JPH0333415Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a dressing device for a slicing machine that cuts an ingot of silicon or the like used as a semiconductor material into wafer shapes.

[Conventional technology]

As a cutter for cutting ingots in the above-mentioned slicing machine, an inner-edge type cutter having a binder containing diamond particles attached to the inner periphery is generally used. When cutting a large number of wafers with this cutter, it becomes clogged and requires regular dressing. There are two methods for this dressing: a manual method by an operator and a mechanical method. The former method requires considerable skill, and the latter method is generally adopted. This method involves cutting the dressing rod using the clogged cutter, thereby performing so-called dressing. An example is shown in FIG.
70 is an indexing table having a guide groove 71 that follows the shape of the dummy D attached to the lower part of the ingot W;
Two claw pieces 73a, 7 that hold the dummy D in place
3b, the ingot holder 73 is moved perpendicularly to the plane of the paper by rotation of a screw shaft 74, and a clamp mechanism 75 is provided on the upper part. When feeding out the ingot W, the clamp of the clamp mechanism 75 is loosened, the screw shaft 74 rotates to feed the ingot W by a predetermined amount, the ingot W is fastened by the clamp mechanism 75, and cut by the cutter C. However, the cutter C has an inner cutting edge, and the figure shows only its inner circumference with chain lines.

Dressing device 80 for the cutter C
A dressing device 80 has a fixing block 81 attached to the groove 78, and a slide bar 82 is attached to the inner surface of a column 77 to which the cylinder 76 of the clamp mechanism 75 is attached. , 83 and the feed screw 84. A slide block 85 passes through the slide bars 82 and 83 and rotatably fixes the tip of the feed screw 84. A dress rod 86 is attached to the slide block 85.

During dressing, the feed screw 84 is manually rotated to send out the dressing rod 86 together with the slide block 85, which is then cut by the cutter C to remove the clogging.

[Problem that the invention attempts to solve]

Since the dressing rod 86 is fed out by manually rotating the feed screw 84, the amount of feeding is not constant. Also, when dressing one time, usually 2~
It cuts off four times, and it is preferable that the amount cut off each time is as small as possible, for example, the thickness of the wafer (for example, about 1 mm), but for safety reasons, it is recommended to feed out a slightly larger amount than this. It is customary.

Therefore, the dressing rod is wasted, and feeding is done manually, which is a great waste of time.

[Means for solving problems]

In view of this, the present invention aims to automatically feed out a dressing rod in predetermined lengths using an ingot feeding mechanism, and its features include an ingot holder that holds the ingot;
The ingot holder is equipped with a feeding member that sequentially transfers the ingot holder by a predetermined amount, and the ingot holder is equipped with claws that open and close opposite each other for clamping, and between the two claws there is a notch into which a dummy to be attached to the ingot is inserted. A rod-shaped cavity for inserting a dressing member is formed, and the dimensions of the mutual relationship between the notch and the cavity are selected so that both claw pieces can hold the dressing member inserted into the cavity preferentially to the dummy located in the notch. It's what I did.

[Effect]

By inserting the dressing member into the cavity, the opening/closing pawl pieces preferentially clamp the dressing member, but not the dummy. Therefore, when the ingot holder is advanced by the feeding member, the ingot is not sent out, but only the dressing member is sent out in predetermined amounts.

During this dressing operation, the ingot is held stationary by being pressed against the indexing table by the cylinder of the clamp mechanism.

〔Example〕

1 to 5 show embodiments of the present invention. As is well known, the slicing machine 1 includes an indexing mechanism 2 for placing an ingot W thereon and feeding it out by a predetermined amount, and a clamping mechanism 3 for clamping the ingot W. The clamp mechanism 3 has a cylinder 5 attached to the support column 4.
and a clamp claw 6 that is pushed down by the cylinder 5. 7 is a cushion made of an elastic material. Further, C is an inner blade type cutter.

The indexing mechanism 2 includes an indexing table 10 that supports a dummy D attached to an ingot W, and a guide rail 11 is attached to the top surface of the indexing table to fit the dummy and guide its forward and backward movement. Further, the indexing table 10 is provided with an ingot holder 12 for holding the ingot W by cutting out a part thereof.
is connected to the feeding member 13.

The ingot holder 12 has a pair of opening/closing claws 1.
4, 15, one claw 14 is a fixed claw and the other is a swinging claw 15, the fixed claw 14 is provided with a shoe 18 that fits into a rail 17 attached to a side plate 16, and flanges 19, Install 20. A support shaft 21 passing through the other swinging claw 15 is attached between the flanges 19 and 20 to support the claw 15 in a swingable manner, and the upper part of both the claws 14 and 15 has a notch into which the dummy D is fitted. A portion 22 is formed. The swing claw 5 is equipped with a hydraulic cylinder 23, the tip of a piston rod 24 faces the fixed claw 14, and the operation of the hydraulic cylinder 23 narrows the gap between the upper notches 22 and holds the dummy D between them. 25 is a restoring spring.

