JPH0326955A - Method for measuring bounary impedance distribution in micro-region - Google Patents
Method for measuring bounary impedance distribution in micro-regionInfo
- Publication number
- JPH0326955A JPH0326955A JP16070989A JP16070989A JPH0326955A JP H0326955 A JPH0326955 A JP H0326955A JP 16070989 A JP16070989 A JP 16070989A JP 16070989 A JP16070989 A JP 16070989A JP H0326955 A JPH0326955 A JP H0326955A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- sample
- tip
- solution
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000009826 distribution Methods 0.000 title claims description 19
- 239000000523 sample Substances 0.000 claims abstract description 72
- 238000005259 measurement Methods 0.000 claims abstract description 22
- 238000000691 measurement method Methods 0.000 claims 1
- 239000011888 foil Substances 0.000 abstract description 5
- 239000011347 resin Substances 0.000 abstract description 5
- 229920005989 resin Polymers 0.000 abstract description 5
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 5
- 239000010935 stainless steel Substances 0.000 abstract description 5
- 239000004698 Polyethylene Substances 0.000 abstract description 2
- 229910052731 fluorine Inorganic materials 0.000 abstract description 2
- 239000011737 fluorine Substances 0.000 abstract description 2
- -1 polyethylene Polymers 0.000 abstract description 2
- 229920000573 polyethylene Polymers 0.000 abstract description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 abstract description 2
- 229920002554 vinyl polymer Polymers 0.000 abstract description 2
- 229920000178 Acrylic resin Polymers 0.000 abstract 1
- 239000004925 Acrylic resin Substances 0.000 abstract 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract 1
- 239000013013 elastic material Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 11
- 230000007423 decrease Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000002847 impedance measurement Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 206010011469 Crying Diseases 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 239000007832 Na2SO4 Substances 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 230000035922 thirst Effects 0.000 description 1
- 210000005239 tubule Anatomy 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、微小領域における界面インピーダンス分布測
定方法に関し、特に、試料の表面にプローブの下端を密
合させて溶液が漏れない空間を形成することによって、
微小領域の測定範囲を限定し、検出精度を向上させるた
めの新規な改良に関する，
〔従来の技術〕
従来、塗覆装を施した金属材料の腐食性を測定するため
の界面インピーダンス分布の測定は、Ｉｓａａｃｓ氏、
Ｌｅｉｄｈｅｉｓｅｒ氏ら′によって試みられており、
Ｉｓａａｃｓ氏は３電極式、Ｌｅｉｄｈｅｉｓｅｒ氏は
２電極式で測定しているが、何れも、第７図に示される
ように、溶液１中に浸漬された試料２に対し、電！Ｉ１
３を内部に有するプローブ４の先端４ａが接近して配設
され、プローブ４を試料２にできるだけ近づけることに
より、プローブ４の検出範囲を限定するようにした方法
である．
〔発明が解決しようとする課題〕
従来の微小領域における界面インピーダンス分布測定方
法は、以上のように構戒されているため、次のような課
題が存在していた．
すなわち、プローブの下端を試料に近（＝ｔけ、試料と
は非接触の状態で検出範囲を限定する方法では、プロー
ブの近傍の電気信号にプローブから遠く離れた部分の電
気信号が混入し、平面方向の分解能が低下していた．
また、測定範囲が明確に検定されないため、測定された
インピーダンス値を単位面積当りに換算することが難し
く、測定値の絶対性に欠け、広く使用できる汎用測定方
法として収汲うことが困難であった．
さらに、前述の・ように、１ローブを試料に接触させる
ことなく測定を行った場合には、第６図に示すように、
試料から離れた位置においても電位振幅の減少が認めら
れ、ブロードな状態の特性曲線となっている．
本発明は、以上のような課題を解決するためになされた
もので、特に、試料の表面に１ローブの先端を密合させ
て溶液が漏れない空間を形或することによって、微小領
域の測定範囲を限定し、検出精度を向上させるようにし
た微小頭域における界面インピーダンス分布測定方法を
提供することを目的とする．
〔課題を解決するための手段〕
本発明による微小領域における界面インピーダンス分布
測定方法は、溶液中に浸漬させた試料に対して、プロー
ブにより界面インピーダンスを測定するようにした方法
において、前記プローブの先端を前記試料の表面に接ｈ
さぜ、前記プローブ内の溶液が漏れない空間をプローブ
内に形成して測定範囲を限定するようにした方法である
。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for measuring interfacial impedance distribution in a microscopic area, and in particular, a method for measuring interfacial impedance distribution in a microscopic area, in particular, a method in which the lower end of a probe is brought into close contact with the surface of a sample to form a space from which a solution does not leak. By this,
[Conventional technology] Conventionally, interfacial impedance distribution measurements for measuring the corrosivity of coated metal materials have been conducted. , Mr. Isaacs,
It has been attempted by Leidhiser et al.
