JPH03255927A - Deformation measuring method for polygon mirror - Google Patents
Deformation measuring method for polygon mirrorInfo
- Publication number
- JPH03255927A JPH03255927A JP5370790A JP5370790A JPH03255927A JP H03255927 A JPH03255927 A JP H03255927A JP 5370790 A JP5370790 A JP 5370790A JP 5370790 A JP5370790 A JP 5370790A JP H03255927 A JPH03255927 A JP H03255927A
- Authority
- JP
- Japan
- Prior art keywords
- polygon mirror
- groove patterns
- mirror
- deformation
- light beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims 2
- 230000002093 peripheral effect Effects 0.000 claims abstract description 7
- 238000009826 distribution Methods 0.000 claims abstract description 4
- 238000005259 measurement Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
Description
【発明の詳細な説明】 １はポリゴンミラー、２は固定した光源、Ｂｌ。[Detailed description of the invention] 1 is a polygon mirror, 2 is a fixed light source, Bl.
Ｂ２．・・・、Ｂｎは固定したビームスプリッタ、Ｓｌ
。B2. ..., Bn is a fixed beam splitter, Sl
.
Ｓ２．−、Ｓｎは固定したセンサ、Ｌｌｌ、Ｌ１２゜・
・・、Ｌｌｎは光源２から出射してそれぞれビームスプ
リッタＢｌ、Ｂ２．・・・、Ｂｎによって回転軸に平行
方向へ分割された光ビーム、ＰＬ、Ｐ２゜・・・、Ｐｎ
はポリゴンミラー１の上面に、測定時に比べて十分遅い
回転速度で削成し削成時の回転速度においては周縁が真
円、且つ互いに同心円とみなせるくさび状の溝パターン
、Ｌ２１．□Ｌ２２゜・・・、Ｌ２ｎはそれぞれ光ビー
ムＬｌｌ、Ｌ工２゜−−−、Ｌｌｎが溝パターンＰＬ、
Ｐ２．−．Ｐｎの周縁の角部ｔｌ、ｔ２．・・・ｔｎに
おいて反射した後該ビームスプリッタＢｌ、Ｂ２．・・
・、Ｂｎを透過した光ビームである。S2. −, Sn are fixed sensors, Lll, L12°・
. . , Lln are emitted from the light source 2 and connected to the beam splitters Bl, B2 . ..., a light beam split in the direction parallel to the rotation axis by Bn, PL, P2゜..., Pn
L21. is a wedge-shaped groove pattern that is cut on the upper surface of the polygon mirror 1 at a sufficiently slow rotational speed compared to the time of measurement, and whose peripheral edge is a perfect circle at the rotational speed during cutting and can be regarded as mutually concentric circles. □L22゜..., L2n is the light beam Lll, L2゜---, Lln is the groove pattern PL,
P2. −． Corner portions tl, t2 of the periphery of Pn. ...tn and then the beam splitters Bl, B2 .・・・
・This is a light beam that has passed through Bn.
光源２から出射した光ビームはビームスプリッタＢｌ、
Ｂ２．・・・、Ｂｎによって回転軸に平行方向へ分割さ
れて光ビームＬ １１．Ｌ １２．−、 Ｌ １ ｎと
なり、図２のようにそれぞれパターンＰ１゜Ｐ２．−、
Ｐｎの周縁の角部ｔｌ、ｔ２． ° ｔｎにおいて回転
軸に垂直な面で反射したものだけがビームスプリッタＢ
ｌ、Ｂ２．・・・、Ｂｎを透過し、センサＳｌ、８２．
・・・、Ｓｎに入射してパワーが測定される。The light beam emitted from the light source 2 is transmitted through a beam splitter Bl,
B2. ..., the light beam L is split by Bn in a direction parallel to the rotation axis.11. L 12. -, L 1 n, and as shown in FIG. 2, the patterns P1°P2 . -,
Corner portions tl, t2 of the periphery of Pn. ° At tn, only the light reflected from the plane perpendicular to the rotation axis is reflected from the beam splitter B.
l, B2. . . . transmits Bn, sensor Sl, 82.
