JPH03273508A - Magnetic head and production thereof - Google Patents

Magnetic head and production thereof

Info

Publication number
JPH03273508A
JPH03273508A JP7521590A JP7521590A JPH03273508A JP H03273508 A JPH03273508 A JP H03273508A JP 7521590 A JP7521590 A JP 7521590A JP 7521590 A JP7521590 A JP 7521590A JP H03273508 A JPH03273508 A JP H03273508A
Authority
JP
Japan
Prior art keywords
gap
magnetic
film
forming
magnetic head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7521590A
Other languages
Japanese (ja)
Inventor
Yasuhiro Nakaya
安広 仲谷
Tatsutoshi Suenaga
辰敏 末永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7521590A priority Critical patent/JPH03273508A/en
Publication of JPH03273508A publication Critical patent/JPH03273508A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To obtain the magnetic head which is robust and highly reliable with a smaller number of processes without causing the cutting of chips or peeling at the joint surfaces of a gap at the time of polishing of a tape-traveling surface by melting and joining core half bodies by using metallic brazing materials as a gap material. CONSTITUTION:'SENDUST(R)' films 2, 2' are formed on the gap surfaces of a ferrite core material 1 and the films of the metallic brazing materials 4, 4' for the magnetic gap and for joining are formed between the 'SENDUST(R)' films 2 and 2'. Ir films are formed as antireaction films between the ferrite material and the 'SENDUST(R)' films. The joining of the core half bodies is executed by the metallic brazing materials and glass 3. Since the metallic brazing materials are interposed, the secure gap joint is obtd. with the smaller man-hours.

Description

【発明の詳細な説明】 産業上の利用分野 本発明はVTR,DAT、FDD等に使用する磁気ヘッ
ド及びその製造方法に間する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a magnetic head used in VTRs, DATs, FDDs, etc., and a method for manufacturing the same.

従来の技術 近年、磁気記録技術の動向はビデオ等のように高周波領
域での特性が要求されるに従い、サブミクロンの記録波
長に十分対応できる磁気ヘッド及び記録媒体が要望され
ている。このような現状の中で磁気ヘッドは、保持力H
cの高い記録媒体(例えばメタル、Ba−Feテープ)
に十分な書き込みを行う為、フェライト等の強磁性酸化
物材料と比べより飽和磁束密度Bsの高い磁性合金膜(
例えばセンダスト、非晶質材料)をフェライトのギャッ
プ面に配した構造の磁気ヘッドの開発が行われている。
BACKGROUND OF THE INVENTION In recent years, as magnetic recording technology has been trending toward demands for characteristics in a high frequency range, such as in video, there is a need for magnetic heads and recording media that can adequately handle submicron recording wavelengths. Under these current circumstances, magnetic heads have a holding force H
Recording media with high c (e.g. metal, Ba-Fe tape)
In order to perform sufficient writing, a magnetic alloy film with a higher saturation magnetic flux density Bs (
For example, a magnetic head with a structure in which sendust (an amorphous material) is arranged on the gap surface of ferrite is being developed.

例えば特開昭60−95704、特開昭60−3210
7等に開示された技術が知られている。
For example, JP-A-60-95704, JP-A-60-3210
A technique disclosed in No. 7, etc. is known.

発明が解決しようとする課題 しかしながら、このようなギャップ面に金属磁性膜を用
いた磁気ヘッドのギャップ接合強度は弱く、チップ切断
時やテープ走行面の研磨時にギャップ接合面で剥がれる
という課題があった。
Problems to be Solved by the Invention However, the gap bonding strength of magnetic heads using a metal magnetic film on the gap surface is weak, and there is a problem that the gap bonding surface may peel off when cutting chips or polishing the tape running surface. .

