JPH0331741A - Bearing rigidity measuring instrument for static pressure bearing - Google Patents

Bearing rigidity measuring instrument for static pressure bearing

Info

Publication number
JPH0331741A
JPH0331741A JP16542189A JP16542189A JPH0331741A JP H0331741 A JPH0331741 A JP H0331741A JP 16542189 A JP16542189 A JP 16542189A JP 16542189 A JP16542189 A JP 16542189A JP H0331741 A JPH0331741 A JP H0331741A
Authority
JP
Japan
Prior art keywords
load
bearing
shaft
static pressure
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16542189A
Other languages
Japanese (ja)
Inventor
Takaomi Miyazaki
宮崎 隆臣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP16542189A priority Critical patent/JPH0331741A/en
Publication of JPH0331741A publication Critical patent/JPH0331741A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To omit labor such as the replacement of a weight to safely and continuously measure the bearing rigidity of a static pressure bearing against a load by providing a fixing member for fixing and supporting a static pressure bearing with a means for adding a continuously variable load to a shaft supported by the static pressure bearing and detecting the load. CONSTITUTION:The static pressure bearing 1 provided with porous materials 1a, 1b for projecting pressurized gas supplied from the external supports the shaft 1c with static pressure and is fixed and supported by a fixing block 2. At the time of measuring the rigidity of the bearing 1, a switching valve 20 is set up to the returning side and load to be applied to the shaft 1c is turned to zero by air cylinders 3, 13 to determine the origin of load displacement. Then the switch valve 20 is turned to the going side, the air cylinders 3, 13 are driven by compressed air fed from a switching pipe 24 and load to be applied to the shaft 1c is detected by load cells 4, 14. Thus, the load to be applied to the shaft 1c can be continuously variably measured.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は、静圧軸受の軸受剛性を測定する装置に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a device for measuring bearing stiffness of a hydrostatic bearing.

〔従来の技術] 静圧軸受は、過負荷を受けた場合でも焼き付くことなく
スムーズに回転するために所定の軸受剛性が必要とされ
る。そのため組立後には軸受剛性を測定し、品質の良否
を判断する方法がとられている。
[Prior Art] Hydrostatic bearings require a certain level of bearing rigidity in order to rotate smoothly without seizing even when overloaded. Therefore, after assembly, bearing rigidity is measured to determine whether the quality is good or bad.

従来の軸受剛性の測定方法は、第5図(a)および(b
)に示すようにラジアルおよびアキシャルの軸受剛性の
測定方向と重力方向が一致するように、ラジアルおよび
アキシャルの静圧軸受1aおよび1bを、測定方向に合
わせたブロック2aおよび2bにそれぞれ設置し、重り
3aおよび3bを徐々に増やし、その時々の軸変位量を
変位計4によって検出し、そして、′s4図に示すよう
な負荷と変位間の関係線図から、軸に加わる荷重に対す
る軸変位の比を求め剛性値を得ている。
The conventional method for measuring bearing stiffness is shown in Figs. 5(a) and (b).
), the radial and axial hydrostatic bearings 1a and 1b are installed in blocks 2a and 2b aligned with the measurement direction, respectively, so that the measurement direction of the radial and axial bearing stiffness coincides with the direction of gravity. 3a and 3b are gradually increased, the amount of shaft displacement at each time is detected by the displacement meter 4, and the ratio of the shaft displacement to the load applied to the shaft is determined from the relation diagram between load and displacement as shown in figure 's4. The stiffness value is obtained.

[発明が解決しようとする課題] しかしながら、このような従来例では、荷重方法に重り
を使用しているため次のような問題点がある。
[Problems to be Solved by the Invention] However, in such conventional examples, since weights are used in the loading method, there are the following problems.

(1)第2図に示すように、決まった荷重でしか測定で
きず、荷重・変位間の連続的な関係が得られない。
(1) As shown in Figure 2, measurements can only be made with a fixed load, and a continuous relationship between load and displacement cannot be obtained.

(2)重りを頻繁に交換する必要があり、手間がかかる
ため、量産に通さない。
(2) Since it is necessary to frequently replace the weight, which is time-consuming, it cannot be put into mass production.

