JPH033429U - - Google Patents
Info
- Publication number
- JPH033429U JPH033429U JP869789U JP869789U JPH033429U JP H033429 U JPH033429 U JP H033429U JP 869789 U JP869789 U JP 869789U JP 869789 U JP869789 U JP 869789U JP H033429 U JPH033429 U JP H033429U
- Authority
- JP
- Japan
- Prior art keywords
- purge gas
- processing chamber
- absorption tower
- absorption
- tower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010521 absorption reaction Methods 0.000 claims description 12
- 238000010926 purge Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 239000011630 iodine Substances 0.000 description 2
Landscapes
- Treating Waste Gases (AREA)
- Gas Separation By Absorption (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP869789U JPH033429U (ko) | 1989-01-27 | 1989-01-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP869789U JPH033429U (ko) | 1989-01-27 | 1989-01-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH033429U true JPH033429U (ko) | 1991-01-14 |
Family
ID=31512318
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP869789U Pending JPH033429U (ko) | 1989-01-27 | 1989-01-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH033429U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007313413A (ja) * | 2006-05-25 | 2007-12-06 | Miura Co Ltd | 脱酸素装置 |
-
1989
- 1989-01-27 JP JP869789U patent/JPH033429U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007313413A (ja) * | 2006-05-25 | 2007-12-06 | Miura Co Ltd | 脱酸素装置 |