JPH0326362A - Chucking device for hollow base body - Google Patents

Abstract

PURPOSE:To reduce an initial cost by positioning plural pieces of chucks on the same axis and connecting the chucks in series in a vertical direction in such a manner that upper chucks hold the hollow base body having the bore of a large diameter. CONSTITUTION:An arm 5 of a chuck moving device 2 is swung at a prescribed angle in a horizontal direction and the chucking device 1 is moved to a position where the base body is transferred and received. The chucking device 1 is thereafter moved downward by moving the lifting device 4 of the chuck moving device 2 downward, by which the hollow base body 7a is so held as to close its top end aperture. After the chucking device 1 is moved upward, the arm 12 is swung at a prescribed angle in a horizontal direction so that the chucking device 1 can be positioned above a coating liquid storage tank 3. The lifting device 4 is then moved downward to immerse the hollow base body 7a into the coating liquid and after the prescribed immersion the hollow base body 7a is taken out of the coating liquid.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a chuck device for hollow substrates used in dip coating hollow substrates.

[Prior Art] When a photoreceptor for an electrophotographic copying machine or the like is manufactured by a dip coating method, for example, Japanese Patent Application Laid-Open No. 62-65763
As disclosed in the above publication, there is a need for a chuck device that holds a cylindrical hollow base so as to close the upper end opening and immerses it in a coating solution and takes it out, and various chuck devices have already been put into practical use. It is provided.

[Problems to be Solved by the Invention] However, such conventional chuck devices are usually equipped with chucks that can be used for hollow substrates with the same inner diameter, and are not suitable for hollow substrates with various inner diameters. Could not be hired. For this reason, when dip coating hollow substrates having various inner diameters, it is necessary to install a plurality of chuck devices, which is disadvantageous in terms of equipment investment.

The present invention has focused on such a problem, and as a result of intensive studies from various aspects to solve this problem, a plurality of chucks that hold the hollow base so as to close the upper end opening are positioned coaxially and They discovered that it is sufficient to connect the chucks in series and to attach the chucks located higher up so that they can hold a larger diameter hollow base body.

[Means for Solving the Problems] That is, the chuck device for a hollow substrate according to the present invention is configured to close the upper end opening of the hollow substrate in the chuck device for a hollow substrate suspended on an arm of a chuck moving device. A plurality of holding chucks are positioned on the same axis and connected in series in the vertical direction, and the chucks disposed higher are mounted so that they can hold a hollow base having a larger inner diameter. It is something.

[Example] Describing an example below, FIG. 1 is a diagram showing a schematic configuration of a dip coating apparatus for a hollow substrate. In the figure, 1 is a chuck device, 2 is a chuck moving device, and 3 is a coating liquid. The chuck moving device 2 is equipped with a lifting device 4 and an arm 5, and the lifting device 4 is guided by a vertical shaft 6 and is mounted so as to be able to move up and down, and the arm 5 is mounted horizontally at a predetermined position. It is attached to the lifting device 4 so as to be able to swing at any angle. Note that the chuck device 1 located above the coating liquid storage tank 3 is suspended by an arm 5 and holds a cylindrical hollow base 7a.

In FIG. 2, the detailed construction of the chuck device 1 is shown, and the chuck device 1 includes four chucks, that is, first to fourth chucks 8 to 11.

First, the first chuck 8 will be described. This chuck 8 includes a first piston 14 fitted into a cylinder (hereinafter referred to as the first cylinder) formed by the chuck outer shell #12 and the first guide 13. and chuck outer shell 12
and an O-ring 15 whose vertical movement is regulated by a guide 13 and which is mounted so that it can be deformed by being crushed by the lower end of the piston 14. In addition, the first guide 1
3 is a chuck outer shell 1 whose upper end is fitted into the center holder 16 and fixed to the arm 5;
2 and is fixed with a bolt (bolt indicated by a broken line).

With the lower end of the chuck outer shell 12 in contact with the upper end of the hollow base 7a indicated by the chain line, and the lower end of the first guide 13 inserted into the upper end opening of the hollow base 7a, Pressurized air is supplied from the first supply/exhaust port 17 to the upper chamber of the first cylinder, and the first piston 14 is moved downward to crush and deform the O-ring 15 to form the hollow base 7.
The hollow base body 7a can be held in pressure contact with the inner circumferential surface of the hollow base body 7a so as to close the upper end opening of the hollow base body 7a. In FIG. 1, the hollow base body 7a is shown being held by the first chuck 8 in this manner.

Note that when the first piston 14 is moved downward,
The pressurized air in the downward-opening chamber of the first cylinder is transferred to the second air supply/exhaust port 18.
is exhausted from. Furthermore, by supplying pressurized air from the second supply/exhaust port 18 and moving the first piston 14 upward, the O-ring 15 can be restored and the holding of the hollow base 7a can be released. , first supply/exhaust port 17
is exhausted from. The supply/exhaust route will be described later.

