JPH03286317A - Method and device for driving control - Google Patents

Abstract

PURPOSE:To reset a mobile object to its original target position without stopping the movement processing even in an oscillation state of the mobile object, and to carry on the operations of other processing systems by providing an auxiliary function generating means. CONSTITUTION:The auxiliary function generating means F1 - Fn generate the auxiliary target position signals SP1 - SPn and the auxiliary target velocity signals SV1 - SVn based on an action release signal SR, a reference clock phi, an error detection signal SE, and a position detection signal SPR which are supplied from a control function generating means 11. The means 11 inactivates the outputs of both signals SP and SV and also outputs the signal SR to a 1st auxiliary function generating means F1 with input of the signal SE. The means F1 outputs the signals SP1 and SV1. Then the drive of a mobile object 18 is controlled so that both velocity and position deviations of the object 18 are set to '0'. Thus the object 18 can be reset to its original control target position and velocity.

Description

[Detailed description of the invention] [Table of contents] Overview Industrial field of application Prior art (Figures 9 and 10) Problem to be solved by the invention (Figure 11) Means for solving problems (Figure 11) Fig. 1) Working Examples (Figs. 2 to 8) Effects of the Invention [Summary] Assembling the XY stage and precision parts of a drive control device, especially an electron beam exposure device that draws fine patterns of semiconductor integrated circuits. Regarding a device that controls the movement of an arm of an articulated robot, even if the xY stage or a moving body such as an arm of an articulated robot falls into an oscillation state, the oscillation is stopped without stopping the movement process. The purpose of this device is to detect the state of the moving object, return it to the previous target position, and continue the operation of other processing systems. control function generating means for generating a position signal; position detecting means for detecting the position of the moving body and outputting a position detection signal; and inputting the target position signal and the position detection signal and outputting a position deviation signal. a position deviation detection means; a position/speed conversion means for inputting the position deviation signal and outputting a first speed deviation signal; and inputting the target position signal and the position detection signal and outputting a second speed deviation signal. and a signal processing means that receives the first speed deviation signal and the second speed deviation signal and outputs a drive control signal, and the signal processing means inputs the first speed deviation signal and the second speed deviation signal and outputs a drive control signal. In a drive control device that controls input and output of a drive means, one or more auxiliary function generation means are provided to assist the control function generation means in generating a function, and each of the auxiliary function generation means is configured to control input and output of the reference clock and the position. The apparatus includes generating an auxiliary target position signal and an auxiliary target position signal based on an error detection signal and a position detection signal from the deviation detection means, and in the apparatus, the control function generation means and each of the auxiliary function generation means The configuration includes outputting an operation cancellation signal based on an error detection signal from the position deviation detection means.

[Industrial application field]

The present invention relates to a drive control device and a drive control method, and more specifically, the present invention relates to a χY stage of an electron beam exposure device that draws fine patterns of semiconductor integrated circuits, an arm of an articulated robot that assembles precision parts, etc. The present invention relates to a device and method for controlling movement.

For example, in recent years, as semiconductor integrated circuit devices have become ultra-fine and highly functional, in order to speed up the drawing process and improve throughput, it is possible to increase the moving speed of the XY stage on which the object to be exposed is placed without stopping. BACKGROUND OF THE INVENTION An electron beam exposure apparatus is used that continuously controls and irradiates an object to be exposed with an electron beam to draw a fine pattern.

According to this, if the deviation in the position and speed of the stage becomes abnormally large during the exposure process, the drive control amount may exceed a limit value and the stage may enter an oscillating state. This may cause the exposure processing system to stop operating due to loss of control.

In this case, since the exposure processing program is set to the initial value, subsequent exposure processing cannot be continued.As a result, semiconductor wafers in the middle of exposure processing become unusable, resulting in a decrease in production yield. There is the problem of inviting.

Therefore, even if the moving object falls into an oscillating state, the oscillating state is detected without stopping the movement process, the object is returned to the previous target position, and other processing systems continue operating. What is desired is a device and method that can do this.

[Conventional technology] 9 to 11 are explanatory diagrams related to the conventional example.

FIG. 9 shows a configuration diagram of an XY stage section of an electron beam exposure apparatus according to a conventional example.

In the figure, the stage section of an electron beam exposure apparatus that draws fine patterns includes an XY stage 1 on which a semiconductor wafer is placed, an X-axis motor 2 that moves the stage 1 in the X-axis direction, and a It consists of a Y-axis motor 3 that moves the motors 2 and 3, and a drive control device 4 that controls the drive of both motors 2 and 3.

The function of the stage section is to move the XY stage on which the semiconductor wafer is mounted directly under the electron beam 5 of the exposure processing system.
It moves continuously in the Y force direction.

