JPH0332215A - High voltage pulse generating circuit and discharge stimulating laser using the circuit and accelerator - Google Patents

Abstract

PURPOSE:To improve the reliability at high repetitive operation by adopting the constitution such that a pulse voltage or a pulse current setting a gate starting point is fed to a main saturable reactor via a 2nd saturable reactor provided in a reset circuit. CONSTITUTION:A thyratron 3 is turned on for a gate period and the charge stored in advance in a main capacitor 5 is transferred to a capacitor 6. Most of a terminal voltage V6 of the capacitor 6 is applied to an output winding 11 of a main saturable reactor 10. The moment the energy in the main capacitor 5 is almost transferred to the capacitor 6, the magnetic flux density of the main saturable reactor 10 is saturated and the inductance of the output winding 11 of the main saturable reactor 10 is rapidly reduced and the energy in the capacitor 6 is transferred to the peaking capacitor 8. Thus, highly efficient operation of a high voltage pulse generating circuit and repetitive operation capable of output control is facilitated and the production of output jitter is suppressed.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a high-voltage pulse generation circuit used in discharge-excited lasers such as excimer lasers and copper vapor lasers, or accelerators such as linear induction accelerators. , especially those using magnetic pulse compression circuits.

[Prior art] Discharge-excited lasers such as copper vapor lasers and excimer lasers are
Studies are being carried out on its use in chemical reaction processes such as uranium enrichment, lithography, and CVD.

Such discharge-pumped lasers are required to have high output, high-quality repulsion, high reliability, and long life. For example, a high-voltage pulse generation circuit as shown in Fig. 24 is used. There is. In this circuit, 1 is a variable high voltage DC power supply, 2
is the charging resistance of the main capacitor 5, 3 is the thyratron, 4 is the inductance, 5 is the main capacitor, 6 is the capacitor,
8 is a peaking capacitor, 9 is a laser main discharge pole, 1
0 is a saturable reactor, and 81 is a charging inductance of the main capacitor 5.

In this circuit, the operation when the constants of each part are optimized so that the energy transfer efficiency from the main capacitor 5 to the peaking capacitor 8 is maximized is shown in the circuit configuration diagram in Figure 24 and the saturable reactor in Figure 25. This will be explained using the conceptual diagram of the operating magnetization curve of No. 10 and the waveforms of the main parts of FIG. 28.

During the off period of the thyratron 3, the saturable reactor 10 is
Positive electrode of DC power supply 1, resistor 2, inductance 4, main capacitor 5, winding 11 of saturable reactor. Inductance 81. Due to the charging current of the main capacitor 5 flowing through the negative electrode path of the current power source 1, the main capacitor 5 is reset to -Br via 8 to B in Fig. 25.In other words, in this circuit, the main capacitor 5 is The charging circuit also serves as a reset circuit for the saturable reactor 10.

Next, when the thyratron 3 is turned on at 1=O in FIG. 28, the discharge current 11 shown in FIG. As a result, the terminal voltage (6) of the capacitor 6 increases to the polarity shown in FIG. 24, as shown at v6 in FIG. During this time, the magnetic flux density of the saturable reactor 10 changes toward the point "-Br" in FIG. 8. Winding 1 of the saturable reactor 10], the current iQ flowing in the path of the capacitor 6 is very small compared to the current 1. as shown in FIG. It is in the off state.

Therefore, the saturable reactor 10 blocks the voltage with the polarity shown in FIG. 24, as shown in 2 in FIG.

When the current j becomes zero at 7-1, the magnetic flux density of the saturable reactor 10 reaches the opening in FIG. 25, and the magnetic core becomes saturated. At this time, the inductance 41° (sat) of the saturable reactor (O) is sufficiently small compared to the inductance 4 of the inductance 4, so most of the charge accumulated in the capacitor 6 is , flows to the illustrated polarity in FIG. 24, 12 increases rapidly, and the magnetic flux density of the saturable reactor 10 changes from the mouth to Br in FIG. Most of the energy is transferred to the peaking capacitor 8, as shown by vs in FIG.

Note that the period from when the thyratron 3 is turned on until the current i2 becomes zero is called a gate period, and if losses in various parts are ignored, the following equation holds true.

When "6" V I is 1, the following equation holds true.

ΔBm″: BS (Br) (4) E: Input DC power supply voltage (V) N1.: Number of turns Ae of winding 11 of saturable reactor 10
: Effective cross-sectional area (rrr) ΔB■: Operating magnetic flux density amount 1- Bs: Saturation magnetic flux density (T)B
r: Residual magnetic flux density (゛)
L,: inductance of inductance 4 (11) C5
: Capacitance of main capacitor 5 (F) C8: Capacitance of capacitor 6 (F) C8: Capacitance of peaking capacitor 8 (F) Gate magnetizing force peak value of H-bisaturable reactor 10 (A
/m) For I2: Peak value of 12 (A) Breath e: Average magnetic path length of saturable reactor 10 (Ill) At the moment when all the energy of capacitor 6 is transferred to peaking capacitor 8, that is, as shown in FIG. The laser main discharge electrode breaks down at τ, 10τ2, and the energy of the peaking capacitor is consumed in the laser gas. At this time, most of the energy stored in the peaking capacitor 8 is consumed in the laser gas via the laser main discharge electrode 9, but a portion contributes to resetting the saturable reactor 10. This energy saturable rear 12
= The magnetic flux density of the throttle 10 changes from Br through 2' to Br in FIG. 25.

During repeated operations, the operations described above are performed a number of times according to the repetition frequency.

Further, the charging current of the main capacitor 5 is determined by the total control magnetizing force H of the magnetic core of the saturable reactor 10, which is determined by the operating conditions.
When the total control magnetization force is smaller than r (for example, Murakami 2, ``Magnetization Application Engineering'', Shokusho Shoten p. 42-49 (1984)), as shown in Fig. 26, a saturable reactor is used. 10 is provided with a reset winding 82 in addition to the output winding MA11, and a reset circuit 85 is connected to the ends 83 and 84 of the winding. A method of resetting by magnetizing to polarity is also described in, for example, Japanese Patent Laid-Open No. 171172/1983. Second
FIG. 7 shows an example of the configuration of the reset circuit 85.
．． 84 is an output terminal, 86 is an inductance for blocking a high voltage surge induced in the reset winding 82 during the gate period of the saturable reactor 10, 87 is a resistor, 88 is a varistor, and 89 is a DC power supply.

In the above explanation of the conventional example, an example was explained in which the magnetic pulse compression circuit using a saturable reactor has one stage, but a semiconductor element such as a thyristor is used instead of a thyratron as a switching element, A pulse generation circuit is also used that uses a multi-stage magnetic pulse compression circuit in which the peak value of the pulse voltage is increased by "2" and magnetic pulse compression circuits using saturable reactors are connected in multiple stages. Furthermore, in the case of an accelerator such as a linear induction accelerator, since the output thereof is large, a pulse generation circuit using a multi-stage magnetic pulse compression circuit is often used.

Regarding the principle of the magnetic pulse compression circuit, for example,
W, S, MELVILLE: ”THE USA
OF 5ATURABLEREACTOR8”, Pr
oceedings In5t, Electrica
l Engineers, (London) Vol.
98. Part3. No, 53. pp, 185~
207 (1951), and regarding the application of the same circuit to discharge-pumped lasers, see, for example, 1. Sm1lanski, S.
R, Byron and F1 T, R, Burkes: “Electrical
Excjtation of an XeC↓1a
ser using llagnetjc pulses
e compressionAppl, Phys, Le
tt, 40(7), pp, 547-548 (1982
), magnetic pulse compression circuits using semiconductor elements are described, for example, in Shimada's ``Research on Magnetic Pulse Compression Power Sources for Excitation of Highly Repetitive Excimer Lasers'', Keio University Faculty of Science and Technology Dissertation (1986).

Furthermore, high voltage pulse generation circuits similar to the method described above are used in accelerators such as linear induction accelerators used in free electron lasers and the like. For details see, eg, D. Birx.

E, CooK, S, Hawkins, S, Poor.
, L., Reginato, J., Schmidt an.
d M, Sm1th: ”THE APPLICAT
ION OF MAGNETIC5WITCIjES
AS PULSE 5OURCES FORINDUC
TIONLINAC3”, IEEE Transac
tion on Nuclear 5science,
Vol, N5-30. No, 4. pp2763-2
768 (1983).

[Problems to be Solved by the Invention] Discharge-excited lasers are required to have stable laser output and low jitter. For example, in an excimer laser for lithography, it is necessary to stably supply a laser output of about 100 mJ per pulse at a repetition frequency of about 5001-iz for a period of about 10" shots or more.

However, due to repeated operations, the laser gas deteriorates, so in order to satisfy the above output conditions, it is necessary to
It is necessary to gradually increase the energy input into the gas. For this reason, in the conventional circuit shown in FIG. 24, a method is used in which the human-powered DC power supply voltage is gradually increased. However, in the system shown in FIG. 24, the operating magnetic flux density amount at the time of the gate of the saturable reactor 10 is
4) Since ΔBm is a constant value as shown in the formula, if the human power DC power supply voltage is lower than the optimal value that maximizes the energy transfer efficiency from the main capacitor 5 to the peaking capacitor 8, the voltage and current waveforms of the main parts will be In addition, when the frequency is high, the frequency waveform becomes as shown in FIG.