Mr. Isaacs uses a 3-electrode method, and Mr. Leidheiser uses a 2-electrode method, but in both cases, as shown in Figure 7, the sample 2 immersed in the solution 1 receives an electric current! I1
In this method, the tip 4a of a probe 4 having a probe 3 inside thereof is placed close to each other, and the detection range of the probe 4 is limited by bringing the probe 4 as close as possible to the sample 2. [Problems to be solved by the invention] Conventional methods for measuring interfacial impedance distribution in microscopic areas are subject to the above-mentioned limitations, and as a result, the following problems have existed. In other words, in a method in which the detection range is limited by keeping the lower end of the probe close to the sample (=t) and not in contact with the sample, the electrical signal near the probe is mixed with the electrical signal from the part far away from the probe. The resolution in the planar direction was reduced. Also, because the measurement range was not clearly verified, it was difficult to convert the measured impedance value per unit area, and the measurement value lacked absoluteness, making it difficult to use for general-purpose measurement that can be widely used. Furthermore, as shown in Fig. 6, when measurements were carried out without bringing one lobe into contact with the sample, as described above,
A decrease in potential amplitude is observed even at positions far from the sample, resulting in a broad characteristic curve. The present invention was made to solve the above-mentioned problems, and in particular, it is possible to measure a minute area by closely fitting the tip of one lobe to the surface of a sample to form a space in which the solution does not leak. The purpose of this study is to provide a method for measuring interfacial impedance distribution in a small head area that limits the range and improves detection accuracy. [Means for Solving the Problems] A method for measuring interfacial impedance distribution in a micro region according to the present invention is a method in which the interfacial impedance of a sample immersed in a solution is measured using a probe. is in contact with the surface of the sample.
In this method, a space is formed within the probe so that the solution within the probe does not leak, thereby limiting the measurement range.
本発明による微小領域における界面インピーダンス分布
測定方法においては、プローブの先端を試枳の茂面に接
触させるため、溶液が漏れない空間をプローブ内に形成
することができ、測定対象範囲を１ロープの細管内部の
みとすることが可能となる．
従って、プローブと試料が接合することにより、プロー
ブから離間した部位までが測定対象とならず、プローブ
内のみの微小領域にら限られるため、界面インピーダン
スがＲ＝ρ・Ｌ／Ｓ （ Ｒ ：インピーダンス、ρ：
比抵抗、Ｌ：長さ、Ｓ：断面積）に従うことから、測定
対象面積（Ｓ）が小さくなった分だけ、インピーダンス
が大きくなるものである．
〔実施例〕
以下、図面と共に本発明による微小領域における界面イ
ンピーダンス分布測定方法の好適な実施例について詳細
に説明する．
尚、従来例と同一又は同等部分には、同一符号を付して
説明する．
第１図から第６図迄は、本発明による微小領域における
界面インピーダンス分布測定方法を示すためのもので、
第ｌ図は測定状態を示す構成図、第２図は第１図のプロ
ーブを詳細に示す横戒図、第３図は測定状態を示す原理
図、第４図は界面インピーダンス分布測定装置を示すブ
ロック図、第５図は測定データの特性曲線図である．図
において符号１で示されるものは、０．０ＩＭ旧，ＳＯ
，のｌ容液て゛あり、この冫８液１中に浸ｉＮされ｛男
脂で肢覆したステンレス箔（厚さ：２０ｕｍ｝の断面よ
りなる試ｆ：Ｉ２の表面２ａには、ガラス管よりなるプ
ローブ４の先端４ａが接合して配設されている．このプ
ローブ４の先端４ａの内径は、０．３７ｉ＋ｍに設定さ
れている．
前記先＠４ａは、ビニール系、アクリル系、ポリエチレ
ン、フッ素系（テフロン）等の有機樹脂、ゴム等からな
る弾性材料で構成されており、先端４ａが１ｌｃ料２の
表面２ａに接合した場な、プローブ４内の空間４ｂ内に
おける溶液１は５１ローブ４外に漏れることのないよう