The movement control at this time is cooperatively controlled by the control device 4 and the control means of the exposure processing system that controls the electron beam 5 .

This is intended to speed up processing and improve throughput as semiconductor integrated circuit devices become ultra-fine and highly functional.

FIG. 1O is a configuration diagram of a drive control device according to a conventional example.

In the figure, for example, the drive control device 4 that controls the Y-pongee motor 3 includes a function generator 4A, a deviation counter 4B, a speed deviation detection circuit 4C, a position/speed N conversion circuit 4D, and a D
/ Between A converter 4E and amplifier! 4F, a laser receiver 4G, and an up/down counter 4H.

The functions of the apparatus are as follows: First, a target position signal SP and a target position signal S2 of the XY stage are generated by the function generating circuit 4A based on the control command signal SOI and II clock φ from the host computer of the exposure processing system. both signals s
p and sv are output to a deviation counter and a speed deviation detection circuit 4C.

Additionally, the position of the XY stage l is detected by the laser receiver 4G, and the position information is sent to the uptown counter 4.
H is output as a position detection signal SPR to the deviation counter 4B and the speed deviation detection circuit 4C. Deviation counter 4B
In the speed deviation detection circuit 4C, a deviation detection process is performed between the previous signals SP, SV and the position detection signal SPR. Further, the position/speed conversion circuit 41) outputs a speed deviation signal SFI, and the speed deviation detection circuit 4C outputs a speed deviation signal SF2, and both signals SFI and SF2 are outputted to Y via the D/A converter 4E amplification circuit 14F. The signal is output to the shaft motor 3, thereby allowing precise drive control of the XY stage 1.

Problem to be solved by invention C] By the way, according to the conventional example, FIGS. 11(a) and (b)
As shown in the diagram explaining the problem, if the speed and position deviations α1β of stage 1 become abnormally large during exposure processing, the drive control amount will exceed the limit value and stage 1 will enter an oscillation state. There is.

For example, in the speed control characteristic shown in figure (a), the number of questions '
4EFB4A target speed (velocity deviation α between target stage speed vk and actual stage speed vr related to g's SV)
occurs, and this exceeds the limit value of the drive control lid.

Furthermore, in the position control characteristic diagram shown in FIG. This is a case where the value is exceeded.

This is because stage 1 is assembled with many #Il dense parts, and the load torque seen from the drive means suddenly fluctuates greatly due to friction between the parts, changes in the viscosity of the lubricating oil, or the lubrication state. Speed and position deviation α,
It is thought that this occurs when β becomes large, especially when strict control is performed using a high feedback gain.

Therefore, the operation of the exposure processing system may stop due to the drive control device 4 becoming uncontrollable. In this case, an error signal from the control device 4 returns the exposure processing program of the host computer to its initial value.

This makes it impossible to continue subsequent exposure processing. As a result, there is an rjIM that semiconductor wafers in the middle of exposure processing become unusable, resulting in a decrease in production yield.

Furthermore, in an articulated robot that assembles precision parts, when its drive control all exceeds a limit value, the robot may continue to vibrate while holding the parts in a restrained state.

Therefore, if it exceeds the limit value, the movement of that arm is stopped and an error signal is output to the component holding mechanism system. As a result, the restrained state in which the component is held may continue, or the holding operation may be forcibly released, causing the component to fall.

This poses a problem in that the reset process takes a lot of time and interferes with the assembly process of precision parts.

The present invention was created in view of the problems of the prior art, and it is possible to stop the movement process even if a moving body such as an XY stage or an arm of an articulated robot falls into an oscillation state. The object of the present invention is to provide a drive control device and a drive control method that can sense the oscillation state, return it to the previous target position, and continue the operation of other processing systems.

[Means for Solving the Problems] FIG. 1 shows a principle diagram of a drive control device according to the present invention.

The apparatus includes a control function generating means 11 that generates a target position signal SP and a target position signal SV of a moving body 18 based on an external control signal SO and a reference clock φ;
a position detection means 12 that detects the position of B and outputs a position detection signal spR; a position deviation detection means 13 that inputs the target position signal SP and the position detection signal SPR and outputs a position deviation signal SPE; a position/speed conversion means 14 which inputs the position deviation signal SPE and outputs the first speed deviation signal SFI; and the target position signal S■ and the position detection signal SPI? a speed deviation detection means 15 which inputs the signal and outputs the second speed deviation signal SF2; and a signal which inputs the first speed deviation signal SFI and the second speed deviation signal SF2 and outputs the drive control signal SC. processing means 16, and controls the input/output of the driving means 17 of the movable body 18 based on the drive control signal SC, one or more assisting function generation of the control function generating means 11. auxiliary function generating means F1 to Fn are provided, and each of the auxiliary function generating means F1 to Fn detects the auxiliary target based on the reference clock φ, the error detection signal SE from the position deviation detection means 13, and the position detection signal SPR. Position signal SPI~S
In the control device, the control function generating means 11 and each of the auxiliary function generating means F1 to Fn generate the error detection signal from the position deviation detecting means 13. It is characterized by outputting an operation cancellation signal SR based on the SE, and the control method is a control method for a device in which the control device and another processing system 19 are combined, wherein Control target position WPK and control target speed V
The movement of the moving body 18 is controlled based on K, and when the moving body 18 deviates from the control target, an output process indicating the occurrence of an abnormality is sent to another processing system 19, and each of the auxiliary function generating means Fl- Auxiliary target position signal Pk1-P from Fn
The above object is achieved by continuing the movement control of the moving body 18 based on kn and the auxiliary target position signal Vkl-Vkn.

[For production]

According to the device of the present invention, the operation release signal SR from the control function generating means 11 and the reference standard crank error detection signal SE
and the auxiliary target position signal S based on the position detection signal SPR.
One or more auxiliary function generating means F1-Fn are provided for generating PI-SPn and auxiliary target position signals Sv1-SVn.

For example, when the speed deviation α1 position deviation β of the moving body 18 such as an XY stage or an arm of an articulated robot exceeds the limit value of the drive control amount, first, the position detection means 12 detects, for example, as shown in FIG. The position detection signal SPR related to the actual stage position Pe in the position control characteristic diagram of
is output to the first auxiliary function generating means Fl. However, the control target position of the moving body 18 is Pk, the control target speed is Vk,
The actual stage speed of the moving body 18 that caused the error is Ve,
If the actual stage position is Pe, the speed deviation α is ve-
Vk and positional deviation β are Pe−Pk.

Next, the control function generating means 1 is transmitted from the position deviation detecting means 13.
The error detection signal SE is output to the function generating means 1.
The outputs of the target position signal SP and the target position signal S■ from 1 are inactivated. Around this time, an operation cancellation signal SR is outputted from the function generating means 11 to the first auxiliary function generating means F1. As a result, the auxiliary target position signal SPI from the first auxiliary function generating means F1 is output to the position deviation detecting means 13, and similarly the auxiliary target position signal SνI is output to the speed deviation detecting means 15, respectively.

In the position deviation detection means 13, a position deviation signal SPE is detected based on the auxiliary target position signal SPI and the position detection signal SPR, and the position deviation signal SPE is converted to the first
is converted into a speed deviation signal SFI.

In addition, the speed deviation detection means 15 uses an auxiliary target position signal S
A second speed deviation signal SF2 is detected based on VI and the position detection signal SPR, and is input to the signal processing means 16 together with the first speed deviation signal SFI.

Therefore, the speed deviation α1 position deviation β of the moving body 18 is set to “0”.
'', it becomes possible to return the movable body 18 to the previous control target position Pk and control target speed Vk.

This makes it possible to continue operating other processing systems without stopping them.

Further, according to the method of the present invention, when the moving body 1B deviates from the control target, an abnormality occurrence is output to the other processing system 19, and the auxiliary target position Pkl- Pkn and auxiliary target speed Vk1-Vkn
The movement control of the moving body 18 is continued based on the above.

Therefore, when another processing system recognizes that the speed deviation α1 position deviation β of the moving body 18 such as the XY stage or the arm of an articulated robot exceeds the limit value of the drive control amount, for example,
By recognizing an abnormality occurring area in the exposed area during the exposure process, selective exposure process can be performed in which only that area is subjected to the drawing process. In addition, each time the speed deviation α1 position deviation β of the moving body 18 exceeds the limit value of the driving control weight, the auxiliary target position Pkl=Pkn and the auxiliary target speed Vk1-Vkn are sequentially generated from the 4-stage auxiliary function generation Fl-Fn. Since the receiver is inherited, it becomes possible to facilitate maintenance management processing such as investigating the cause of failure of the moving body 18.

As a result, only the chip portion of the semiconductor wafer in which the abnormality has occurred is exposed, so that unlike the conventional example, the wafer is not dropped one by one, and it is possible to improve the production yield.

Furthermore, in an articulated robot that assembles precision parts, even if its drive control amount exceeds a limit value, its arm does not stop moving and continues to move while holding the part. , it is possible to move to the target position.

This eliminates the need for parts to fall, eliminates the need for recent processing, and allows the assembly work of circular and f-shaped parts to be continued.

[Example] Next, an example of the present invention will be described with reference to the drawings.

2 to 8 are diagrams illustrating a drive control device and a drive control method according to an embodiment of the present invention, and FIG. 2 shows f! of an XY stage to which the control device is applied. It shows a precept map.

In FIG. G, for example, the stage portion of an electron beam exposure apparatus that draws a fine pattern includes a Y stage 31a on which a semiconductor wafer is placed and an X stage that moves the Y stage 31a in the X direction in a vacuum chamber 36. 31b
, a Y-axis laser interferometer 35a and a Y-axis mirror 31c for detecting the position of the Y stage 31a, and an X-axis laser interferometer 35b and an X-axis mirror 31d for detecting the position of the X stage 31b. 36, a Y-axis DC motor 32 that moves the Y-stage 31a in the Y-axis direction, an X-axis DC motor 33 that moves it in the X-axis direction, and a drive control device that controls the drive of both motors 32 and 33. Consisting of 30.

The function of the stage section is to continuously move the xy stages 31a and 31b on which the semiconductor wafer is placed in the forward direction in the XY direction directly below the electron beam 29b of the exposure processing system 29. Movement control at this time is cooperatively controlled by the control device 30 and the control means of the exposure processing system 29 that controls the electron beam 29a.

FIG. 3 is a configuration diagram of an xY stage drive control device according to an embodiment of the present invention.

In the figure, for example, a drive control device that controls the Y-axis DC motor 32! 30 is a function generator 211 position detection circuit 2
21 Position deviation detection circuit 231 Position/speed calculation circuit 24.
Speed deviation detection circuit 25. It consists of a signal processing port 826 and first and second auxiliary function generators 27,28.

Reference numeral 21 denotes a function generator which is an embodiment of the control function generating means 11, and generates the target position of the xY stage based on the control command data (external control signal S○) DSO from the host CPU of the exposure processing system 27 and the sampling clock. It generates a signal SP and a target position signal Sv. Note that the function generator 21
An example of the control characteristics of the XY stage where this occurs will be explained with reference to FIG.

22 is a laser receiver 22A and an up/down counter 22B which are an embodiment of the position detection means 12, and the receiver 22A is a laser interferometer 25.
a. Receive the position information of the Y stage detected by the Y-axis mirror 21c, and send it to 21! This is used to convert the signal into a signal, etc. The amplifier/down counter 22B counts the number of times the Y stage or the like moves forward (up) and nine times (down), and outputs a position detection signal SPR.

23 is a positional deviation detection circuit which is an embodiment of the positional deviation detection means 13, and is operated by an adder 23A and a deviation counter 23B. The X adder 23A adds the target position signal SP and the position detection signal SPR and outputs the position deviation β. The deviation counter 23B multiplies the positional deviation β by g1 and outputs a positional deviation signal SPE.

24 is the position W/ which is an example of the speed conversion means 4/
This is a speed control X circuit, and consists of an integrating circuit 24A, and feedback gain multiplier circuits 24B and 24C.

The integrating circuit 24A integrates the positional deviation signal SPE and outputs a speed deviation signal W. The 0 multiplication circuit 24B amplifies and outputs the positional deviation signal SPH.

The multiplication circuit 24C amplifies the speed deviation signal W and outputs the first speed deviation signal SFI.

A speed deviation detection circuit 25 is an embodiment of the speed deviation detection means 15, and is controlled by a differentiation circuit 25A, an adder 25B, and a multiplication circuit 25C. The differentiating circuit 25A differentiates the position detection signal SPR and outputs a signal V related to the actual stage speed vr.

The adder 25B adds the target position signal SV and the signal (2) relating to the actual stage speed Vr.

The multiplication unit 825C amplifies the addition-processed signal V and outputs the second
This outputs a speed deviation signal SF2.

A signal processing circuit 26 is an embodiment of the signal processing means 16, and includes an adder 26A, a D/^ converter 26B, and an amplifier 26C. Addition*H26A performs addition processing on the first speed deviation signal SF2, second speed deviation signal SF2, etc., and outputs the driving side 1txc. The D/A converter 26B performs digital/analog conversion processing on the drive control IXC.

The amplifier 26C amplifies the D/A processed signal and outputs a drive control signal SC to the Y-axis DC motor.

Up to this point, the drive control device is similar to the conventional drive control device, but in the embodiment of the present invention, one or more auxiliary function generation means F1 to Fn that assist the function generation of the function generator 21 are used. 1. Second auxiliary function generator 27 (Fl), 28
(F2) is provided.

Each of the auxiliary function generators 27 and 28 generates an auxiliary target position signal SPI based on the error detection signal SE and the position detection signal SPR from the sampling clock and the deviation counter 23B.
It generates SF3 and auxiliary target position signal 5VISV2. The timing of this occurrence will be explained with reference to FIG.