..., the power is measured by entering the Sn.
ここでパターンＰｉ、Ｐ２．・・・、Ｐｎの周縁は削成
時よりも高速な回転では遠心力により回転軸Ｏから外へ
向かう力を受けているが、ポリゴンミラー１は、上面か
らみると多角形をしているために円周方向の質量分布が
均一ではないのでパターンＰＬ、Ｐ２．・・・、Ｐｎの
周縁は位置によって受ける力の大きさが異なり、真円で
はなくなる。したがって回転軸Ｏに平行な方向へ反射す
る光ビームのパワーも位置によって変化するので、この
パワーをセンサＳｌ、Ｓ２．・・・、Ｓｎで測定するこ
とによってパターンＰＬ、Ｐ２．・・・、Ｐｎの周縁変
形の様子がわかり、ポリゴンミラー内の円周方向及び半
径方向の変形量分布が測定できる。Here, patterns Pi, P2. ..., the peripheral edge of Pn receives a force directed outward from the rotation axis O due to centrifugal force when rotating at a higher speed than during cutting, but since the polygon mirror 1 has a polygonal shape when viewed from the top surface. Since the mass distribution in the circumferential direction is not uniform in patterns PL, P2. ..., the magnitude of the force applied to the periphery of Pn differs depending on the position, and it is no longer a perfect circle. Therefore, since the power of the light beam reflected in the direction parallel to the rotation axis O also changes depending on the position, this power is measured by the sensors S1, S2. ..., Sn by measuring patterns PL, P2. ..., the peripheral deformation of Pn can be seen, and the deformation amount distribution in the circumferential direction and radial direction within the polygon mirror can be measured.
（発明の効果）
以上のように本発明によれば、ポリゴンミラーの回転中
心から外へ向かう変形の傾向を円周方向及び半径方向の
各箇所において検出することができる。したがって１回
転によるポリゴンミラー表面の形状変化を精度良く、詳
細に推察することが可能になる。(Effects of the Invention) As described above, according to the present invention, the tendency of deformation of the polygon mirror outward from the center of rotation can be detected at each location in the circumferential direction and the radial direction. Therefore, it is possible to estimate the change in shape of the polygon mirror surface due to one rotation with high accuracy and in detail.
第１図及び第２図は本発明の実施例を示し、第１図はポ
リゴンミラー測定装置の斜視図、第２図は第１図におけ
るパターンＰＬ、Ｐ２．・・・、Ｐｎの周縁付近の拡大
図、第３図は従来例を示す。
１．１１・・・・・・ポリゴンミラー
２・・・・・・光源
３・・・・・・センサ
Ｂｌ、Ｂ２．・・・、Ｂｎ・・・・・・ビームスプリッ
タＰＬ、Ｐ２．・・・、Ｐｎ・・・・・・ポリゴンミラ
ー１上に設けた溝パターン
Ｓｌ、Ｓ２．・・・、Ｓｎ・・・・・・センサＬｌｌ、
ＬＬ２．−．Ｌｌｎ、Ｌ２１．Ｌ２２゜、Ｌ２ｎ・・・
・・・光ビーム
Ｌｌ、Ｌ２・・・・・・光ビーム
Ｔ１・・・・・・ポリゴンミラー１の上面に設けた円板
状の凸部
ｔ、ｔｌ、ｔ２．・・・ｔｎ・・・・・・角部○・・・
・・・回転軸1 and 2 show an embodiment of the present invention, FIG. 1 is a perspective view of a polygon mirror measuring device, and FIG. 2 is a pattern PL, P2. . . , FIG. 3, an enlarged view of the vicinity of the periphery of Pn, shows a conventional example. 1.11...Polygon mirror 2...Light source 3...Sensor Bl, B2. ..., Bn... Beam splitter PL, P2. ..., Pn...Groove patterns Sl, S2 . . . provided on the polygon mirror 1. ..., Sn... Sensor Lll,
LL2. −． Lln, L21. L22゜, L2n...
