JPH0332419U - - Google Patents
Info
- Publication number
- JPH0332419U JPH0332419U JP9381589U JP9381589U JPH0332419U JP H0332419 U JPH0332419 U JP H0332419U JP 9381589 U JP9381589 U JP 9381589U JP 9381589 U JP9381589 U JP 9381589U JP H0332419 U JPH0332419 U JP H0332419U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- sub
- chemical
- supply pump
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Weting (AREA)
Description
第１図は実施例の要部構成図、である。
図において、１……処理槽、２……主タンク、
３……副タンク、４……循環ポンプ、５……供給
ポンプ、６……制御装置、７ａ，７ｂ，７ｃ……
循環パイプ、８ａ，８ｂ……供給パイプ、１１…
…処理用薬液、１２……副薬液、である。
FIG. 1 is a block diagram of the main parts of the embodiment. In the figure, 1... treatment tank, 2... main tank,
3... Sub tank, 4... Circulation pump, 5... Supply pump, 6... Control device, 7a, 7b, 7c...
Circulation pipes, 8a, 8b... Supply pipes, 11...
...Treatment chemical solution, 12...Adjunctive chemical solution.
Claims (1)
給ポンプと制御装置とを具え、 処理槽は、薬液処理を行うものであり、 主タンクは、処理槽に循環させる処理用薬液を
収容するものであり、 循環ポンプは、上記循環を駆動するものであり
、 副タンクは、上記処理用薬液に補充する副薬液
を収容するものであり、 供給ポンプは、副タンクから副薬液を主タンク
に供給するものであり、 制御装置は、循環ポンプの作動時間を検出して
供給ポンプの作動を制御するものであり、 循環ポンプの作動時間が所定に達した際に供給
ポンプが適宜量の副薬液を主タンクに供給するこ
とを特徴とする薬液処理装置。[Scope of claim for utility model registration] Comprising a treatment tank, a main tank, a sub-tank, a circulation pump, a supply pump, and a control device, the treatment tank is for processing chemical liquid, and the main tank is for circulating chemicals to the treatment tank. The circulation pump is for driving the circulation. The sub-tank is for storing the sub-chemical to replenish the processing chemical. The supply pump is for supplying the sub-chemical from the sub-tank. The sub-chemical solution is supplied to the main tank, and the control device detects the operation time of the circulation pump and controls the operation of the supply pump.When the operation time of the circulation pump reaches a predetermined value, the supply pump is 1. A chemical liquid processing device characterized in that: supplies an appropriate amount of an auxiliary chemical liquid to a main tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9381589U JPH0332419U (en) | 1989-08-09 | 1989-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9381589U JPH0332419U (en) | 1989-08-09 | 1989-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0332419U true JPH0332419U (en) | 1991-03-29 |
Family
ID=31643178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9381589U Pending JPH0332419U (en) | 1989-08-09 | 1989-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0332419U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61134027A (en) * | 1984-12-05 | 1986-06-21 | Mitsubishi Electric Corp | Wet processing device |
-
1989
- 1989-08-09 JP JP9381589U patent/JPH0332419U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61134027A (en) * | 1984-12-05 | 1986-06-21 | Mitsubishi Electric Corp | Wet processing device |