In addition, the function generator 21 and each auxiliary function generator 27.28
is for outputting an operation cancellation signal SR to the lower level based on the error detection signal SE from the deviation counter 23B. For example, when the first error detection signal SE is input to the function generator 21, the corresponding The target position signal SP and target position signal SV from the function generator 21 are invalidated, and the operation cancellation signal SR is output to the first auxiliary function generator 28 at the lower level. For example, if the error detection signal SE and the release signal SR match as a result of two-person AND logic, the auxiliary target position signal SP1 and the auxiliary target position signal SVI from the auxiliary function generator 28 are transmitted through the first switching circuit SWI. It is considered valid.

Furthermore, when the second error detection signal SE is input to the first auxiliary function generator 27, the auxiliary target position signal SP1 and the auxiliary target position signal SVI of the function generator 27 are invalidated, and the lower An operation release signal SR is output to the second auxiliary function generator 28.

The following multiple auxiliary function generators Fl, F2...Fi...
The function generation operation of Fn is transferred from the upper generator Fi to the lower generator Fi+1.

FIGS. 4(a) to 4(c) are control characteristic diagrams of the function generator according to the embodiment of the present invention, and FIG. 4(a) shows the target acceleration characteristic per unit time of the XY stage.

In the same figure (a), the vertical axis is the target acceleration θ of the xY stage, and the horizontal axis indicates time t. For example, if the acceleration at the start of stage movement is θ-a, and the Let the speed be θ−a.

FIG. 4B shows the target speed characteristics of the XY stage per unit time.

In the same figure (b), the vertical axis is the target speed V of the XY stage.
For example, the horizontal axis indicates the time.
The arbitrary speed of the stage is ■n=(vn-1)10. However, the term of time is omitted.

FIG. 4(c) shows the target position characteristics of the XY stage per unit time.

[In IJI diagram (c) 4, the vertical axis represents the target position P of the XY stage, and the horizontal axis represents time.

For example, any position on the stage is Pn=(Pn-1)+
vn+1/2θ. However, the term t is omitted.

The function generator 21 generates the target position signal SP and the target position signal S■.

FIG. 5 shows the control 2 of the auxiliary function generator according to the embodiment of the present invention.
8u characteristic diagram, which shows the target acceleration characteristic, target velocity characteristic, and target position characteristic per unit time of the XY stage, similarly to the interval generator.

In the figure, it is assumed that with the control characteristics of t and auxiliary function generation Fi28 and 29 different from the control characteristics of the function generator 21, the speed deviation α and position deviation β of the stage become large at time te and the error detection signal SE is generated. In this case, the first auxiliary function generator 28 first generates the auxiliary target position signal 5P12 and the auxiliary target position signal SVI instead of the target position signal SP and the target position signal S■ from the function generator 2I. .

That is, when an error occurs in the xY stage, the auxiliary function generator 27 generates an auxiliary target value from the actual stage position IFPe and the actual stage speed ve by being given the actual stage position Pe and the actual stage speed ve that has entered the oscillation state. 111Pkl, and generates a time interval so as to shift to the auxiliary target speed Vkl.

As a result, movement control is performed so as to eliminate the speed deviation α0 and the position deviation β of the XY stage which has fallen into an oscillation state.

In this way, according to the apparatus of the embodiment of the present invention, the auxiliary target position signal SP1. Two auxiliary function generators 27, 28 are provided which generate SF3 and auxiliary target position signals SVI, SV2.

For example, when the speed deviation α2 position deviation β of a moving object such as an xY stage or an arm of an articulated robot exceeds the limit value of the drive control amount, the position detection circuit 22 first performs the position control shown in FIG. 5(b). A position detection signal SPR related to the actual stage position Pe in the characteristic diagram is output to the one-place difference detection circuit 23 and the first auxiliary function generator 27. However, if the control target position of the stage is Pk, the control target speed is Vk, the actual stage speed when an error occurs is ve, and the actual stage position Pe is, then the speed deviation α is ve-Vk, and the position deviation β is Pe-P.
It is k.

At this time, the error detection signal SE is output from the position deviation detection @path 23 to the function generator 21, and the outputs of the target position signal SP and the target position signal S2 from the function generator 21 are inactivated. Around this time, an operation cancellation signal SR is output from the function generator 21 to the first auxiliary function generator 27.

As a result, the auxiliary target position signal SPI from the first auxiliary function generator 27 is output to the position deviation signal generator 23, and similarly the auxiliary target position signal SVI is output to the speed deviation detection circuit 25.