For this reason, the efficiency of energy transfer from the main capacitor 5 to the peaking capacitor 8 decreases, and the aftercurrent of the current il flowing between the main electrodes of the thyratron 3 increases, causing a reverse current to flow, resulting in a large loss in the thyratron 3. Become. Furthermore, since the proportion of energy in the laser gas that does not contribute to laser oscillation also increases, there is also the problem that the life of the laser gas is shortened. For this reason,
As mentioned above, the number of shots that can be outputted while keeping the laser output constant is limited to about 106 shots or less.

The copper vapor laser used in the uranium enrichment process has a repetition frequency of 5 klb or more and a laser output of 100 lbs.
±3ns over approximately 1,000 hours or more at approximately W
It is required to operate stably with less than a certain amount of jitter. In such a laser, the repetition frequency is about one order of magnitude higher than that of the excimer laser, so in order to extend the lifespan, a semiconductor element such as a thyristor and a multistage magnetic pulse compression circuit are used as the switching element instead of a thyratron. It is strongly desired to use a high voltage pulse generation circuit that combines the following. However, in the conventional high voltage pulse generation circuit using a multi-stage magnetic pulse compression circuit, in order to optimize the energy transfer efficiency from the main capacitor to the final stage peaking capacitor, it is necessary to The amount of operating magnetic flux density at the gate of the saturable reactor constituting
Since this is a constant value, it was necessary to insert an inductance in series with the saturable reactor in each stage of the magnetic pulse compression circuit to adjust the pulse width of the current that flows after the saturable reactor is saturated. In addition, the above-mentioned method must be used to adjust the timing of the output of each laser when performing multiple synchronized operation, and commercial plants (several hundred units require synchronized operation). It is considered extremely difficult to use.

In free electron lasers or linear induction accelerators used for plasma heating in nuclear fusion reactors, a type of transformer for electron beam acceleration called an accelerator cell has a voltage peak value of several hundred ■ and a current peak value of several tens. kA, pulse width 100n
It is required to operate in a burst mode for as long as possible, with a rectangular pulse of approximately 2 seconds, with a jitter within several nanoseconds, and for a longer time than the repetition frequency. A high voltage pulse generation circuit for this purpose uses a multi-stage magnetic pulse compression circuit using thyratrons in parallel as switches. In this pulse generation circuit, as the temperature rises due to loss in the saturable reactor due to repeated operations, the operating magnetic flux density at the gate of the saturable reactor magnetic core decreases, so jitter increases as the operating time increases. There was a problem.

The object of the present invention is to provide a high voltage pulse generation circuit having a magnetic pulse compression circuit using a saturable sum reactor having a function of varying the amount of operating magnetic flux density at the time of gate of the saturable reactor, and a discharge excitation laser using the same. , and in the accelerator, when fluctuations in the input power supply voltage, load fluctuations, or characteristics fluctuations of each element including the saturable reactor occur, the energy transfer efficiency decreases, the loss of the switching elements increases, or The object of the present invention is to provide a high-voltage pulse generation circuit that is highly reliable even in high-repetition operations while suppressing the occurrence of output stutter, and a discharge excitation laser and an accelerator using the same.

[Means for Solving the Problems] The present invention provides a high voltage pulse generation circuit having a magnetic pulse compression circuit using a saturable reactor, in which the operating magnetic flux density at the gate of the saturable reactor constituting the magnetic pulse compression circuit is A high voltage pulse generation circuit characterized in that the amount is set by a pulse voltage or a pulse current applied through a saturable reactor newly provided in a reset circuit of the saturable reactor. be.

In this way, the pulse voltage or pulse current applied through the saturable reactor newly installed in the reset circuit that constitutes the magnetic pulse compression circuit can cause load fluctuations,
If the configuration is such that the amount of operating magnetic flux density at the time of gate of the saturable reactor that constitutes the magnetic pulse compression circuit is set in response to input terminal fluctuations and characteristic fluctuations of elements that constitute the circuit,
The surge voltage induced in the saturable reactor constituting the magnetic pulse compression circuit at the time of gate can be suppressed by the saturable reactor provided in the reset circuit, and the pulse generation circuit in the reset circuit is protected from the surge voltage. be able to. Further, compared to the case where a normal glue handle is inserted into the reset circuit, the use of a saturable reactor is preferable because it is superior in both the surge voltage blocking function and the responsiveness at reset during high repetition operation.

In the high-voltage pulse generation circuit, there is a mutual difference between a period in which a gate voltage is applied to the saturable reactor constituting the magnetic pulse compression circuit and a period in which the reset circuit generates a pulse voltage or a pulse current. When configured to have a stall period, the surge voltage blocking function by the saturable reactor newly provided in the reset circuit is improved, which is preferable.

In the high voltage pulse generation circuit, a saturable reactor newly provided in a reset circuit of a saturable reactor constituting the magnetic pulse compression circuit is provided with a reset circuit for resetting the saturable reactor. In addition, since the amount of magnetic flux density operated by the surge voltage can be increased, it is possible to downsize the saturable reactor. Furthermore, since the amount of operating magnetic flux density when the switch element of the reset circuit of the saturable reactor newly provided in the reset circuit operates can be made constant, the output of the high voltage pulse generation circuit is also reduced.

The present invention also provides a high voltage pulse generation circuit having a magnetic pulse compression circuit using a saturable reactor, in which the saturable reactor constituting the magnetic pulse compression circuit includes:
This high voltage pulse generation circuit is characterized in that, in addition to the reset circuit, a preset circuit is provided to prevent jitter in the operating magnetic flux density amount when the saturable reactor is gated.

In this way, by providing a preset circuit in addition to a reset circuit in the saturable reactor that constitutes the magnetic pulse compression circuit, it is possible to suppress jitter in the magnetic flux density of the saturable reactor immediately before the saturable reactor is reset. This is preferable because it reduces jitter in the output of the high voltage pulse generation circuit that occurs when the amount of operating magnetic flux density at the time of the gate of the saturable reactor is varied.

By making the preset circuit that constitutes the magnetic pulse compression circuit output a pulse voltage or pulse current, the response characteristics of output control by the saturable reactor that constitutes the magnetic pulse compression circuit during high repetition operation are improved. do.

Further, the magnetic pulse compression circuit can be activated by presetting the saturable reactor constituting the magnetic pulse compression circuit with a pulse voltage or pulse current applied via a saturable reactor newly provided in the preset circuit. This is preferable because it improves the protection function of the preset circuit against the surge voltage induced at the time of gate of the saturable reactor.

23- By providing a reset circuit for resetting the saturable reactor newly provided in the preset circuit of the saturable reactor constituting the magnetic pulse compression circuit, a reset circuit for resetting the saturable reactor may be newly provided in the preset circuit. This makes it possible to downsize the magnetic core constituting the saturable reactor, and also reduces the output power of the high voltage pulse generating circuit.

In a high voltage pulse generation circuit having a magnetic pulse compression circuit using a saturable reactor provided with a preset circuit in addition to the reset circuit, by operating the preset circuit of the saturable reactor constituting the magnetic pulse compression circuit, By preventing the jitter in the magnetic flux density immediately before resetting the saturable reactor and then changing the magnetic flux density in the reset circuit, the jitter in the magnetic flux density after the reset is completed is reduced. As a result, the amount of operating magnetic flux density at the time of gate of the saturable reactor can be set while suppressing jitter.

Here, by setting the maximum magnetic flux density at the time of presetting of the saturation reactor constituting the magnetic pulse generating circuit to be equal to or higher than the residual magnetic flux density, the output power of the present high voltage pulse generating circuit can be further reduced.

Furthermore, by setting the maximum magnetic flux density at the time of presetting of the saturable reactor constituting the magnetic pulse compression circuit in a region where its relative magnetic permeability is 10 or less, the output of the high voltage pulse generation circuit is This is a significant decrease and is desirable.

In a high voltage pulse generation circuit having a magnetic pulse compression circuit using a saturable reactor which is provided with a preset circuit in addition to the reset circuit, the saturable reactor is set in a region where jitter in the magnetic flux density thereof is less generated by the reset circuit. Then, by operating a preset circuit that magnetizes in the same direction as when gating and setting the magnetic flux density at the start of gate, the operating density at the time of gate of the saturable reactor can be adjusted to generate jitter. This is preferable because it allows setting while preventing the above.

Here, in a high voltage pulse generation circuit that sets the operating magnetic flux density amount at the gate of the saturable reactor constituting the magnetic pulse compression circuit by a preset operation after the completion of the reset operation, the minimum By setting the magnetic flux density to be less than or equal to the negative residual magnetic flux density, the output of the present high voltage pulse generation circuit can be significantly compared to other companies, which is preferable.