The feeding member 13 consists of a stepping motor 30, and a screw shaft 32 and a screw cylinder 33 that are driven by the motor 30 via a reduction gear 31. The screw cylinder 33 is attached to the fixed claw 14, and the stepping motor 3
0, the ingot holder 12 is moved by a predetermined amount equal to the thickness of the wafer to be cut. When the ingot holder 12 reaches the cutting edge of the indexing table 10, the opening/closing claws 14 and 15 are opened and moved back, and the above operation is repeated again.

The dressing device 40 of the present invention has a cavity 41 in the ingot holder 12 in which a rod-shaped dressing member 45 is inserted, located between the claws 14 and 15 and below the notch 22. Reference numeral 42 denotes a stopper provided as necessary to determine the insertion position of the dressing member 45.

The dressing member 45 is formed by inserting and fixing a dressing rod 47 into a holder 46, and the cavity 41 is formed when the holder 46 is held between the left and right claws 14 and 15.
The swing claws 15 are regulated in their movement and do not move to the position where the dummy D is held in the notch 22, that is, the size is such that the swing claws 15 preferentially hold the dress member 45.

In addition, in the figure, 50 is an ingot swinging mechanism,
The swing plate 51 to which the side plate 16 is attached is attached to the vertical part 52a of the pedestal 52, and the horizontal part 52b of the pedestal is attached to the base 53. The horizontal part 52b is attached so as to be swingable in the vertical direction, and the horizontal part 52b is swingable in the horizontal direction about a vertical line passing through the dropping point, so that the cutting angle for the directional ingot W can be adjusted. It is something. 54
55 is a vertical operation handle, and 55 is a horizontal operation handle.

In the above configuration, when cutting a large number of wafers to cause clogging and dressing the cutter C, the ingot W is pressed by the clamp mechanism 3 and held on the indexing table 10, and the ingot holder 12 is Open both claws 14 and 15.
Next, the dressing member 45 is inserted into the cavity 41, and the cylinder 23 is actuated to rotate the swing claw 15 to clamp the dressing member 45 (FIG. 5a). The dressing member 45 is sent out by a predetermined amount via the ingot holder 12 by the rear feeding member 13. At this time, the ingot W is not held between the ingot holders 12 and is therefore not sent out.

Further, since the dressing member 45 is fed out by the feeding member 13 by the same amount as the amount of wafer cut out, 1
The amount of feed per cycle is always constant and the amount of wafer cut out is very small, allowing the dressing rod 47 to be used economically.

The dressing operation for the cutter C is performed in the opposite direction to the cutting direction of the ingot, and after the dressing operation is completed, the dressing member 45 is taken out from the cavity 41 and the regular operation of cutting the wafer begins. That is, both claws 14 and 15 of the ingot holder 12 are dummy D.
It is used to clamp and feed a predetermined amount.

[Effect of idea]

According to the present invention, since the dressing member is held between the ingot holders, there is no need for a special mechanism as in the prior art, and the structure is simple. Furthermore, since the ingot is not clamped when the dressing member is attached, it is possible to automatically feed the ingot by a small amount using a conventional feeding member.

[Brief explanation of drawings]

1 to 5 relate to an embodiment of the present invention; FIG. 1 is a partially cutaway front view of the indexing mechanism;
Figure 2 is a sectional view taken along the - line in Figure 1;
Figure 3 is a sectional view taken along the - line in Figure 2;
Figure 4 is a front view of the dressing member, and Figure 5 is an explanatory diagram of its operation, where Figure a shows the state in which the dressing member is held, and Figure b shows the state in which the dummy is held without the dressing member. , FIG. 6 is an explanatory diagram of a conventional dressing device. 1 is a slicing machine, 12 is an ingot holder, 13 is a feeding member, 14 is a fixed claw, 15 is a swinging claw, 22 is a notch portion, 40 is a dressing device, 41 is a cavity, 45 is a dressing member, C is a cutter, D is a dummy and W is an ingot.

Claims (1)

[Scope of utility model registration request] The ingot holder is equipped with an ingot holder that clamps the ingot, and a feeding member that sequentially transfers the ingot holder by a predetermined amount. A notch into which the dummy to be attached is inserted forms a cavity for inserting a rod-shaped dressing member, and both claw pieces are formed in the notch so that the dressing member inserted into the cavity is held preferentially to the dummy located in the notch. A dressing device for a slicing machine, characterized in that dimensions of the mutual relationship between the space and the cavity are selected.