The position deviation detection circuit 23 detects a position deviation signal SPE based on the auxiliary target position signal SPI and the position detection signal SPt+.
is detected and converted into a first speed deviation signal SFI via the position/speed conversion circuit 24.

Further, in the speed deviation detection circuit 25, a second speed deviation signal SF2 is detected based on the auxiliary eye 45 position signal SVI and the position detection signal SPR, and it is sent to the signal processing circuit 25 along with the first speed deviation signal SFI. is input.

Therefore, the speed deviation α1 position deviation β of the stage is set to “0”.
Since the stage is drive-controlled so as to be controlled, it is possible to return the stage to the previous control target of the control target position Pk and control target speed Vk.

This allows the exposure processing system 29 to continue operating without stopping.

Next, a drive control method according to an embodiment of the present invention will be explained.

6 to 8 are operational flowcharts for explaining the drive control method according to the embodiment of the present invention, and FIG. 6 shows the operational flowchart of the function generator.

For example, to explain a method of controlling an electron beam exposure apparatus in which the drive control device 30 and the exposure processing system 29 are combined, first, a target position signal SP and a target position signal SV are output from the function generator 21 to the XY stage. and performs movement control processing.

In the figure, the drive acceleration of the stage θ-
a is set, and the progress of the sampling clock φ is determined in step P2. If the sampling clock φ has elapsed (YES), the target speed of the stage Vk=Vk10, the target f vertical position Pk-Pk+Vk+1 is set in step P3.
/2 θ are generated respectively.

Next, in step P4, the stage target speed (2) is compared and determined with its maximum value Vmax. If the maximum value vmax is exceeded (YES), the acceleration θ=
Set to 0. If it does not exceed it (NO), return to step P2.

Furthermore, in step P6, the generation of the function is continued until the deceleration point R of the target position of the stage is reached, and when the deceleration point Rp is reached (YES), the acceleration is set to θ-a in step P7. If it does not reach that point (No),
Return to step P2.

Next, in step P8, similarly to step P3, the stage target speed Vk=Vk+θ and its target position Pk=Pk+
Vk+1/2 θ are generated respectively.

Thereafter, in step PIO, the control target position Pk and its maximum value Pm are compared and determined. If the maximum value Pm is exceeded (
If YES), the step pH is set to control target position Pk - maximum value Pm. If it does not exceed this (No), the process returns to step P9, and the elapsed time of the sampling clock φ is determined. If the sampling clock does not elapse (NO
), the process returns to step P7.

As a result, x
The Y stage can be driven and controlled.

Here, it is assumed that the XY stage deviates from the control target due to an abnormality in the lubrication system or the like. At this time, from the drive control device 30 to the host computer of the exposure processing device 29,
An error detection signal SE indicating the occurrence of an abnormality in the stage is output. Along with this, the auxiliary function generator 27 operates as follows.

FIG. 7 shows an operation flowchart of the auxiliary function generator according to the embodiment of the present invention.

In the figure, the position deviation signal 5PE (deviation counter value) is cleared in step PI, and the actual stage position (current position f of the stage) Pr = Pe and the actual stage speed (actual speed of the stage) Vr are -Read Ve.

Next, in step P3, the control target speed Vk and travel data MD from the function generator 21 are read, and in step P4, the auxiliary target speed Vkl-Vr, the auxiliary target position Pkl=Pr
Set.

Furthermore, in step P5, it is determined whether the auxiliary target speed Vkl>Vr. When the auxiliary target speed Vkl is larger than Vr (YES), the auxiliary acceleration θd from the auxiliary function generator 27 and the target acceleration θ=−a are processed in step P7. When the auxiliary target speed Vkl is smaller than Vr (NO)
In step P6, θd and θ−a are processed.

Thereafter, in step P8, the progress of the sampling clock φ is determined. If the sampling clock φ has elapsed (
If YES), the auxiliary target speed of the stage vkl-Vkl+θ and its target position IPkl-Pkl+V are determined in step P9.
kl+1/2 θ are generated respectively.

Next, in step PIO, a process is performed to determine whether the auxiliary acceleration θd>a. If acceleration θd is greater than a (YES)
In step f12, a process is performed to determine whether Vkl>Vmax. If the acceleration θd is smaller than a (No),
A process for determining Vkl<Vs+ax is performed at step pH.

Also, at step pH, the auxiliary target speed Vkl is V wax
If the target speed Vkl is larger than Vwax (NO), the process moves to step P13, and if the target speed Vkl is larger than Vwax (YE
In step S), the process returns to step P8.

Further, in step P12, the auxiliary target speed Vkl is set to V −
If it is larger than ax (YES), step P13
If the target speed Vkl is smaller than V sax (NO), the process returns to step P8.

