subjecting a fluorine-based resin film such as polytetrafluoroethylene or tetrafluoroethylene-perfluoroalkyl ether resin to stretching processing, and forming many fine nodules A shown in Fig. 3a and b. A large number of interconnected fine fibers B and a large number of elongated microscopic cavities, that is, ventilation pores C, are formed surrounded by these. By manufacturing these in a dust-free chamber, it is possible to obtain products containing almost no fine particles. Table 2 shows an example of the characteristics of the fine particle blocking body obtained as described above, which is made of a thin porous membrane having a large number of ventilation pores and a high porosity.
【表】
本発明においては、これらの中から高性能瀘紙
内に含有又は表面に付着している繊維の微粒子の
通過を阻止しうる径の通気細孔を多数有するもの
が選ばれる。
微細粒子阻止体を設けることにより、高性能瀘
紙から再発する高性能瀘紙内に含有又は表面に付
着している繊維の微粒子の殆どを除くことができ
る。
これらの微細粒子阻止体は、接着性がよく、例
えば第４図に示す点線丸印のように間隔をおいて
スポツト的に接着することにより、大面積の瀘紙
でもそのものの開孔率に殆ど影響を与えることな
く重畳できるので製造が容易である。また更に耐
熱性に優れていることから硝子繊維を用いた耐熱
性瀘紙に重畳して高温環境用の濾過器の実現が可
能であり、また耐薬品性をもつていることから腐
蝕性気体用濾過器の実現にも貢献することができ
る。
（実施例）
標準的な濾過器である610mm（縦）×610mm（横）
×150mm（奥行）の寸法をもつ第５図に示した枠
体４内に、厚さ400〜500μｍ、圧力損失40mm（吸
引風速5.3cm／sec、0.3μｍ径粒子に対して）、捕
捉効率99.97％の硝子短繊維から作られた高性能
瀘紙に、厚さ0.7μｍ、を風力損失20mm（吸引風速
5.3cm／secに対して）、捕捉効率99.97％（吸引風
速5.3cm／sec、0.3μｍ径の粒子に対して）最大通
気細孔径が0.3μｍのゴアテツクスを微細粒子阻止
体として重畳した、表面積が20m2ほ濾過体５を波
形に折り曲げて固定した濾過器について大気塵を
用いて試験したところ、風量17m3において、高性
能瀘紙に付着している粒子の再発塵は見られなか
つた。
なお以上の実験に使用した大気塵の粒径分布及
び濃度は第３表に示す通りである。[Table] In the present invention, those having a large number of ventilation pores with a diameter capable of blocking the passage of fine particles of fibers contained in or attached to the surface of the high-performance filter paper are selected from among these. By providing the fine particle blocking body, it is possible to remove most of the fine fiber particles contained in or attached to the surface of the high performance filter paper that recur from the high performance filter paper. These fine particle blocking bodies have good adhesion properties, and by adhering them in spots at intervals as shown in the dotted circles shown in Figure 4, even a large area of filter paper can have a porosity that is almost the same as that of the paper itself. Manufacture is easy because it can be superimposed without any influence. Furthermore, since it has excellent heat resistance, it is possible to create a filter for high-temperature environments by overlaying it on heat-resistant filter paper using glass fibers, and because it has chemical resistance, it can be used for corrosive gases. It can also contribute to the realization of filters. (Example) Standard filter 610mm (vertical) x 610mm (horizontal)
The frame body 4 shown in Fig. 5 has dimensions of ×150 mm (depth), has a thickness of 400 to 500 μm, a pressure loss of 40 mm (suction wind speed of 5.3 cm/sec, for particles with a diameter of 0.3 μm), and a trapping efficiency of 99.97. % of short glass fibers with a thickness of 0.7 μm and a wind loss of 20 mm (suction wind speed
5.3 cm/sec), trapping efficiency 99.97% (suction wind speed 5.3 cm/sec, for particles with a diameter of 0.3 μm), with a surface area of When a test using atmospheric dust was performed on a filter in which a 20m2 filter body 5 was bent into a corrugated shape and fixed, no re-dusting of particles attached to the high-performance filter paper was observed at an air volume of 17m3 . The particle size distribution and concentration of atmospheric dust used in the above experiments are shown in Table 3.
【表】
（発明の効果）
本発明の空気清浄化用濾過体においては、通気
中に含有される微量の埃等の微細粒子は、高性能
瀘紙の流入口側から1/2程度の深さまでの間にお
いて殆ど全て捕捉され、微細粒子阻止体に達する
のは僅少であるので、微細粒子阻止体の目詰まり
は高性能瀘紙のそれに比べて少なく圧力損失に大
きな影響を与えることがないので、空気清浄化用
濾過体の性能低下がなく、硝子繊維より形成され
た高性能瀘紙の再発塵を防ぎ、安定した空気清浄
化度を得ることができる。[Table] (Effects of the invention) In the air purifying filter of the present invention, minute particles such as trace amounts of dust contained in the ventilation are removed from the inlet side of the high-performance filter paper to a depth of about 1/2. Almost all of the particles are captured during the process, and only a small amount reaches the fine particle blocker, so clogging of the fine particle blocker is less than that of high-performance filter paper, and does not have a large effect on pressure loss. There is no deterioration in the performance of the air purifying filter, the high-performance filter paper made of glass fibers is prevented from re-dusting, and a stable degree of air purification can be obtained.
第１図は高性能瀘紙の塵埃の捕捉状態を示す拡
大部分断面図、第２図は本発明の構成例を示す部
分斜視図、第３図は微細粒子粒子阻止体の断面
図、第４図は微細粒子阻止体お高性能瀘紙との重
畳法の一例図、第５図は標準的濾過器の部分断面
斜視図である。
１……高性能瀘紙、２……微細粒子阻止体、３
……空気流出側面、４……枠体、５……微細粒子
阻止体と高性能瀘紙を重畳した濾過体。
Fig. 1 is an enlarged partial cross-sectional view showing how the high-performance filter paper captures dust, Fig. 2 is a partial perspective view showing a configuration example of the present invention, Fig. 3 is a cross-sectional view of a fine particle prevention body, and Fig. 4 The figure is an example of a method of superimposing a fine particle blocker and a high-performance filter paper, and FIG. 5 is a partially sectional perspective view of a standard filter. 1... High performance filter paper, 2... Fine particle inhibitor, 3
... Air outflow side, 4 ... Frame body, 5 ... Filter body in which fine particle blocking body and high-performance filter paper are superimposed.
Claims (1)
99.97％以上の効率で捕捉することができる空気
清浄化用の高性能瀘紙の空気流出側面に、該高性
能瀘紙内に含有又は表面に付着している繊維の再
発微粒子の通過を阻止しうる径の通気細孔を多数
有し、その開孔率が大きい薄い多孔質膜からなる
微細粒子阻止体を重畳したことを特徴とする空気
清浄化用濾過体。 ２ 特許請求の範囲第１項においてその微細粒子
阻止体を微細な多数の結節と、これらを連結する
微細な多数の繊維とこれらによつて囲まれた多数
の微細空〓とより成るボリ四弗化エチレン製の連
続多孔質膜で構成したことを特徴とする空気清浄
化用濾過体。[Claims] 1. Particles made of glass fiber and having a diameter of 0.3 μm.
The air outflow side of a high-performance filter paper for air purification, which can capture with an efficiency of 99.97% or more, prevents the passage of recurrent fine particles of fibers contained in the high-performance filter paper or attached to the surface. 1. A filter body for air purification, characterized in that a fine particle blocking body made of a thin porous membrane having a large number of ventilation pores with a large diameter and a large porosity is superimposed thereon. 2. In claim 1, the fine particle blocking body is defined as a material consisting of a large number of fine nodules, a large number of fine fibers connecting these nodules, and a large number of fine voids surrounded by these. An air purifying filter body comprising a continuous porous membrane made of ethylene chloride.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11749786A JPS62277119A (en) | 1986-05-23 | 1986-05-23 | High-performance filter paper |
| DE8787304583T DE3780511T2 (en) | 1986-05-23 | 1987-05-22 | HIGH PERFORMANCE GAS FILTER. |
| AT87304583T ATE78416T1 (en) | 1986-05-23 | 1987-05-22 | HIGH PERFORMANCE GAS FILTER. |
| EP87304583A EP0246917B1 (en) | 1986-05-23 | 1987-05-22 | High performance gas filter |
| US07/230,275 US4877433A (en) | 1986-05-23 | 1988-09-26 | High performance gas filter assembly |
| HK1158/93A HK115893A (en) | 1986-05-23 | 1993-10-28 | High performance gas filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11749786A JPS62277119A (en) | 1986-05-23 | 1986-05-23 | High-performance filter paper |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62277119A JPS62277119A (en) | 1987-12-02 |
| JPH0334967B2 true JPH0334967B2 (en) | 1991-05-24 |
Family
ID=14713198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11749786A Granted JPS62277119A (en) | 1986-05-23 | 1986-05-23 | High-performance filter paper |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62277119A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008031967A (en) * | 2006-07-31 | 2008-02-14 | Nippon Muki Co Ltd | Filter for gas turbine intake air |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6334881B1 (en) * | 1999-04-20 | 2002-01-01 | Gore Enterprise Holdings, Inc. | Filter media |
| JP2002370020A (en) * | 2001-06-13 | 2002-12-24 | Nitto Denko Corp | Suction filter medium for turbine, its using method and manufacturing method therefor |
| US7138057B2 (en) * | 2004-07-22 | 2006-11-21 | Gore Enterprise Holdings, Inc. | Filter media |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5125874A (en) * | 1974-08-28 | 1976-03-03 | Yuasa Battery Co Ltd | SEIMITS USEKISOROKAZAI |
| JPS6012579U (en) * | 1983-07-04 | 1985-01-28 | 富士塗油器株式会社 | Lubricating device for escalator handrails and guide rails |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6238727Y2 (en) * | 1981-05-29 | 1987-10-02 |
-
1986
- 1986-05-23 JP JP11749786A patent/JPS62277119A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5125874A (en) * | 1974-08-28 | 1976-03-03 | Yuasa Battery Co Ltd | SEIMITS USEKISOROKAZAI |
| JPS6012579U (en) * | 1983-07-04 | 1985-01-28 | 富士塗油器株式会社 | Lubricating device for escalator handrails and guide rails |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008031967A (en) * | 2006-07-31 | 2008-02-14 | Nippon Muki Co Ltd | Filter for gas turbine intake air |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62277119A (en) | 1987-12-02 |
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