JPH0325911U - - Google Patents
Info
- Publication number
- JPH0325911U JPH0325911U JP8386089U JP8386089U JPH0325911U JP H0325911 U JPH0325911 U JP H0325911U JP 8386089 U JP8386089 U JP 8386089U JP 8386089 U JP8386089 U JP 8386089U JP H0325911 U JPH0325911 U JP H0325911U
- Authority
- JP
- Japan
- Prior art keywords
- signal
- comparison
- fluid
- mass flow
- electric signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Landscapes
- Flow Control (AREA)
Description
第１図は本考案による警報機能付マスフローコ
ントローラの第１実施例を示すブロツク図、第２
図は第１実施例に用いた比較手段の動作状況を示
す図、第３図は本考案の第２実施例を示すブロツ
ク図、第４図は第２実施例に用いた比較手段の作
動状況を示す図、第５図は従来のマスフローコン
トローラのブロツク図である。
１……流入路、２……バイパス部、３……セン
サー部、４……流出路、５……コントロールバル
ブ、６……増幅回路、７……比較制御回路、８…
…電気信号設定器、９……比較手段、１０……表
示手段。
Fig. 1 is a block diagram showing a first embodiment of a mass flow controller with an alarm function according to the present invention;
Fig. 3 is a block diagram showing the second embodiment of the present invention, and Fig. 4 is a diagram showing the operating state of the comparison means used in the second embodiment. FIG. 5 is a block diagram of a conventional mass flow controller. DESCRIPTION OF SYMBOLS 1...Inflow path, 2...Bypass section, 3...Sensor section, 4...Outflow path, 5...Control valve, 6...Amplification circuit, 7...Comparison control circuit, 8...
. . . Electrical signal setting device, 9 . . . Comparison means, 10 . . . Display means.
Claims (1)
ンサー部と、このセンサー部の流体と並列に別け
て流体が流れるバイパス部と、これらセンサー部
とバイパス部との流体が合流して流れる流出路と
、この流出路に設けたコントロールバルブと、前
記センサー部で検出した質量流量信号とあらかじ
め設定した質量流量設定信号とを比較制御し前記
コントロールバルブへ駆動信号を出力する比較制
御回路と、電気信号を調整して設定する電気信号
設定器と、この電気信号設定器により設定された
信号と前記比較制御回路の前記コントロールバル
ブへの駆動信号とを比較して比較信号を出力する
比較手段と、この比較手段の比較信号を表示する
表示手段とからなることを特徴とする警報機能付
マスフローコントローラ。 An inflow path for fluid, a sensor section through which the fluid in this inflow path flows, a bypass section through which fluid flows separately in parallel with the fluid in this sensor section, and an outflow path through which fluids from these sensor sections and the bypass section merge and flow. a control valve provided in the outflow path; a comparison control circuit that compares and controls the mass flow rate signal detected by the sensor section with a preset mass flow rate setting signal and outputs a drive signal to the control valve; and an electric signal. an electric signal setting device that adjusts and sets the electric signal; a comparison means that compares the signal set by the electric signal setting device with a drive signal to the control valve of the comparison control circuit and outputs a comparison signal; A mass flow controller with an alarm function, comprising display means for displaying a comparison signal of a comparison means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8386089U JPH0325911U (en) | 1989-07-17 | 1989-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8386089U JPH0325911U (en) | 1989-07-17 | 1989-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325911U true JPH0325911U (en) | 1991-03-18 |
Family
ID=31631882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8386089U Pending JPH0325911U (en) | 1989-07-17 | 1989-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325911U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007107791A (en) * | 2005-10-12 | 2007-04-26 | Niles Co Ltd | Material drying device |
-
1989
- 1989-07-17 JP JP8386089U patent/JPH0325911U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007107791A (en) * | 2005-10-12 | 2007-04-26 | Niles Co Ltd | Material drying device |
| JP4648815B2 (en) * | 2005-10-12 | 2011-03-09 | ナイルス株式会社 | Material dryer |
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