In a high voltage pulse symptom circuit having a magnetic pulse compression circuit using a saturable reactor of the method described below,
The saturable reactor magnetic core constituting the magnetic pulse compression circuit has a saturation magnetostriction λs of +5×10−1 to −5×
When a magnetic material in the 10-R range is used, there is little variation in the output when the repetition frequency is changed, and reliability is reduced due to deterioration of the magnetic properties of the core. An excellent pulse generation circuit that does not cause deterioration can be realized.

Further, when a magnetic core having a squareness ratio of 0.7 or more in DC magnetic characteristics is used as the saturable reactor magnetic core, a high voltage pulse generation circuit with less output shimmer can be obtained.

When a magnetic core composed of an amorphous magnetic alloy containing Co as the main component is used as the saturable reactor magnetic core,
This is preferable because the output ivy can be easily reduced.

As the saturable reactor magnetic core, the composition formula % formula % () (However, M is at least Co or Ni,
M′ is at least one element selected from the group consisting of Nb, W, Ta, Zr, Hf, Ti, M, and o; M″ is V
, Cr, Mn, AQ, platinum metal element, Sc, Y, rare earth element, Au, Zn, Sn.

and at least one element selected from the group consisting of Mo, X is C, Ce, P, Ga, Sb, In,
Be.

At least one element selected from the group consisting of As, a+ X+ V+ Z+ α, β, and γ are O≦a≦0.5, 0.1≦X≦3.6≦y<z5°, respectively 3≦
z<15.14<y 10 z<30°27 1≦α≦10, 0≦β≦10.0 and γ≦10.

) and at least 50% of the composition
When using a magnetic core made of a magnetic alloy consisting of fine cc Fe solid solution crystal grains and having an average grain size of 500 A or less as measured by the maximum dimension of each crystal grain,
There is less ivy and reliability is improved.

In the high-voltage pulse generation circuit, the energy transfer efficiency is improved by configuring the operating magnetic flux density at the time of the gate of the saturable reactor constituting the magnetic pulse compression circuit to be variable in conjunction with the DC input power supply voltage. It is preferable that the output can be varied while suppressing deterioration as much as possible.

In the high-voltage pulse generation circuit, deterioration of energy transfer efficiency is prevented by configuring the operating magnetic flux density amount at the time of gate of the saturable reactor constituting the magnetic pulse compression circuit to be variable in accordance with load fluctuation. While suppressing
Output can be varied.

When multiple stages of the magnetic pulse compression circuits are used in the high-voltage pulse generation circuit, optimization to maximize energy transfer efficiency is facilitated, and significant deterioration of energy transfer efficiency is also prevented. It is possible and preferable.

When a plurality of high-voltage pulse generation circuits are operated synchronously, it is preferable because the jitter of the output of each high-voltage pulse generation circuit is small, so that the timing of the synchronous operation can be easily determined.

The discharge-excited laser that uses a high-voltage pulse generation circuit that has a magnetic pulse compression circuit that uses a saturable reactor as described above requires a manual DC power supply voltage increase in order to prevent a decrease in laser output due to laser gas deterioration. Even if it is changed, there is little decrease in energy transfer efficiency, and the ability to keep the laser output constant increases.

In addition, when the discharge excitation laser is an excimer laser, the rate of deterioration of the laser gas of the laser is significant, so the range of change in the input DC power supply voltage is widened to minimize the number of shots at which the laser output remains constant. However, according to Japan's 1JlJ, it is possible to always operate with optimal energy transfer efficiency in response to fluctuations in the input terminal, and the number of shots for which the laser output is constant is one digit or more. ” - can be raised.

Further, when the discharge excitation laser is a copper vapor laser, in many cases, a plurality of lasers are operated synchronously in a direct dish array, and in this case, according to the present invention, the output power of each laser is reduced. Therefore, the total output during synchronous operation can be easily increased.

A platform used for an accelerator for charged particles such as an electron beam that uses a high-voltage pulse generation circuit with a magnetic pulse compression circuit using a saturable reactor as described above has a significant decrease in energy transfer efficiency. It is possible to control the output without causing any problems, and it is possible to realize an accelerator with less jitter.

When the accelerator is a linear induction accelerator, it is possible to easily control output fluctuations that occur due to changes in characteristics due to heat generation during repeated operations of the saturable reactor, transformer, or other magnetic core used. .

[Examples] Examples of the present invention will be described in detail below, but the present invention is not limited to these Examples.

(Example 1) FIG. 1 is an example of the present invention, and is a circuit configuration diagram showing an example of application to a discharge excitation laser I. In this circuit, numeral is variable manual high voltage DC power supply, 2 is main capacitor 5, 55
3 is a thyratron, 4 is an inductance, 6 is a capacitor, 7 is a charging inductance of the main capacitor 6, 8 is a peaking capacitor, 9 is a laser main discharge pole,
10 is a saturable reactor, 11 is a saturable reactor 10
The output winding 12 is the reset winding 13 of the saturable reactor 10. The reset winding 13 and 14 are the winding ends of the reset winding 12 of the saturable reactor 10 and the output end of the reset circuit 15.

FIG. 2 is a circuit diagram of the reset circuit 15 used in this embodiment, where 13.14 is the output terminal of the reset circuit 15, 16 is a saturable reactor, and 17° 31-22 is for surge voltage absorption. varistor, 18 is a diode, 19 is a capacitor, 20 is a thyristor, 21 is a resistor,
23 is a variable DC power supply.

The operation of this circuit is explained by the circuit configuration diagrams shown in Figs. 1 and 2, the time chart shown in Fig. 3, the operating magnetization curve of the saturable reactor 10 shown in Fig. 4, and the operating magnetization curve of the saturable reactor 16 shown in Fig. 5. This will be explained using a curve.

During the period T shown in FIG. 3, that is, during the gate period, the thyratron 3 is turned on, and the charge previously stored in the polarity shown in the main capacitor 5 is transferred to the path of the shown discharge current 11.
Transfer to capacitor 6.

During this time, the magnetic flux density of the saturable reactor 10 changes from point a to b.
However, since the inductance of the output winding 11 of the saturable reactor 10 at this time is very large, the discharge current 12 of the peaking capacitor 81 from the capacitor 6 is limited to an extremely small value. Therefore, most of the terminal voltage v6 of the capacitor 6 is applied to the output winding 11 of the saturable reactor "O" with the polarity indicated by the black circle in the figure.

Meanwhile, during this time, the second iris register 20 of the reset circuit 15 shown in FIG.
Due to the voltage waveform blocked by the output winding 11 of the saturable reactor 10, the surge voltage induced in the reset winding 12 with the polarity of the black circle in FIG. It changes from point to point b. Since the inductance of the saturable reactor 16 at this time is sufficiently large, most of the surge voltage induced by the reset tightening of the saturable reactor 10 is generated by the saturable reactor 1.
6, diode 18, thyristor 20,
The variable DC power supply 23 and the like are protected.

At the moment when most of the energy of the main capacitor 5 is transferred to the capacitor 6, the magnetic flux density of the saturable reactor 10 is
It reaches point b in FIG. 4 and is saturated. As a result, the inductance of the output winding fill of the saturable reactor 10 sharply decreases, the current 12 increases significantly, and the energy of the capacitor 6 is transferred to the peaking capacitor 8. When the terminal voltage υ8 of the peaking capacitor 8 reaches the breakdown voltage of the laser main discharge pole 9, most of the energy stored in the capacitor is dissipated in the laser gas via the laser main discharge pole 9. , contributes to laser oscillation. but,
Some of the energy is not dissipated in the laser gas and also contributes to resetting the saturable reactor 10. Meanwhile, during this time, the thyristor 20 of the reset circuit 15 shown in FIG. 2 is in an off state. Therefore, the magnetic flux density of the saturable reactor 10 changes from point b to point e via point 0, point d, and point e in FIG. 4. In addition, the magnetic flux density of the saturable reactor 16 is determined from b to do via C in FIG.
The direction changes. In FIG. 4, ΔB is the amount of operating magnetic flux density at the time of gate, and ΔB is the amount of operating magnetic flux density due to the reversal current of il.

During the period T2 shown in FIG. 3, both the thyratron 3 and the thyristor 18 are in the off state. During this time, the main capacitor 5 connects the positive terminal of the power supply 1, the resistor 2, and the inductance 4.
, the main capacitor 5, the inductance 7, and the negative electrode of the power supply 1, the charging current flows again to the polarity shown in the figure.

Further, the magnetic flux density of the saturable reactor 10 changes by ΔB2 from point e to point f in FIG. 4 due to the self-setting operation. The magnetic flux density of the saturable reactor 16 is the fifth
It changes from point C'' to point e' in the figure due to the self-resetting operation.The degree of the self-setting operation of the saturable reactor 10 and the self-resetting operation of the saturable reactor 16 depends on the phase difference etc. of the magnetic core used. different.

Regarding the self-setting operation of the saturable reactor 10, see, for example, Kiwaki, Onda: "1) Experimental study of magnetic core operation of a high frequency magnetic amplifier for a C-DC converter" °, Institute of Electrical Engineers of Japan Magnetics Study Group Materials, MAG-88- 233,I
) I) 1-8 (1,988).