. . . Light beams Ll, L2 . . . Light beam T 1 . . . Disc-shaped convex portions t, tl, t2 . ...tn... corner part ○...
···Axis of rotation
Claims (1)
い回転速度で削成し、削成時の回転速度においては周縁
が真円、且つ互いに同心円とみなせる複数のくさび状の
溝パターン（Ｐ１）、（Ｐ２）、・・・、（Ｐｎ）を設
け、ポリゴンミラー（１）を高速度回転した状態で固定
した光源（２）から出射して該溝パターンのそれぞれに
対応した複数のビームスプリッタ（Ｂ１）、（Ｂ２）、
・・・、（Ｂｎ）によって回転軸に平行に分割された光
ビーム（Ｌ１１）、（Ｌ１２）、・・・、（Ｌ１ｎ）を
それぞれ溝パターン（Ｐ１）、（Ｐ２）、・・・、（Ｐ
ｎ）の周縁の角部（ｔ１）、（ｔ２）、・・・（ｔｎ）
に入射させ、反射した後該ビームスプリッタ（Ｂ１）、
（Ｂ２）、・・・、（Ｂｎ）を透過した光ビーム（Ｌ２
１）、（Ｌ２２）、・・・、（Ｌ２ｎ）をそれぞれを固
定した複数のセンサ（Ｓ１）、（Ｓ２）、・・・、（Ｓ
ｎ）に入射させて光ビーム（Ｌ２１）、（Ｌ２２）、・
・・、（Ｌ２ｎ）のパワーを測定し、高速回転中のポリ
ゴンミラー１上の溝パターン（Ｐ１）、（Ｐ２）、・・
・、（Ｐｎ）の周縁変形の様子を検出し、ポリゴンミラ
ーの円周方向及び径方向の遠心力による変形量分布を測
定することを特徴とするポリゴンミラーの変形測定方法
。A plurality of wedge-shaped groove patterns (P1) are cut on the upper surface of the polygon mirror (1) at a sufficiently slow rotational speed compared to the time of measurement, and the peripheral edges are perfect circles at the rotational speed during cutting, and can be regarded as mutually concentric circles. , (P2), . . . , (Pn) are provided, and a plurality of beam splitters ( B1), (B2),
..., (Bn) into groove patterns (P1), (P2), ..., ( P
corner portions (t1), (t2), ... (tn) of the periphery of n)
and after reflection, the beam splitter (B1),
The light beam (L2) transmitted through (B2), ..., (Bn)
1), (L22), ..., (L2n) are fixed respectively, a plurality of sensors (S1), (S2), ..., (S
light beams (L21), (L22), .
..., (L2n) is measured, and the groove patterns (P1), (P2), ... on the polygon mirror 1 during high speed rotation are measured.
A method for measuring deformation of a polygon mirror, characterized by detecting the deformation of the peripheral edge of (Pn) and measuring the distribution of deformation amount due to centrifugal force in the circumferential direction and radial direction of the polygon mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5370790A JPH03255927A (en) | 1990-03-07 | 1990-03-07 | Deformation measuring method for polygon mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5370790A JPH03255927A (en) | 1990-03-07 | 1990-03-07 | Deformation measuring method for polygon mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03255927A true JPH03255927A (en) | 1991-11-14 |
Family
ID=12950303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5370790A Pending JPH03255927A (en) | 1990-03-07 | 1990-03-07 | Deformation measuring method for polygon mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03255927A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004085529A (en) * | 2002-06-25 | 2004-03-18 | Matsushita Electric Works Ltd | Laser distance-measuring equipment and method therefor |
-
1990
- 1990-03-07 JP JP5370790A patent/JPH03255927A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004085529A (en) * | 2002-06-25 | 2004-03-18 | Matsushita Electric Works Ltd | Laser distance-measuring equipment and method therefor |
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