Next, the second chuck 9 includes a second piston 20 fitted into a cylinder formed by the first guide 13 and the second guide 19 (hereinafter referred to as a second cylinder), 2 The vertical movement is regulated by the guide 19,
The second guide 19 is configured with an O-ring 21 mounted so that it can be deformed by being crushed by the lower end of the second piston 5 20.The second guide 19 has an intermediate portion fitted onto the center bolt 16. and its upper end is fitted into the first guide 13,
Further, a 7 flange 22 is inserted into the lower end of the bolt 23.
It is fixed by.

For this reason, the lower end of the first guide 13 is brought into contact with the upper end of the hollow base 7b (see FIG. 3), which has an inner diameter smaller than the inner diameter of the hollow base 7a that can be held by the first chuck 8, and the lower end of the second guide 19 and With the flange 22 fitted into the upper end opening of the hollow base 7b, pressurized air is supplied from the first air supply/exhaust port 7 to the upper chamber of the second cylinder to move the second piston 20 downward. The O-ring 21 can be crushed and deformed to be brought into pressure contact with the inner circumferential surface of the hollow base 7b and held so as to close the upper end opening of the hollow base 7b. In addition, similarly to the first chuck 8 described above, by supplying pressurized air from the second supply/exhaust port 18, the hollow base 7b
It is possible to release the hold on 6.

Next, the third chuck 10 includes a third piston 25 fitted into a cylinder (hereinafter referred to as the third cylinder) formed by the second guide 19, the flange 22, and the third guide 24, and the flange. 22 and a third guide 24 to restrict vertical movement, and an O-ring 26 mounted so as to be deformable by being crushed by the lower end of the third piston 25. Note that the third guide 24 is fitted into the second guide 19 and has a center bolt 1 at its upper end.
The lower end of 6 is screwed.

For this reason, the lower end of the second guide 22 is brought into contact with the upper end of the hollow base 7c (see FIG. 3), which has an inner diameter smaller than the inner diameter of the hollow base 7b that can be held by the second chuck 9, and the lower end of the third guide 24 is While the hollow base body 7C is inserted into the upper end opening, pressurized air is supplied from the first supply/exhaust port 17 to the upper chamber of the third cylinder, and the third piston 25 is moved downward to remove the O-ring 26. Crushing and deforming hollow base 7C
The hollow base 7C can be held in pressure contact with the inner circumferential surface of the hollow base 7C so as to close the upper end opening. Further, similarly to the first and second chucks 8 and 9 described above, the holding of the hollow base 7C can be released by supplying pressurized air from the second supply/exhaust port 18.

Next, the fourth chuck 11 is a cylinder (hereinafter referred to as a fourth cylinder) formed by the third guide 24, the fourth guide 27, and the center shaft 28.

) and the third guide 24.
The vertical movement is regulated by the fourth guide 27, and the fourth guide 27
It is composed of an O-ring 30 mounted so as to be deformable by being crushed by the lower end of the piston 29, and an elastic body 31 mounted around the center shaft 28 so as to urge the fourth piston 29 upward. has been done. The center shaft 28 has an upper end fitted into and screwed to the third guide 24, and a lower end thereof is fitted with the fourth guide 24.
7 is inserted and fixed with bolts 32.

For this reason, the lower end of the third guide 24 is brought into contact with the upper end of the hollow base 7d (see FIG. 3), which has an inner diameter smaller than the inner diameter of the hollow base 7C that can be held by the third chuck 10, and the lower end of the fourth guide 27 is While the hollow base body 7d is inserted into the upper end opening, pressurized air is supplied from the first air supply/exhaust port 17 to the upper chamber of the fourth cylinder, and the fourth piston 29 is moved downward to remove the O-ring 30. is crushed and deformed to form a hollow base 7.
The hollow base 7d can be held in pressure contact with the inner circumferential surface of the hollow base 7d so as to close the upper end opening of the hollow base 7d.

Further, similarly to the above-mentioned 1.2.3 chucks 8, 9.10, the holding of the hollow base 7d can be released by supplying pressurized air from the second supply/exhaust port 18.

In this way, the first to fourth chucks 8 to 11 are positioned coaxially and connected in series in the vertical direction, and are mounted so that the chucks disposed higher are capable of holding a hollow base having a larger inner diameter. has been done. The pistons 14, 20, 25, and 29 of each chuck 8 to 11 can move downward together when pressurized air is supplied from the first supply/exhaust port 17, and It is mounted so that when pressurized air is supplied from the second air supply/exhaust port 18, it can move upward.

That is, in FIG. 3, the supply/exhaust passage communicating with the first supply/exhaust port 17 is shown by a solid line, but the pressurized air supplied from the first supply/exhaust port 17 flows through the chuck outer shell 12.
The liquid flows into the upper chamber 41 of the first cylinder through a passage 40 bored in the cylinder, and moves the first piston 14 downward. A passage 42 bored in the first guide 13
It flows into the upper chamber 44 of the second cylinder through the passage 1i' 443 bored in the second guide 19 and moves the second piston 20 downward, and at the same time, it flows into the upper chamber 44 of the third cylinder. and moves the third piston 25 downward. Furthermore, the hole g4 bored in the third guide 24
6 and flows into the upper chamber 47 of the fourth cylinder.
Move the piston 29 downward.

