JPH0326960U - - Google Patents
Info
- Publication number
- JPH0326960U JPH0326960U JP8824889U JP8824889U JPH0326960U JP H0326960 U JPH0326960 U JP H0326960U JP 8824889 U JP8824889 U JP 8824889U JP 8824889 U JP8824889 U JP 8824889U JP H0326960 U JPH0326960 U JP H0326960U
- Authority
- JP
- Japan
- Prior art keywords
- case
- nozzle
- gas introduction
- gas
- side wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989088248U JPH0724774Y2 (ja) | 1989-07-27 | 1989-07-27 | 集束イオンビーム装置用ガス導入機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989088248U JPH0724774Y2 (ja) | 1989-07-27 | 1989-07-27 | 集束イオンビーム装置用ガス導入機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0326960U true JPH0326960U (enExample) | 1991-03-19 |
| JPH0724774Y2 JPH0724774Y2 (ja) | 1995-06-05 |
Family
ID=31637872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989088248U Expired - Lifetime JPH0724774Y2 (ja) | 1989-07-27 | 1989-07-27 | 集束イオンビーム装置用ガス導入機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0724774Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4521338Y1 (enExample) * | 1969-02-03 | 1970-08-25 |
-
1989
- 1989-07-27 JP JP1989088248U patent/JPH0724774Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4521338Y1 (enExample) * | 1969-02-03 | 1970-08-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0724774Y2 (ja) | 1995-06-05 |