JPH03294155A - Transfer operation procedure forming device - Google Patents

Abstract

PURPOSE:To obtain a transfer operation procedure forming device suitable to control an equipment by use of a model by mainly composing the device of a moving body, and forming a transfer operation procedure in reference to the data of each element model in a system. CONSTITUTION:When a state renewing message to each device from a transfer schedule data 30 by start instruction, the procedure 42b of a device model 42 sends the state renewing message to each wafer. A wafer model 44 judges where the following device is acceptable or not, and when judged to be acceptable, a transfer message is formed and transmitted to a transfer machine model 45. The transfer machine model 45 forms a transfer command and transmits the transfer command to an operation command forming controller, and after a completion message is received through an operation command forming controller from the transfer machine, the rewrite of state data is conducted to the data 45a of the transfer machine model 45, and the operation completion is noticed to the wafer model 44 to perform state rewriting processing.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a transfer operation procedure generation device, and in particular, to a transfer operation procedure generation device, and in particular, to The present invention relates to a transfer operation procedure generation device that generates a transfer operation procedure for transferring parts in a parts processing system including a control device for controlling the parts.

[Conventional technology]

In the development of control software for a parts movement system that includes a transfer machine that moves parts, the concept of creating movement/body control software is conventional.

The main body of control is the controller that controls the entire system,
Most moving objects followed this pattern.

This is a control software based on the concept of controlling a large number of moving objects with a single controller.9 If there are a relatively small number of moving objects, there is no particular problem with the method based on the concept described above. When the number of mobile devices increases or when a variety of moving objects appear, the processing capacity of the controller becomes insufficient. Therefore, in order to cope with this, it is necessary to replace the controller with a more capable controller, or to rebuild the entire system so that equipment (such as a sub-controller) that assists the main controller can be added.

[Problem to be solved by the invention]

By the way, in the above-mentioned parts moving system, in order to improve the movement performance of the movable bodies within the system, it is necessary to update the movable bodies and simultaneously improve the performance of the controller to correspond to the new movable bodies. In other words, the characteristics and status of individual moving objects are managed separately into data representing each moving object and controller procedures, and even if a feature related to one concept is changed or added, the program will have to be modified in multiple locations. , there is a problem that it is not easy to do.

The present invention has been made to solve the above problems.

An object of the present invention is to provide a transfer operation procedure generation device suitable for use when controlling equipment using a model.

Another object of the present invention is that by generating a transfer procedure based on a one-part model, it is possible to easily cope with changes in the system equipment configuration and changes in the method for generating two-part transfer procedures, thereby facilitating the maintenance and management of control software. An object of the present invention is to provide a method for generating a transfer operation procedure.

[Means for Solving the Problems] In order to achieve the above object, a transfer operation procedure generating device according to the present invention includes a part to be processed, a parts processing device, a transfer machine for transferring the parts, and a control unit for controlling the transfer machine. A transfer operation procedure in which the control device controls a transfer machine and generates a transfer operation procedure to be given to a control device that controls the transfer machine to move five parts to a target parts processing apparatus. A first communication module that is a generation device and sends and receives instruction data for moving nine parts, a second communication module that sends and receives control data to and from a control device that controls the transfer machine, and represents the status of each component of the system. Each element model is generated, and data is exchanged between each element model.

The present invention is characterized by comprising a procedure generating means for changing the state data of each element model and sequentially generating control data according to the movement state of the component model using the changed state data.

In addition, in the transfer operation procedure generation method, corresponding to each component of the system, an element model is generated that is modeled as a composite of data indicating the state of the element, a procedure indicating the function of the element, and one communication process. Then, each part model of the element model to be transferred communicates with other element models, sequentially obtains state data at the next time from state data at a certain time, and calculates data based on state change data. The present invention is characterized in that control data to which each part model itself is transferred is sequentially generated.

[Effect]

According to this, the transfer operation procedure generation device includes a first communication module, a second communication module, and a procedure generation means for generating control data of the transfer operation procedure. 1st
When Neil, the communication module, receives instruction data for moving parts and activates the procedure generation means, the procedure generation means generates each element model that expresses the state of each component of the system, and each ! data is exchanged between the element models, the state data of each element model is changed, and control data is generated according to the movement state of the part model using the changed state data. Then, while transmitting and receiving control data to and from the control device that controls the transfer machine via the second communication module, the next control data is sequentially obtained.
Generate a transfer operation procedure.