に横或されている。In the method for measuring interfacial impedance distribution in a minute area according to the present invention, since the tip of the probe is brought into contact with the surface of the test tube, a space can be created in the probe from which the solution does not leak, and the measurement target area can be reduced to one rope. It becomes possible to limit the amount to only the inside of the tubule. Therefore, by joining the probe and the sample, the measurement target does not extend to the area far away from the probe, but is limited to a minute area only within the probe, so the interface impedance is R = ρ・L/S (R: impedance , ρ:
(specific resistance, L: length, S: cross-sectional area), the impedance increases as the area to be measured (S) decreases. [Example] Hereinafter, a preferred example of the method for measuring interfacial impedance distribution in a minute area according to the present invention will be described in detail with reference to the drawings. Note that the same or equivalent parts as in the conventional example are given the same reference numerals and explained. FIG. 1 to FIG. 6 are for illustrating the method of measuring interfacial impedance distribution in a minute area according to the present invention.
Figure 1 is a configuration diagram showing the measurement state, Figure 2 is a horizontal diagram showing the probe in Figure 1 in detail, Figure 3 is a principle diagram showing the measurement state, and Figure 4 shows the interfacial impedance distribution measuring device. The block diagram and Figure 5 are characteristic curve diagrams of measured data. In the figure, the number 1 indicates 0.0IM old, SO
, and the surface 2a of I2 is made of a cross section of stainless steel foil (thickness: 20 um) immersed in this liquid 8 and coated with male fat. The tip 4a of the probe 4 is connected and disposed.The inner diameter of the tip 4a of this probe 4 is set to 0.37i+m.The tip @ 4a is made of vinyl, acrylic, polyethylene, or fluorine. When the tip 4a is bonded to the surface 2a of the 1LC material 2, the solution 1 in the space 4b inside the probe 4 has 51 lobes 4. It is placed horizontally to prevent leakage.
前記１ローブ４内の前記空間４ｂ内には、電極３が配設
されている．
前記電極３は、第２図で示されるように構成されており
、中心位置に形戒された参照電極軸３ａ、この参照電極
輪３ａの外周に形或された参照電極軸絶縁被Ｆｍ！３ｂ
、この参照電極軸３ａの先端に形成された微小参照電極
３ａ＾、および、前記参照電極軸絶縁被ｆｆ３ｂの外周
位置に非接触状態でスバイラル状に形成された対極３０
とから構成され、この対極３ｃは直系０．１３ｍｍの白
金で構成されている５
前記試料２、溶Ｍｌおよびプローブ４を有する容器１０
は、マイクロコンピュータ１ｌにより制御を受けるバル
スモータ制御部１２によって、Ｘ，Ｙ，Ｚの三次元方向
に位置合わせを行うことができるテーブル１３上に配設
されている。An electrode 3 is disposed within the space 4b within the one lobe 4. The electrode 3 is constructed as shown in FIG. 2, with a reference electrode shaft 3a shaped at the center, and a reference electrode shaft insulation sheath Fm! shaped around the outer periphery of this reference electrode ring 3a. 3b
, a minute reference electrode 3a^ formed at the tip of this reference electrode shaft 3a, and a counter electrode 30 formed spirally in a non-contact state on the outer circumferential position of the reference electrode shaft insulating covering ff3b.
5, the counter electrode 3c is made of platinum with a diameter of 0.13 mm; a container 10 containing the sample 2, the dissolved Ml, and the probe 4;
are arranged on a table 13 that can be aligned in three-dimensional directions of X, Y, and Z by a pulse motor control section 12 controlled by a microcomputer 1l.
