JPH0329236U - - Google Patents
Info
- Publication number
- JPH0329236U JPH0329236U JP9051989U JP9051989U JPH0329236U JP H0329236 U JPH0329236 U JP H0329236U JP 9051989 U JP9051989 U JP 9051989U JP 9051989 U JP9051989 U JP 9051989U JP H0329236 U JPH0329236 U JP H0329236U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- movement
- fine movement
- thin fine
- lifting stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9051989U JPH0329236U (en, 2012) | 1989-07-31 | 1989-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9051989U JPH0329236U (en, 2012) | 1989-07-31 | 1989-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0329236U true JPH0329236U (en, 2012) | 1991-03-22 |
Family
ID=31640035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9051989U Pending JPH0329236U (en, 2012) | 1989-07-31 | 1989-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0329236U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011138938A1 (ja) * | 2010-05-07 | 2011-11-10 | Ｎｓｋテクノロジー株式会社 | 支持装置及び露光装置 |
-
1989
- 1989-07-31 JP JP9051989U patent/JPH0329236U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011138938A1 (ja) * | 2010-05-07 | 2011-11-10 | Ｎｓｋテクノロジー株式会社 | 支持装置及び露光装置 |
| JP5702373B2 (ja) * | 2010-05-07 | 2015-04-15 | Ｎｓｋテクノロジー株式会社 | 支持装置及び露光装置 |