JPH0330260U - - Google Patents
Info
- Publication number
- JPH0330260U JPH0330260U JP9075689U JP9075689U JPH0330260U JP H0330260 U JPH0330260 U JP H0330260U JP 9075689 U JP9075689 U JP 9075689U JP 9075689 U JP9075689 U JP 9075689U JP H0330260 U JPH0330260 U JP H0330260U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- attached
- film forming
- electrode structure
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9075689U JPH0330260U (lm) | 1989-07-31 | 1989-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9075689U JPH0330260U (lm) | 1989-07-31 | 1989-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0330260U true JPH0330260U (lm) | 1991-03-25 |
Family
ID=31640268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9075689U Pending JPH0330260U (lm) | 1989-07-31 | 1989-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330260U (lm) |
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1989
- 1989-07-31 JP JP9075689U patent/JPH0330260U/ja active Pending