In this way, corresponding to each component of the system, each element model is generated and transported as a composite model of data indicating the state of the element, a procedure indicating the function of the element, and one communication process. For example, each part model of the element model communicates with other element models, such as a device model and a storage model.

Sequentially obtain state data at the next time from state data at a certain time, based on state change data.

Control data by which each part model itself is transferred is sequentially generated in accordance with the moving state of the part model.

As a result, transport operation procedures are generated based on the mobile object by referring to the data of each element model in the system, so it is possible to add system components.

It is possible to create a method of generating control data for a control device that can easily respond to situations where changes have occurred. That is, without making any changes to other parts of the system.
Elements are added by adding an element model that includes data, procedure 2 communication processes, and expresses a function. In other words, the controllers are distributed along with each moving object, and each controller operates while communicating with the software. It can be added without any special changes.

The main points for generating such a transfer operation procedure can be summarized as follows. Namely.

(1) Generate an element model for the components necessary to control the transfer operation.

(2) Each element model is data indicating the state of the element.

Procedure 2 showing the functions consists of each part of the communication process.

(3) The component model of the element model plays the main role.

A transfer operation procedure is generated by following the state of movement of the part model itself.

(4) Therefore, the logical structure and algorithm of the control data can be made into an easy-to-understand program by directly expressing the real thing as a model.

(5) Changes in the system configuration environment, one part of the transfer machine, etc. can be easily handled.

〔Example〕

Hereinafter, one embodiment of the present invention will be specifically described using the drawings.

FIG. 1 is a block diagram showing the overall configuration of a parts processing system according to an embodiment of the present invention.

In FIG. 1, 1 is a schedule generation computer, 2 is a device control computer, 3 is LSI manufacturing device A, and 4 is LSI manufacturing device A.
SI manufacturing equipment B, 5 and LSI manufacturing equipment C56 are transfer machines 6. 7 is a transfer procedure generation controller, and 8 is an operation instruction generation controller. The parts processing system here is an LSI manufacturing system. Schedule generation computer 1 controls and manages the entire system, and equipment control computer 2 controls LSI manufacturing equipment A, LSI manufacturing equipment! ! B, and the LSI manufacturing device tc are individually controlled. LSI manufacturing equipment A, LSI manufacturing equipment B, and LSI manufacturing equipment C perform respective processes on semiconductor wafers, which are processed parts. B.

A transfer machine 6 is provided between the LSI manufacturing equipment and the LSI manufacturing equipment, and the transport machine 6 transfers semiconductor wafers as components between the LSI manufacturing equipment. This is performed under the control of the operation command generation controller 8. The operation command generation controller 8 is given the transfer procedure generated by the transfer procedure generation controller 7 and executes the transfer machine 6 according to the transfer procedure.
control and transport each part.

In this parts processing system, the LS by the transfer machine 6 is
Although a subsystem for I-wafer transport will be described as an example, such a transport subsystem is not limited to transporting LSI wafers, but can be similarly applied to transporting other parts.

FIG. 2 is a block diagram showing the configuration of the transfer procedure generation controller. In FIG. 2, 1 is a schedule generation computer, 2 is an equipment control computer, 6 is a transfer machine, and 7 is a schedule generation computer.
Reference numeral 8 indicates a transfer procedure generation controller, and 8 indicates an operation instruction generation controller, which are the same as those shown in FIG. The transfer procedure generation controller 7, as shown in FIG. 2, has a user interface 732 to operation instruction generation controller communication module 72. Ground computer communication module 71. It is composed of a plurality of modules such as a system model 40, and each module is composed of a plurality of submodules. In the transfer procedure generation controller 7, each of these modules operates in sequence to generate a transfer operation procedure for the operation command generation controller 8, which is a control device for the transfer machine 6.

The flow of generating the transfer operation procedure will be explained step by step with reference to FIG. 2.

(1); Creation of wafer model based on transfer schedule When the transfer schedule data created by the schedule creation computer l is sent to the transfer procedure generation controller 7, the transfer procedure generation controller 7 sends the ground-based computer communication module 71 to Upon receiving this transfer schedule data, it is extracted and converted for the system model 4o and provided to the wafer model creation sub-module 11. The wafer model creation sub-module 11 creates a wafer model 44 based on this. Here, as other element models in the system, storage model 41. LSI manufacturing equipment model 4
2, etc. are generated in advance in the module of the system model 4o. Note that at this time, models of other elements may be similarly generated by a model creation sub-module (not shown).