課題を解決するための手段 請求項1の本発明は、強磁性酸化物を主体とする磁気コ
アのギャップ面が、金属磁性膜からなる磁気ヘッドにお
いて、コア半体の突合せ面に金属ロウ材が形成されてい
ることを特徴とする磁気ヘッドである。
Means for Solving the Problems The present invention as claimed in claim 1 provides a magnetic head in which a gap surface of a magnetic core mainly made of a ferromagnetic oxide is made of a metal magnetic film, and a metal brazing material is provided on the abutting surfaces of the core halves. This is a magnetic head characterized by the following:

請求項4の本発明は、主コアが強磁性酸化物を主体とす
る磁気ヘッドの製造方法において、対で磁気ヘッドとな
るコア半体のギヤツブ形成面を鏡面に加工する工程と、
そのLへ反応防止膜を形成し金属磁性膜を形成する工程
と、ギャップ材としてギャップ面に金属ロウ(オを形成
する工程と、このような一対のコア半体のギャップ面を
突き合わせた状態て金属ロウ材の液相が出現する温度以
上で非酸化性雰囲気において熱処理し接合する事により
磁気的なギャップを形成する工程とを備えたことを特徴
とする磁気ヘッドの製造方法である。
The present invention according to claim 4 provides a method for manufacturing a magnetic head in which the main core is mainly made of ferromagnetic oxide, including the step of processing gear-forming surfaces of core halves that form a pair of magnetic heads into a mirror surface;
A process of forming a reaction prevention film on the L and a metal magnetic film, a process of forming a metal solder (O) on the gap surface as a gap material, and a state in which the gap surfaces of the pair of core halves are butted together. This method of manufacturing a magnetic head is characterized by the step of forming a magnetic gap by heat-treating and bonding in a non-oxidizing atmosphere at a temperature higher than the temperature at which a liquid phase of the metal brazing material appears.

作用 本発明では、この金属ロウ材の存在により、工数の少な
い製造方法で強固なギャップ接合ができる。
Function: In the present invention, due to the presence of the metal brazing material, a strong gap joint can be made with a manufacturing method that requires fewer man-hours.

実施例 以下、本発明の一実施例の磁気ヘッドについて図面を参
照しながら説明する。
Embodiment A magnetic head according to an embodiment of the present invention will be described below with reference to the drawings.

m1図は本発明の磁気ヘッドの構成の一実施例を示すも
ので、フェライトコア材lのギャップ面にセンダスト膜
2.2′が成膜され、センダスト膜2と2′の間には磁
気ギャップ及び接合用として金属ロウ4.4゛が形膜さ
れており、またフェライト材とセンダスト膜の間には反
応防止膜としてl「膜(図では省略)が形成されている
。コア半体の接合ζJ金属ロウとガラス3によって行わ
れでいる。このようにして得られた磁気ヘッドチップは
、接合力の強いものであった。
Figure m1 shows an embodiment of the structure of the magnetic head of the present invention, in which a sendust film 2.2' is formed on the gap surface of the ferrite core material l, and a magnetic gap is formed between the sendust films 2 and 2'. A 4.4" metal solder film is formed for bonding, and a 1" film (not shown in the figure) is formed as a reaction prevention film between the ferrite material and the sendust film. This was done using ζJ metal solder and glass 3. The magnetic head chip thus obtained had a strong bonding force.

第2図は本発明の他の実施例の磁気ヘッドの構成を示す
もので、フェライトコア材5のギャップ面にセンダスト
膜6.6”が成膜され、センタスト膜6と6′の間には
磁気ギャップ材としてテープ走行面側の突合せ面に(以
下フロントギャップと記す)SiO2とガラス膜8が形
成されており、他のギャップ面に(以下ハックギャップ
と記す)金属ロウ9が形成されている。また、フェライ
ト材とセンダスト膜の開には反応防止膜としてI「膜(
図では省略)が形成されている。コア半体の接合は、ガ
ラス膜8と、金属ロウ9とトラック幅規制用のガラス7
によって行われ、このようにして得られた磁気ヘッドチ
ップは接合力の強いものであった。
FIG. 2 shows the configuration of a magnetic head according to another embodiment of the present invention, in which a sendust film 6.6'' is formed on the gap surface of the ferrite core material 5, and between the centerust films 6 and 6'. As a magnetic gap material, SiO2 and a glass film 8 are formed on the abutting surface on the tape running surface side (hereinafter referred to as the front gap), and a metal solder 9 (hereinafter referred to as the hack gap) is formed on the other gap surface. .In addition, an I" film (
(omitted in the figure) is formed. The core halves are joined by a glass film 8, a metal solder 9, and a glass 7 for regulating track width.
The magnetic head chip thus obtained had a strong bonding force.

次に、本発明の一実施例の磁気ヘッドの製造方法につい
て図面を参照しながら説明する。
Next, a method of manufacturing a magnetic head according to an embodiment of the present invention will be described with reference to the drawings.

第3図は、本発明の磁気へ・ソトの製造方法を示す工程
図である。第3図(a)は、フェライトコア材10に巻
き線溝11を形成したコア半体である。第3図(b )
は、鏡面に加工されたフェライト面に反応防止1Ith
(例えば11・)を100A程度形成した後センダスト
膜12を3〜4μmスパッター法で等で成膜し、さらに
ギャップ材として金属ロウ13を形成したコア半体であ
る。なお、金属ロウとしてAg−Cu−In合金を用い
、センダスト膜の磁気特性が良好な600℃付近て液相
が出現するように、CIピ 10〜60重量%、1n:
 1〜40重量%、望ましくは、Cu:  20〜45
+  In:25〜35 w t%の範囲になるように
スパッタ法で成膜した。第2図(C)は、一対のコア半
体を突き合わせた状態でAg−Cu−In膜の液相が出
現する温度以上で非酸化性雰囲気において接合した後、
テープ走行面にトラック幅規制溝を加工し、ガラス14
をモールドしたコア15である。第2図(d)は、ギャ
ップ形成されたコア】5を所定のサイズに切断したヘッ
ドチップ16である。
FIG. 3 is a process diagram showing the method for manufacturing the magnetic material of the present invention. FIG. 3(a) shows a core half in which a winding groove 11 is formed in a ferrite core material 10. Figure 3(b)
The reaction prevention 1Ith is applied to the mirror-processed ferrite surface.
(For example, 11.) is formed to about 100 A, and then a sendust film 12 of 3 to 4 μm is formed by sputtering or the like, and a metal solder 13 is further formed as a gap material to form a core half. Incidentally, an Ag-Cu-In alloy was used as the metal solder, and 10 to 60% by weight of CI pipe, 1N:
1 to 40% by weight, preferably Cu: 20 to 45
+ In: The film was formed by sputtering so that the content was in the range of 25 to 35 wt%. FIG. 2(C) shows that after the pair of core halves are butted together and bonded in a non-oxidizing atmosphere at a temperature higher than that at which the liquid phase of the Ag-Cu-In film appears,
A track width regulating groove is machined on the tape running surface, and the glass 14
This is the core 15 which is molded. FIG. 2(d) shows a head chip 16 obtained by cutting the gap-formed core 5 into a predetermined size.

以下本発明の他の実施例の磁気ヘッドの製造方法につい
て図面を参照しながら説明する。
A method of manufacturing a magnetic head according to another embodiment of the present invention will be described below with reference to the drawings.

第4図は、本発明の磁気ヘッドの製造方法を示す工程図
である。第4図(a)はフエライI・コア材17を鏡面
に加工した後、センダスト膜18をスパッタ法等で形成
し、巻線溝19を形成したコア半体である。鏡面に加工
されたフェライト面に、反応防止膜(例えばIr)を1
00A程度形成した後センダスト膜を3〜4μmスパッ
ター法等で成膜する。第4図(b)は、テープ走行面側
のギャップ面にトラック幅規制溝20を加工し、ギャッ
プ材としてフロントギャップ面には、SiO2膜とガラ
ス膜21を、パックギャップ面には金属ロウとしてAg
−Cu−In合金膜22をスパッタ法で成膜したコア半
体である。第4図(C)は一対のコア半体を突き合わせ
た状態でAg−Co−In膜の液相が出現する温度以上
で非酸化性雰囲気において接合するとともに、トラック
幅規制溝2oにガラス23を巻き線溝側19から流し込
んだコア24である。第4図(d)は、ギャップ形成さ
れたコア24を所定のサイズに切断したべ・ソトヂップ
25である。このようにして、磁気ヘッドが製造される
FIG. 4 is a process diagram showing the method for manufacturing the magnetic head of the present invention. FIG. 4(a) shows a core half in which a Feray I core material 17 is processed into a mirror surface, a sendust film 18 is formed by sputtering, etc., and a winding groove 19 is formed. A reaction prevention film (for example, Ir) is applied to the mirror-finished ferrite surface.
After forming about 00A, a sendust film of 3 to 4 μm is formed by sputtering or the like. In FIG. 4(b), a track width regulating groove 20 is machined on the gap surface on the tape running surface side, and a SiO2 film and a glass film 21 are used as the gap material on the front gap surface, and a metal solder is used on the pack gap surface. Ag
This is a core half formed by depositing a -Cu-In alloy film 22 by sputtering. FIG. 4(C) shows a pair of core halves butted together in a non-oxidizing atmosphere at a temperature higher than the temperature at which the liquid phase of the Ag-Co-In film appears, and glass 23 is placed in the track width regulating groove 2o. This is the core 24 poured from the winding groove side 19. FIG. 4(d) shows a solid dip 25 obtained by cutting the gap-formed core 24 into a predetermined size. In this way, a magnetic head is manufactured.

発明の効果 以1:のように本発明は、ギャップ材として金属ロウ材
を用いて溶融接合することにより、チップ切断やテープ
走行面の研磨時にギャップ接合面で剥離することない堅
固な信頼性の高い磁気ヘッドが少ない工程数で得られる
Effects of the Invention As described in 1., the present invention uses a brazing metal as the gap material for melting and bonding, thereby achieving a solid and reliable structure that does not peel off at the gap bonding surface during chip cutting or polishing the tape running surface. A high quality magnetic head can be obtained with fewer steps.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の磁気ヘッドの一実施例の構成を示す斜
視図、第2図は本発明の磁気ヘッドの他の実施例の構成
を示す斜視図、第3図は本発明の一実施例にかかる磁気
ヘッドの製造方法を示す工程図、第4図は本発明の他の
実施例にかかる磁気ヘッドの製造方法を示す工程図であ
る。 1、5、 lOl 17・・・フェライト材、2、6.
12、18・・・センダスト膜、3.7、14.23・
・・ガラス、4.9、13.22・・・金属ロウ材、8
.21・・・SiO2ガラス膜。
FIG. 1 is a perspective view showing the structure of one embodiment of the magnetic head of the present invention, FIG. 2 is a perspective view showing the structure of another embodiment of the magnetic head of the invention, and FIG. 3 is an embodiment of the present invention. FIG. 4 is a process diagram showing a method of manufacturing a magnetic head according to another embodiment of the present invention. 1, 5, lOl 17... Ferrite material, 2, 6.
12, 18... Sendust film, 3.7, 14.23.
...Glass, 4.9, 13.22...Metal brazing material, 8
.. 21...SiO2 glass film.

Claims (5)

