JPH0326300B2 - - Google Patents

Info

Publication number
JPH0326300B2
JPH0326300B2 JP7692985A JP7692985A JPH0326300B2 JP H0326300 B2 JPH0326300 B2 JP H0326300B2 JP 7692985 A JP7692985 A JP 7692985A JP 7692985 A JP7692985 A JP 7692985A JP H0326300 B2 JPH0326300 B2 JP H0326300B2
Authority
JP
Japan
Prior art keywords
piezoelectric element
disc
shaped piezoelectric
valve housing
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7692985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61236974A (ja
Inventor
Yoshio Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7692985A priority Critical patent/JPS61236974A/ja
Publication of JPS61236974A publication Critical patent/JPS61236974A/ja
Publication of JPH0326300B2 publication Critical patent/JPH0326300B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/02Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/025Actuating devices; Operating means; Releasing devices electric; magnetic actuated by thermo-electric means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP7692985A 1985-04-11 1985-04-11 流体制御弁 Granted JPS61236974A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7692985A JPS61236974A (ja) 1985-04-11 1985-04-11 流体制御弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7692985A JPS61236974A (ja) 1985-04-11 1985-04-11 流体制御弁

Publications (2)

Publication Number Publication Date
JPS61236974A JPS61236974A (ja) 1986-10-22
JPH0326300B2 true JPH0326300B2 (de) 1991-04-10

Family

ID=13619410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7692985A Granted JPS61236974A (ja) 1985-04-11 1985-04-11 流体制御弁

Country Status (1)

Country Link
JP (1) JPS61236974A (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4903732A (en) * 1989-01-19 1990-02-27 A. K. Allen Company Piezoelectric valve
US6086041A (en) * 1997-04-07 2000-07-11 Mccord Winn Textron Inc. Multi-valve module having a ceramic piezoelectric actuator
US6065688A (en) * 1998-03-09 2000-05-23 The United States Of America As Represented By The Secretary Of The Navy Mass-flux actuator with high frequency response
EP1653133B1 (de) * 2004-10-28 2007-09-19 C.R.F. Società Consortile per Azioni Ventil
DE602005005673T2 (de) 2005-09-08 2009-05-07 C.R.F. Società Consortile per Azioni, Orbassano Membraneventil mit Formgedächtnisbetätigung
EP1881272A1 (de) * 2006-07-20 2008-01-23 Siemens Aktiengesellschaft Vorrichtung und Verfahren zur Versorgung eines Brenners mit einem Brennstofffluid

Also Published As

Publication number Publication date
JPS61236974A (ja) 1986-10-22

Similar Documents

Publication Publication Date Title
EP0544405B1 (de) Piezoelektrisch betätigtes Durchflussregelventil
US5323999A (en) Microstructure gas valve control
EP0512521B1 (de) Thermisch gesteuertes Mikrominiaturventil
US5325880A (en) Shape memory alloy film actuated microvalve
KR100352781B1 (ko) 압전형 밸브
US7011288B1 (en) Microelectromechanical device with perpendicular motion
US4096993A (en) Compensated control valve
JPH04506105A (ja) マイクロ弁
KR940008188B1 (ko) 압력 반응 제어장치
JPS62220782A (ja) 流体制御弁
US9695951B2 (en) Slide valve
JP2000505180A (ja) マイクロバルブ
JPH0771647A (ja) 周囲温度補償を備えた熱作動弁
JPH11315947A (ja) 圧電バルブ
JP3056794B2 (ja) 圧力応答スイッチ
US4243858A (en) Snap disc operated pressure switch
JPH0326300B2 (de)
US4268006A (en) Modulating diaphragm valve
US4412650A (en) Snap acting heat motor operated gas valve
US3275285A (en) Thermoelectric valve
US20060249211A1 (en) Actuator and actuator driven control device
US3591138A (en) Heat motor safety valve construction and parts therefor
EP1060338B1 (de) Piezo-ventil mit hohem ansprechverhalten
US3683137A (en) Pressure switch diaphragm assembly with clamping diaphragm sealing means
US4238651A (en) Snap action fluid pressure switch