前記プローブ４内の電極３才３よび試料２は、ボテンシ
ョスタット１４に接続されており、このボテンシゴスタ
ットｌ４は、前記マイクロコンビ．ユータ１１に接続さ
れたロックインアンプ１５及びインピーダンス解析装置
１６に接続されている。The electrode 3 in the probe 4 and the sample 2 are connected to a botensiostat 14, which is connected to the microcombi. It is connected to a lock-in amplifier 15 connected to the user 11 and an impedance analysis device 16.
前記マイクロコンピュータｌ１には、プリンタ１７およ
びハードディスクｌ８が接続されており、マイクロコン
ピュータ１１に対するデータの出入を行うことができる
ように構成されている．次に、前述の電極３に対して交
流電流源３Ａおよび電圧源３Ｂを、第３図で示すように
、印加した攪、第４図に示す走査インピーダンス測定装
置２０におけるテーブル】３を，バルスモー夕制御部１
２によって、三次元方向に移動させながら、試料２の被
測定点を検出し、試料２の界面インピーダンスを測定し
た．
尚、前記走査インピーダンス測定装置２０におけるボテ
ンショスタット１４は東方技研のＭｏｄｅ ｌ２０００
を用い、インピーダンス解析装置１６はＮＦ回路５０５
０＾を用いると共に、ロックインアンブ１５はＮＦ回路
５６１０を用いた．
従って、ボテンショスタッ１・】４から得られた前記電
極３からの出力信号は、インピーダンス解析装［１６で
処理された後、マイクロコンビスータ１１を介して、プ
リンタ１７で印字されると共に、ハードディスク１８に
記憶されるように構成されている．
次に、実際に行ったインピーダンスの測定においては、
０．０１Ｈ Ｎａ２ＳＯ４中に浸漬させた、樹脂で被覆
したステンレス箔〈厚さ＋ ２０ｐｍ）よりなる試料２
の断面に、プロープ４の先端４ａを密着して接合させて
か八行った。A printer 17 and a hard disk 18 are connected to the microcomputer 11, and the microcomputer 11 is configured to be able to input and output data to and from the microcomputer 11. Next, an alternating current source 3A and a voltage source 3B are applied to the electrode 3 as shown in FIG. Control unit 1
2, the measurement point of sample 2 was detected while moving in three-dimensional direction, and the interfacial impedance of sample 2 was measured. The botensiostat 14 in the scanning impedance measuring device 20 is Model 12000 manufactured by Toho Giken.
The impedance analysis device 16 uses the NF circuit 505
0^ was used, and the lock-in amplifier 15 used an NF circuit 5610. Therefore, the output signal from the electrode 3 obtained from the potentiometer 1.4 is processed by the impedance analyzer [16], then printed by the printer 17 via the micro combisuiter 11, and printed on the hard disk 18. It is configured so that it is stored in Next, in the actual impedance measurement,
Sample 2 consisting of resin-coated stainless steel foil (thickness + 20 pm) immersed in 0.01H Na2SO4
The tip 4a of the probe 4 was closely joined to the cross section of the probe.
一点目の位置のインピーダンス測定が終了した？麦、電
極３を試料２から離間さぜて、水平方向に移動させ、再
び試料２に密着させ、インピーダンスを測定する手順で
、ステンレス箔よりなる試料２の断面を横断するように
２．２ ｅｓ−だけ走査させた．この時の測定結果を第
５図に示している。Has the impedance measurement at the first point been completed? Then, the electrode 3 was separated from the sample 2, moved horizontally, brought into close contact with the sample 2 again, and the impedance was measured. − was scanned. The measurement results at this time are shown in FIG.