【特許請求の範囲】[Claims] (1)、強磁性酸化物を主体とする磁気コアのギャップ
面が、金属磁性膜からなる磁気ヘッドにおいて、コア半
体の突合せ面に金属ロウ材が形成されていることを特徴
とする磁気ヘッド。
(1) A magnetic head in which the gap surface of a magnetic core mainly made of ferromagnetic oxide is made of a metal magnetic film, characterized in that a metal brazing material is formed on the abutting surfaces of the core halves. .
(2)強磁性酸化物を主体とする磁気コアのギャップ面
が、金属磁性膜からなる磁気ヘッドにおいて、テープ走
行面側のギャップ面にSiO_2膜、あるいはさらにガ
ラス膜が形成され、他のギャップ面に金属ロウ材が形成
されたことを特徴とする磁気ヘッド。
(2) In a magnetic head where the gap surface of the magnetic core mainly composed of ferromagnetic oxide is made of a metal magnetic film, a SiO_2 film or an additional glass film is formed on the gap surface on the tape running surface side, and the other gap surface A magnetic head characterized in that a metal brazing material is formed on.
(3)金属ロウ材としてAg−Cu−In系合金膜が用
いられ、その組成比が、Cu:10〜60重量%、In
:1〜40重量%であることを特徴とする請求項1又は
2記載の磁気ヘッド。
(3) An Ag-Cu-In alloy film is used as the metal brazing material, and its composition ratio is Cu: 10 to 60% by weight, In
3. The magnetic head according to claim 1, wherein: 1 to 40% by weight.
(4)主コアが強磁性酸化物を主体とする磁気ヘッドの
製造方法において、対で磁気ヘッドとなるコア半体のギ
ャップ形成面を鏡面に加工する工程と、その上へ反応防
止膜を形成し金属磁性膜を形成する工程と、ギャップ材
としてギャップ面に金属ロウ材を形成する工程と、この
ような一対のコア半体のギャップ面を突き合わせた状態
で前記金属ロウ材の液相が出現する温度以上で非酸化性
雰囲気において熱処理し接合する事により磁気的なギャ
ップを形成する工程とを備えたことを特徴とする磁気ヘ
ッドの製造方法。
(4) In a method of manufacturing a magnetic head whose main core is mainly made of ferromagnetic oxide, the step of processing the gap-forming surfaces of the core halves that form a pair of magnetic heads into a mirror surface, and forming a reaction prevention film thereon. a step of forming a metal magnetic film, a step of forming a metal brazing material on the gap surface as a gap material, and a liquid phase of the metal brazing material appearing when the gap surfaces of the pair of core halves are brought into contact with each other. 1. A method of manufacturing a magnetic head, comprising the step of forming a magnetic gap by heat treatment and bonding in a non-oxidizing atmosphere at a temperature higher than .
(5)主コアが強磁性酸化物を主体とする磁気ヘッドの
製造方法において、対で磁気ヘッドとなるコア半体のギ
ャップ形成面を鏡面に加工する工程と、その上へ反応防
止膜を形成した後金属磁性膜を形成する工程と、ギャッ
プ材としてテープ走行面側のギャップ面にSiO_2膜
とガラス膜を形成し、他のギャップ面には金属ロウ材を
形成する工程と、このような一対のコア半体のギャップ
面を突き合わせた状態で前記金属ロウ材の液相が出現す
る温度以上で非酸化性雰囲気において熱処理し接合する
事により磁気的なギャップを形成する工程とを備えたこ
とを特徴とする磁気ヘッドの製造方法。
(5) In a method of manufacturing a magnetic head whose main core is mainly made of ferromagnetic oxide, the step of processing the gap-forming surfaces of the core halves that form a pair of magnetic heads into a mirror finish, and forming a reaction prevention film thereon. After that, a step of forming a metal magnetic film, a step of forming a SiO_2 film and a glass film as gap materials on the gap surface on the tape running surface side, and a step of forming a metal brazing material on the other gap surfaces. forming a magnetic gap by heat-treating and bonding the core halves in a non-oxidizing atmosphere at a temperature higher than that at which a liquid phase of the metal brazing material appears with the gap surfaces of the core halves butted against each other. Features: A manufacturing method for magnetic heads.
JP7521590A 1990-03-22 1990-03-22 Magnetic head and production thereof Pending JPH03273508A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7521590A JPH03273508A (en) 1990-03-22 1990-03-22 Magnetic head and production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7521590A JPH03273508A (en) 1990-03-22 1990-03-22 Magnetic head and production thereof

Publications (1)

Publication Number Publication Date
JPH03273508A true JPH03273508A (en) 1991-12-04

Family

ID=13569767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7521590A Pending JPH03273508A (en) 1990-03-22 1990-03-22 Magnetic head and production thereof

Country Status (1)

Country Link
JP (1) JPH03273508A (en)

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