JPH032630U - - Google Patents

Info

Publication number
JPH032630U
JPH032630U JP6355289U JP6355289U JPH032630U JP H032630 U JPH032630 U JP H032630U JP 6355289 U JP6355289 U JP 6355289U JP 6355289 U JP6355289 U JP 6355289U JP H032630 U JPH032630 U JP H032630U
Authority
JP
Japan
Prior art keywords
susceptor
wafer
sloped
storage hole
placing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6355289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6355289U priority Critical patent/JPH032630U/ja
Publication of JPH032630U publication Critical patent/JPH032630U/ja
Pending legal-status Critical Current

Links

JP6355289U 1989-05-31 1989-05-31 Pending JPH032630U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6355289U JPH032630U (US20090163788A1-20090625-C00002.png) 1989-05-31 1989-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6355289U JPH032630U (US20090163788A1-20090625-C00002.png) 1989-05-31 1989-05-31

Publications (1)

Publication Number Publication Date
JPH032630U true JPH032630U (US20090163788A1-20090625-C00002.png) 1991-01-11

Family

ID=31593706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6355289U Pending JPH032630U (US20090163788A1-20090625-C00002.png) 1989-05-31 1989-05-31

Country Status (1)

Country Link
JP (1) JPH032630U (US20090163788A1-20090625-C00002.png)

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