JPH03273508A - Magnetic head and production thereof - Google Patents
Magnetic head and production thereofInfo
- Publication number
- JPH03273508A JPH03273508A JP7521590A JP7521590A JPH03273508A JP H03273508 A JPH03273508 A JP H03273508A JP 7521590 A JP7521590 A JP 7521590A JP 7521590 A JP7521590 A JP 7521590A JP H03273508 A JPH03273508 A JP H03273508A
- Authority
- JP
- Japan
- Prior art keywords
- gap
- magnetic
- film
- forming
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 53
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000463 material Substances 0.000 claims abstract description 27
- 238000005219 brazing Methods 0.000 claims abstract description 16
- 239000011521 glass Substances 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims description 28
- 230000005294 ferromagnetic effect Effects 0.000 claims description 6
- 230000002265 prevention Effects 0.000 claims description 6
- 239000007791 liquid phase Substances 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 5
- 229910000846 In alloy Inorganic materials 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000011162 core material Substances 0.000 abstract description 23
- 229910000702 sendust Inorganic materials 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 11
- 229910000859 α-Fe Inorganic materials 0.000 abstract description 10
- 238000005520 cutting process Methods 0.000 abstract description 5
- 238000005498 polishing Methods 0.000 abstract description 3
- 238000002844 melting Methods 0.000 abstract description 2
- 230000008018 melting Effects 0.000 abstract description 2
- 229910000679 solder Inorganic materials 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 4
- 229910052681 coesite Inorganic materials 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 229910052905 tridymite Inorganic materials 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 2
- 208000017227 ADan amyloidosis Diseases 0.000 description 1
- 201000000194 ITM2B-related cerebral amyloid angiopathy 2 Diseases 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はVTR,DAT、FDD等に使用する磁気ヘッ
ド及びその製造方法に間する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a magnetic head used in VTRs, DATs, FDDs, etc., and a method for manufacturing the same.
従来の技術
近年、磁気記録技術の動向はビデオ等のように高周波領
域での特性が要求されるに従い、サブミクロンの記録波
長に十分対応できる磁気ヘッド及び記録媒体が要望され
ている。このような現状の中で磁気ヘッドは、保持力H
cの高い記録媒体(例えばメタル、Ba−Feテープ)
に十分な書き込みを行う為、フェライト等の強磁性酸化
物材料と比べより飽和磁束密度Bsの高い磁性合金膜(
例えばセンダスト、非晶質材料)をフェライトのギャッ
プ面に配した構造の磁気ヘッドの開発が行われている。BACKGROUND OF THE INVENTION In recent years, as magnetic recording technology has been trending toward demands for characteristics in a high frequency range, such as in video, there is a need for magnetic heads and recording media that can adequately handle submicron recording wavelengths. Under these current circumstances, magnetic heads have a holding force H
Recording media with high c (e.g. metal, Ba-Fe tape)
In order to perform sufficient writing, a magnetic alloy film with a higher saturation magnetic flux density Bs (
For example, a magnetic head with a structure in which sendust (an amorphous material) is arranged on the gap surface of ferrite is being developed.
例えば特開昭60−95704、特開昭60−3210
7等に開示された技術が知られている。For example, JP-A-60-95704, JP-A-60-3210
A technique disclosed in No. 7, etc. is known.
発明が解決しようとする課題
しかしながら、このようなギャップ面に金属磁性膜を用
いた磁気ヘッドのギャップ接合強度は弱く、チップ切断
時やテープ走行面の研磨時にギャップ接合面で剥がれる
という課題があった。Problems to be Solved by the Invention However, the gap bonding strength of magnetic heads using a metal magnetic film on the gap surface is weak, and there is a problem that the gap bonding surface may peel off when cutting chips or polishing the tape running surface. .
課題を解決するための手段
請求項1の本発明は、強磁性酸化物を主体とする磁気コ
アのギャップ面が、金属磁性膜からなる磁気ヘッドにお
いて、コア半体の突合せ面に金属ロウ材が形成されてい
ることを特徴とする磁気ヘッドである。Means for Solving the Problems The present invention as claimed in claim 1 provides a magnetic head in which a gap surface of a magnetic core mainly made of a ferromagnetic oxide is made of a metal magnetic film, and a metal brazing material is provided on the abutting surfaces of the core halves. This is a magnetic head characterized by the following:
請求項4の本発明は、主コアが強磁性酸化物を主体とす
る磁気ヘッドの製造方法において、対で磁気ヘッドとな
るコア半体のギヤツブ形成面を鏡面に加工する工程と、
そのLへ反応防止膜を形成し金属磁性膜を形成する工程
と、ギャップ材としてギャップ面に金属ロウ(オを形成
する工程と、このような一対のコア半体のギャップ面を
突き合わせた状態て金属ロウ材の液相が出現する温度以
上で非酸化性雰囲気において熱処理し接合する事により
磁気的なギャップを形成する工程とを備えたことを特徴
とする磁気ヘッドの製造方法である。The present invention according to claim 4 provides a method for manufacturing a magnetic head in which the main core is mainly made of ferromagnetic oxide, including the step of processing gear-forming surfaces of core halves that form a pair of magnetic heads into a mirror surface;
A process of forming a reaction prevention film on the L and a metal magnetic film, a process of forming a metal solder (O) on the gap surface as a gap material, and a state in which the gap surfaces of the pair of core halves are butted together. This method of manufacturing a magnetic head is characterized by the step of forming a magnetic gap by heat-treating and bonding in a non-oxidizing atmosphere at a temperature higher than the temperature at which a liquid phase of the metal brazing material appears.
作用
本発明では、この金属ロウ材の存在により、工数の少な
い製造方法で強固なギャップ接合ができる。Function: In the present invention, due to the presence of the metal brazing material, a strong gap joint can be made with a manufacturing method that requires fewer man-hours.
実施例
以下、本発明の一実施例の磁気ヘッドについて図面を参
照しながら説明する。Embodiment A magnetic head according to an embodiment of the present invention will be described below with reference to the drawings.
m1図は本発明の磁気ヘッドの構成の一実施例を示すも
ので、フェライトコア材lのギャップ面にセンダスト膜
2.2′が成膜され、センダスト膜2と2′の間には磁
気ギャップ及び接合用として金属ロウ4.4゛が形膜さ
れており、またフェライト材とセンダスト膜の間には反
応防止膜としてl「膜(図では省略)が形成されている
。コア半体の接合ζJ金属ロウとガラス3によって行わ
れでいる。このようにして得られた磁気ヘッドチップは
、接合力の強いものであった。Figure m1 shows an embodiment of the structure of the magnetic head of the present invention, in which a sendust film 2.2' is formed on the gap surface of the ferrite core material l, and a magnetic gap is formed between the sendust films 2 and 2'. A 4.4" metal solder film is formed for bonding, and a 1" film (not shown in the figure) is formed as a reaction prevention film between the ferrite material and the sendust film. This was done using ζJ metal solder and glass 3. The magnetic head chip thus obtained had a strong bonding force.
第2図は本発明の他の実施例の磁気ヘッドの構成を示す
もので、フェライトコア材5のギャップ面にセンダスト
膜6.6”が成膜され、センタスト膜6と6′の間には
磁気ギャップ材としてテープ走行面側の突合せ面に(以
下フロントギャップと記す)SiO2とガラス膜8が形
成されており、他のギャップ面に(以下ハックギャップ
と記す)金属ロウ9が形成されている。また、フェライ
ト材とセンダスト膜の開には反応防止膜としてI「膜(
図では省略)が形成されている。コア半体の接合は、ガ
ラス膜8と、金属ロウ9とトラック幅規制用のガラス7
によって行われ、このようにして得られた磁気ヘッドチ
ップは接合力の強いものであった。FIG. 2 shows the configuration of a magnetic head according to another embodiment of the present invention, in which a sendust film 6.6'' is formed on the gap surface of the ferrite core material 5, and between the centerust films 6 and 6'. As a magnetic gap material, SiO2 and a glass film 8 are formed on the abutting surface on the tape running surface side (hereinafter referred to as the front gap), and a metal solder 9 (hereinafter referred to as the hack gap) is formed on the other gap surface. .In addition, an I" film (
(omitted in the figure) is formed. The core halves are joined by a glass film 8, a metal solder 9, and a glass 7 for regulating track width.
The magnetic head chip thus obtained had a strong bonding force.
次に、本発明の一実施例の磁気ヘッドの製造方法につい
て図面を参照しながら説明する。Next, a method of manufacturing a magnetic head according to an embodiment of the present invention will be described with reference to the drawings.
第3図は、本発明の磁気へ・ソトの製造方法を示す工程
図である。第3図(a)は、フェライトコア材10に巻
き線溝11を形成したコア半体である。第3図(b )
は、鏡面に加工されたフェライト面に反応防止1Ith
(例えば11・)を100A程度形成した後センダスト
膜12を3〜4μmスパッター法で等で成膜し、さらに
ギャップ材として金属ロウ13を形成したコア半体であ
る。なお、金属ロウとしてAg−Cu−In合金を用い
、センダスト膜の磁気特性が良好な600℃付近て液相
が出現するように、CIピ 10〜60重量%、1n:
1〜40重量%、望ましくは、Cu: 20〜45
+ In:25〜35 w t%の範囲になるように
スパッタ法で成膜した。第2図(C)は、一対のコア半
体を突き合わせた状態でAg−Cu−In膜の液相が出
現する温度以上で非酸化性雰囲気において接合した後、
テープ走行面にトラック幅規制溝を加工し、ガラス14
をモールドしたコア15である。第2図(d)は、ギャ
ップ形成されたコア】5を所定のサイズに切断したヘッ
ドチップ16である。FIG. 3 is a process diagram showing the method for manufacturing the magnetic material of the present invention. FIG. 3(a) shows a core half in which a winding groove 11 is formed in a ferrite core material 10. Figure 3(b)
The reaction prevention 1Ith is applied to the mirror-processed ferrite surface.
(For example, 11.) is formed to about 100 A, and then a sendust film 12 of 3 to 4 μm is formed by sputtering or the like, and a metal solder 13 is further formed as a gap material to form a core half. Incidentally, an Ag-Cu-In alloy was used as the metal solder, and 10 to 60% by weight of CI pipe, 1N:
1 to 40% by weight, preferably Cu: 20 to 45
+ In: The film was formed by sputtering so that the content was in the range of 25 to 35 wt%. FIG. 2(C) shows that after the pair of core halves are butted together and bonded in a non-oxidizing atmosphere at a temperature higher than that at which the liquid phase of the Ag-Cu-In film appears,
A track width regulating groove is machined on the tape running surface, and the glass 14
This is the core 15 which is molded. FIG. 2(d) shows a head chip 16 obtained by cutting the gap-formed core 5 into a predetermined size.
以下本発明の他の実施例の磁気ヘッドの製造方法につい
て図面を参照しながら説明する。A method of manufacturing a magnetic head according to another embodiment of the present invention will be described below with reference to the drawings.
第4図は、本発明の磁気ヘッドの製造方法を示す工程図
である。第4図(a)はフエライI・コア材17を鏡面
に加工した後、センダスト膜18をスパッタ法等で形成
し、巻線溝19を形成したコア半体である。鏡面に加工
されたフェライト面に、反応防止膜(例えばIr)を1
00A程度形成した後センダスト膜を3〜4μmスパッ
ター法等で成膜する。第4図(b)は、テープ走行面側
のギャップ面にトラック幅規制溝20を加工し、ギャッ
プ材としてフロントギャップ面には、SiO2膜とガラ
ス膜21を、パックギャップ面には金属ロウとしてAg
−Cu−In合金膜22をスパッタ法で成膜したコア半
体である。第4図(C)は一対のコア半体を突き合わせ
た状態でAg−Co−In膜の液相が出現する温度以上
で非酸化性雰囲気において接合するとともに、トラック
幅規制溝2oにガラス23を巻き線溝側19から流し込
んだコア24である。第4図(d)は、ギャップ形成さ
れたコア24を所定のサイズに切断したべ・ソトヂップ
25である。このようにして、磁気ヘッドが製造される
。FIG. 4 is a process diagram showing the method for manufacturing the magnetic head of the present invention. FIG. 4(a) shows a core half in which a Feray I core material 17 is processed into a mirror surface, a sendust film 18 is formed by sputtering, etc., and a winding groove 19 is formed. A reaction prevention film (for example, Ir) is applied to the mirror-finished ferrite surface.
After forming about 00A, a sendust film of 3 to 4 μm is formed by sputtering or the like. In FIG. 4(b), a track width regulating groove 20 is machined on the gap surface on the tape running surface side, and a SiO2 film and a glass film 21 are used as the gap material on the front gap surface, and a metal solder is used on the pack gap surface. Ag
This is a core half formed by depositing a -Cu-In alloy film 22 by sputtering. FIG. 4(C) shows a pair of core halves butted together in a non-oxidizing atmosphere at a temperature higher than the temperature at which the liquid phase of the Ag-Co-In film appears, and glass 23 is placed in the track width regulating groove 2o. This is the core 24 poured from the winding groove side 19. FIG. 4(d) shows a solid dip 25 obtained by cutting the gap-formed core 24 into a predetermined size. In this way, a magnetic head is manufactured.
発明の効果
以1:のように本発明は、ギャップ材として金属ロウ材
を用いて溶融接合することにより、チップ切断やテープ
走行面の研磨時にギャップ接合面で剥離することない堅
固な信頼性の高い磁気ヘッドが少ない工程数で得られる
。Effects of the Invention As described in 1., the present invention uses a brazing metal as the gap material for melting and bonding, thereby achieving a solid and reliable structure that does not peel off at the gap bonding surface during chip cutting or polishing the tape running surface. A high quality magnetic head can be obtained with fewer steps.
第1図は本発明の磁気ヘッドの一実施例の構成を示す斜
視図、第2図は本発明の磁気ヘッドの他の実施例の構成
を示す斜視図、第3図は本発明の一実施例にかかる磁気
ヘッドの製造方法を示す工程図、第4図は本発明の他の
実施例にかかる磁気ヘッドの製造方法を示す工程図であ
る。
1、5、 lOl 17・・・フェライト材、2、6.
12、18・・・センダスト膜、3.7、14.23・
・・ガラス、4.9、13.22・・・金属ロウ材、8
.21・・・SiO2ガラス膜。FIG. 1 is a perspective view showing the structure of one embodiment of the magnetic head of the present invention, FIG. 2 is a perspective view showing the structure of another embodiment of the magnetic head of the invention, and FIG. 3 is an embodiment of the present invention. FIG. 4 is a process diagram showing a method of manufacturing a magnetic head according to another embodiment of the present invention. 1, 5, lOl 17... Ferrite material, 2, 6.
12, 18... Sendust film, 3.7, 14.23.
...Glass, 4.9, 13.22...Metal brazing material, 8
.. 21...SiO2 glass film.
Claims (5)
面が、金属磁性膜からなる磁気ヘッドにおいて、コア半
体の突合せ面に金属ロウ材が形成されていることを特徴
とする磁気ヘッド。(1) A magnetic head in which the gap surface of a magnetic core mainly made of ferromagnetic oxide is made of a metal magnetic film, characterized in that a metal brazing material is formed on the abutting surfaces of the core halves. .
が、金属磁性膜からなる磁気ヘッドにおいて、テープ走
行面側のギャップ面にSiO_2膜、あるいはさらにガ
ラス膜が形成され、他のギャップ面に金属ロウ材が形成
されたことを特徴とする磁気ヘッド。(2) In a magnetic head where the gap surface of the magnetic core mainly composed of ferromagnetic oxide is made of a metal magnetic film, a SiO_2 film or an additional glass film is formed on the gap surface on the tape running surface side, and the other gap surface A magnetic head characterized in that a metal brazing material is formed on.
いられ、その組成比が、Cu:10〜60重量%、In
:1〜40重量%であることを特徴とする請求項1又は
2記載の磁気ヘッド。(3) An Ag-Cu-In alloy film is used as the metal brazing material, and its composition ratio is Cu: 10 to 60% by weight, In
3. The magnetic head according to claim 1, wherein: 1 to 40% by weight.
製造方法において、対で磁気ヘッドとなるコア半体のギ
ャップ形成面を鏡面に加工する工程と、その上へ反応防
止膜を形成し金属磁性膜を形成する工程と、ギャップ材
としてギャップ面に金属ロウ材を形成する工程と、この
ような一対のコア半体のギャップ面を突き合わせた状態
で前記金属ロウ材の液相が出現する温度以上で非酸化性
雰囲気において熱処理し接合する事により磁気的なギャ
ップを形成する工程とを備えたことを特徴とする磁気ヘ
ッドの製造方法。(4) In a method of manufacturing a magnetic head whose main core is mainly made of ferromagnetic oxide, the step of processing the gap-forming surfaces of the core halves that form a pair of magnetic heads into a mirror surface, and forming a reaction prevention film thereon. a step of forming a metal magnetic film, a step of forming a metal brazing material on the gap surface as a gap material, and a liquid phase of the metal brazing material appearing when the gap surfaces of the pair of core halves are brought into contact with each other. 1. A method of manufacturing a magnetic head, comprising the step of forming a magnetic gap by heat treatment and bonding in a non-oxidizing atmosphere at a temperature higher than .
製造方法において、対で磁気ヘッドとなるコア半体のギ
ャップ形成面を鏡面に加工する工程と、その上へ反応防
止膜を形成した後金属磁性膜を形成する工程と、ギャッ
プ材としてテープ走行面側のギャップ面にSiO_2膜
とガラス膜を形成し、他のギャップ面には金属ロウ材を
形成する工程と、このような一対のコア半体のギャップ
面を突き合わせた状態で前記金属ロウ材の液相が出現す
る温度以上で非酸化性雰囲気において熱処理し接合する
事により磁気的なギャップを形成する工程とを備えたこ
とを特徴とする磁気ヘッドの製造方法。(5) In a method of manufacturing a magnetic head whose main core is mainly made of ferromagnetic oxide, the step of processing the gap-forming surfaces of the core halves that form a pair of magnetic heads into a mirror finish, and forming a reaction prevention film thereon. After that, a step of forming a metal magnetic film, a step of forming a SiO_2 film and a glass film as gap materials on the gap surface on the tape running surface side, and a step of forming a metal brazing material on the other gap surfaces. forming a magnetic gap by heat-treating and bonding the core halves in a non-oxidizing atmosphere at a temperature higher than that at which a liquid phase of the metal brazing material appears with the gap surfaces of the core halves butted against each other. Features: A manufacturing method for magnetic heads.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7521590A JPH03273508A (en) | 1990-03-22 | 1990-03-22 | Magnetic head and production thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7521590A JPH03273508A (en) | 1990-03-22 | 1990-03-22 | Magnetic head and production thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03273508A true JPH03273508A (en) | 1991-12-04 |
Family
ID=13569767
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7521590A Pending JPH03273508A (en) | 1990-03-22 | 1990-03-22 | Magnetic head and production thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03273508A (en) |
-
1990
- 1990-03-22 JP JP7521590A patent/JPH03273508A/en active Pending
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