JPH0329756B2 - - Google Patents

Info

Publication number
JPH0329756B2
JPH0329756B2 JP56034483A JP3448381A JPH0329756B2 JP H0329756 B2 JPH0329756 B2 JP H0329756B2 JP 56034483 A JP56034483 A JP 56034483A JP 3448381 A JP3448381 A JP 3448381A JP H0329756 B2 JPH0329756 B2 JP H0329756B2
Authority
JP
Japan
Prior art keywords
gas
carbon
growth
die
growth zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56034483A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57111299A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS57111299A publication Critical patent/JPS57111299A/ja
Publication of JPH0329756B2 publication Critical patent/JPH0329756B2/ja
Granted legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP3448381A 1980-03-10 1981-03-10 Method of growing silicon crystal body Granted JPS57111299A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12907580A 1980-03-10 1980-03-10

Publications (2)

Publication Number Publication Date
JPS57111299A JPS57111299A (en) 1982-07-10
JPH0329756B2 true JPH0329756B2 (pm) 1991-04-25

Family

ID=22438347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3448381A Granted JPS57111299A (en) 1980-03-10 1981-03-10 Method of growing silicon crystal body

Country Status (2)

Country Link
JP (1) JPS57111299A (pm)
IN (1) IN154501B (pm)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MX2009013010A (es) * 2007-06-14 2010-01-20 Evergreen Solar Inc Recalentador del horno de estirado de cristal con al menos una abertura.

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4158038A (en) * 1977-01-24 1979-06-12 Mobil Tyco Solar Energy Corporation Method and apparatus for reducing residual stresses in crystals
JPS5815477B2 (ja) * 1977-08-31 1983-03-25 大阪チタニウム製造株式会社 半導体シリコンの引上法

Also Published As

Publication number Publication date
JPS57111299A (en) 1982-07-10
IN154501B (pm) 1984-11-03

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