JPH032633U - - Google Patents
Info
- Publication number
- JPH032633U JPH032633U JP6355589U JP6355589U JPH032633U JP H032633 U JPH032633 U JP H032633U JP 6355589 U JP6355589 U JP 6355589U JP 6355589 U JP6355589 U JP 6355589U JP H032633 U JPH032633 U JP H032633U
- Authority
- JP
- Japan
- Prior art keywords
- cross
- determining
- utility
- teg pattern
- used during
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6355589U JPH032633U (enExample) | 1989-05-31 | 1989-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6355589U JPH032633U (enExample) | 1989-05-31 | 1989-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH032633U true JPH032633U (enExample) | 1991-01-11 |
Family
ID=31593712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6355589U Pending JPH032633U (enExample) | 1989-05-31 | 1989-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH032633U (enExample) |
-
1989
- 1989-05-31 JP JP6355589U patent/JPH032633U/ja active Pending