JPH033423U - - Google Patents

Info

Publication number

JPH033423U

JPH033423U JP6460389U JP6460389U JPH033423U JP H033423 U JPH033423 U JP H033423U JP 6460389 U JP6460389 U JP 6460389U JP 6460389 U JP6460389 U JP 6460389U JP H033423 U JPH033423 U JP H033423U

Authority

JP

Japan

Prior art keywords

particulate silica

cleaning

cleaning treatment

heating

gas

Prior art date

1989-06-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 6
• 239000007788 liquid Substances 0.000 claims description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 6
• 239000000377 silicon dioxide Substances 0.000 claims 3
• 238000010438 heat treatment Methods 0.000 claims 2
• 239000002912 waste gas Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 239000002184 metal Substances 0.000 description 1

Cited By (1)