JPH0331139U - - Google Patents

Info

Publication number
JPH0331139U
JPH0331139U JP9101389U JP9101389U JPH0331139U JP H0331139 U JPH0331139 U JP H0331139U JP 9101389 U JP9101389 U JP 9101389U JP 9101389 U JP9101389 U JP 9101389U JP H0331139 U JPH0331139 U JP H0331139U
Authority
JP
Japan
Prior art keywords
substrate
transportation
extrusion
detecting
rotating member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9101389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0730602Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989091013U priority Critical patent/JPH0730602Y2/ja
Publication of JPH0331139U publication Critical patent/JPH0331139U/ja
Application granted granted Critical
Publication of JPH0730602Y2 publication Critical patent/JPH0730602Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Controlling Sheets Or Webs (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1989091013U 1989-08-03 1989-08-03 基板供給装置 Expired - Fee Related JPH0730602Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989091013U JPH0730602Y2 (ja) 1989-08-03 1989-08-03 基板供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989091013U JPH0730602Y2 (ja) 1989-08-03 1989-08-03 基板供給装置

Publications (2)

Publication Number Publication Date
JPH0331139U true JPH0331139U (US07922777-20110412-C00004.png) 1991-03-26
JPH0730602Y2 JPH0730602Y2 (ja) 1995-07-12

Family

ID=31640517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989091013U Expired - Fee Related JPH0730602Y2 (ja) 1989-08-03 1989-08-03 基板供給装置

Country Status (1)

Country Link
JP (1) JPH0730602Y2 (US07922777-20110412-C00004.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095503U (ja) * 1983-12-07 1985-06-29 パイオニア株式会社 部品供給装置
JPS63144946U (US07922777-20110412-C00004.png) * 1987-03-16 1988-09-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095503U (ja) * 1983-12-07 1985-06-29 パイオニア株式会社 部品供給装置
JPS63144946U (US07922777-20110412-C00004.png) * 1987-03-16 1988-09-26

Also Published As

Publication number Publication date
JPH0730602Y2 (ja) 1995-07-12

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees