JPH03260924A - Tracking mirror actuator device - Google Patents

Tracking mirror actuator device

Info

Publication number
JPH03260924A
JPH03260924A JP2060737A JP6073790A JPH03260924A JP H03260924 A JPH03260924 A JP H03260924A JP 2060737 A JP2060737 A JP 2060737A JP 6073790 A JP6073790 A JP 6073790A JP H03260924 A JPH03260924 A JP H03260924A
Authority
JP
Japan
Prior art keywords
mirror
movable part
thin plate
center line
spring member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2060737A
Other languages
Japanese (ja)
Inventor
Hideaki Kibune
英明 木船
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP2060737A priority Critical patent/JPH03260924A/en
Publication of JPH03260924A publication Critical patent/JPH03260924A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To allow a sure tracking mirror actuator operation by forming respectively plural sheets of leaf spring members which support both ends of a movable part into a shape having at least two points of curved parts extended in the direction perpendicular to the turning center line of the movable part. CONSTITUTION:The directions of driving currents are so determined that the directions of the force in the normal direction of the mirror generated in driving coils 4 in a magnetic gap 9 are reversed in the respective driving coils 4, by which the couple of forces is generated in the movable part 5 and the movable part is rotated around the rotating center line C. The curved parts 13a, 13b of the leaf spring member 12 deform curvilinearly at this time. The curved parts 13a, 13b can be made sufficiently longer than the longitudinal length of the leaf spring member and since the parallel curved parts 13a, 13b exist at two point in one sheet of the leaf spring member 12, the 1st order resonance frequency is suppressed to a sufficiently low state even if the thickness of the member is increased.

Description

【発明の詳細な説明】 産業上の利用分町 本発明は、光情報記録再生装置におけるトラッキングミ
ラーアクチュエータ装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a tracking mirror actuator device in an optical information recording/reproducing device.

従来の技術 一般に、光情報記録再生装置においては、情報記録媒体
」二に微小スポットを形成して情報の記録又は再生を行
う。このときに光情報記録媒体に対して前記微小スポッ
トのトラッキング動作を行うためのミラーを可動的に備
えたものがある。
2. Description of the Related Art Generally, in an optical information recording/reproducing apparatus, a minute spot is formed on an information recording medium to record or reproduce information. At this time, some devices are equipped with a movable mirror for performing a tracking operation of the minute spot with respect to the optical information recording medium.

この際のトラッキングミラーアクチュエータ構成として
は、例えば特開昭62−210418号公報に示される
ものがある。第7図ないし第9図はその内容を示すもの
である。まず、ミラー1はミラー支持体2により支持さ
れている。このミラー支持体2のX方向両側は駆動部3
中の駆動コイル4に一体化され、これらにより可動部5
が構成されている。前記駆動部3は固定ベース6上に立
設固定された略U字状のヨーク磁気回路7とその外側内
面に固定された磁石8とこれらのヨーク磁気回路7と磁
石8との形成する磁気ギャップ9111に一辺を位置さ
せた前記駆動コイル4とよりなる。
An example of a tracking mirror actuator configuration in this case is shown in Japanese Patent Application Laid-Open No. 62-210418, for example. Figures 7 to 9 show the contents. First, the mirror 1 is supported by a mirror support 2. On both sides of the mirror support 2 in the X direction are driving parts 3.
The movable part 5 is integrated with the drive coil 4 inside.
is configured. The drive unit 3 includes a substantially U-shaped yoke magnetic circuit 7 fixed upright on a fixed base 6, a magnet 8 fixed to the outer inner surface of the yoke magnetic circuit 7, and a magnetic gap formed between the yoke magnetic circuit 7 and the magnet 8. It consists of the drive coil 4 with one side located at 9111.

また、前記可動部5は略左右対称形状(前後方向も対称
的であるが)であり、その左右両側(y方向両側)は各
々1枚ずつの薄板状ばね部オA10により固定ベース6
」二に支持されている。即ち、薄板状ばね部材10の一
端はミラー支持体2(可動部5)に固定され、他端は固
定ベース6」−に立設固定した固定支持部11に固定さ
れている。この2枚の薄板状ばね部材10も左右両側で
対称的に設けられているが、具体的には、薄板状ばね部
材10の中心線は可動部5の回転中心線C上に設定され
ている。可動部5の重心はこの回転中心線C近傍とされ
ている。
Furthermore, the movable part 5 has a substantially bilaterally symmetrical shape (although it is also symmetrical in the front-rear direction), and the fixed base 6 is attached to the left and right sides (both sides in the y direction) by one thin plate-like spring part A10.
” It is supported by two people. That is, one end of the thin plate-shaped spring member 10 is fixed to the mirror support 2 (movable part 5), and the other end is fixed to a fixed support part 11 that is erected and fixed to the fixed base 6''. These two thin plate-like spring members 10 are also provided symmetrically on both the left and right sides, but specifically, the center line of the thin plate-like spring member 10 is set on the rotation center line C of the movable part 5. . The center of gravity of the movable part 5 is set near this rotation center line C.

即ち、ミラーlを含む可動部5を左右2枚の薄板状ばね
部材10で支持し、この薄板状ばね部材10のねじり中
心線近傍に可動部5の重心を設定するとともに、支持系
の低剛性の方向がミラー面内方向となり、高剛性の方向
がミラー法線方向と=3 − なるように、薄板状ばね部利lOの厚み方向をミラー面
内方向に合わせて固定する。これによれば、ミラーlに
おいてはミラー面内方向でミラーが微小量移動しても光
ビームの位置にはまったく影響しないため、支持系が低
剛性であっても問題はない。そして、光ビームの位置に
関係するミラー法線方向の支持系剛性は高剛性とするこ
とができるため、光スポットの位置決め精度を低下させ
てしまう振動を抑制できるというものである。
That is, the movable part 5 including the mirror l is supported by two left and right thin plate spring members 10, the center of gravity of the movable part 5 is set near the torsion center line of the thin plate spring members 10, and the support system has low rigidity. The thickness direction of the thin plate-shaped spring portion lO is fixed to match the in-plane direction of the mirror so that the direction of the thin plate-shaped spring portion 10 is equal to the in-plane direction of the mirror, and the direction of high rigidity is equal to the normal direction of the mirror by =3 −. According to this, the position of the light beam is not affected at all in the mirror 1 even if the mirror moves by a minute amount in the mirror in-plane direction, so there is no problem even if the support system has low rigidity. Furthermore, since the rigidity of the support system in the normal direction of the mirror, which is related to the position of the light beam, can be made high, vibrations that degrade the positioning accuracy of the light spot can be suppressed.

発明が解決しようとする課題 このようなトラッキングミラーアクチュエータ装置を、
より詐細に検討すると、可動部5の一次共振周波数は通
常50Hz前後に設定する必要がある。このため、薄板
状ばね部材10にステンレス材質を用いた場合、20μ
m前後の厚さとなる。
The problem to be solved by the invention is to provide such a tracking mirror actuator device.
When examined in more detail, the primary resonance frequency of the movable part 5 usually needs to be set to around 50 Hz. For this reason, when stainless steel material is used for the thin plate spring member 10, the
The thickness will be around m.

ここに、ステンレス鋼板はその厚さに±2μm程度の誤
差が避けられないため、薄板状ばね部材lOの板厚は±
10%程度のバラツキを持つことになる。一方、薄板状
ばね部利10のねじりばね走数は板厚の3乗に比例する
ため、板厚に±10%程度のバラツキがあると、ねじり
ばね定数としては±33%程度もバラツキを持つことに
なる。ここに、ねじりばね定数の1/2乗に比例する一
次共振周波数は±15%程度ものバラツキを持つことに
なる。
Here, since the stainless steel plate inevitably has an error of about ±2 μm in its thickness, the thickness of the thin plate spring member IO is ±2 μm.
There will be a variation of about 10%. On the other hand, the torsional spring travel number of the thin plate spring part 10 is proportional to the cube of the plate thickness, so if there is a variation of about ±10% in the plate thickness, the torsional spring constant will vary by about ±33%. It turns out. Here, the primary resonance frequency, which is proportional to the 1/2 power of the torsional spring constant, has a variation of about ±15%.

一般に、制御系の仕様を考えると、可動部5の一次共振
周波数のバラツキは±10%程度の範囲内に抑える必要
がある。ところが、薄板状ばね部材10の板厚だけで±
15%ものバラツキを持った場合、他の要素(例えば、
可動部慣性モーメントのバラツキ、薄板状ばね部材lO
の長さ、幅のバラツキ等)の影響をも考慮すると、現実
には、−次共振周波数は±20%程度のバラツキを持っ
てしまい、到底、制御系の仕様を満足することはできな
い。
Generally, considering the specifications of the control system, it is necessary to suppress the variation in the primary resonance frequency of the movable part 5 within a range of approximately ±10%. However, the thickness of the thin plate spring member 10 alone is ±
If there is a variation of 15%, other factors (e.g.
Variation in the moment of inertia of the moving part, thin plate spring member lO
Considering the influence of variations in length, width, etc.), in reality, the negative-order resonance frequency has a variation of about ±20%, making it impossible to satisfy the specifications of the control system.

この点、薄板状ばね部材10の板厚のバラツキを±5%
5%程範囲内に抑えることができれば、その影響による
一次共振周波数のバラツキは±7.6%程度に抑えるこ
とができ、制御系の仕様を満足し得るものとなる。この
ような構成の可否について検討してみる。まず、薄板状
ばね部材10の板厚を40μmとした場合、第7図ない
し第9図のような構成のままでは、ねじりばね定数は2
゛=8倍となり、−次共振周波数は8°”=2.8倍と
なってしまい、50Hz前後に設定することができない
。このため、薄板状ばね部材10の長手方向(y方向)
の長さを長くし、幅方向(Z方向)の長さを短くし、ね
じりばね定数を小さくする必要がある。しかし、薄板状
ばね部材10の長手方向の長さを長くすると、装置が大
型化してしまう。また、幅方向を短くすると、薄板状ば
ね部材10に働く剪断応力[kg−f / cn+]が
大きくなってしまい、薄板状ばね部材lOの許容応力を
越えてしまう問題が生じてしまう。
In this regard, the variation in the plate thickness of the thin plate spring member 10 is limited to ±5%.
If it can be suppressed within a range of about 5%, the variation in the primary resonance frequency due to this influence can be suppressed to about ±7.6%, which satisfies the specifications of the control system. Let's consider whether such a configuration is possible. First, when the plate thickness of the thin plate spring member 10 is 40 μm, the torsional spring constant is 2 if the configuration as shown in FIGS. 7 to 9 is maintained.
゛ = 8 times, and the -order resonance frequency becomes 8 degrees = 2.8 times, and it cannot be set around 50 Hz. Therefore, the longitudinal direction (y direction) of the thin plate spring member 10
It is necessary to increase the length, shorten the length in the width direction (Z direction), and decrease the torsional spring constant. However, if the length of the thin plate-like spring member 10 in the longitudinal direction is increased, the device becomes larger. Moreover, if the width direction is shortened, the shear stress [kg-f/cn+] acting on the thin plate spring member 10 becomes large, causing a problem of exceeding the allowable stress of the thin plate spring member IO.

課題を解決するための手段 光情報記録媒体上に微小スポットを形成して1′i!f
報の記録又は再生を行う光情報記録再生装置で、前記光
ti!f報記DW、体に対して前記微小スポットのトラ
ッキング動作を行うためのミラーをミラー支持体に支持
させて駆動部を右する略左右幻弥11/i 逍で回転中
心線を中心に同動変位可能な可動t’fl(に]t(載
したトラッキングミラーアクチュエータ装置において、
請求項1記載の発明では、可動部の回転中心線に対し重
直な方向に延設させた少なくとも2個所の屈曲部を有し
て厚み方向を前記ミラーの面内方向に合わせた2枚ずつ
の薄板状ばねγfI+ jAにより前記可動部の左右両
側を固定部に対して支持させ、請求項2記載の発明では
、可動部の回転中心線に対し垂直な方向に延設させた少
なくとも2個所の屈曲部を有して前記回転中心線を中心
に放射状に配設させた少なくとも3枚ずつの薄板状ばね
部材により前記可動部の左右両側を固定部に対− して支持させた。
Means for Solving the Problem Forming a minute spot on an optical information recording medium and performing 1'i! f
An optical information recording/reproducing device for recording or reproducing information, the optical ti! f report DW, the mirror for performing the tracking operation of the minute spot with respect to the body is supported by the mirror support, and the drive unit is moved in the same direction around the rotation center line. In a tracking mirror actuator device mounted on a movable movable t'fl(t),
In the invention according to claim 1, each mirror has at least two bent portions extending in a direction perpendicular to the rotation center line of the movable portion, and has a thickness direction aligned with the in-plane direction of the mirror. The left and right sides of the movable part are supported with respect to the fixed part by thin plate-like springs γfI+ The left and right sides of the movable part are supported by at least three thin plate-like spring members each having a bent part and arranged radially around the rotation center line with respect to the fixed part.

作用 可動部の両端を支持する薄板状ばね部材が、可動部の回
転中心線に対し垂直な方向に延設させた少なくとも2個
所の屈曲部をイfする形状のものとしたので、板厚を厚
くしても一次共振周波数を低く抑えることができる。よ
って、薄板状ばね部材の板厚のバラツキによる一次共振
周波数のバラツキは小さいものとなり、確実なトラッキ
ングミラーアクチュエータ動作を行わせることができる
The thin plate-shaped spring member supporting both ends of the working movable part has a shape that extends in a direction perpendicular to the rotation center line of the movable part and has at least two bent parts, so that the plate thickness can be reduced. Even if the thickness is increased, the primary resonance frequency can be kept low. Therefore, variations in the primary resonance frequency due to variations in the thickness of the thin plate-shaped spring member are small, and reliable tracking mirror actuator operation can be performed.

特に、請求項2記載の発明のように、回転中心線を中心
に放射状に配設させた少なくとも3枚以上の薄板状ばね
部材により支持させることにより、回転方向以外の剛性
を十分に高くし、回転方向以外の可動部の有害な運動を
抑制することができる。
In particular, as in the invention as claimed in claim 2, by supporting at least three or more thin plate-like spring members arranged radially around the rotation center line, the rigidity in directions other than the rotation direction is sufficiently increased. Harmful movement of the movable part in directions other than the rotational direction can be suppressed.

実施例 請求項1記載の発明の一実施例を第1図ないし第3図に
基づいて説明する。第7図ないし第9図で示した部分と
同−m!分は同一符号を用いて示す。
Embodiment An embodiment of the invention set forth in claim 1 will be described with reference to FIGS. 1 to 3. Same as the part shown in Figures 7 to 9 -m! Minutes are indicated using the same symbols.

トラッキングミラーアクチュエータとしての県木構造は
同様であるが、可動部5を支持する薄板状ばね部材の形
状等を工夫したものである。まず、可動部5の左右両側
には各々2枚ずつの薄板状ばね部材12が上下(Z方向
)対称配置関係で設けられている。これらの薄板状ばね
f+ll+J ] 2はlit体では何れも略コ字状形
状のもので、同一直線なる可動部5の回転中心線Cに対
して垂直な方向に延設させた平行な2個所の屈曲部13
a、13bを有し、これらの屈曲部13a、13bは回
1云中心線Cから最も離れた個所を結合部13cとして
互いに結合され、回転中心線Cに最も近い部分で、一方
の屈曲部13a側はミラー支持体2(可動部5)に固定
され、他方の屈曲部13b(It!lは固定支持部11
に固定されている。即ち、ミラー支持体2・固定支持部
11間が薄板状ばね部利により最短距離で短絡的に支持
されることなく、クランク状の薄板状ばね部材12によ
り迂回状態で支持された状態とされている。また、これ
らの薄板状ばね部材12の厚み方向はミラー1の面内方
向とされている。なお、本実施例にあっても、可動部5
の重心は回転中心線C近傍に設定されている。
Although the structure of the tracking mirror actuator is the same, the shape of the thin plate-like spring member that supports the movable part 5 has been devised. First, two thin plate-like spring members 12 are provided on each of the left and right sides of the movable portion 5 in a vertically symmetrical arrangement (in the Z direction). These thin plate springs f+ll+J ] 2 are all approximately U-shaped in the lit body, and have two parallel locations extending in a direction perpendicular to the rotation center line C of the movable part 5, which is the same straight line. Bent part 13
a and 13b, and these bent portions 13a and 13b are connected to each other with the point farthest from the center line C of rotation 1 as a connecting portion 13c, and one bent portion 13a is connected to the portion closest to the rotation center line C. The side is fixed to the mirror support 2 (movable part 5), and the other bent part 13b (It!l is fixed to the fixed support part 11
is fixed. That is, the mirror support 2 and the fixed support part 11 are not supported in a short-circuit manner at the shortest distance by the thin plate spring member, but are supported in a roundabout manner by the crank shaped thin plate spring member 12. There is. Further, the thickness direction of these thin plate-like spring members 12 is in the in-plane direction of the mirror 1. Note that even in this embodiment, the movable part 5
The center of gravity of is set near the rotation center line C.

このような構成において、磁気ギャップ9中の駆動コイ
ル4に発生するミラー法線方向(X方向)のツノの向き
が、各々の駆動コイル4で逆向きとなるように駆動電流
の向きを決定することにより、可動部5には偶力が発生
し、回転中心線Cを中心に回転する。このとき、本実施
例の薄板状ばね部材12の屈曲部13a、13bは曲げ
変形する。
In such a configuration, the direction of the drive current is determined so that the direction of the horn in the mirror normal direction (X direction) generated in the drive coil 4 in the magnetic gap 9 is opposite in each drive coil 4. As a result, a force couple is generated in the movable part 5, and the movable part 5 rotates about the rotation center line C. At this time, the bent portions 13a and 13b of the thin plate-like spring member 12 of this embodiment are bent and deformed.

この屈曲部13a、13bは第7図に示した薄板状ばね
部材10の長手方向の長さに比べ十分に長くすることが
でき、かつ、1枚の薄板状ばね部材12において2個所
に平行な屈曲部13a、13bがあるため、板厚を厚く
しても一次共振周波数は十分低い状態に抑えることがで
きる。
These bent portions 13a and 13b can be made sufficiently longer than the length in the longitudinal direction of the thin plate-like spring member 10 shown in FIG. Because of the bent portions 13a and 13b, the primary resonance frequency can be kept sufficiently low even if the plate thickness is increased.

つづいて、請求項2記載の発明の一実施例を第4図ない
し第7図により説明する。基本的には前記実施例と同様
であるが、本実施例では可動部5の左右両端に各々4枚
ずつの薄板状ばね部材12を可動部5の回転中心線Cに
対して放射状、ここでは×状に配設させて設けたもので
ある。これは、薄板状ばね部材の剛性を高めるためであ
る。即ち、前記実施例による場合、薄板状ばね部材12
はy。
Next, an embodiment of the invention according to claim 2 will be described with reference to FIGS. 4 to 7. Basically, it is the same as the previous embodiment, but in this embodiment, four thin plate-like spring members 12 are provided at both left and right ends of the movable part 5 radially with respect to the rotation center line C of the movable part 5. They are arranged in an x-shape. This is to increase the rigidity of the thin plate spring member. That is, in the case of the above embodiment, the thin plate spring member 12
Yes.

X方向の剛性が十分大きいのに幻しX方向の剛性は極め
て小さく、可動部5がZ軸周りに回転運動をしてしまい
、ミラー1により偏向された光束のトラッキング方向が
本来のトラッキング方向からずれてしまう可能性がある
。この点、本実施例では、4枚の薄板状ばね部材12を
回転中心線Cに対して放射状に配設させて設けているの
で、薄板状ばね部材12の剛性はx+ 5’l  Zの
各方向で十分に大きくすることができる。
Although the rigidity in the X direction is sufficiently large, the rigidity in the X direction is extremely small, and the movable part 5 rotates around the Z axis, causing the tracking direction of the light beam deflected by the mirror 1 to change from the original tracking direction. There is a possibility that it will shift. In this regard, in this embodiment, since the four thin plate spring members 12 are arranged radially with respect to the rotation center line C, the rigidity of the thin plate spring members 12 is It can be made large enough in the direction.

なお、本実施例では、可動部5の片側について−11= 12 4枚の薄板状ばね部材12を設けたが、要は、3枚以」
二の薄板状ばね部材12を回転中心線Cに対して放射状
配置させて設ければよい。
In this embodiment, -11=12 four thin plate spring members 12 are provided on one side of the movable part 5, but in short, three or more thin plate spring members 12 are provided.
The second thin plate-like spring member 12 may be arranged radially with respect to the rotation center line C.

発明の効果 本発明は、上述したように可動部の両端を支持する各々
複数枚の薄板状ばね部材を、可動部の回転中心線に対し
垂直な方向に延設させた少なくとも2個所の屈曲部をイ
fする形状のものとしたので、板厚を厚くしても一次共
振周波数を低く抑えることができ、よって、薄板状ばね
部材の板厚のバラツキによる一次共振周波数のバラツキ
を小さいものとして、確実なトラッキングミラーアクチ
ュエータ動作を行わせることができ、特に、請求項2記
載の発明によれば、少なくとも3枚以上の薄板状ばね部
材を回転中心線を中心に放射状に配設させたので、回転
方向以外の剛性を十分に高くし、回転方向以外の可動部
の有害な運動を抑制することができるものである。
Effects of the Invention As described above, the present invention provides at least two bent portions in which a plurality of thin plate spring members each supporting both ends of the movable portion extend in a direction perpendicular to the rotation center line of the movable portion. Since the shape is such that the primary resonance frequency can be kept low even if the plate thickness is increased, the variation in the primary resonance frequency due to variation in the plate thickness of the thin plate spring member can be minimized. The tracking mirror actuator can be operated reliably, and in particular, according to the invention as claimed in claim 2, at least three or more thin plate-like spring members are arranged radially around the rotation center line. It is possible to sufficiently increase the rigidity in directions other than the rotational direction and suppress harmful movements of the movable parts in directions other than the rotational direction.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は請求項1記載の発明の一実施例を示す斜視図、
第2図は薄板状ばね部材付近の側面図、第3図は薄板状
ばね部材付近の正面図、第4図は請求項2記載の発明の
一実施例を示す斜視図、第5図は薄板状ばね部材伺近の
側面図、第6図は薄板状ばね部材(l近の正面図、第7
図は従来例を示す斜視図、第8図はその薄板状ばね部月
イ・]近の側面図、第9図は薄板状ばね部材付近の正面
図である。 ■・・・ミラー、2・・・ミラー支持体、3・・・駆動
部、5・・・可動部、11・・・固定部、12・・・薄
板状ばね部材、13a、13b・・・屈曲部、C・・・
回転中心線、%、3送 、J3c 1 8晒 晒
FIG. 1 is a perspective view showing an embodiment of the invention as claimed in claim 1;
FIG. 2 is a side view of the vicinity of the thin plate spring member, FIG. 3 is a front view of the vicinity of the thin plate spring member, FIG. 4 is a perspective view showing an embodiment of the invention as claimed in claim 2, and FIG. 5 is a thin plate Figure 6 is a side view of the thin plate-shaped spring member (1);
The figure is a perspective view showing a conventional example, FIG. 8 is a side view of the thin plate-like spring portion, and FIG. 9 is a front view of the vicinity of the thin plate-like spring member. ■...Mirror, 2...Mirror support body, 3...Drive part, 5...Movable part, 11...Fixed part, 12...Thin plate-shaped spring member, 13a, 13b... Bent part, C...
Rotation center line, %, 3 feed, J3c 1 8 bleaching

Claims (1)

【特許請求の範囲】 1、光情報記録媒体上に微小スポットを形成して情報の
記録又は再生を行う光情報記録再生装置で、前記光情報
記録媒体に対して前記微小スポットのトラッキング動作
を行うためのミラーをミラー支持体に支持させて駆動部
を有する略左右対称構造で回転中心線を中心に回動変位
可能な可動部に搭載したトラッキングミラーアクチュエ
ータ装置において、前記可動部の回転中心線に対し垂直
な方向に延設させた少なくとも2個所の屈曲部を有して
厚み方向を前記ミラーの面内方向に合わせた2枚ずつの
薄板状ばね部材により前記可動部の左右両側を固定部に
対して支持させたことを特徴とするトラッキングミラー
アクチュエータ装置。 2、光情報記録媒体上に微小スポットを形成して情報の
記録又は再生を行う光情報記録再生装置で、前記光情報
記録媒体に対して前記微小スポットのトラッキング動作
を行うためのミラーをミラー支持体に支持させて駆動部
を有する略左右対称構造で回転中心線を中心に回動変位
可能な可動部に搭載したトラッキングミラーアクチュエ
ータ装置において、前記可動部の回転中心線に対し垂直
な方向に延設させた少なくとも2個所の屈曲部を有して
前記回転中心線を中心に放射状に配設させた少なくとも
3枚ずつの薄板状ばね部材により前記可動部の左右両側
を固定部に対して支持させたことを特徴とするトラッキ
ングミラーアクチュエータ装置。
[Claims] 1. An optical information recording/reproducing device that records or reproduces information by forming a minute spot on an optical information recording medium, in which a tracking operation of the minute spot is performed on the optical information recording medium. In a tracking mirror actuator device in which a mirror is supported on a mirror support and is mounted on a movable part that has a substantially bilaterally symmetrical structure and can be rotated about a center line of rotation, the mirror is supported by a mirror support and has a drive part. The left and right sides of the movable part are connected to the fixed part by two thin plate spring members each having at least two bent parts extending in a direction perpendicular to the mirror and having a thickness direction aligned with the in-plane direction of the mirror. A tracking mirror actuator device, characterized in that the tracking mirror actuator device is supported against an object. 2. In an optical information recording and reproducing device that records or reproduces information by forming a minute spot on an optical information recording medium, a mirror is supported for performing a tracking operation of the minute spot on the optical information recording medium. In a tracking mirror actuator device, which is mounted on a movable part that is supported by the body and has a drive part and has a substantially bilaterally symmetrical structure and can be rotated about a center line of rotation, the actuator device extends in a direction perpendicular to the center line of rotation of the movable part. The left and right sides of the movable part are supported with respect to the fixed part by at least three thin plate-like spring members each having at least two bent parts and arranged radially around the rotation center line. A tracking mirror actuator device characterized by:
JP2060737A 1990-03-12 1990-03-12 Tracking mirror actuator device Pending JPH03260924A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2060737A JPH03260924A (en) 1990-03-12 1990-03-12 Tracking mirror actuator device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2060737A JPH03260924A (en) 1990-03-12 1990-03-12 Tracking mirror actuator device

Publications (1)

Publication Number Publication Date
JPH03260924A true JPH03260924A (en) 1991-11-20

Family

ID=13150875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2060737A Pending JPH03260924A (en) 1990-03-12 1990-03-12 Tracking mirror actuator device

Country Status (1)

Country Link
JP (1) JPH03260924A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6486995B2 (en) 2000-04-28 2002-11-26 Denso Corporation Vibration-resisting structure of optical scanner
WO2011007628A1 (en) * 2009-07-17 2011-01-20 日本電気株式会社 Small size mirror tilt actuator
DE102016111531A1 (en) * 2016-06-23 2018-01-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optical scanner

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6486995B2 (en) 2000-04-28 2002-11-26 Denso Corporation Vibration-resisting structure of optical scanner
WO2011007628A1 (en) * 2009-07-17 2011-01-20 日本電気株式会社 Small size mirror tilt actuator
US8593712B2 (en) 2009-07-17 2013-11-26 Nec Corporation Small size fast steering mirror having small size and excellent vibration characteristics
JP5846636B2 (en) * 2009-07-17 2016-01-20 日本電気株式会社 Compact mirror tilt actuator
EP2455795A4 (en) * 2009-07-17 2017-12-27 Nec Corporation Small size mirror tilt actuator
DE102016111531A1 (en) * 2016-06-23 2018-01-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optical scanner
DE102016111531B4 (en) 2016-06-23 2022-02-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optical scanner

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