During the period T3 shown in FIG. 3, that is, during the reset period, the thyristor 20 is turned on, and the charge previously stored in the capacitor 19 with the polarity shown is discharged through the path IR shown in the drawing. At this time, thyratron 3 is in an off state. The magnetic flux density of the saturable reactor 16 changes from point d" in FIG. 5 to point e, after being saturated at point e, via point f' to point g.e.
Since the inductance of the saturable reactor 16 during the period from point ' to point ea- is extremely large, the value of the current i r is small, and the turn-on loss of the thyristor 20 is sufficiently suppressed. After saturation at point e', the inductance of the saturable reactor 16 decreases rapidly, so jr increases significantly and flows into the reset winding 1i12 of the saturable reactor 10, magnetizing the saturable reactor 10 to the black circle shown in the figure and the polarity. That is, reset. As a result, the magnetic flux density of the saturable reactor 10 is ΔB from point f to point 1 via point g and h in FIG.
It changes a lot.

During the period T4 shown in FIG. 3, both the thyratron 3 and the thyristor 20 are in the off state, and the magnetic flux density of the saturable reactor 10 changes by ΔB4 from point i to point a in FIG. 4 due to self-setting. do. On the other hand, the magnetic flux density of the saturable reactor 16 is set at g' in FIG.
It changes from point to point a゛.

The above operations are repeated.

In this embodiment, the pulse voltage applied to the reset winding 12 of the saturable reactor 10 is changed by changing the voltage of the variable DC power supply 23 of the reset circuit 15 when the voltage of the input power supply 1 is changed. By changing the operating magnetic flux density amount ΔB at the time of gate of the saturable reactor 10, the energy transfer efficiency from the main capacitor 5 to the peaking capacitor 8 is always operated at an optimum value. As a result, compared to the conventional example, a high voltage pulse generation circuit can be obtained that does not cause a decrease in energy transfer efficiency with respect to changes in input voltage.

Furthermore, by inserting the saturable reactor 16 into the reset circuit 15, sufficient inductance can be obtained by using its non-saturated region to block the surge voltage induced in the reset winding of the saturable reactor 10 at the time of gate. By using an inductance with a small saturation region, the pulse width of the pulse voltage at the time of reset can be made sufficiently small. As a result, it is possible to both shorten the reset period and protect the reset circuit when using the pulse voltage or pulse current reset method, which has been difficult in the past, and it becomes easy to increase the repetition rate of the magnetic pulse compression circuit.

Table 1 shows the magnetic core phase quality and DC magnetic characteristics of the saturable reactor 10 used in this example, and Table 2 shows the shape of the magnetic core used. In this example, a plurality of toroidal-shaped unit magnetic cores shown in Table 2 are combined as shown in Table 3, and used as one turn of winding in a coaxial 1 degree cylinder to prevent temperature rise due to core loss. Therefore, it is cooled using silicone oil.

Table 4 shows that when each of the materials shown in Tables 1 to 3 is used as a saturable reactor in FIG.
The capacitance of each is 20 nF, the effective length of the laser main discharge pole 9 is 300 mm, and the laser gas is He, K.
Using a mixed gas of R and F2, the pre-ionization method is U■ automatic pre-ionization (a gap of about 111 m is provided in the path through which the current 1□ in Fig. 1 flows, and the laser main discharge cell 9 is uniformly pre-ionized). method), and the main capacitor 5 is operated to keep the laser output constant.
Energy transfer efficiency η from to peaking capacitor 8
t (ratio of the input energy of the main capacitor 5 to the input energy of the peaking capacitor 8), laser overall efficiency η (
The ratio of the laser output P, o to the input energy of the main capacitor 5), the laser output Po, the gas life, and the laser output power are compared. Here, energy transfer efficiency η
L, laser overall efficiency η, and laser output Po are values at 1/2 of the gas life. The gas life was defined as the period until the laser output Po decreased by 5%. Laser output is the variation time in 1000 shots at 172 hours of gas life.

, 33 Table 1, 1 to 11 are interlayer insulation using polyimide film with a thickness of 7.5, and No. 12 to 17 are interlayer insulation using MgO.

Yakuza. is the magnetic flux density at a magnetizing force of 800 A/m, and λs is the saturation magnetostriction.

No. table No. table No. 4 table The wave number is Hz, and the laser gas is a mixture of He, Kr, and F2.

In addition, in the reset circuit shown in FIG. 2, the saturable reactor 16 uses two toroidal magnetic cores of Ni-Zn ferrite having the shape shown in Table 5 and DC magnetic characteristics, and has a winding #I of 25 turns. It was used. The capacitance of the capacitor 19 was 10 μF, and the voltage of the power supply 23 was set to an appropriate value depending on each sample.

No. table *Magnetic flux density at Bfloe magnetizing force of 800 A/rn.

As shown in Table 4, Sample Nos. . . . - 6 G.

When using a crystalline magnetic core and Fe-based ultra-ultrafine crystalline magnetic cores of samples Nos. 12 to 17, the energy transfer efficiency ηt, laser overall efficiency η, Excellent in terms of laser output Po and gas life.
Laser output power was also reduced to about 1/243 compared to when using an Fe-based amorphous magnetic core. Furthermore, the squareness ratio B in the DC magnetic characteristics
r/B,. However, when using a magnetic core of 0.7 or more,
It was also found that there was less laser output ivy when using the same system of interoperable magnetic cores.

FIG. 32 shows the results when Sample No. 5 was used as the saturable reactor and when Sample No. 25 was used in the examples of the present invention shown in Table 4 above.
This figure compares various characteristics with respect to the number of shots when the same saturable reactor is used in the conventional circuit shown in the figure.

According to the present invention, it is easy to maintain the laser output Po constant while compensating for the deterioration of the laser gas, and it is understood that each characteristic is improved. Further, as expected from the small decrease in energy transfer efficiency ηt, it is possible to suppress the reversal current of the thyratron, and it is also possible to improve the thyratron life by about one order of magnitude.

4 (Example 2) In a discharge excitation laser having the main circuit configuration shown in FIG. 1, a circuit configuration shown in FIG. 6 was used as the reset circuit 15.

In FIG. 6, 13.14 is the output terminal of the reset circuit 15, 16 is the saturable reactor, 24 is the output winding of the saturable reactor 16, 25 is the reset winding of the saturable reactor 16, and 17, 22.28 are the output ends of the reset circuit 15. A surge voltage suction varistor, 18 a diode, 19 a capacitor, 20 a thalistor, 21. 27 is a resistor, 23 is a variable DC power supply, 26 is an inductance for absorbing surge voltage, and 29 is a DC power supply.

The operation of the main circuit and the reset and gate time charts of this embodiment are the same as those of the first embodiment, and only the operation of the saturable reactor 16 in the reset circuit 15 is different.

Below, regarding the operation of the saturable reactor 16 of the reset circuit in this embodiment, the time chart of FIG.
This will be explained using the reset circuit configuration diagram shown in the figure and the operating magnetization curve of the saturable reactor 16 shown in FIG. During the period 1.1 shown in FIG. 3, that is, the gate period of the saturable reactor 10, the saturable reactor 1. Reset winding 12 of O
A surge voltage induced in the saturable reactor 6 is applied to the output winding 24 of the saturable reactor 6. For this reason, the saturable reactor ■
The magnetic flux density of 6 is from point a to b in Figure 7 according to the polarity of the black circle in the figure.
The voltage changes by ΔB°" from point " to point c. During this period, the inductance of the output 8#A24 of the saturable reactor 16 is extremely large, so most of the surge voltage is caused by the winding 2. Block, diode 18, thyristor 2
0. The power supply 23 and the like are protected.

During a period i2 not shown in FIG. 3, both the thyratron 3 and the thyristor 20 are in the OFF state. At this time, the magnetic flux density of the saturable reactor 16 is reset by the current I26 flowing through the reset winding 25 of the saturable reactor 16, with the polarity opposite to that of the black circle shown in the figure, from the 0 point to the point a'' in FIG. Ru.

During the period I3 shown in FIG. 3, the Cyrisk 20 turns on and discharges the charge previously stored in the capacitor 19 with the polarity shown in the drawing along the path of the shown discharge current ir. Therefore, the magnetic flux density of the saturable reactor 16 is saturated with the polarity of the black circle shown in the figure from point a'' to point d'' in FIG. The above a
Since the inductance of the output winding 24 of the saturable reactor 16 from point "' to point d" is extremely large, almost all of the voltage generated by turning on the thyristor 20 is from the output winding m24 of the saturable reactor 16. prevents it. but,
When the point d''' is reached, the inductance of the output winding 24 decreases rapidly, and the reset winding I of the saturable reactor 10
A pulse voltage is applied to J12, and the saturable reactor 1
0 is reset to the opposite polarity to the black circle shown in the figure.

During the period I4 in FIG. 3, the magnetic flux density of the saturable reactor 16 is reset from point f" to point a" in FIG. 7 by the reset current flowing through the reset winding MA25.

The above operations are repeated.