この第５図の特性曲線は、電流変調モードでの測定例で
あり、印加電流をＯＩＩ＾に保持し、ｏ．ｏｔｔ＋＾の
電流変調を与えた時の電位振幅を示している．従って、
第５図から明らかなように、電極３が試料のステンレス
Ｔ３（寸近にくると、電位振幅のシャープな減少がみら
れ、金属箔部分と他の部分との差異が明確で、位置分解
能に陵れていることが明らかである．
これに対して、比較例・とじて、プローブ４を試料２に
接含させずに同様の測定を行った場きにはく従来方法〉
、第６図に示したように、ステンレス箔から離れた位置
においても電位振幅の減少が認められ、第５図よりもブ
ロードな特性曲線を描いている．
また、電位振幅の値を比較すると、同一条件で測定した
渇きに、本発明の方法の方が５〜１０倍程度電位振幅が
大きい．つまり、インピーダンスΔＶ
（Ｒ）は、Ｒ一訂、但し、Δ■はｔ泣振幅、△ｌは電流
変調であるから、明らかに本発明の方法で測定した方が
インピーダンスが大きくなっている。The characteristic curve in FIG. 5 is an example of measurement in current modulation mode, where the applied current is maintained at OII^ and o. It shows the potential amplitude when applying current modulation of ott+^. Therefore,
As is clear from Fig. 5, when the electrode 3 comes close to the stainless steel T3 sample, there is a sharp decrease in the potential amplitude, and the difference between the metal foil part and other parts is clear, and the positional resolution increases. On the other hand, in a comparative example, when similar measurements were made without the probe 4 coming into contact with the sample 2, the conventional method failed.
As shown in Fig. 6, a decrease in the potential amplitude was observed even at a position away from the stainless steel foil, and the characteristic curve was broader than that in Fig. 5. Furthermore, when comparing the potential amplitude values, the potential amplitude of the method of the present invention is about 5 to 10 times larger than that of thirst measured under the same conditions. In other words, the impedance ΔV (R) is the same as R1, but since Δ■ is the amplitude and Δl is the current modulation, it is clear that the impedance is larger when measured by the method of the present invention.
これは、プローブ４を試料２に接合させずに測定した場
合には、電′Ｓ３から遠く離間した部位までが測定対象
となるため、インピーダンスがＲ一ρ・Ｌ／Ｓ （但し
、ρ：比抵抗、Ｉ、：長さ、Ｓ：断面積〉に従うことか
ら、測定対象面ｆｌｆ（Ｓ）が大きくなった分だけ、イ
ンピーダンスが小さくなることによるものと考えられる
．
さらに、電位振幅の値を比較しても、本発明の方法の方
が、測定範囲を限定できるために、極めて優れているこ
とが明らかである．
〔発明の効果〕
本発明による微小領域における界面インビーダンス分布
測定方法は、以上のように構成されているため、次のよ
うな効果を得ることができる．すなわち、プローブの先
端を試料の表面に接合させて、界面インピーダンス分布
を微小頭域に限定し、プローブ内の溶液を漏れない状態
としているため、プローブの先端の内径に相当する極め
て限定された面積内におけるインピーダンス測定を行う
ため、極めて高感度の測定を得ることができる．
従って、試料における金属箔部分と他の部分ととの差異
を明確に測定し、優れた位置分解能を得ることができる
ものである．This is because when measuring without connecting the probe 4 to the sample 2, the impedance is R-ρ・L/S (where ρ: ratio Resistance, I: length, S: cross-sectional area〉, it is thought that this is because the impedance becomes smaller as the surface to be measured flf(S) becomes larger. Furthermore, the values of potential amplitude are compared. However, it is clear that the method of the present invention is extremely superior because the measurement range can be limited. [Effects of the Invention] The method of measuring interfacial impedance distribution in a minute area according to the present invention is With the above configuration, the following effects can be obtained: the tip of the probe is joined to the surface of the sample, the interfacial impedance distribution is limited to a minute head area, and the solution inside the probe is Since the impedance measurement is performed within an extremely limited area corresponding to the inner diameter of the tip of the probe, extremely sensitive measurements can be obtained. It is possible to clearly measure the difference between different parts and obtain excellent positional resolution.
第１図から第６図迄は、本発明による微小Ｗｉ域におけ
る界面インピーダンス分布測定方法を示すためのもので
、第１図は測定状態を示す構或図、第２図は第１図のプ
ローブを詳細に示す構成図、第３図は測定状態を示す原
理図、第４図は界面インピーダンス分布測定装置を示す
ブロック図、第５図は測定データの特性曲線図、第６図
および第７図は従来の界面インピーダンス分布測定方法
を示すためのもので、第６図は特性曲線図、第７図は測
定状態を示す構成図である．
１は溶液、２は試料、２ａは表面、４は１ローブ、４ａ
発明の先端、４ｂは空間である。
第１図
＊Ｋ（Ａ）’ 測ｘ対！？［
領ヱ或゛（日）泪り定ダ寸象力）ら陳きたし）頒１或゛
第４図
１ｔ
１８
第５図
第６図
１ｍｍ1 to 6 are for illustrating the method of measuring interfacial impedance distribution in a minute Wi region according to the present invention. FIG. 1 is a diagram showing the configuration of the measurement state, and FIG. Fig. 3 is a principle diagram showing the measurement state, Fig. 4 is a block diagram showing the interfacial impedance distribution measuring device, Fig. 5 is a characteristic curve diagram of measurement data, and Figs. 6 and 7. Figure 6 is a characteristic curve diagram, and Figure 7 is a configuration diagram showing the measurement state. 1 is solution, 2 is sample, 2a is surface, 4 is 1 lobe, 4a
The leading edge of the invention, 4b, is space. Figure 1 *K(A)' Measure x pair! ? [Region ヱ゛(Japanese) Crying Determination of Power) ra Chinshi) Distribution 1〖゛Fig. 4 1t 18 Fig. 5 Fig. 6 Fig. 1mm
Claims (2)
プローブ（４）により界面インピーダンスを測定するよ
うにした微小領域における界面インピーダンス分布測定
方法において、 前記プローブ（４）の先端（４ａ）を前記試料（２）の
表面に接合させ、前記プローブ（４）内の溶液（１）が
漏れない空間（４ｂ）をプローブ（４）内に形成して測
定範囲を限定することを特徴とする微小領域におけるに
おける界面インピーダンス分布測定方法。(1) For the sample (2) immersed in the solution (1),
In a method for measuring an interfacial impedance distribution in a micro region, in which the interfacial impedance is measured by a probe (4), the tip (4a) of the probe (4) is bonded to the surface of the sample (2), and the probe (4) A method for measuring interfacial impedance distribution in a minute area, characterized in that the measurement range is limited by forming a space (4b) in the probe (4) from which the solution (1) inside does not leak.
弾性部材を有し、前記弾性部材が前記試料（２）の表面
（２ａ）に接合していることを特徴とする請求項１記載
の界面インピーダンス分布測定方法。(2) The probe (4) has an elastic member provided at the tip (4a), and the elastic member is bonded to the surface (2a) of the sample (2). The interfacial impedance distribution measurement method described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1160709A JP2725843B2 (en) | 1989-06-26 | 1989-06-26 | Measurement method of interface impedance distribution in micro area |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1160709A JP2725843B2 (en) | 1989-06-26 | 1989-06-26 | Measurement method of interface impedance distribution in micro area |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0326955A true JPH0326955A (en) | 1991-02-05 |
| JP2725843B2 JP2725843B2 (en) | 1998-03-11 |
Family
ID=15720775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1160709A Expired - Lifetime JP2725843B2 (en) | 1989-06-26 | 1989-06-26 | Measurement method of interface impedance distribution in micro area |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2725843B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5668435A (en) * | 1994-08-01 | 1997-09-16 | Hitachi, Ltd. | Color display system with color cathode ray tube having a high breakdown voltage |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60173451A (en) * | 1984-02-20 | 1985-09-06 | Toshiba Corp | Instrument for measuring corrosion of metal |
| JPS62222156A (en) * | 1986-03-25 | 1987-09-30 | Toshiba Corp | Stirring electrode device |
| JPS63317760A (en) * | 1987-06-19 | 1988-12-26 | Univ Tohoku | Potential measuring electrode cell |
-
1989
- 1989-06-26 JP JP1160709A patent/JP2725843B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60173451A (en) * | 1984-02-20 | 1985-09-06 | Toshiba Corp | Instrument for measuring corrosion of metal |
| JPS62222156A (en) * | 1986-03-25 | 1987-09-30 | Toshiba Corp | Stirring electrode device |
| JPS63317760A (en) * | 1987-06-19 | 1988-12-26 | Univ Tohoku | Potential measuring electrode cell |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5668435A (en) * | 1994-08-01 | 1997-09-16 | Hitachi, Ltd. | Color display system with color cathode ray tube having a high breakdown voltage |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2725843B2 (en) | 1998-03-11 |
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