JPH032768B2 - - Google Patents

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to a substrate transfer apparatus used, for example, in the manufacturing process of semiconductor devices or solid state devices that performs die bonding or wire bonding to a substrate. Regarding.

(Prior Art) An example of a product using a substrate and a conventional device will be described with reference to FIGS. 1 and 2. In FIG. 1, reference numeral 11 denotes a substrate, which is made of ceramic, glass, etc., and has a pattern formed on its upper surface by photo-engraving. Then, in the die bonding process, the IC 12, capacitor chip 13, etc. are mounted on this substrate 11. Further, in the wire bonding process, the substrate 11 and the IC 12 or capacitor chip 13 are connected with wires made of aluminum, gold, or the like. In order to perform such a die bonding process or a wire bonding process, it is necessary to transport the substrate 11 to a predetermined die bonding position or wire bonding position.

Conventionally, this transportation has been carried out by fixing the substrate 11 on the carrier 14 using positioning pins 15 and clamp springs 16, and using the feed pin holes 1 provided in the carrier 14.
7 and a conveyance device 18 shown in FIG. FIG. 2 is a plan view of the conveyance device 18,
A plurality of transfer arms 20 are attached to the transfer rod 19,
The carrier 14 is attached to the tip of the transfer arm 20.
A feed pin 21 is provided protrudingly to be inserted into and removed from the feed pin hole 17. The transport rod 19 is driven in a rectangular shape in the vertical direction (direction perpendicular to the plane of the drawing) and the front-back direction (left-right direction in the drawing) by a drive device (not shown). As a result, the feed pin 21 is inserted into the feed pin hole 17 of the carrier 14, and after conveying the carrier 14 at a fixed pitch, it is removed from the feed pin hole 17 and returned to its original position, and the operation is repeated. Note that the carrier 14 is regulated from moving in the width direction (in the vertical direction in the drawing) by a pair of guide plates 22 provided along the conveyance direction.
is sent along the longitudinal direction.

However, in the above device, the carrier 14 is used for conveyance.
Requires. This carrier 14 is made of a thin stainless steel plate so that the temperature can be raised quickly (120 to 200°C) in the wire bonding process, and it also has a positioning pin 15, a clamp spring 16, a feed pin hole, 17 etc., it takes a lot of effort to manufacture and the price per piece of carrier 14 is also high. Since at least 100 carriers 14 are required for each type of product, the cost of the carriers 14 increases.

Further, since the carrier 14 is formed of a thin stainless steel plate, the mounting screws of the positioning pin 15 and the clamp spring 16 tend to loosen, and maintenance requires a lot of time.

Furthermore, depending on the type of substrate 11, the carrier 14
When the width dimension of the guide plate 22 changes, the operator must change the position of the guide plate 22 each time to accommodate this change, which significantly reduces the transfer rate of the device.

In addition, conventionally, as shown in Japanese Utility Model Publication No. 57-39185, as a device for conveying long workpieces,
There is also known a device in which both ends of the workpiece are supported on pedestals on both sides, and the workpiece is held and moved between a pair of adjacent holding bodies. However, this device does not have a positioning mechanism in the width direction of the workpiece, so the positioning accuracy is poor, and even with the clamping mechanism, the clamping interval in the front and back direction is only between a pair of adjacent clamping bodies. It cannot be applied when the dimensions of the workpiece in the front and rear directions are significantly different.

(Means for solving the problem) As mentioned above, in the conventional device, various kinds of substrates with different dimensions in the width direction and length direction can be handled.
There are difficulties in positioning and feeding the paper in its width and length directions.

SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transfer device with high operating efficiency that can easily respond to changes in the width and length of substrates.

[Structure of the invention]

(Means for Solving the Problems) The substrate transfer device of the present invention includes a transfer stage that is provided toward the substrate transfer direction and supports the substrate in a movable manner, and a transfer stage that is disposed along one side of the transfer stage. A guide rail is provided on the other side of the transfer stage and presses the other side of the substrate so that one side of the substrate comes into contact with the guide rail. a positioning mechanism that positions the substrate; a substrate holding mechanism that is provided below the transfer stage so as to be movable in the transfer direction of the substrate and that holds the substrate on the transfer stage at its front and rear ends; a transport mechanism for moving the substrate in the transport direction, and the positioning mechanism supports the base end of an arm rotatably in the width direction by a shaft on the side of the transport stage, and the positioning mechanism supports the substrate at the tip of the arm. a pressing body that comes into contact with the side of the arm, and a drive unit that rotates the arm;
The substrate holding mechanism is provided with a transfer table that is moved by the transfer mechanism below the transfer stage, a holding table is provided on the transfer table so as to be movable in the movement direction of the transfer table, and a holding table is provided on the transfer table so as to be movable in the moving direction of the transfer table. Holding bodies that are opposed to each other and that hold the front and rear ends of the substrate are respectively provided in a protruding manner, and a drive unit that moves the holding table forward and backward with respect to the transfer table is provided.

(Function) In the present invention, the substrate is supplied onto the transfer stage and supported, and the drive unit of the positioning mechanism is operated to rotate the arm in the width direction of the substrate about the axis at the base end of the arm as a fulcrum. is pressed against the side of the board, one side of the board is brought into contact with the guide rail, and the board is positioned in the width direction.

Next, with the pair of holders of the substrate holding mechanism facing the front and rear ends of the substrate, the drive section is operated to move the holder with respect to the transport platform, and one holder is moved against the other holder. Bring your bodies close together and hold the front and rear ends of the board.

Next, the transport mechanism is driven to move the entire substrate holding mechanism to transport the substrate while positioning it in the width direction and length direction.

(Example) Hereinafter, an example of the present invention will be described with reference to the drawings.

In FIG. 3, reference numeral 25 denotes a transfer stage, which is provided facing the direction in which the substrate 11 is transferred, and on the upper surface of which the substrate 11, which is supplied by a substrate holding mechanism (not shown), is movably supported. A guide rail 26 is arranged along one side of the transport stage 25 at a predetermined interval, and comes into contact with one side of the substrate 11 on the transport stage 25 to guide it in the transport direction. It has a wall surface 27.

30 is a positioning mechanism, and the above-mentioned transport stage 25
It is provided on the other side. This positioning mechanism 3
0, the base end of an arm 32 is supported by a shaft 31 on the side of the conveyance stage 25 so as to be rotatable in the width direction, and a pressing body 33 made of a roller is mounted on the tip of the arm 32. The pressing body 33 presses the other side of the board 11 in the width direction, and brings one side of the board into contact with the wall surface 27 of the guide rail 26, thereby positioning the board 11 in the width direction.

FIG. 5 shows a drive unit that rotates the arm 32 of the positioning mechanism 30. A bracket 43 is attached to the end of the transport stage 25, a motor 35 is provided on this bracket 43, and a motor 35 is installed on the bracket 43. A worm 37 meshed with a worm wheel 36 provided at the lower end of the shaft 31 on the output shaft
is attached, and the arm 32 is rotated together with the shaft 31 by the drive of the motor 35. Further, a drum 38 is provided at the lower part of the base end of the arm 32,
A spring 39 is wound around this drum 38, and this spring 39 pushes the pressing body 33 onto the substrate 11.
The driving force to the arm 32 after pressing is absorbed. Furthermore, a photoelectric sensor 4 is attached to the bracket 43.
1 is attached, and this photoelectric sensor 41 and the shaft 3
The rotation angle of the shaft 31 is detected by a sensor plate 42 provided integrally with the shaft 31. This detection signal is used to control the operation of the motor 35.

Returning to FIG. 3, reference numerals 45 and 46 denote a pair of holders, which are provided so as to be able to move upwardly between the transport stage 25 and the guide rail 26, and are arranged at the front end and rear end in the transport direction of the substrate 11 when the board 11 is projected. It is arranged so as to face the end. This pair of holders 45 and 46 is connected to a substrate holding mechanism 47 shown in FIG.
The substrate holding mechanism 47 will be explained below with reference to FIG.

The substrate 11 is located below the transport stage 25.
A long conveyor table 4 along the conveyance direction (horizontal direction in the figure)
8 is provided movably in the transport direction of the substrate 11, and one of the holders 45 is mounted on the transport table 48.
However, multiple protrusions are provided at a fixed pitch. A long holding table 49 is supported on the conveyance table 48 so as to be movable along the longitudinal direction, and supports 51 are provided at both ends of the holding table 49 so as to be movable in the front and back direction.
The other holder 46 is provided protrudingly on each support 51, and a spring 52 is stretched between the end of each support 51 and the holder 49 side.

Further, a drive unit is provided for moving the holding table 49 forward and backward with respect to the transport table 48. This drive unit is
A rack 54 is placed along the length direction of the lower surface of the holding base 49.
is provided, and a worm 56 and a worm wheel 57 are driven by a motor 55 provided on the transfer table 48 side.
It is driven laterally in the drawing via a pinion gear 58 which is coaxial with this and meshes with the rack 54.
Reference numeral 60 denotes a photoelectric sensor, which is arranged to detect the moving position of the holding table 49, and controls the operation of the motor 55 based on its detection signal. Also, 6
1 and 62 are both photoelectric sensors, of which one photoelectric sensor 61 detects the starting point for clamping the substrate 11 of the holding table 46, and the other photoelectric sensor 6
2 detects the movable end of the holding body 46.

Reference numeral 65 denotes a transport mechanism, which has a ball screw 66 disposed along the width direction of the substrate 11, and a pulse motor or servo motor 68 is connected to one end of the ball screw 66 via a coupling ring 67. 6
Reference numeral 9 denotes a conveying block, which has a built-in ball nut that screws into the ball screw 66.
6, it moves laterally as it rotates. Further, this conveyance block 69 has a deep groove ball bearing 71 disposed in the vertical direction, and supports a conveyance rod 72 hanging from the conveyance table 48 so as to be vertically movable. Therefore, the entire substrate holding mechanism 47 moves together with the transport block 69.

Reference numeral 75 denotes a vertical mechanism, which has a driving motor 76, and is driven by a crank mechanism 77 and a cam mechanism (not shown) to move the above-mentioned holder 4.
5 and 46 are moved up and down.

Next, the operation will be explained.

As shown in FIG. 3a, the substrate 11 is supplied onto the transfer stage 25 and supported by a substrate supply device (not shown).

Next, the motor 35 of the drive section of the positioning mechanism 30 shown in FIG. Press it against the side.
Therefore, as shown in FIG. 3b, one side of the board 11 comes into contact with the wall surface 27 of the guide rail 26, and the board 11 is positioned in the width direction. Even after this positioning, the motor 35 continues to rotate until the sensor plate 42 operates the photoelectric sensor 41, but this rotational force is absorbed by the drum 38 provided at the lower part of the base end of the arm 32 and the spring 39 wound around it. be done.

Here, if the type of the board 11 is different, the board 11
However, since the rotation of the arm 32 allows a large amount of deflection of the pressing body 33, even if the width of the substrate 11 changes arbitrarily, the rotation of the arm 32 is different. By simply changing the amount of movement, positioning in the width direction can be performed without any change.

Almost simultaneously with the above positioning operation, the vertical mechanism 75 shown in FIG. 4 is operated to raise the holders 45 and 46 to face the front and rear ends of the substrate 11.

Next, the motor 55 of the drive unit shown in FIG. 4 is operated to move the holding table 49 to the left in the figure with respect to the conveying table 48. As a result of this operation, the other holder 46 moves in the same direction so as to approach one holder 45, and engages with the front end of the substrate 11, so that the holder 46 moves closer to the other holder 45, as shown in FIG. , 46 sandwich the substrate 11 at its front and rear ends, positioning and holding the substrate 11 in the front and rear direction. The movement of the holding table 49 continues for a predetermined distance even after the holding body 46 comes into contact with the front end of the substrate 11 until the position where the photoelectric sensor 60 performs the detection operation. Since this predetermined moving distance is constant and the extension of the clamping spring 52 is also constant, a constant clamping force can be obtained.

Here, if the type of the board 11 is different, the board 11
The length in the front and back direction is also different, but for this,
The only difference is the stopping position of the holder 46. Therefore, from one holder 45 to the other holder 4
Even if the length of the substrate 11 changes arbitrarily between the distances up to 6, the positioning and holding of the substrate 11 can be performed without any change.

