JPH0331295U - - Google Patents
Info
- Publication number
- JPH0331295U JPH0331295U JP8957989U JP8957989U JPH0331295U JP H0331295 U JPH0331295 U JP H0331295U JP 8957989 U JP8957989 U JP 8957989U JP 8957989 U JP8957989 U JP 8957989U JP H0331295 U JPH0331295 U JP H0331295U
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- fired
- carbon
- thickness
- nitride layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 4
- 238000010304 firing Methods 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8957989U JPH0331295U (fi) | 1989-07-28 | 1989-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8957989U JPH0331295U (fi) | 1989-07-28 | 1989-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0331295U true JPH0331295U (fi) | 1991-03-27 |
Family
ID=31639153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8957989U Pending JPH0331295U (fi) | 1989-07-28 | 1989-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0331295U (fi) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6159638B2 (fi) * | 1981-07-24 | 1986-12-17 | Scolastico Carlo | |
| JPS63290393A (ja) * | 1987-05-22 | 1988-11-28 | イビデン株式会社 | 焼成容器 |
-
1989
- 1989-07-28 JP JP8957989U patent/JPH0331295U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6159638B2 (fi) * | 1981-07-24 | 1986-12-17 | Scolastico Carlo | |
| JPS63290393A (ja) * | 1987-05-22 | 1988-11-28 | イビデン株式会社 | 焼成容器 |