, the specific contents of the wafer model 44 will be described later, but include the wafer name, transfer route, current position, and scheduled departure time.

It consists of status data such as loft name and cassette name, procedures for creating transfer procedures, and communication processes.
The same number of pieces will be made as the actual number. The wafer model 44 is
Depending on each state, for example, the cassette model 43
The cassette model 43 is further stored in the model 41 of the storage depending on the state. These contents correspond to the actual appearance of system components such as actual semiconductor wafers, wafer cassettes, and storage (FIG. 4).

It reflects the system components as they are.

(2); Starting the transfer sequence In the storage model 41, the one-hour management sub-module (procedure: hereinafter also referred to as procedure) 12 checks at fixed time intervals whether or not the wafer whose scheduled departure time has arrived is in the storage. is being monitored. Through this monitoring, when the time management submodule 12 detects the wafer model 44 at the scheduled departure time from the state data of the wafer model 44, it sends a message to the wafer model 44 requesting transfer.

The wafer model 44 that has received the message, in the procedure (transfer destination determination submodule) 13, uses the data of its current position and the state of the transfer route to find the LSI manufacturing equipment model 42 of the next transfer destination. The LSI I sought
The data of the manufacturing equipment model 42 is output.

(3); Inquiry about the equipment status In the wafer model 42, next, the state adjustment procedure 14 is processed, and the next transfer destination determined in the previous transfer destination determination procedure 13 (LSI manufacturing equipment model 42) is processed. ) sends an interim message inquiring about whether or not it is in an acceptable state. A message inquiring about the device status is sent from the wafer model 43 to the device model 42, and a device status message is returned as a reply.

(4); Transfer message transmission The wafer model 42 receives the device status message returned from the device model 42, and then performs the transfer message creation procedure 15. If it is determined, a transfer message is created by the process of the transfer message creation procedure 15, and this transfer message is sent to the response instruction generation controller communication module 72. In addition, the action instruction generation controller communication module 72 sends transport messages to the action instruction generation controller 8. As a result, the operation command generation controller 8 converts the wafer-based transfer command into an operation command sequence for the transfer machine 6 and sends it to move the transfer machine 6.
Through such an operation, the transfer machine 6 actually transfers the semiconductor wafer to be transferred from the cassette in the storage to the next LSI manufacturing apparatus.

(5); Rewriting the data in the model By the operation of the transfer machine 6, the parts to be transferred (semiconductor wafer)
When the transfer to the target device is completed, a completion message is sent from the transfer device 6 to the operation command generation controller 8, and the operation command generation controller 8 further sends a message to the operation command generation controller communication module as a message of an R8232C line interface signal, for example. 72. The operation instruction generation controller communication module 72 receives this message, converts it into state data of each element model of the system model 40, sends it to the transfer source element model, and converts it into state data of each element model. 1. Here, for example, the information is sent to the storage model 41, and the storage model 41 processes the 1-position change procedure 16 to change the position of the corresponding wafer model 44.
By processing the position change procedure 16, the data rewriting procedure 17 is performed on the LSI manufacturing equipment model 42, and then the data rewriting procedure 18 is performed on the wafer model 44, and the process ends.

That is, position change procedure 16. Data rewriting procedure 1
7, the wafer model 44 in this transfer method is set as the state data that is transferred from the storage model 41 to the LSI manufacturing equipment model 42, and a message is also sent to the Eva model 44, and the wafer model The data rewriting procedure 18 of 44 is executed, and the data of the current position state of the wafer model 44 is rewritten.

(6); Ejection from the device In this way, the semiconductor wafer is transferred to a predetermined LSI manufacturing device by the transfer device 6, and when the processing in the LSI manufacturing device is completed, a completion message is sent from the device control computer 2. It is sent to the transfer procedure generation controller 7. This completion message is displayed on the schedule creation calculator 1.
In the same manner as the message for transfer from
1 receives the message, and the peer-to-computer communication module 71 sends it to the LSI manufacturing equipment model 42 as a processing completion message. In the LSI manufacturing equipment model 42, the wafer model 44 to be transported next is selected from among the wafer models located within itself through the processing of the wafer selection procedure 19. Send a message. In the wafer model 44, a transfer message is received by the transfer destination determination procedure 13, and the transfer destination is determined. The subsequent processing is similar to the case where a message for transfer is sent to the wafer model 44 at regular intervals from the time management procedure 12 of the storage model 41.