Also in this embodiment, when the voltage of the input power supply 1 is changed 7-, the variable DC power supply 23 of the reset circuit 15
By changing the voltage of the saturable reactor 10, it is possible to control the amount of operating magnetic flux density at the time of gate, and to perform optimum operation.

Further, the effect of inserting the saturable reactor 16 into the reset circuit is exactly the same.

Further, by newly providing a resetting/sowing circuit in the saturable reactor 16, the operating magnetic flux density of the saturable reactor 16 can be increased, so that the magnetic core can be made smaller.

Table 6 shows the shape of the magnetic core of the saturable reactor 16 used in this example and the iIl flow magnetic characteristics. When No. 22 is used, one same magnetic core is used, the number of turns of the output winding 24 is 10 turns, and the number of turns of the reset winding is 1.
Turn and I2. =l.

By using OA, safe operation of the reset circuit was possible even at a high repetition rate of 50011z.

When using No. 23, the number of turns of the output winding 24 using one same magnetic core is 20 turns, and the number of turns of the reset winding is 6.
By setting i, , -2, OA as a turn, safe operation was possible even at a high repeat of 5001 (z).

Table 7 shows the laser output in this example. It can be seen from this table that jitter could be reduced by resetting the saturable reactor 16.

Incidentally, sample No. in Table 7 corresponds to sample No. 9 in Table 1, and indicates the phase of the saturable reactor 10.

Table 6 I6°. is the magnetic flux density at a magnetizing force of 800 A/m.

Table 7 When the saturable reactor 16 is not reset, No. 21 is used in the reactor core 6 (Example 3) Fig. 8 shows another example of the present invention, in which a discharge excitation laser l
It is a circuit configuration diagram showing an example of application of \. In this circuit,
1 is a variable manual high voltage DC power supply, 2 is a charging resistor of the main capacitor 5, 3 is a thyratron, 4 is an inductance, 6 is a capacitor, 7 is a charging inductance of the main capacitor 6, 8 is a peaking capacitor, 9 is a laser main discharger very,
1o is saturable reactor, 11 is 0 above saturable reactor
31 is the reset winding of the saturable reactor 1o, 61 is the preset winding of the saturable reactor 1o, 3
2.33 is the reset winding end of the saturable reactor 1o and the output end of the reset circuit 34, and 62.63 is the winding end of the preset winding 61 of the saturable reactor 1o and the output end of the preset circuit 64.

FIG. 9 is a circuit configuration diagram of the reset circuit 34 used in this embodiment, and 32 and 33 are the output terminals of the reset circuit 34;
35 is an inductance for absorbing surge voltage, 36 is a resistor,
37 is a surge voltage absorbing bar 91-risk, and 38 is a variable DC power supply.

FIG. 10 is a circuit configuration diagram of the preset circuit 64 used in this embodiment, where 62 and 63 are the output terminals of the preset circuit, 65 is an inductance, 66° and 71 are varistors for absorbing surge voltage, and 67 is a varistor for absorbing surge voltage. A diode, 68 a capacitor, 69 a thyristor, 70 a resistor, and 72 a variable DC power supply.

The operation of this circuit will be explained using the circuit configuration diagrams shown in FIGS. 8, 9, and 10, the time chart shown in FIG. 11, and the operating magnetization curve of the saturable reactor 10 shown in FIG. 12.

During the 1.1 period shown in FIG. 11, that is, the gate period, the thyratron 3 is turned on, and the charge previously stored in the main capacitor 5 with the polarity shown in the drawing is caused by the discharge current i flowing in the direction shown in the drawing. The signal is transferred to capacitor 6. During this time, the magnetic flux density of the saturable reactor 10 changes from point α to point β in FIG. 12, but since the inductance of the output winding 11 of the saturable reactor 10 at this time is also large, The current 12 flowing from the peaking capacitor 82 to the peaking capacitor 82 is limited to a very small value.

Therefore, most of the terminal voltage (6) of the capacitor 6 is applied to the output winding 11 of the saturable reactor 10 with the polarity indicated by the black circle in the figure. Meanwhile, during this time, the thyristor 69 is off.
In addition, although the DC reset current Ir is flowing through the reset circuit 34, the saturable reactor 10
Since the gate magnetizing force is larger than the magnetizing force 1-1 r applied to the saturable reactor 10 as described above,
The magnetic flux density changes from point α to point β in FIG. Also, this and the preset volume i11 of the west saturation reactor 10!61. Although surge voltages are induced in both the reset windings 31 and 31 with the polarities indicated by the black circles in the figure, these are absorbed by the inductances 65 and 35, and the semiconductor elements, DC power supply, etc. are protected.

At the moment when most of the charge in the main capacitor 5 is transferred to the capacitor 6, the magnetic flux density of the saturable reactor 10 reaches point β in FIG. 12 and becomes saturated. As a result, the saturable reactor 1
0, the inductance of the output winding 11 decreases rapidly, and the current 1
2 increases significantly and the charge on capacitor 6 is transferred to peaking capacitor 8. When the terminal voltage of the peaking capacitor 8 reaches the dielectric breakdown voltage of the laser main discharge pole 9, most of the energy stored in the capacitor is
It is consumed in the laser gas via the laser main discharge electrode 9 and contributes to laser oscillation. However, some of the energy also contributes to resetting the saturable reactor 10, and the magnetic flux density of the saturable reactor 10 changes from point β to point γ, then point 6 in FIG. 12, and then to point ε. Point ΔB in FIG. 12 is the amount of operating magnetic flux density at the time of gate, and ΔBa is the amount of operating magnetic flux density due to the reversal current of 12.

During the period To2 shown in FIG. 11, both the thyratron 3 and the thyristor 69 are in the off state. During this time, the magnetic flux density of the saturable reactor 10 is changed to ε in FIG. 12 by the reset current Ir supplied by the reset circuit 34.
ΔBb is reset from the point to the ζ point.

During the period 'r'3 shown in FIG. fi 61 to magnetize the saturable reactor 10 to the polarity indicated by the black circle in the figure. As a result,
The magnetic flux density of the saturable reactor 10 is saturated from point ζ to point η in FIG. only changes and is preset.

↓ During the period T, l in Fig. 1, the thyristor 69 is in the off state, and the magnetic flux density of the saturable reactor lO is changed by △Bc from the 0 point to the α point in Fig. 12 due to the reset current 1r. will be reset.

The above operations are repeated.

In this embodiment, the saturability between To and To2 in FIG. Fluctuations in the operating magnetic flux density ABa+ΔBb of the reactor 10 can be compensated for by the reset operation during the T°8 period in FIG.

The setting of the operating magnetic flux density amount ΔB at the time of the gate of the saturable reactor 10 in order to prevent a decrease in energy transfer efficiency when the voltage value of the input power source 1 is varied is to set the reset winding 31 of the saturable reactor 10. This is possible by changing the flowing reset current.

Table 8 shows the laser output power when the main circuit of the present invention shown in FIG. 8 is used with the reset circuit shown in FIG. 9 and the preset circuit shown in FIG. 10, and is operated according to the time chart shown in FIG. This is a comparison of the laser emitting device in Example 1 described above, and all operating conditions were the same as in Example 1. From the same table, it can be seen that according to this example, compared to Example 1, it is possible to significantly suppress the jitter of the laser output to about 1/2 or less.

Table 9 shows the maximum magnetic flux density at presetting and the maximum magnetic flux density at presetting when samples 5, 11, and 13 shown in Tables 1 to 3 are used as the saturable reactor 10 in this example. 56 shows the relationship between relative magnetic permeability and output power.

When the maximum magnetic flux density at the time of presetting is greater than or equal to the residual magnetic flux density in the DC magnetic characteristics of each sample, the laser output power decreases. In particular, it has been found that when the relative magnetic permeability at the maximum magnetic flux density during presetting is 10 or less, the laser output fluctuation is significantly reduced.

Table 8 = 59 Table * Sample 5. 1.1. The residual magnetic flux densities in the 13 DC magnetic custom orders are 0.51T, 0.96T, and 1, respectively.
．． It is 12T.

(Example 4) As the preset circuit 64, a circuit having the circuit configuration shown in FIG. 13 was used instead of the circuit having the circuit configuration shown in FIG. In Fig. 13, 62゜60 63 is the output terminal of the Precera I circuit, 73 is a saturable reactor, 66.71 is a varistor for absorbing surge voltage, 67
is a diode, 68 is a capacitor, 69 is a thyristor,
70 is a resistor, and 72 is a variable DC power supply. By using the saturable reactor 73 and utilizing the saturated region and non-saturated region, the low inductance required to reduce the pulse width of the preset pulse current and the surge induced in the preset winding 61 at the gate of the saturable reactor 10 can be reduced. We were able to achieve the high inductance needed to block the voltage. Therefore, it is possible to both shorten the preset period and protect the preset circuit, and it becomes easy to increase the number of repetitions.

The operation of saturable reactor 73 at this time is shown in Fig. 8 and 1.
The circuit configuration in Figure 3, the time chart in Figure 11, and the
This will be explained using the operating magnetization curve of the saturable reactor 73 shown in FIG.

