JPH032632U - - Google Patents

Info

Publication number
JPH032632U
JPH032632U JP6188089U JP6188089U JPH032632U JP H032632 U JPH032632 U JP H032632U JP 6188089 U JP6188089 U JP 6188089U JP 6188089 U JP6188089 U JP 6188089U JP H032632 U JPH032632 U JP H032632U
Authority
JP
Japan
Prior art keywords
cleaning
cassette
wafers
cleaning tank
cleaning device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6188089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6188089U priority Critical patent/JPH032632U/ja
Publication of JPH032632U publication Critical patent/JPH032632U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP6188089U 1989-05-30 1989-05-30 Pending JPH032632U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6188089U JPH032632U (US20110009641A1-20110113-C00185.png) 1989-05-30 1989-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6188089U JPH032632U (US20110009641A1-20110113-C00185.png) 1989-05-30 1989-05-30

Publications (1)

Publication Number Publication Date
JPH032632U true JPH032632U (US20110009641A1-20110113-C00185.png) 1991-01-11

Family

ID=31590525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6188089U Pending JPH032632U (US20110009641A1-20110113-C00185.png) 1989-05-30 1989-05-30

Country Status (1)

Country Link
JP (1) JPH032632U (US20110009641A1-20110113-C00185.png)

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