JPH03277877A - Sluice valve for vacuum - Google Patents
Sluice valve for vacuumInfo
- Publication number
- JPH03277877A JPH03277877A JP7826690A JP7826690A JPH03277877A JP H03277877 A JPH03277877 A JP H03277877A JP 7826690 A JP7826690 A JP 7826690A JP 7826690 A JP7826690 A JP 7826690A JP H03277877 A JPH03277877 A JP H03277877A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- plate
- opposing
- leaf spring
- opposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001154 acute effect Effects 0.000 claims abstract description 9
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 abstract description 7
- 239000000428 dust Substances 0.000 abstract description 5
- 238000007789 sealing Methods 0.000 abstract description 3
- 238000005299 abrasion Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Landscapes
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は真空排気系等を構成する流体流路の途中に介挿
して使用されあるいは半導体製造装置等の真空室内を真
空状態に維持するために使用される真空用仕切弁に係り
、特にシールを達成させる力の発生機構として板バネを
用い、その変形を利用して閉、開弁を行う真空用仕切弁
に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention is used by being inserted in the middle of a fluid flow path constituting a vacuum evacuation system, or for maintaining a vacuum state in a vacuum chamber of semiconductor manufacturing equipment, etc. The present invention relates to a vacuum gate valve used in the industry, and more particularly to a vacuum gate valve that uses a leaf spring as a force generating mechanism to achieve sealing, and uses the deformation of the leaf spring to close and open the valve.
従来この種の真空用仕切弁においては種々の機構が提案
されているが潤滑油を用いることができないため、リン
ク機構を用いたもの（特開昭５９２６６７４号公報や特
開昭５９−２６６７．５号公報に記載された弁）は、摩
耗、かじり、焼付きなどの好ましくない現象が発生し、
かつころを使用する場合には表面圧力が大きく、ころお
よびその転勤面において摩耗が著しいなどの課題がある
。また、特開昭５９−２３１７５号公報あるいは特公昭
６３−４６３１０号公報に記載されている機構において
も支持体あるいは柱体との接触部において微小ではある
が面圧の高い摺動があり、摩耗粉の発生が懸念されると
いう課題がある。Conventionally, various mechanisms have been proposed for this type of vacuum gate valve, but since lubricating oil cannot be used, some mechanisms using a link mechanism (Japanese Unexamined Patent Publications No. 5926674 and No. 592667.5) have been proposed. The valves described in the above publication suffer from undesirable phenomena such as wear, galling, and seizure.
When rollers are used, there are problems such as high surface pressure and significant wear on the rollers and their rolling surfaces. Furthermore, even in the mechanism described in Japanese Patent Application Laid-open No. 59-23175 or Japanese Patent Publication No. 63-46310, there is a slight sliding movement with high surface pressure at the contact portion with the support or column, which causes wear and tear. There is a problem in that there is concern about the generation of powder.
このような摩耗により発生する粉塵、ちり （以下塵埃
と記す）は、半導体製造などの産業分野での使用に際し
て、大きな問題となることは良く知られている。It is well known that the dust and dirt (hereinafter referred to as dust) generated by such wear poses a major problem when used in industrial fields such as semiconductor manufacturing.
本発明の目−的は、機構部からの発塵のない清浄な雰囲
気を保持できる真空仕切弁を提供しようとするものであ
る。SUMMARY OF THE INVENTION An object of the present invention is to provide a vacuum gate valve that can maintain a clean atmosphere free of dust from its mechanical parts.