Next, in step P13, Vkl-Vs+ax,
θ-〇 is set, and in step P14, it is determined whether the target position Pkl of the stage has reached the deceleration point RP.

Further, in step P14, the target position Pkl is changed to the deceleration point Rp.
If the IPkl reaches the deceleration point RP (YES), the process moves to step P15, and if the second IPkl does not reach the deceleration point RP (N
For o), return to step P8.

Furthermore, in step Pi5, the acceleration θ--a is set,
Next, in step P16, it is determined whether the target position Pkl of the stage has reached the target point Pm. If the target position fPkl reaches the target point Rm (YES),
The process moves to step P17, and the target position Pkl is set to the target point R.
If m has not been reached (NO), the process returns to step P8.

Further, in step P17, the stage is stopped due to Pkl=Pm and Vkl=0.

In this way, the function generator 21 transfers the function generation to the auxiliary function generator 27 due to an error in the stage, and then the movement control is completed without causing another error in the stage.

Next, after the auxiliary function generator 27 performs the connection processing,
The operation of the deviation counter when a stage error occurs again will be explained.

FIG. 8 shows an operation flowchart of the deviation counter according to the embodiment of the present invention.

In the figure, in step P1, a positional deviation β is determined in advance as a control reference for the function generator 21 and each auxiliary function generator 27, 28.
=Pk-Pr is set.

Next, a process is performed to determine whether positional deviation β>maximum positional deviation β−aX. At this time, the positional deviation β is the maximum positional deviation β11aX
(YES), proceed to step P3.3 If the position deviation β does not exceed the maximum position deviation β-ax (
If No), the process moves to step P7.

In step P3, a comparison process is performed between the positional deviation θ and the allowable positional deviation βm. At this time, the positional deviation β is the allowable positional deviation β
If the zero position deviation β does not exceed the allowable position deviation θm (YES), proceed to step P5.
In o), the process moves to step P4. In step P4, the allowable positional deviation βm is set as the actual stage positional deviation βp, and the process moves to step P7.

Also, in step P5, the positional deviation β is the allowable positional deviation βm
Count the number of times the number exceeds the limit. Each time a stage error occurs, the count value NG is incremented by 1 and the process moves to step P6.

Next, in step P6, a comparison process is performed between the error occurrence count [NG] and the set number of times N. At this time, if the count value NG is greater than the set number of times N (YES), the process moves to step P8. If the count value NG is less than the set number of times N (NO), the process moves to step P7.

In step P8, an error detection signal SE is generated and outputted to the microcomputer of the exposure processing system, so that a stage error is recognized.

The stage at this time is in a state of re-oscillation, and is a state of deviating from the control target again. When this error occurs, an operation cancellation signal SR is output from the first auxiliary function generator 27 to the second auxiliary function generator 28, and the auxiliary target position signal SPI and the auxiliary target position signal S of the auxiliary function generator 27 are output.
In place of VI, stage movement control is continuously processed using the auxiliary target position signal SP2 and the auxiliary target position signal SV2 from the second auxiliary function generator 28.

Note that in step P9, the counter value is cleared by outputting the error detection signal SE. Also, step P
7, the actual stage position deviation βP is converted into a position deviation signal SP.
Output as E.

In this way, according to the drive control method of the embodiment of the present invention, when the stage deviates from the control target, an abnormality occurrence is output to the exposure processing system 29 and the first auxiliary function generator 27 Auxiliary target position Pkl and auxiliary target speed V
The movement control of the stage is continuously processed based on the auxiliary target position Pk2 and the auxiliary target speed Vk2 from the second auxiliary function generator 2 instead of kl.

For this reason, the exposure processing system 29 determines whether the speed deviation α2 of the stage and the position deviation β are drive control. By recognizing that the limit value of the Il amount has been exceeded, for example, by recognizing an area where an abnormality has occurred in the exposed area during the exposure process, it is possible to perform a selective exposure process that passes the drawing process only for that area. . In addition, each time the speed deviation α position deviation β of the stage exceeds the limit value of the drive control amount, the auxiliary target position P from the auxiliary function generators 27 and 28 is
klPk2 and auxiliary target speed Vk1. The generation of Vk2 is successively received. This makes it possible to facilitate maintenance management processing such as investigation of the cause of failure of the stage.

As a result, only the chip portion of the semiconductor wafer in which the abnormality has occurred is exposed, so that the wafer is not left alone as in the conventional example, and it is possible to improve the production yield.

In addition, in an articulated robot that assembles M-dense parts, even if its drive control amount exceeds a limit value, its arm does not stop moving and continues to move while holding the part. , it is possible to move to the target position.

This prevents parts from falling and eliminates the need for reset processing, making it possible to continue smoothly assembling parts.

