JPH0333053U - - Google Patents
Info
- Publication number
- JPH0333053U JPH0333053U JP9469389U JP9469389U JPH0333053U JP H0333053 U JPH0333053 U JP H0333053U JP 9469389 U JP9469389 U JP 9469389U JP 9469389 U JP9469389 U JP 9469389U JP H0333053 U JPH0333053 U JP H0333053U
- Authority
- JP
- Japan
- Prior art keywords
- polished
- holder according
- corner
- insert
- protective member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims 3
- 238000005299 abrasion Methods 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 239000006260 foam Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9469389U JPH0333053U (cs) | 1989-08-10 | 1989-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9469389U JPH0333053U (cs) | 1989-08-10 | 1989-08-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0333053U true JPH0333053U (cs) | 1991-04-02 |
Family
ID=31644008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9469389U Pending JPH0333053U (cs) | 1989-08-10 | 1989-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0333053U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014108485A (ja) * | 2012-12-03 | 2014-06-12 | Okamoto Machine Tool Works Ltd | バッキング材およびそれを用いた基板のキャリアヘッド構造 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS608926U (ja) * | 1983-06-28 | 1985-01-22 | 株式会社東芝 | 回転多面体鏡 |
| JPS61209877A (ja) * | 1985-03-14 | 1986-09-18 | Nitto Hatsujo:Kk | ラツピングキヤリア |
-
1989
- 1989-08-10 JP JP9469389U patent/JPH0333053U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS608926U (ja) * | 1983-06-28 | 1985-01-22 | 株式会社東芝 | 回転多面体鏡 |
| JPS61209877A (ja) * | 1985-03-14 | 1986-09-18 | Nitto Hatsujo:Kk | ラツピングキヤリア |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014108485A (ja) * | 2012-12-03 | 2014-06-12 | Okamoto Machine Tool Works Ltd | バッキング材およびそれを用いた基板のキャリアヘッド構造 |
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