本発明真空用仕切弁は上記の課題を解決し、上記の目的
を達成するため、図示のように弁箱ｌの弁座面ｌＯ及び
台座面６にそれぞれ対向し互いに平行に配置された弁板
２及び対向板３と、この弁板２と対向板３との間に設け
られた支持板４とにより弁軸に対して垂直な方向にスラ
イド可能な弁体部７を構成し、弁板２と対向板３の向か
い合うそれぞれの面に、可撓性を有する板バネ５を弁体
部７のスライド方向と鋭角θをなして固定し、弁板２及
び対向板３に対して支持板４を相対移動させて閉弁する
際、支持板４によって板バネ５を屈曲させて鋭角θを拡
大させ閉弁するように構成したものである。In order to solve the above-mentioned problems and achieve the above-mentioned objects, the vacuum gate valve of the present invention has valve plates disposed parallel to each other and facing the valve seat surface lO and the pedestal surface 6 of the valve box l, respectively, as shown in the figure. 2 and the opposing plate 3, and a support plate 4 provided between the valve plate 2 and the opposing plate 3 constitute a valve body portion 7 that is slidable in a direction perpendicular to the valve shaft. Flexible leaf springs 5 are fixed to opposing surfaces of the valve plate 2 and the opposing plate 3 at an acute angle θ with respect to the sliding direction of the valve body portion 7. When the valve is closed by relative movement, the plate spring 5 is bent by the support plate 4 to enlarge the acute angle θ and close the valve.
弁板２及び対向板３に対して支持板４が相対的に移動し
て閉弁するとき、板バネ５が変形して弁体部７のスライ
ド方向に対する板バネ５の鋭角θが拡大し、弁板２と支
持板４間の距離及び対向板３と支持板４間の距離がそれ
ぞれ拡大して弁板２の弁座面ｌＯへの押付けと対向板３
の台座面６への押付けが可能となり、閉弁することがで
きることになる。When the support plate 4 moves relative to the valve plate 2 and the opposing plate 3 to close the valve, the leaf spring 5 is deformed and the acute angle θ of the leaf spring 5 with respect to the sliding direction of the valve body portion 7 is expanded. The distance between the valve plate 2 and the support plate 4 and the distance between the opposing plate 3 and the supporting plate 4 are increased, so that the valve plate 2 is pressed against the valve seat surface lO and the opposing plate 3 is increased.
can be pressed against the pedestal surface 6, and the valve can be closed.
以下図面により本発明の詳細な説明する。 The present invention will be explained in detail below with reference to the drawings.
第１１！ｌは本発明真空用仕切弁の一実施例の開弁状態
を示す要部の縦断面図、第２図はその閉弁状態を示す縦
断面図である。11th! 1 is a vertical cross-sectional view of a main part of an embodiment of the vacuum gate valve of the present invention showing the valve in the open state, and FIG. 2 is a vertical cross-sectional view showing the valve in the closed state.
まず、本実施例の構成を説明する。First, the configuration of this embodiment will be explained.
弁箱１内に、昇降棒４０に連結された支持板４を挟んで
、それぞれが平行となるように弁板２と対向板３が配置
されている。弁板２と対向板３には、それぞれ帯状の板
バネ３０が固定され、それぞれの板バネ３０の両端部は
連結部材３２に固定されており、弁板２と対向板３が近
づく方向に付勢されている。A valve plate 2 and a facing plate 3 are arranged in the valve box 1 so as to be parallel to each other, with a support plate 4 connected to an elevating rod 40 being sandwiched therebetween. A band-shaped leaf spring 30 is fixed to each of the valve plate 2 and the opposing plate 3, and both ends of each plate spring 30 are fixed to a connecting member 32, and the plate springs 30 are attached in the direction in which the valve plate 2 and the opposing plate 3 approach each other. Forced.
弁板２と対向板３の向かい合うそれぞれの面に、板バネ
５の両端部が固定され、板バネ５は、弁板２と対向板３
の中間付近にて第１図において上方に屈曲した断面形状
を有し、弁板２と対向板３との取付は面とそれぞれ鋭角
θをなして板バネ５の中央部が固定されている。弁板２
にはシール材１１が設けてあり、シール材１１と対面す
る弁箱１の内壁には弁座面ＩＯが形成されている。Both ends of a plate spring 5 are fixed to opposing surfaces of the valve plate 2 and the opposing plate 3, and the plate spring 5 is attached to the valve plate 2 and the opposing plate 3.
The plate spring 5 has a cross-sectional shape bent upward in FIG. 1 near the middle of the valve plate 2, and the valve plate 2 and the opposing plate 3 are attached to each other at an acute angle θ with the plane, and the center portion of the leaf spring 5 is fixed. Valve plate 2
is provided with a sealing material 11, and a valve seat surface IO is formed on the inner wall of the valve box 1 facing the sealing material 11.