Note that the transfer procedure generation controller 7 has a user interface 73 for receiving instructions from the user 20 and checking the status. Via the user interface 73, the user 20 can change parameters of the system model, such as the wafer transfer time interval, etc.
You can check the status (status data) of each part of 0.

In this way, the model of the moving object (in this case the wafer model)
Each moving object is independent in this parts processing system because it is the main body that generates the transfer command.
Therefore, changes related to a moving object only need to be changed to its model.For example, if the moving object has the highest priority and can be transported without being affected by other conditions, the state adjustment that queries the device status can be done. Procedure 14 can be omitted. Also.

This change only requires changing the mobile model, and there is no need to change other models or message systems.

Furthermore, even when a new moving object is added to the system, by adding that model to the system, it can be moved without changing other parts.

FIG. 3 is a diagram specifically explaining the structure of element models in the system and the relationship of communication processing between the element models. In this figure 3, as an element model in the system,
Installation/contribution model (LSI manufacturing equipment model) 42. Wafer model 44. A transporter model 45 is shown as an example.

Moreover, 4th ap and 4b are a top view and a front view of the storage apparatus which explains the example of the storage which accommodates and stores a semiconductor wafer in a cassette.

As shown in FIGS. 4a and 4b, a semiconductor wafer 6
2 is stored in a cassette 61, and the cassette 61 containing semiconductor wafers 62 is stored in the storage main body 60. A predetermined semiconductor wafer is taken out by a wafer take-out mechanism provided in the storage main body, and transferred to an LSI manufacturing apparatus by a transfer machine, where work steps of each manufacturing process are performed.

In response to such actual work processes and processing processes,
Each element in the part processing system is modeled to generate an element model, and the state data of each element model is changed to control the one part processing system.

FIG. 3 1 - Equipment model 42 of the element model in the system shown. Wafer model 44. Using the transporter model 45 as an example, an example of processing for communicating between each element model and changing state data will be described next.

Such processing corresponds to the processing explained in Part 2. As shown in FIG. It consists of a procedure (42b, 44b, 45b) that changes the state data of the element and expresses the function of each element, and a communication process (42c, 44c, 45c) that communicates between each element. .

11, according to the start-up instruction at 30 p.m. on transfer schedule day.
When a status update message is sent to each device in step 31, a procedure 42b of the device model 42 starts upon receipt of the message, and in step 32, a status update message is sent to each wafer.

In the wafer model 44, when a status update message is received from the equipment model 42, one procedure 44 of the λ wave model 44 is executed.
B starts by receiving a message, and in step 33 the next device inquires whether it can accept the message 2. Then, in the next step 35, it determines whether it can accept the message. If the acceptance is not possible, the waiting process of step 35a is performed, and the process from step 33 is repeated.

On the other hand, when the device model 42 receives an inquiry as to whether or not the wafer model 44 from step 33 can be accepted,
In step 34, the state data is read and the device state is returned to the wafer model 44 that has received the device state adjustment.

As a result, if it is determined in the determination step of step 35 in the wafer model 44 that the wafer can be accepted, the process proceeds to the next step 36. In step 36, a transport message is created and sent to the transport model. This transfer message contains the wafer name 50. of the status data held by the wafer model 44. Transfer route 51. Current position 52. Scheduled departure time 53° Lot name 54. It consists of a cassette name 55, etc., and specifies the wafer model to be transferred.

In the transport machine model 45, when the transport message is received, the procedure 45 receives the message and starts, and in step 37, creates a transport command to control the transport machine, and sends τ to the motion command generation controller. As soon as you send the transport command.

Next, after receiving a completion message from the transfer machine via the operation command generation controller, in step 38, in the processing of the 2-motion completion notification, the state is determined for the data 45a of the transfer machine model 45. The data is rewritten, and furthermore, the wafer model 44 is notified of the completion of the operation.

As a result, the wafer model 44 performs the state rewriting process in step 69, and the wafer name 50. of the state data that the wafer model 44 has. Transfer route 51. Cursed position 52. Scheduled departure time 53° Lot name 54. In this way, the data 4 in the wafer model-44 is rewritten to update the force sensor/nod name 55, etc.
4. Upper part E halo 5o, transfer route 51. Current position: $152
, Departure from PO Y fixed time 53. Ronto name 54. Cassette name 55
etc., the status is updated sequentially.