In the gate period T"1 in FIG. 11, the saturable reactor 73
Due to the surge voltage induced in the polarity of the black circle shown in the preset winding 61 of the saturable reactor 11, the magnetic flux density changes from point ■ to point ■ in FIG. It changes by △B■ up to the point. During this time, the inductance of the saturable reactor 73 is large, so the surge voltage is blocked and the preset circuit 64 is protected.

During the preset period T' 2 in FIG. 11, the magnetic flux density of the saturable reactor 73 increases from point ■ in FIG. changes up to.

During the preset period T"3 in FIG. 11, the magnetic flux density of the saturable reactor 73 changes from point V in FIG.
After being saturated at point, it changes to point ■ via point ■ and point ■. Saturable reactor 7 during this period from point V to point ■
Since the inductance of the capacitor 68 shown in the figure is extremely large, the inductance of the radial current 1"6 of the illustrated capacitor 68 is extremely small.
Since the inductance of the saturable reactor 73 when changing from point 2 to Br via point 2 is extremely small, the above 1.6. becomes extremely large and presets the saturable reactor 10 in a short period of time.

During the reset period -p+ in FIG. 11, the magnetic flux density of the saturable reactor 73 changes from point It changes to 1 point via the X point.

The second operation is repeated.

Note that the 15th preset circuit is used instead of the preset circuit shown in FIG.
When the preset circuit shown in the figure is used, by magnetizing the saturable reactor 73 to the polarity indicated by the black circle in the figure, it is possible to maintain the position of the point ■ shown in FIG. The fluctuations in the density amounts ΔBz and ΔBn are expressed as [
I/7 can be stopped, and the output power can be significantly reduced.

In FIG. 15, 62.63 is the output terminal of the reset circuit 64, 66.71.78 is a surge voltage absorbing varistor,
67 is a diode, 68 is a capacitor, 69 is a thyristor, 70.77 is a resistor, 72 is a variable DC power supply, 74 is an output winding of the saturable reactor 73, 75 is a reset tightening of the saturable reactor 73, 76 is an inductance, 79 is a DC power supply.

Table 10 shows sample No. 5 shown in Tables 1 to 3 above.
．． 11. ．． 13 is used as the saturable reactor 10,
Comparison of laser output output when the preset circuit shown in FIG. 13 is used in the circuit shown in FIG. 8 according to the present invention, when the preset circuit shown in FIG. 15 is used, and when shown in Example 3 above. It is. The operating conditions were the same as in Example 1, and the magnetic core of the saturable reactor 73 in FIGS.
, 22. When the preset circuit shown in FIG. 13 was used, a 10-turn winding string was provided on the same magnetic core. One way solution 15
When using the reset circuit shown in the figure, the same magnetic core has an output winding of 74.10 turns, a reset winding & jtl turn,
I,,-1, was used as OA. According to the same table, the 15th
By using the three preset circuits shown in the figure, the laser output shunt can be reduced to the same level as when the preset circuit shown in FIG. 10 shown in the third embodiment is used. Note that the first example shown in Example 3 above
The high repetition operation limit of the preset circuit shown in Figure 0 is 300
On the other hand, when the preset circuits of FIGS. 13 and 15 according to this embodiment are used, the frequency is about 500 Hz.
) High repetition motion exceeding 1z was also possible.

Table 10 64 (Example 5) This is another example of the present invention, and the discharge excitation laser having the main circuit configuration of FIG. 8 is equipped with the preset circuit and reset circuit shown in FIG. The circuit configuration shown in FIG. 16 was used.

In Fig. 16, 32 and 33 are the output terminals of the reset circuit 34, 39 is an inductance, 40 and 45 are varistors for absorbing surge voltage, 41 is a diode, 42 is a capacitor, 43 is a thyristor, 44 is a resistor, and 46 is a variable It is a DC power supply.

The operation of this circuit will be explained using the circuit configurations shown in FIGS. 8, 10, and 16, the time chart shown in FIG. 17, and the operating magnetization curve of the saturable reactor 10 shown in FIG. 18.

During the gate period Tα shown in FIG. 17, the thyratron 3 is turned on, and the charge previously stored in the main capacitor 5 with the polarity shown in the figure flows into a discharge stream 1. The signal is transferred to the capacitor 6. During this time, the magnetic flux density of the saturable reactor 10 changes from point α' to point β' in FIG. Current 1 flowing from to peaking capacitor 8
2 is restricted to a very small value. Therefore, most of the terminal voltage v6 of the capacitor 6 is the saturable reactor 1.
0 to the output winding 11 with the polarity shown. Meanwhile, during this time, both thyristors 43 and 69 are in the off state,
Reset winding 31 of saturable reactor 10. The surge voltage induced in the preset winding 32 is blocked by the inductances 39 and 65, respectively, and the semiconductor elements, DC power supply, etc. are protected.

At the moment when most of the charge in the main capacitor 5 is transferred to the capacitor 6, the magnetic flux density of the saturable reactor 10 reaches point β'' in FIG. 18 and becomes saturated.As a result, the output winding of the saturable reactor 10 The inductance of peaking capacitor 8 decreases rapidly, the current 12 increases significantly, and the charge on capacitor 6 is transferred to peaking capacitor 8. Peaking capacitor 8
When the terminal voltage V, reaches the dielectric breakdown voltage of the laser main discharge pole, most of the energy stored in the capacitor is consumed in the laser gas via the laser main discharge pole 9, resulting in laser oscillation. Contribute. However, a part of the energy becomes a current in the opposite direction to that shown in FIG. 12 and also contributes to resetting the saturable reactor 10, and the magnetic flux density of the saturable reactor 10 changes from point β′ to point γ′ in FIG. It changes to the ε゛ point via the δ′ point. Δ3 in FIG. 18 is the operating magnetic flux density amount during the gate period, and ΔB'a is 1. is approximately equal to the amount of operating magnetic flux density associated with the reversal of .

During the period Tβ shown in FIG. 17, thyratron 3, thyristor 43, and 69 are all in the off state.

During this time, the magnetic flux density of the saturable reactor 10 changes from ε' point to ζ' point in FIG. 18 due to the self-resetting effect.
b' changes.

During the period '↓゛γ shown in FIG. line 61 to magnetize the saturable reactor 10 to the polarity b7 indicated by the black circle in the figure. Due to this preset operation, the magnetic flux density of the saturable reactor 10 changes by ΔB'c from point ζ in FIG. 18 to saturation at point η", then passes through 0" to Br.

During the period Tδ in FIG. 17, the thyristor 69 is in the off state and the magnetic flux density of the saturable reactor 10 is at the point Br.

During the period Tε in FIG. 17, the thyristor 43 turns on and discharges the charge previously accumulated in the capacitor 42 with the polarity shown in the diagram through the path 131 shown in the diagram, and the saturable reactor 1
0 reset winding 31 and saturable reactor 10
is magnetized to the opposite polarity to the black circle shown. Therefore, the magnetic flux density of the saturable reactor 10 is reset by ΔB'd from Br in FIG. 18 from point L' to point λ° via point ''.

During this period T in FIG. 17, the thyristor 43 is turned off, and the magnetic flux density of the saturable reactor 10 is self-set by ΔBe from point λ' to point α' in FIG. 18.

ba The above operations are repeated.

In this embodiment, as in the case of the implementation described in ])h, it was possible to suppress the occurrence of output shatter, and it was also possible to perform optimal operation control in accordance with the voltage change of the human power source 1.

In addition, when the circuit shown in Figure No. 9 is used for the reset h . In FIG. 19, 32.33 is the output terminal of the reset circuit 34;
0.45 is a varistor for absorbing surge voltage, 41 is a diode, 42 is a capacitor, 44 is a variable direct current power supply, and 47 is a saturable reactor.

When the circuit shown in FIG. 20 is used as the reset circuit 34, the same effect as that described in the second embodiment can be obtained,
The size of the saturable reactor 47 has been reduced. In FIG. 20, 32.33 is the output terminal of the reset circuit 34, 4
．． 0.4.5. 52 is a surge absorbing varistor, 41 is a diode, 42 is a capacitor, 43 is a thyristor, 44. ．． 51 is a resistor, 46 is a variable DC power supply,
47 is a saturable reactor, 48 is a four-force winding of the iiJ saturable reactor, 49 is a reset winding of the rotor saturated actor 47, 50 is an inductance, and 53 is a DC' power source.

Furthermore, when the circuit shown in FIG. 13 is used as the preset circuit 64, the same effect as that described in Example 4 described in [) can be obtained, and it is easy to achieve a high repetition rate. .

When the circuit shown in FIG. 15 is used as the preset circuit 64, the same condition as that described in the third embodiment of i'+ij7 can be obtained, and the high precision adjustment is facilitated and the output power is also reduced. A・K was a little.

(Embodiment 6) Fig. 21 is another embodiment of the present invention, and is a drawing diagram of a circuit 1t+"j showing an application example of several sets of excitation and Power supply, 2 is the charging of the main capacitor 5; isijJ
11 is the i'IJ'I saturable reactor 10 winding, 61 is the IiJ saturable saturable reactor 10 reset winding, 62.63 is the winding tip of the preset winding 61, and the output of the preset circuit 64. Tin 81 is the charging inductance of the main capacitor 5.

In this embodiment, the charging inductance 8 of the main capacitor 5
1 is provided after the output winding 1 of the saturable reactor 10, so that the current of the main capacitor 5 also acts as a reset current of the saturable reactor 10. Further, as the preset circuit 64, the circuit shown in FIG. 10 was used.

The operation of this circuit is explained by the circuit configuration shown in Fig. 21 and Fig. 10, and the circuit configuration shown in Fig. 2.
Time chart in Figure 2, saturable reactor 1 in Figure 23
This will be explained using an operating magnetization curve of 0.

During the gate period T°α shown in FIG. 22, the thyratron 3 is turned on, and the charge previously stored in the main capacitor 5 with the polarity shown is transferred to the capacitor 6 by the shown discharge current 11. During this time, the flux density of the TiJ saturable reactor 10 changes from point A to point 4 in FIG. The current 12 flowing into the peaking capacitor 8 is limited to a very small value. Therefore, most of the terminal voltage v6 of the capacitor 6 is applied to the output winding ii+5!11 of the saturable reactor 10 with the polarity indicated by the black circle in the figure.

On the other hand, during this period, the thyristor 69 is in the off state, and the surge pressure induced by the polarity of the black circle in the figure of the preset winding 61 of the saturable reactor 10 is suppressed by the inductance 65, and each element of the preset circuit 64 is protected. It will be planned.

During +1 when most of the charge in the main capacitor 5 is transferred to the capacitor 6, the magnetic flux of the saturable reactor 10 is
It reaches the four points in the figure and becomes saturated. As a result, the inductance of the output winding 11 of the saturable reactor 10 rapidly increases, the current i2 increases significantly, and the charge in the capacitor 6 is transferred to the peaking capacitor 8. When the terminal voltage V8 of the peaking capacitor 8 reaches the dielectric breakdown voltage of the laser main discharge electrode 9, most of the energy stored in the capacitor is consumed in the laser gas via the laser main discharge electrode 9, and the laser Contributes to oscillation. However, some of the energy becomes a reversal current in the opposite direction to that shown in FIG. 23 and contributes to resetting the saturable reactor 10, and the magnetic flux of the saturable reactor 10 changes from the four points to the C point in FIG. It passes through two points and changes to point H. Here, ΔB shown in FIG.
is the amount of operating magnetic flux density during the gate period, and ΔB is approximately 12
is equal to the amount of operating magnetic flux density due to the reversal current.

During the reset period '1''β shown in FIG. 22, both the thyratron 3 and the thyristor 69 are in the off state. During this time, the magnetic flux density of the saturable reactor 10 is the same as that of the human power source 1, resistor 2, inductance 4, and main capacitor 5.
, the charging current of the main capacitor 5 flowing in the path of the output winding 11 of the saturable reactor 10, the inductance 81, and the load of the human power source 1 causes a voltage of ΔB from point H to point B in FIG. Only the mouth is reset.

During the period of 16.gamma shown in FIG. It is supplied to the preset winding 61 of the saturable reactor 10, and the saturable reactor 10 is magnetized to the polarity indicated by the black circle in the figure. As a result, the magnetic flux density of the saturable reactor 10 is -+
3 From r to point A, there is a change of ΔBc.

The above operations are repeated.

Table 11 shows the preset circuit 6 in the circuit of FIG.
4, a comparison of the laser output sick in the case of using the preset circuit of FIG. 10 and the samples shown in Tables 1 to 3 as the 1-iJ saturation reactor 10 and the case of Example 1 above. It is.

The operating conditions are the same as in the first embodiment. According to this example, laser output sick could be significantly reduced compared to Example 1 of the commercial publication.

In addition, in this embodiment, by setting the pumping magnetic flux density at the time of reset to less than 1 B1 in DC magnetic characteristics,
1 when the laser output sick is set to l--Br r or more
We were able to lower it to about 72.

Also, IL in Figure 21! When the circuit shown in FIG. 13 or 15 is used as the preset circuit 64 at the 1st road side r&, the lL! shown in FIG. 10! The high repetition motion of the platform using circuits is 3001
However, it was possible to operate at 5001-1 z or higher. Furthermore, when the circuit shown in FIG. 13 was used as the preset circuit 6/I, the laser output sick was about twice that of Example 1, but when the circuit from the 15th country was used, It was possible to achieve almost the same laser output thickness as in Example 1.

5 1 Table 6 [Effects of the Investigation As explained above, according to the present invention, the operating magnetic force 11 at the time of the gate of the saturable reactor constituting the magnetic pulse compression circuit is reduced by 11I. Output control is ii
J Noh High School 71! This facilitates high-efficiency operation and high-repetition operation of the upper pulse generation path, and also suppresses the occurrence of output shatter.

For this reason, in discharge-pumped lasers such as excimer lasers that require single-stroke output control as the laser gas deteriorates,
'The number of shots that can be operated with AI output is greatly increased, and the loss of switching elements such as thyratrons can be reduced, so reliability and lifespan are also improved.

In addition, copper vapor lasers, TEMA (Transversely Excit
ed MulLi Atmosphere Pres.
-For accelerators such as GO, discharge-pumped lasers in laser shafts, or linear induction accelerators, low jitter is important in order to operate multiple machines in addition to high repetition operation.According to Japan 1jlJ, ii! Output thick required when using these! 1 can be added, and the usage efficiency is 7J" + l'J <, making it possible to realize a highly reliable system.

In addition, when using a semiconductor element of a thyristor cap instead of a family tube element such as a thyratron as a switch diaphragm, it is necessary to use a multi-stage magnetic pulse compression circuit, or in this case, it is necessary to use a multi-stage magnetic pulse compression circuit. It is necessary to optimize the operation of the pulse compression circuit, but according to this research, it is possible to control the pulse compression circuit to achieve the optimum operation in eight stages, and it is possible to control the pulse compression circuit to achieve the optimum operation. A proper operation of the pulse compression circuit can be easily performed.

[Brief explanation of drawings]

Figure 1 shows the main circuit configuration of a discharge-activated laser 0-actual cell example using a straight-weight 1-pulse circuit according to the book JallJ, and the second
The figure is a practical example of the circuit of the reset circuit of the direct heavy 1-pulse photovoltaic [L11 path] according to this investigation. The time chart of the old one-step operation when using the circuit shown in Figure 2 or Figures 1 and 6. The figure shows the saturable reactor l when the circuit is operated based on time chart 91.
Figure 5 is a conceptual diagram of the operating magnetization curve of the saturable reactor 16 when the circuit is operated according to the time chart of Figure 3 using the circuits of Figure 1 and Country 2, section 6. 7 shows the circuit configuration of another embodiment of the reset circuit of the high-voltage pulse generation circuit according to this research, and FIG. 7 shows the circuit operation when using the circuits shown in FIGS. 1 and 6 and according to the time chart shown in FIG. 3. TIJ saturation saturation reactor 16 operation magnetization 1i
ll line conceptual diagram, FIG. 8 is the main circuit structure J of another embodiment of the discharge excitation laser using the high voltage pulse generation circuit according to the present invention.
Figure 9 shows the circuit configuration of the reset circuit constituting the high voltage pulse generation circuit according to the present invention, and Figure 10 shows the circuit configuration of the preset port constituting the high voltage pulse generation circuit according to the present invention. Figure 11 is a combination of country 8, figure 9 and figure 10, or figure 8, country 9 and figure 13, or figure 8, figure 9 and figure 15, which is an embodiment of the invention. Figure 12 is a time chart of circuit operation, Figure 12 is Figure 8, Figure 9 and Figure 10, or Country 8, Figure 9 and Figure 13, or Figure 12 is Figure 8, Figure 9 and Figure 15. When combined, the first
Fig. 1 is a conceptual diagram of the operating magnetization of the saturable reactor 10 when operated according to the time chart shown in Fig. 1, and Fig. 13 is a circuit configuration diagram of a preset circuit constituting the il'fi electric pulse optical lozenge circuit according to this research. , Country 14 shows the possible results when operating according to the time chart in Figure 1 above when the circuits in Figure 8, Figure 9, and Figure 13, or Figure 8, Figure 9, and Figure 5 are combined. Operating magnetization t+tua of saturation reactor 73
Conceptual diagram, Fig. t5 shows the circuit configuration country of the preset circuit constituting the high voltage pulse generation circuit according to the present invention, and Fig. 16 shows the circuit configuration country of the preset circuit constituting the high voltage pulse generation circuit according to the present study. The 17th country is shown in Figure 8, Figure 10, and Figure 16.
Figure, or Figure 8, Figure 10, and Figure 19, or Figure 8, Figure 10, and 1 of the 20th country! A time chart showing the circuit operation when using the l path, Fig. 18 is similar to Fig. 8.
17 using the circuits of Figure o and Figure 16 or Figure 8 and Figure 10 and Country 19 or Country 8 and Figure 10 and Figure 20.
Conceptual diagram of the saturable reactor (LOO) operating magnetization curve when the circuit is operated according to the tie chart in the figure: +l'ii f'lj
Pressure pulse photogeneration 1 [-reway] "4-defeat reset circuit L!J route (11η land country, 沁2") The figure shows a discharge-excited laser using a pulse generation circuit related to Raikou IJ. Other 0 Example 1:, Circuit (, '1\j anti-diagram, Figure 22 is the 21st district and the 10th country, or Figure 21 and the 13th country bL< is the 2j
Figure and Fig. 10 or 21, and 13th countries BL <↓ Yobobo 21 Garden)) Show the circuit operation when combined with the circuit of Fig. ijs
Using the circuits shown in Figures 21 and 15 in combination, 1. when operating according to the time chart of the 22nd country. Figures 24 and 26 are conceptual diagrams of the operating magnetization curves for a saturated LJ saturation 0, and Figures 24 and 26 are schematic diagrams of the main path 111ηj of a force-excited laser using conventional direct pressure pulse light generation. 25j
Figure (J, nail) Conceptual diagram of the operating magnetization curve of the I11 saturated rear tortoise 10 that is J3 in one direction in the 241st section or Figure 26, the circuit structure j table of the reset circuit 85 in the circuit of the 26th country in the 27th country, the 28th The figure shows the magnetic Harusuno KZi ILZ circuit during the clay extraction operation.11j'1 is the waveform diagram of the main parts of the 1st main pulse generation circuit, and Figure 29 is the waveform diagram of the main parts of the 1st main pulse generation circuit.
When using the circuit shown in Figure 4 or Figure 26, input power supply 1
The waveform diagram of the main parts when the voltage is low, Figure 30 is the waveform diagram of the main parts when the voltage is low.
When using the circuit shown in Figure 26 or Figure 26, the input power supply l
Figure 31 is a diagram comparing the output characteristics of a KrF excimer laser using the high voltage pulse generating circuit according to the present invention and a KrF excimer laser using a conventional high voltage pulse generating circuit. be. 1.23, 29, 38, 72, 79, 89: Power supply 3: Thyratron, 5: Main capacitor 9: Laser main discharge electrode 10. 16, 73: Saturable reactor 15. 34, 85: Reset circuit 64 Nib reset circuit

Claims (25)

[Claims] (1) In a high voltage pulse generation circuit having a magnetic pulse compression circuit using a saturable reactor, the amount of operating magnetic flux density at the gate of the saturable reactor constituting the magnetic pulse compression circuit is determined by the reset of the saturable reactor. A high voltage pulse generation circuit characterized in that the circuit is configured to be set by a pulse voltage or pulse current applied via a saturable reactor newly provided in the circuit. (2) In the high voltage pulse generation circuit according to claim 1, a period during which a gate voltage is applied to the saturable reactor constituting the magnetic pulse compression circuit, and a period during which the reset circuit generates a pulse voltage or a pulse current. 1. A high voltage pulse generation circuit characterized in that the circuit is configured to have a stop period between the two periods. (3) In the high voltage pulse generation circuit according to claim 1, the saturable reactor newly provided in the reset circuit of the saturable reactor constituting the magnetic pulse compression circuit has a function for resetting the saturable reactor. A high voltage pulse generation circuit characterized in that a reset circuit is provided. (4) In a high voltage pulse generation circuit having a magnetic pulse compression circuit using a saturable reactor, the saturable reactor constituting the magnetic pulse compression circuit includes a reset circuit as well as an operation when the saturable reactor is gated. A high voltage pulse generation circuit characterized by being provided with a preset circuit for preventing jitter in magnetic flux density. (5) In the high voltage pulse generation circuit according to claim 4, the preset circuit of the saturable reactor constituting the magnetic pulse compression circuit outputs a pulse voltage, a pulse current, or a high voltage pulse. generation circuit. (6) In the high voltage pulse generation circuit according to claim 5, the saturable reactor constituting the magnetic pulse compression circuit includes a pulse voltage applied via a saturable reactor newly provided to the preset circuit; Alternatively, a high voltage pulse generation circuit characterized in that it is preset by a pulse current. (7) In the high voltage pulse generation circuit according to claim 6, the saturable reactor newly provided in the preset circuit of the saturable reactor constituting the magnetic pulse compression circuit has a function for resetting the saturable reactor. A high voltage pulse generation circuit characterized in that a reset circuit is provided. (8) The high voltage pulse generation circuit according to claim 4, wherein the operating magnetic flux density amount at the time of gate of the saturable reactor constituting the magnetic pulse compression circuit is set by reset after completion of presetting. High voltage pulse generation circuit. (9) The high voltage pulse generation circuit according to claim 8, wherein the maximum magnetic flux density at the time of presetting of the saturable reactor constituting the magnetic pulse compression circuit is equal to or higher than the residual magnetic flux density. generation circuit. (10) In the high voltage pulse generation circuit according to claim 9, the maximum magnetic flux density at the time of presetting of the saturable reactor constituting the magnetic pulse compression circuit has a relative permeability of 10.
A high voltage pulse generation circuit characterized by being in the following areas. (11) In the high voltage pulse generation circuit according to claim 4, the amount of operating magnetic flux density at the time of gate of the saturable reactor constituting the magnetic pulse compression circuit is equal to the amount of operating magnetic flux density at the time of gate of the saturable reactor. A high voltage pulse generation circuit characterized by being set by a preset after completion of reset to prevent jitter. (12) The high voltage pulse generation circuit according to claim 11, wherein the minimum magnetic flux density at the time of resetting the saturable reactor constituting the magnetic pulse compression circuit is equal to or less than a negative residual magnetic flux density. Voltage pulse generation circuit. (13) In the high voltage pulse generation circuit according to any one of claims 1 to 12, the saturable reactor magnetic core constituting the magnetic pulse compression circuit has a saturation magnetostriction λs of +5×10^-^6 to -
A high voltage pulse generation circuit characterized in that it is constructed using a magnetic material in the range of 5×10^-^8. (14) In the high-voltage pulse generation circuit according to any one of claims 1 to 12, the squareness ratio in the DC magnetic characteristics of the saturable reactor magnetic core constituting the magnetic pulse compression circuit is 0.7.
A high voltage pulse generation circuit characterized by the above. (15) In the high voltage pulse generation circuit according to any one of claims 1 to 12, the saturable reactor magnetic core constituting the magnetic pulse compression circuit is made of an amorphous magnetic alloy containing Co as a main component. Features a high voltage pulse generation circuit. (16) In the high voltage pulse generation circuit according to any one of claims 1 to 12, the saturable reactor magnetic core constituting the magnetic pulse compression circuit has a composition formula (Fe_1_-_aM_a)_1_0_0_-_x_-
＿y＿−＿z＿−＿α＿−＿β＿−γCu_xSi_y
B_zM′_αM″_βX_γ (atomic %) (However, M is at least Co or Ni,
M′ is at least one element selected from the group consisting of Nb, W, Ta, Zr, Hf, Ti, and Mo; M″ is V;
At least one element selected from the group consisting of Cr, Mn, Al, platinum metal element, Sc, Y, rare earth element, Au, Zn, Sn, Re, X is C, Co, P, Ga, Sb, I
At least one element selected from the group consisting of n, Be, and As, and a, x, y, z, α, β, and γ are 0≦a≦0.5, 0.1≦x≦, respectively. 3,6≦y≦25,3≦
z≦15, 14≦y+z≦30, 1≦α≦10, 0≦β≦10, 0≦γ≦10 are satisfied. ) and at least 50% of the composition
1. A high voltage pulse generation circuit comprising a magnetic alloy made of fine bccFe solid solution crystal grains and having an average grain size of 500 Å or less as measured by the maximum dimension of each crystal grain. (17) In the high voltage pulse generation circuit according to any one of claims 1 to 16, the amount of operating magnetic flux density at the time of gate of the saturable reactor constituting the magnetic pulse compression circuit is linked to the DC input voltage of the high voltage pulse generation circuit. A high-voltage pulse generation circuit characterized in that it is configured to be able to change. (18) In the high-voltage pulse generation circuit according to any one of claims 1 to 17, the operating magnetic flux density at the time of the gate of the saturable reactor constituting the magnetic pulse compression circuit is linked to load fluctuations of the high-voltage pulse generation circuit. 1. A high-voltage pulse generation circuit characterized in that the circuit is configured to be able to change the voltage. (19) The high voltage pulse generation circuit according to any one of claims 1 to 18, characterized in that the high voltage pulse generation circuit has a plurality of stages of the magnetic pulse compression circuit. (20) A high-voltage pulse generation circuit according to any one of claims 1 to 19, wherein a plurality of high-voltage pulse generation circuits are combined and operated in synchronization. (21) A discharge-excited laser using the high-voltage pulse generation circuit according to any one of claims 1 to 20. (22) A discharge excitation laser according to claim 21, wherein the discharge excitation laser is an excimer laser. (23) A discharge-excited laser according to claim 21, wherein the discharge-excited laser is a copper vapor laser. (24) An accelerator using the high voltage pulse generation circuit according to any one of claims 1 to 20. (25) The accelerator according to claim 24, wherein the accelerator is a linear induction accelerator.