また、対向板３の周囲部に対面する弁箱１の内壁には台
座面６が形成されている。Further, a pedestal surface 6 is formed on the inner wall of the valve box 1 facing the peripheral portion of the opposing plate 3.
次にこのような構成の本実施例の作用を説明する。Next, the operation of this embodiment having such a configuration will be explained.
第１図示の状態から昇降棒４０を第１図において下降さ
せると、連結部材３２が弁底２０に当たり、更に昇降棒
４０により支持板４を下方に押圧すると、弁板２及び対
向板３と支持板４が相対移動して、第２図に示すように
板バネ５の屈曲部が鋭角θを拡大して、弁板２と支持板
４間の距離及び対向板３と支持板４間の距離を拡大し、
弁板２のシール材１１を弁座面１０に押し付けると共に
、対向板３を台座面６に押し付けてシールを達成し閉弁
することになる。開弁状態とするには、昇降棒４０を上
昇させることにより、板バネ５及び板バネ３０の復元力
によって、第１図示の状態に復帰させ、更に弁体部７を
上昇させて、完全な開弁状態とする。When the lifting rod 40 is lowered in FIG. 1 from the state shown in FIG. When the plate 4 moves relatively, the bent part of the plate spring 5 enlarges the acute angle θ as shown in FIG. 2, and the distance between the valve plate 2 and the support plate 4 and the distance between the opposing plate 3 and the support plate 4 Expand the
The sealing material 11 of the valve plate 2 is pressed against the valve seat surface 10, and the opposing plate 3 is pressed against the pedestal surface 6 to achieve sealing and close the valve. To open the valve, raise the lifting rod 40 to return it to the state shown in the first diagram by the restoring force of the leaf springs 5 and 30, and then raise the valve body 7 to completely open the valve. Open the valve.
第３図〜第８１！ｌは本発明における板バネの他側を示
す断面図である。Figure 3~81! 1 is a sectional view showing the other side of the leaf spring in the present invention.
第３図及び第４図の場合は、板バネ５と弁板２及び対向
板３は固定せず、板バネ５の端部を弁板２及び対向板３
に設けた溝８にはめ込んだ例である。In the case of FIGS. 3 and 4, the leaf spring 5, the valve plate 2, and the opposing plate 3 are not fixed, and the ends of the leaf spring 5 are connected to the valve plate 2, the opposing plate 3, and
This is an example in which it is fitted into a groove 8 provided in the.
また、第５図及び第６図の場合は、板バネ５を弁板２と
支持板４を連結する板バネと、対向板３と支持板４を連
結する板バネとに分割して構成した例である。In addition, in the case of FIGS. 5 and 6, the leaf spring 5 is divided into a leaf spring that connects the valve plate 2 and the support plate 4, and a leaf spring that connects the opposing plate 3 and the support plate 4. This is an example.
第７図及び第８図は、板バネ５の固定部と固定部の中間
部における座屈を防止するため、補強部材５０を設けた
場合の例である。第８図は片側のみを示している。いず
れの場合も、板バネ５の長さは任意でよい。7 and 8 are examples in which a reinforcing member 50 is provided to prevent buckling at an intermediate portion between the fixed portions of the leaf spring 5. Figure 8 shows only one side. In either case, the length of the leaf spring 5 may be arbitrary.
上述のように本発明によれば、シールを達成するための
力を発生させる機構として、リンク機構やカム、また従
来の摺動要素を含むいずれの手段をも用いず、板バネ５
の変形のみを利用しているため、摩耗粉等の塵埃の発生
が全くないシール機構を構成することができ、従って、
無発塵の真空仕切弁を提供できるものである。As described above, according to the present invention, the leaf spring 5 does not use any means including linkages, cams, or conventional sliding elements as a mechanism for generating force to achieve a seal.
Since only the deformation of
It is possible to provide a dust-free vacuum gate valve.
第１図は本発明真空用仕切弁の一実施例の開弁状態を示
す要部の縦断面図、第２図はその閉弁状態を示す縦断面
図、第３図〜第８図は本発明における板バネの他側を示
す断面図である。
１・・・・・・弁箱、２・・・・・・弁板、３・・・・
・・対向板、４・・・・・・支持板、５・・・・・・板
バネ、６・・・・・・台座面、７・・・・・・弁体部、
８・・・・・・溝、ＩＯ・・・・・・弁座面、１１・・
・・・・シール材、２０・・・・・・舟底、３０・・・
・・・板バネ、３２・・・・・・連結部材、４０・・・
・・・昇降棒、５０・・・・・・補強部材。
箋１目
箋２目
滲３目
喜９目
寡６し
零θ適Fig. 1 is a vertical cross-sectional view of the essential parts of an embodiment of the vacuum gate valve of the present invention showing the valve open state, Fig. 2 is a longitudinal cross-sectional view showing the valve closed state, and Figs. It is a sectional view showing the other side of the leaf spring in the invention. 1...Valve box, 2...Valve plate, 3...
... Opposing plate, 4 ... Support plate, 5 ... Leaf spring, 6 ... Pedestal surface, 7 ... Valve body part,
8... Groove, IO... Valve seat surface, 11...
... Seal material, 20 ... Boat bottom, 30 ...
...Plate spring, 32...Connection member, 40...
...Lifting rod, 50...Reinforcement member. Note 1 note 2 note 3 note 9 note 6 and zero θ suitable
Claims (1)
れ対向し互いに平行に配置された弁板（２）及び対向板
（３）と、この弁板（２）と対向板（３）との間に設け
られた支持板（４）とにより弁軸に対して垂直な方向に
スライド可能な弁体部（７）を構成し、弁板（２）と対
向板（３）の向かい合うそれぞれの面に、可撓性を有す
る板バネ（５）を弁体部（７）のスライド方向と鋭角θ
をなして固定し、弁板（２）及び対向板（３）に対して
支持板（４）を相対移動させて閉弁する際、支持板（４
）によって板バネ（５）を屈曲させて鋭角θを拡大させ
閉弁するように構成した真空用仕切弁。A valve plate (2) and an opposing plate (3) that are arranged parallel to each other and facing the valve seat surface (10) and pedestal surface (6) of the valve box (1), respectively, and the valve plate (2) and the opposing plate. (3) and the support plate (4) provided between the valve body (7), which is slidable in a direction perpendicular to the valve shaft, and the valve plate (2) and the opposing plate (3) A flexible plate spring (5) is placed on each of the opposing surfaces of the valve body (7) at an acute angle θ with the sliding direction of the valve body (7).
When the support plate (4) is moved relative to the valve plate (2) and the opposing plate (3) to close the valve, the support plate (4)
), the vacuum gate valve is configured to bend the leaf spring (5) to enlarge the acute angle θ and close the valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7826690A JP2714473B2 (en) | 1990-03-26 | 1990-03-26 | Gate valve for vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7826690A JP2714473B2 (en) | 1990-03-26 | 1990-03-26 | Gate valve for vacuum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03277877A true JPH03277877A (en) | 1991-12-09 |
| JP2714473B2 JP2714473B2 (en) | 1998-02-16 |
Family
ID=13657181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7826690A Expired - Lifetime JP2714473B2 (en) | 1990-03-26 | 1990-03-26 | Gate valve for vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2714473B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11315939A (en) * | 1998-05-08 | 1999-11-16 | Ckd Corp | Gate type vacuum cutoff valve |
| KR100779241B1 (en) * | 2006-11-02 | 2007-11-23 | 주식회사 비츠로테크 | Double sided vacuum gate valve |
-
1990
- 1990-03-26 JP JP7826690A patent/JP2714473B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11315939A (en) * | 1998-05-08 | 1999-11-16 | Ckd Corp | Gate type vacuum cutoff valve |
| KR100779241B1 (en) * | 2006-11-02 | 2007-11-23 | 주식회사 비츠로테크 | Double sided vacuum gate valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2714473B2 (en) | 1998-02-16 |
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