(3)静圧軸受のサイズ別に剛性が異なるため、サイズ
別に重りを多数用意する必要がある。
(3) Since the rigidity differs depending on the size of the hydrostatic bearing, it is necessary to prepare a large number of weights for each size.

(4)重りの重量が50kgfを超える場合、手作業で
は効率が悪く、危険が伴なう。
(4) If the weight exceeds 50 kgf, manual work is inefficient and dangerous.

(5)!1つを乗せる位置によつて偏荷重となり、荷重
・変位間の関係にばらつきがある。
(5)! Depending on where one is placed, the load will be uneven, and the relationship between load and displacement will vary.

(6)軸変位量の検出において、静圧軸受ハウジングの
圧縮変形量などが含まれるため、みかけ上の剛性が低め
に検出される。
(6) In detecting the amount of shaft displacement, the amount of compressive deformation of the hydrostatic bearing housing is included, so the apparent rigidity is detected to be low.

本発明の目的は、このような従来技術の問題点に鑑み、
静圧軸受の軸受剛性測定装置において、おもり交換等の
手間が省けかつ安全に連続的な負荷に対する剛性の測定
を行なうことができるようにし、また、ハウジングの変
形等による誤差や偏荷重によるばらつきのない精確な測
定を′行なうことができるようにすることにある。
In view of the problems of the prior art, an object of the present invention is to
In a bearing stiffness measurement device for hydrostatic bearings, it is possible to safely measure the stiffness against continuous loads without having to change weights, etc., and it also eliminates errors due to deformation of the housing and variations due to uneven loads. The purpose is to make it possible to perform accurate measurements.

[課題を解決するための手段] 上記目的を達成するため本発明の静圧軸受の軸受剛性測
定装置は、静圧軸受を固定支持する固定部材と、この固
定部材に取り付けられ、静圧軸受が支持する軸に対して
連続的に可変な荷重を付加するとともにその荷重を検出
する手段と、前記固定部材に取り付けられ、荷重による
軸の変位量を検出する手段とを具備する。
[Means for Solving the Problems] In order to achieve the above object, a bearing stiffness measuring device for a hydrostatic bearing according to the present invention includes a fixing member that fixedly supports a hydrostatic bearing, and a fixing member that is attached to the fixing member, and a device for measuring the bearing stiffness of a hydrostatic bearing. The apparatus includes means for continuously applying a variable load to the supported shaft and detecting the load, and means attached to the fixed member for detecting the amount of displacement of the shaft due to the load.

[作用] この構成において、軸受剛性の測定に際しては軸に対し
て荷重が付加されるが、この荷重は連続的に変化可能で
あるとともにその荷重値およびそれによる軸変位量も連
続的に検出される。したがって、従来のように種々の重
りを交換する必要がなく、簡車かつ安全に連続的な荷重
変化に対する測定が行なわれる。また、荷重を付加して
検出する手段および軸変位量を検出する手段がともに固
定部材に取り付けられているため、得られる測定値には
ハウジングの変形等による誤差は含まれない。
[Function] In this configuration, a load is applied to the shaft when measuring bearing rigidity, but this load can be changed continuously, and the load value and the amount of shaft displacement due to it are also continuously detected. Ru. Therefore, there is no need to replace various weights as in the prior art, and continuous load changes can be measured easily and safely. Furthermore, since the means for applying and detecting the load and the means for detecting the amount of shaft displacement are both attached to the fixed member, the obtained measured values do not include errors due to deformation of the housing or the like.

[実施例] 以下に、本発明の実施例を第1および2図に基づいて説
明する。
[Example] Below, an example of the present invention will be described based on FIGS. 1 and 2.

第1図および第2図は本発明の実施例に係る軸受剛性測
定装置の断面図および外観図である。これらの図におい
て、1は静圧軸受であり、外部より供給された加圧気体
を噴き出す円筒状の多孔質材1aおよび円環状の多孔質
材1bを備え、これらによって軸ICを静圧支持する。
1 and 2 are a sectional view and an external view of a bearing stiffness measuring device according to an embodiment of the present invention. In these figures, reference numeral 1 denotes a static pressure bearing, which includes a cylindrical porous material 1a that blows out pressurized gas supplied from the outside, and an annular porous material 1b, which supports the shaft IC under static pressure. .

2は静圧軸受1を両側より位置決め支持する固定ブロッ
クであり、それぞれ3ケ所をボルトで固定されている。
Fixed blocks 2 position and support the hydrostatic bearing 1 from both sides, each of which is fixed at three locations with bolts.

3はアキシャル軸方向の荷重用のエアシリンダ、4はこ
の荷重を検出するためにエアシリンダ3のロッド先端に
同心接合されている小型ロードセル、5はロードセル4
を介して軸ICに荷重を伝達するためのピストン、6は
ピストン5をなめらかかつ精度よく摺動させるためのす
べり軸受、7はエアシリンダ3およびすべり軸受6を同
心支持するため固定ブロック2に位置決め固定されてい
るハウジング、8はアキシャル軸の変位を検出するため
の直進式変位計、13はラジアル荷重用エアシリンダ、
14は小型ロードセル、15はピストン、16はすべり
軸受、17はエアシリンダ13およびすべり軸受16を
同心支持するため固定ブロック2に位置決め固定されて
いるハウジング、18は荷重部(ピストン15)と対方
向の位置で固定されている、ラジアル変位検出用の直進
式変位計、lOは変位用デジタルアンプ、11は変位計
8.18とアンプ10を接続するコード、12はロード
セルによって検出された歪電流を荷重換算して表示する
ためのデジタル歪アンプ、9はロードセル4,14とア
ンプ12を接続するコード、19は変位計8を位置決め
支持するため荷重側と対方向の固定ブロック2に位置決
め固定されたハウジングである。ハウジング19はハウ
ジング7と位置決め支持方法が共通化されており、荷重
部と変位検出部は左右で変換可能である。
3 is an air cylinder for loading in the axial direction; 4 is a small load cell concentrically connected to the rod end of the air cylinder 3 to detect this load; 5 is a load cell 4
6 is a sliding bearing for smoothly and accurately sliding the piston 5, and 7 is positioned on the fixed block 2 to concentrically support the air cylinder 3 and the sliding bearing 6. A fixed housing, 8 a linear displacement meter for detecting displacement of the axial axis, 13 a radial load air cylinder,
14 is a small load cell, 15 is a piston, 16 is a sliding bearing, 17 is a housing that is positioned and fixed to the fixed block 2 to support the air cylinder 13 and the sliding bearing 16 concentrically, and 18 is a housing opposite to the load part (piston 15). A linear displacement meter for detecting radial displacement is fixed at the position, 10 is a digital amplifier for displacement, 11 is a cord connecting the displacement meter 8.18 and the amplifier 10, and 12 is a strain current detected by the load cell. A digital strain amplifier for converting and displaying the load; 9 is a cord connecting the load cells 4, 14 and the amplifier 12; 19 is positioned and fixed to the fixed block 2 opposite to the load side in order to position and support the displacement meter 8. It is a housing. The housing 19 has the same positioning and supporting method as the housing 7, and the load section and the displacement detection section can be changed between the left and right sides.

20はエアシリンダ3.13の往復動の切換弁、21は
エアシリンダ3.13に供給される圧力を示す圧力ゲー
ジ、22はエアシリンダ3.13に供給される圧力を精
密制御するための精密減圧弁である。23.24は空気
配管であり、これらによって切替弁20の出口25.2
6のそれぞれがエアシリンダ3.13の復動側と往動側
に接続されている。
20 is a reciprocating switching valve for the air cylinder 3.13, 21 is a pressure gauge that indicates the pressure supplied to the air cylinder 3.13, and 22 is a precision gauge for precisely controlling the pressure supplied to the air cylinder 3.13. It is a pressure reducing valve. 23.24 are air pipes, which connect the outlet 25.2 of the switching valve 20.
6 are connected to the backward and forward sides of the air cylinder 3.13, respectively.

次に、この装置の動作を説明する。Next, the operation of this device will be explained.