This update of the status data corresponds to the actual movement of the semiconductor wafer by the transfer machine 6 (2).

Although the present invention has been specifically explained based on the above two examples, 1
It goes without saying that the present invention is not limited to the embodiments described above, and can be modified in various ways without departing from the spirit thereof.

〔Effect of the invention〕

As described above, according to the present invention, each component in the system is modeled, each element model is generated, and the state data of each element model is updated and the transfer machine is controlled. Generate steps. Thereby, by looking at the state data of the element model, the state (state data) of each part in the system can be confirmed.

Furthermore, since the model of the moving object (wafer model) itself generates the transfer command, each moving object becomes independent in the system, and changes to the moving object only need to be made to the model. This change only requires changing the model of the mobile object, and there is no need to change other models or message systems. Therefore, even if a new mobile object is added to the system, adding that model to the system It can be moved without changing parts of

[Brief explanation of drawings]

FIG. 1 is a block diagram showing the overall configuration of a component front system according to an embodiment of the present invention. FIG. 2 is a block diagram showing the configuration of a transfer procedure generation controller, and FIG. 3 is a diagram specifically explaining the structure of element models in the system and the communication processing relationship between each element model. FIGS. 4a and 4b are a plan view and a front view of a storage illustrating an example of a storage for storing semiconductor wafers in cassettes. In the figure, 1... Schedule generation computer, 2... Equipment control computer, 3... LSI manufacturing equipment A, 4
... LSI manufacturing equipment B, 5... LSI manufacturing equipment C,
6... Transfer machine, 7... Transfer procedure generation controller,
8... Operation command generation controller, 11-19...
Submodule (procedure), 20... User, 40.
...System model, 41 storage original model, 42...L
SI manufacturing equipment model, 43...Cassette model, 44
...Wafer model, 45...Transfer machine model, 60.
... storage main body, 61 ... cassette, 62 ... semiconductor wafer, 71 ... ground computer communication module 71,
72...Operation instruction generation controller communication module, 73...User interface.

Claims (5)

[Claims] (1) In a parts processing system that includes a part to be processed, a parts processing device, a transfer machine that transfers the parts, and a control device that controls the transfer device, the control device controls the transfer device and transfers the parts. A transfer operation procedure generation device that generates a transfer operation procedure to be given to a control device that controls a transfer machine that moves the parts to a target parts processing device, the transfer operation procedure generating device comprising: a first communication module that transmits and receives instruction data for moving the parts; A second controller that transmits and receives control data to and from a control device that controls the
The communication module generates each element model that expresses the state of each component of the system, exchanges data between each element model, changes the state data of each element model, and uses the changed state data to A transfer operation procedure generation device comprising: procedure generation means for sequentially generating control data in accordance with the moving state of a part model. (2) The transfer operation procedure generation device according to claim 1, wherein the component to be processed is a semiconductor wafer, and the component processing device is a semiconductor integrated circuit manufacturing device. (3) The first communication module sends and receives instruction data for moving parts from the schedule creation computer that schedules parts processing and the parts processing device, and the second communication module generates operation instructions for the control device that controls the transfer machine. The transfer operation procedure generation device according to claim 1, wherein the transfer operation procedure generation device transmits and receives control data to and from a controller. (4) Each element model that expresses the state of each component of the system is an element model that is modeled as a composite of data showing the state of the element, procedures showing the function of the element, and communication processes. The transfer operation procedure generation device according to claim 1. (5) In a parts processing system that includes a part to be processed, a parts processing device, a transfer machine that transfers the parts, and a control device that controls the transfer machine, the control device controls the transfer machine and transfers the parts. A transfer operation procedure generation method for generating a transfer operation procedure to be given to a control device that controls a transfer machine that moves to a target parts processing device, the method comprising: generating data indicating the state of the element corresponding to each component of the system; , each element model is modeled as a composite of procedures indicating the function of the element and communication processes, and each part model of the element model to be transferred communicates with other element models, and at a certain time Transfer operation procedure generation characterized by sequentially obtaining state data at the next time from state data, and sequentially generating control data for transferring each part model itself based on state change data. Method.