JPH0333219U - - Google Patents

Info

Publication number
JPH0333219U
JPH0333219U JP9490789U JP9490789U JPH0333219U JP H0333219 U JPH0333219 U JP H0333219U JP 9490789 U JP9490789 U JP 9490789U JP 9490789 U JP9490789 U JP 9490789U JP H0333219 U JPH0333219 U JP H0333219U
Authority
JP
Japan
Prior art keywords
magnetic bearing
magnetic
pair
metal member
poles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9490789U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9490789U priority Critical patent/JPH0333219U/ja
Publication of JPH0333219U publication Critical patent/JPH0333219U/ja
Pending legal-status Critical Current

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  • Details Of Measuring And Other Instruments (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの考案に係る磁気軸受のノイズシー
ルドの一実施例を示す概略構成図、第2図は従来
例を示す回路ブロツク図、第3図は従来例におけ
る磁気軸受の構造を示す概略構成図である。 1……N極、1′……S極、1a……N極突出
部、1′a……S極突出部、3……コア部、5…
…シヨートリング。
Fig. 1 is a schematic configuration diagram showing an embodiment of the magnetic bearing noise shield according to this invention, Fig. 2 is a circuit block diagram showing a conventional example, and Fig. 3 is a schematic configuration showing the structure of a magnetic bearing in the conventional example. It is a diagram. 1...N pole, 1'...S pole, 1a...N pole protrusion, 1'a...S pole protrusion, 3...Core part, 5...
...Shotring.

Claims (1)

【実用新案登録請求の範囲】 ターボ分子ポンプ等に使用されるロータを支承
する磁気軸受において、 磁気軸受用のセンサおよび電磁石の各N・S極
を1つのペアとして突出する磁極を複数形成した
コア部と、 その1つのペアとなる磁極の巻線を施した突出
部に対し巻回される、金属製部材からなるシヨー
トリングと、 から構成されていることを特徴とする磁気軸受
のノイズシールド構造。
[Scope of claim for utility model registration] In a magnetic bearing that supports a rotor used in a turbo-molecular pump, etc., a core in which a plurality of protruding magnetic poles are formed, with the N and S poles of a sensor and an electromagnet for the magnetic bearing forming one pair. A noise shielding structure for a magnetic bearing, characterized in that it is comprised of: a shot ring made of a metal member that is wound around a protruding part having one pair of magnetic pole windings; and a shot ring made of a metal member.
JP9490789U 1989-08-11 1989-08-11 Pending JPH0333219U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9490789U JPH0333219U (en) 1989-08-11 1989-08-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9490789U JPH0333219U (en) 1989-08-11 1989-08-11

Publications (1)

Publication Number Publication Date
JPH0333219U true JPH0333219U (en) 1991-04-02

Family

ID=31644189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9490789U Pending JPH0333219U (en) 1989-08-11 1989-08-11

Country Status (1)

Country Link
JP (1) JPH0333219U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000087968A (en) * 1998-09-18 2000-03-28 Mitsubishi Electric Corp Radial magnetic bearing device
JP2006083923A (en) * 2004-09-15 2006-03-30 Boc Edwards Kk Magnetic bearing device and turbo molecular drag pump equipped with the same
WO2017006844A1 (en) * 2015-07-07 2017-01-12 エドワーズ株式会社 Electromagnet unit, magnetic bearing device, and vacuum pump

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000087968A (en) * 1998-09-18 2000-03-28 Mitsubishi Electric Corp Radial magnetic bearing device
JP2006083923A (en) * 2004-09-15 2006-03-30 Boc Edwards Kk Magnetic bearing device and turbo molecular drag pump equipped with the same
WO2017006844A1 (en) * 2015-07-07 2017-01-12 エドワーズ株式会社 Electromagnet unit, magnetic bearing device, and vacuum pump
JP2017020520A (en) * 2015-07-07 2017-01-26 エドワーズ株式会社 Electromagnet unit, magnetic bearing device and vacuum pump
CN107683376A (en) * 2015-07-07 2018-02-09 埃地沃兹日本有限公司 Electromagnet unit, magnetic bearing device and vavuum pump
KR20180026667A (en) * 2015-07-07 2018-03-13 에드워즈 가부시키가이샤 Electromagnet unit, magnetic bearing device and vacuum pump
CN107683376B (en) * 2015-07-07 2020-08-11 埃地沃兹日本有限公司 Electromagnet unit, magnetic bearing device, and vacuum pump

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