Next, the pulse motor or servo motor 68 shown in FIG. 4 is operated to transport the substrate 11 through steps determined for each product type. This operation rotates the ball screw 66, and moves the transport block 69, which has a ball nut screwed thereon, and the transport table 48, which is engaged therewith, in a predetermined transport direction. As a result, the holders 45 and 46 move in the same direction, and the substrate 1 held therebetween moves.
Transport 1. At this time, the positioning mechanism 30 may or may not press the board 11 against the wall surface of the guide rail 26 .

After the above-mentioned conveyance, the vertical mechanism 75 is operated again to lower the holding bodies 45 and 46 below the conveyance stage 25, and each part is operated in the opposite direction to return to the original state, and the next substrate 11 is moved. Prepare for transport.

In the above description, the target of the substrate 11 is a semiconductor device, a solid state device, etc., but the present invention can also be applied to other products. Further, although it is possible to transport the substrate 11 without using a carrier, it is of course also possible to place the substrate 11 on a carrier and transport it, if necessary.

Furthermore, in the illustrated embodiment, a plurality of substrates 11
Although a device that transports both substrates 11 at the same time is shown, a device that transports one substrate 11 may also be used.

〔Effect of the invention〕

According to the present invention, when transporting a substrate to a predetermined position, in the positioning mechanism, the arm having the pressing body is rotated in the width direction of the substrate using the axis at the base end thereof as a fulcrum, and the pressing body is moved to the side of the substrate. Since the board is positioned in the width direction by pressing it against the side and bringing one side of the board into contact with the guide rail, the amount of deflection of the pressing body can be large, making it easy to handle various types of boards with different width dimensions. In addition, with the pair of holders of the substrate holding mechanism facing the front and rear ends of the substrate, the holder is moved relative to the transport platform, and one holder is moved relative to the other holder. Since the holders are brought close together and sandwich the front and rear ends of the board, the amount of change between the pair of holders can be large, and it is possible to easily accommodate various types of boards with different length dimensions. Therefore, it is possible to quickly deal with changes in the shape of the substrate due to a change in product type, and the substrate can be transported while being reliably positioned in the width direction and length direction, and the operating rate can be greatly improved.

[Brief explanation of the drawing]

Fig. 1 is an exploded perspective view showing the relationship between a conventional substrate and a carrier, Fig. 2 is a plan view showing a conventional transport device, and Figs. 3 a, b, and c are an embodiment of the substrate transport device according to the present invention. FIG. 4 is a front view of the entire device shown in FIG. 3, and FIG. 5 is a side view of the positioning mechanism. 11...Substrate, 25...Transportation stage, 26...
...Guide rail, 30...Positioning mechanism, 31...
... shaft, 32 ... arm, 33 ... pressing body, 45,
46...Holding body, 47...Substrate holding mechanism, 48...
...transportation table, 49...holding table, 65...transportation mechanism.

Claims (1)

[Claims] 1. A transport stage that is provided facing the transport direction of the substrate and supports the substrate in a movable manner, and a transport stage that is arranged along one side of the transport stage and brings one side of the substrate into contact with the transport stage. a guide rail; a positioning mechanism provided on the other side of the transport stage for positioning the board in the width direction by pressing the other side of the board so that one side of the board contacts the guide rail; a substrate holding mechanism that is provided below to be movable in the transport direction of the substrate and that holds the substrate on the transport stage at its front and rear ends; and a transport mechanism that moves the substrate holding mechanism in the transport direction of the substrate. The positioning mechanism supports a base end of an arm rotatably in the width direction by a shaft on the side of the transfer stage, and a pressing body is attached to the tip of the arm to abut against the side of the substrate. The substrate holding mechanism further includes a drive unit that rotates the arm, and the substrate holding mechanism includes a conveyance table that is moved by the conveyance mechanism below the conveyance stage, and a holding table that is mounted on the conveyance table in the direction of movement of the conveyance table. a movable support body, protrudingly provided on the transfer table and the holding table, facing each other to hold the front and rear ends of the substrate, and a drive unit for moving the holding table forward and backward with respect to the transfer table. A substrate transfer device characterized in that: