JPH0333946U - - Google Patents

Info

Publication number

JPH0333946U

JPH0333946U JP9521489U JP9521489U JPH0333946U JP H0333946 U JPH0333946 U JP H0333946U JP 9521489 U JP9521489 U JP 9521489U JP 9521489 U JP9521489 U JP 9521489U JP H0333946 U JPH0333946 U JP H0333946U

Authority

JP

Japan

Prior art keywords

ion source

plasma generation

plasma

utility

registration request

Prior art date

1989-08-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010891 electric arc Methods 0.000 claims 1
• 238000010884 ion-beam technique Methods 0.000 description 1