On the other hand, in FIG. 4, the supply/exhaust passage communicating with the first supply/exhaust port 18 is shown by a solid line. It flows into the lower chamber 51 of the first cylinder through the passage 50 bored in the first cylinder, moves the first piston 14 upward, and flows into the passage 52 penetrated by the first piston 14 and the first guide 13. The established communication fI8
53 and flows into the 1itll 54. The passage 54 is
The gap formed between the 1st and 2nd guides 1319 and the center bolt 16 is an ellipse.
It flows into the lower chamber 57 of the second cylinder through the passage 55 bored in the guide 19 and the passage 156 penetrated through the second piston 20, and moves the second screws 1 to 20 upward. . Further, in parallel with this, the liquid flows into the lower chamber 59 of the third cylinder through a passage 58 which is branched into a passage 55, and moves the third piston 25 upward. Furthermore,
The interior of the lower chamber 63 of the fourth cylinder passes through a passage 60 penetrated by the third piston 25, a passage 61 bored through the third blade 24, and a passage 62 penetrated by the two fourth pistons. When each piston 14, 20, 25, 29 is moved upward, pressure is applied from the first supply/exhaust port 17. Pressure air is exhausted, and
When each piston 1420, 25, 29 is moved downward, pressurized air is exhausted from the second supply/exhaust day 18, but each exhaust is controlled to have a flow opposite to that at the time of supply6. According to this dip coating apparatus, the arm 5 of the chuck moving device 2 is swung horizontally at a predetermined angle to move the chuck device 1 to the substrate delivery position, and then the lifting device 4 of the chuck moving device 2 is moved downward. By doing so, the chuck device 1 can be moved downward and held so as to close the upper end opening of the hollow base 7a as shown in FIG. 2, and then the chuck device 1 can be moved upward. Thereafter, the chuck device 1 can be positioned above the coating liquid reservoir Wi3 by swinging the arm 12 horizontally at a predetermined angle, and then the chuck device 1 can be moved downward by moving the lifting device 4 downward. The hollow substrate 7a that is being moved and held is dipped into the coating liquid from below @opening 12, and after being immersed in a predetermined position, the chuck device 1 can be moved upward to take out the hollow substrate 7a from the coating liquid. Subsequently, the chuck device 1 can be moved to the substrate transfer position by swinging the arm 12 horizontally at a predetermined angle, and then moved downward and released from holding. When performing dip coating one after another in this way, the first to fourth chucks 8 to 11 are positioned coaxially and connected in series in the vertical direction, and the chucks located higher up have a smaller inner diameter. Since it is mounted so as to be able to hold a large-diameter hollow base, hollow bases 7a to 7a having various inner diameters can be adjusted based on simple positioning control of the chuck device 1.
7d can be dip coated.

That is, during coating, as described above, the chuck device 1 is positioned at a position suitable for holding the hollow substrate to be coated or at a position suitable for dipping.
〜4 Chucks 8 to 11 are located on the same axis and are connected in series in the vertical direction, so even though multiple chucks are installed, other than vertical positioning control It is sufficient to perform positioning control always in the same manner, and therefore hollow substrates 7a to 7d having various inner diameters can be dip coated based on simple positioning control.

Note that the hollow substrate to be dip-coated (the hollow substrate to be held by a chuck) is vertically supported via a jig (not shown). A chuck for hollow substrates that can hold various hollow substrates and prevent complicated positioning control for substrate transfer positions (positions for holding hollow cutting bodies and releasing held hollow substrates), etc. A device is obtained.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a schematic configuration of a dip coating device for hollow substrates;
FIG. 2 is a longitudinal cross-sectional view of the chuck device 1, and FIG. 3 is a vertical cross-sectional view of the chuck device 1.
A diagram showing a pressurized air supply mode for moving the pistons 1420, 25, 29 of the chucks 8 to 11 downward, and FIG. 4 is for moving the pistons 14 14, 20, 25, 29 upward. 2 is a diagram that does not show the pressurized air supply mode. 1... Chuck device, 2... Chuck moving device, 5
...Arm, 7a-7d...Hollow base, 8...First chuck, 9...Second chuck, 10...Third chuck, 11...Second chuck

Claims (1)

[Claims] 1. In a chuck device for a hollow substrate that is suspended on an arm of a chuck moving device, a plurality of chucks that hold the hollow substrate so as to close the upper end opening are positioned coaxially and connected in series in the vertical direction, A chuck device for a hollow substrate, characterized in that the chuck is mounted so that the chuck disposed upwardly can hold a hollow substrate having a larger inner diameter.