JPH0328735U - - Google Patents

Info

Publication number
JPH0328735U
JPH0328735U JP8967689U JP8967689U JPH0328735U JP H0328735 U JPH0328735 U JP H0328735U JP 8967689 U JP8967689 U JP 8967689U JP 8967689 U JP8967689 U JP 8967689U JP H0328735 U JPH0328735 U JP H0328735U
Authority
JP
Japan
Prior art keywords
wafer
heat treatment
treatment jig
width
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8967689U
Other languages
English (en)
Japanese (ja)
Other versions
JP2503301Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8967689U priority Critical patent/JP2503301Y2/ja
Publication of JPH0328735U publication Critical patent/JPH0328735U/ja
Application granted granted Critical
Publication of JP2503301Y2 publication Critical patent/JP2503301Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP8967689U 1989-07-28 1989-07-28 ウェ―ハ立替装置 Expired - Lifetime JP2503301Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8967689U JP2503301Y2 (ja) 1989-07-28 1989-07-28 ウェ―ハ立替装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8967689U JP2503301Y2 (ja) 1989-07-28 1989-07-28 ウェ―ハ立替装置

Publications (2)

Publication Number Publication Date
JPH0328735U true JPH0328735U (US20020051482A1-20020502-M00012.png) 1991-03-22
JP2503301Y2 JP2503301Y2 (ja) 1996-06-26

Family

ID=31639247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8967689U Expired - Lifetime JP2503301Y2 (ja) 1989-07-28 1989-07-28 ウェ―ハ立替装置

Country Status (1)

Country Link
JP (1) JP2503301Y2 (US20020051482A1-20020502-M00012.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014509082A (ja) * 2011-03-11 2014-04-10 バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド 位置合わせ装置、ワークピースローディング装置および位置合わせ方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014509082A (ja) * 2011-03-11 2014-04-10 バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド 位置合わせ装置、ワークピースローディング装置および位置合わせ方法

Also Published As

Publication number Publication date
JP2503301Y2 (ja) 1996-06-26

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