JPH0331430Y2 - - Google Patents
Info
- Publication number
- JPH0331430Y2 JPH0331430Y2 JP1985196049U JP19604985U JPH0331430Y2 JP H0331430 Y2 JPH0331430 Y2 JP H0331430Y2 JP 1985196049 U JP1985196049 U JP 1985196049U JP 19604985 U JP19604985 U JP 19604985U JP H0331430 Y2 JPH0331430 Y2 JP H0331430Y2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- liquid
- container
- cleaning liquid
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 100
- 238000004140 cleaning Methods 0.000 claims description 96
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 10
- 238000007599 discharging Methods 0.000 claims description 3
- 238000011084 recovery Methods 0.000 description 16
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000007667 floating Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985196049U JPH0331430Y2 (enrdf_load_stackoverflow) | 1985-12-20 | 1985-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985196049U JPH0331430Y2 (enrdf_load_stackoverflow) | 1985-12-20 | 1985-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62103487U JPS62103487U (enrdf_load_stackoverflow) | 1987-07-01 |
| JPH0331430Y2 true JPH0331430Y2 (enrdf_load_stackoverflow) | 1991-07-03 |
Family
ID=31154504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985196049U Expired JPH0331430Y2 (enrdf_load_stackoverflow) | 1985-12-20 | 1985-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0331430Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-12-20 JP JP1985196049U patent/JPH0331430Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62103487U (enrdf_load_stackoverflow) | 1987-07-01 |
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