まず、切換弁20を復動側に合わせ、適当な圧力をエア
シリンダ3または13に供給し、軸ICにかかる荷重を
ゼロにし、そして荷重変位の原点法めをする。次に、減
圧弁22を戻して供給圧をゼロにし、切換弁20を往動
側に切換える。そして、減圧弁22を回して徐々に圧力
を上昇させる。これにより配管24から供給される圧縮
空気はエアシリンダ3または13のピストンロッドを押
し上げ、このピストンロッドの先端に取付けられたロー
ドセル4または14はピストン5または15を後方より
押し上げる。ピストン5または15はすべり軸受6また
は16によって案内され、軸1cに荷重を伝える。軸1
cに加わる荷重は、ロードセル4または14によって検
出され、この荷重による軸ICの微小変位量は、それぞ
れの測定軸に取り付けられた変位計8または18によっ
て検出される。ただし、アキシャルおよびラジアルの測
定順は同時に行なってもよいし、別々に行なってもよい
。検出される荷重値および変位量はそれぞれのアンプ1
2および10に表示され、読み取られる。
First, the switching valve 20 is set to the backward movement side, appropriate pressure is supplied to the air cylinder 3 or 13, the load applied to the shaft IC is made zero, and the origin of the load displacement is determined. Next, the pressure reducing valve 22 is returned to zero, and the switching valve 20 is switched to the forward side. Then, the pressure is gradually increased by turning the pressure reducing valve 22. As a result, the compressed air supplied from the pipe 24 pushes up the piston rod of the air cylinder 3 or 13, and the load cell 4 or 14 attached to the tip of this piston rod pushes up the piston 5 or 15 from the rear. The piston 5 or 15 is guided by a plain bearing 6 or 16 and transmits the load to the shaft 1c. axis 1
The load applied to c is detected by the load cell 4 or 14, and the amount of minute displacement of the axis IC due to this load is detected by the displacement meter 8 or 18 attached to each measurement axis. However, the axial and radial measurements may be performed simultaneously or separately. The detected load value and displacement amount are determined by each amplifier 1.
2 and 10 and are read.

また、荷重と変位の関係はX−Yレコーダ30を使用し
て連続的に記録することも可能であり、減圧弁22によ
り圧力も分割制御し、その時々の荷重・変位間の関係を
プロットしてもよい。
In addition, the relationship between load and displacement can be continuously recorded using the X-Y recorder 30, and the pressure can also be dividedly controlled using the pressure reducing valve 22 to plot the relationship between load and displacement at any given time. You can.

このような本実施例の装置においては、次のような利点
がある。
The apparatus of this embodiment has the following advantages.

■ 重量おもりを頻繁に交換する手間が不要になり、安
全性も向上する。
■ Eliminates the need to frequently replace weights and improves safety.

■ 荷重位置、変位検出位置の位置再現性がよいため、
段取変えによる測定の再現性が向上する。
■ Good position repeatability of load position and displacement detection position,
Improves reproducibility of measurements due to setup changes.

■荷重のかけ方が連続、分割のどちらでも可能であり、
また荷重範囲が広いため汎用性が大きい。
■Load can be applied either continuously or dividedly,
Also, the load range is wide, so it has great versatility.

■静圧軸受のサイズが異なっても対応できる。■Can accommodate different sizes of hydrostatic bearings.

■第3図に示すように、軸変位量に対し、従来例では含
まれていた軸受ハウジングの圧縮変形量がキャンセルさ
れ、軸受部の剛性が正確に検出できる。
(2) As shown in FIG. 3, the amount of compressive deformation of the bearing housing, which was included in the conventional example, is canceled out with respect to the amount of shaft displacement, and the rigidity of the bearing portion can be accurately detected.

[発明の効果] 以上説明したように本発明によれば、軸に付加する荷重
を連続的に可変な荷重としたため、おもり交換等の手間
が省けかつ安全に連続的な負荷に対する剛性の測定を行
なうことができる。また、荷重の負荷および検出手段、
ならびに軸変位量検出手段をともに固定部材に取り付け
るようにしたため、ハウジングの変形等による誤差や偏
荷重によるばらつきのない精確な測定を行なうことがで
きる。
[Effects of the Invention] As explained above, according to the present invention, the load applied to the shaft is made to be a continuously variable load, which eliminates the hassle of replacing weights, etc., and allows for safe measurement of rigidity against continuous loads. can be done. Also, load loading and detection means,
In addition, since both the shaft displacement detection means are attached to the fixed member, accurate measurement can be performed without errors due to deformation of the housing or variations due to unbalanced loads.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の一実施例に係る軸受剛性測定装置の
断面図、 第2図は、第1図の装置の外観図、 第3図は、第1図の装置における荷重と軸変位量間の関
係を示すグラフ、 第4図は、従来における荷重と軸の変位間の関係を示す
グラフ、そして 第5図(a)および(b)は、従来例に係る軸受剛性測
定装置を示す外観図である。 1:静圧軸受、IC:軸、2;固定ブロック、3.13
:エアシリンダ、4,14:ロードセル、5,15:ピ
ストン、8.18:直進式変位計。
FIG. 1 is a sectional view of a bearing stiffness measuring device according to an embodiment of the present invention, FIG. 2 is an external view of the device shown in FIG. 1, and FIG. 3 is a diagram showing load and shaft displacement in the device shown in FIG. 1. FIG. 4 is a graph showing the relationship between the conventional load and shaft displacement, and FIGS. 5 (a) and (b) show a bearing stiffness measuring device according to the conventional example. It is an external view. 1: Hydrostatic bearing, IC: Shaft, 2; Fixed block, 3.13
: Air cylinder, 4, 14: Load cell, 5, 15: Piston, 8.18: Straight displacement meter.

Claims (1)

【特許請求の範囲】[Claims] (1)静圧軸受を固定支持する固定部材と、この固定部
材に取り付けられ、静圧軸受が支持する軸に対して連続
的に可変な荷重を付加するとともにその荷重を検出する
手段と、前記固定部材に取り付けられ、荷重による軸の
変位量を検出する手段とを具備することを特徴とする静
圧軸受の軸受剛性測定装置。
(1) a fixing member that fixedly supports the hydrostatic bearing; a means attached to the fixing member for continuously applying a variable load to the shaft supported by the hydrostatic bearing and detecting the load; 1. A bearing rigidity measuring device for a hydrostatic bearing, characterized in that the device is attached to a fixed member and includes means for detecting the amount of displacement of a shaft due to a load.
JP16542189A 1989-06-29 1989-06-29 Bearing rigidity measuring instrument for static pressure bearing Pending JPH0331741A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16542189A JPH0331741A (en) 1989-06-29 1989-06-29 Bearing rigidity measuring instrument for static pressure bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16542189A JPH0331741A (en) 1989-06-29 1989-06-29 Bearing rigidity measuring instrument for static pressure bearing

Publications (1)

Publication Number Publication Date
JPH0331741A true JPH0331741A (en) 1991-02-12

Family

ID=15812106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16542189A Pending JPH0331741A (en) 1989-06-29 1989-06-29 Bearing rigidity measuring instrument for static pressure bearing

Country Status (1)

Country Link
JP (1) JPH0331741A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5900306A (en) * 1995-05-02 1999-05-04 Kimberly-Clark Worldwide, Inc. Nonwoven-film laminates
US7621519B2 (en) 2005-09-13 2009-11-24 Ricoh Company, Limited Sheet conveying apparatus, image reading apparatus, and image forming apparatus
CN105823456A (en) * 2016-05-03 2016-08-03 华中科技大学 Support shaft bending gap and rigidity automatic measuring device and measuring method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5900306A (en) * 1995-05-02 1999-05-04 Kimberly-Clark Worldwide, Inc. Nonwoven-film laminates
US6190758B1 (en) 1995-05-02 2001-02-20 Kimberly-Clark Worldwide, Inc. Nonwoven-film laminates
US7621519B2 (en) 2005-09-13 2009-11-24 Ricoh Company, Limited Sheet conveying apparatus, image reading apparatus, and image forming apparatus
CN105823456A (en) * 2016-05-03 2016-08-03 华中科技大学 Support shaft bending gap and rigidity automatic measuring device and measuring method thereof

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