[Effects of the Invention] As described above, according to the present invention, the control function generating means is provided with an auxiliary target position signal and one or more auxiliary function generating means for generating an auxiliary target position signal.

Therefore, even if the speed deviation 1 position deviation of a moving object such as an XY stage or the arm of an articulated robot exceeds the limit value of the drive control mu, the speed deviation 5 position deviation of the moving object can be reduced to "0".
” The drive can be controlled as follows. This makes it possible to return the moving body to the previous control target position and control target speed.

Furthermore, according to the method of the present invention, when the Ij-moving body deviates from the control target, the occurrence of an abnormality is output to other processing systems, and the movement control is continued.

Therefore, it is possible to continue the processing operation without stopping the operation of other processing systems.

This makes it possible for other processing systems to perform selective exposure processing, etc., which passes the drawing processing only on that area, while recognizing the SN castle where an abnormality has occurred in the moving body. Furthermore, it becomes possible to facilitate maintenance management processing such as investigation of the cause of failure of the mobile body.

This greatly contributes to improving the processing efficiency of other processing systems and improving production yield.

[Brief explanation of drawings]

FIG. 1 is a principle diagram of a drive control device according to the present invention, FIG. 2 is a configuration diagram of an XY stage to which the drive control device according to the present invention is applied, and FIG. 3 is a diagram according to an embodiment of the present invention. FIG. 4 is a diagram showing the control characteristics of the function generator according to the embodiment of the present invention. FIG. 5 is a diagram showing the control characteristics of the auxiliary function generator according to the embodiment of the present invention. , FIG. 6 is an operation flowchart of the function generator according to the embodiment of the present invention, FIG. 7 is an operation flowchart of the auxiliary function generator according to the embodiment of the present invention, and FIG. FIG. 9 is a block diagram of the XY stage section of the electron beam exposure apparatus according to the conventional example; FIG. 10 is a block diagram of the drive control device according to the conventional example;
FIG. 1 is a control characteristic diagram illustrating problems related to the conventional example. (Explanation of symbols) 11... Control function generation means, 12... Position detection means, 13... Position deviation detection means, 14... Position/speed conversion means, 15... Speed deviation detection means, 16... Signal processing means, 17... Driving means, 19... Other processing systems, F1 to Fn... First to second auxiliary function generating means (a plurality of auxiliary function generating means), SO ...External control signal, SE...Error detection signal, SR...Operation cancellation signal, SV...Target speed 1 ship signal, SP...Target position signal, SC...Drive control signal, SPR ...Position detection signal, SPE...Position deviation signal, SFI...First speed deviation signal, SF2...Second speed deviation signal, 5P1=SPn...1st to nth auxiliary target position signal,
SVI to SVn...first to nth auxiliary target position signals, φ...reference clock, VK1 to VKn...auxiliary target speed, PKI to PKn...auxiliary target position, PK...control Target position, VK... Control target speed. (b)

Claims (3)

[Claims] (1) Control function generating means (11
), a position detection means (12) that detects the position of the moving body (18) and outputs a position detection signal (SPR), the target position signal (SP) and the position detection signal (SPR).
a position deviation detection means (13) which inputs the position deviation signal (SPE) and outputs a position deviation signal (SPE); and a position deviation detection means (13) which inputs the position deviation signal (SPE) and outputs a first speed deviation signal (SF1).
speed conversion means (14); speed deviation detection means (15) for inputting the target speed signal (SV) and position detection signal (SPR) and outputting a second speed deviation signal (SF2);
a signal processing means (16) for inputting the first speed deviation signal (SF1) and the second speed deviation signal (SF2) and outputting a drive control signal (SC); ) of the movable body (18) based on the driving means (
17) A drive control device for controlling input/output, wherein one or more auxiliary function generation means (F1 to Fn) are provided to assist function generation of the control function generation means (11), and each of the auxiliary function generation means (F1 to Fn) are auxiliary target position signals (SP1 to SPn) and A drive control device characterized in that it generates auxiliary target speed signals (SV1 to SVn). (2) The drive control device according to claim 1, wherein the control function generating means (11) and each of the auxiliary function generating means (F
1-Fn) outputs an operation cancellation signal (SR) based on an error detection signal (SE) from the position deviation detection means (13). (3) The drive control device and other processing system according to claim 1 (1)
9) is a control method for an apparatus in which the moving body (18) is controlled based on the control target position (PK) and control target velocity (VK) from the control function generating means (11).
When the moving body (18) deviates from the control target, output processing is performed to indicate the occurrence of an abnormality to another processing system (19), and each of the auxiliary function generating means (F1 to F
The moving body (
18) A drive control method characterized by continuously processing the movement control.