JPH03254954A - Structure of thermal head - Google Patents
Structure of thermal headInfo
- Publication number
- JPH03254954A JPH03254954A JP5426690A JP5426690A JPH03254954A JP H03254954 A JPH03254954 A JP H03254954A JP 5426690 A JP5426690 A JP 5426690A JP 5426690 A JP5426690 A JP 5426690A JP H03254954 A JPH03254954 A JP H03254954A
- Authority
- JP
- Japan
- Prior art keywords
- heat
- generating member
- layer
- heating element
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 40
- 239000010410 layer Substances 0.000 claims abstract description 34
- 239000011241 protective layer Substances 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 238000009826 distribution Methods 0.000 abstract description 11
- 238000001259 photo etching Methods 0.000 abstract description 4
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 230000020169 heat generation Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 241000519995 Stachys sylvatica Species 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、カラーハードコピーやビデオプリンタ等の高
画質を要求される感熱記録装置のサーマルヘッドの改良
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement in a thermal head of a thermal recording device such as a color hard copy or video printer that requires high image quality.
本発明は、グレーズ層、発熱抵抗体、電極及び保護層か
らなるサーマルヘッドにおいて、前記発熱抵抗体を2層
以上に形成すると共に、前記2層の各発熱体層形状を異
なるように形成し、これら発熱体層の1み合わせで、発
熱体の発熱むらを少なくして良好な印字品質を得るよう
にしたものである。The present invention provides a thermal head comprising a glaze layer, a heating resistor, an electrode, and a protective layer, in which the heating resistor is formed in two or more layers, and each of the two heating element layers is formed in a different shape, By combining these heating element layers, uneven heating of the heating element can be reduced and good printing quality can be obtained.
通常、ナーマルへ71に設りられた複数の「ノドからな
る発熱抵抗体は、それぞれが矩形形状をして形成されて
いる。これら従来の発熱抵抗体は第4図に示すように1
層のみの発熱体層3で形成され、この為、発熱抵抗体の
各発熱ドツトは中心に比べ、その周辺部分の温度が低く
なってしまい、印字後の印字ドツトは、発熱抵抗体の形
状が矩形であるにも係わらず形状通りの印字ドツトが得
られず、例えば楕円形状等に印字されていた。これらを
改善して印字ドツトを発熱抵抗体の形状通りの矩形に近
づける為、前記発熱体の中央部にスリノド状の抜きパタ
ーンを入れたり、ミアンダ形と呼ばれるS字形状に発〃
(パターンを加工して発熱体の温度分布が均一になるよ
うに工大していた。Normally, the heating resistors each consisting of a plurality of throats installed in the heating element 71 are each formed in a rectangular shape.
For this reason, each heating dot of the heating resistor has a lower temperature at its periphery than the center, and after printing, the printed dots have a shape that is different from the shape of the heating resistor. Even though the dots are rectangular, printed dots cannot be obtained in the correct shape, and are printed in, for example, an elliptical shape. In order to improve these problems and make the printed dots close to the rectangular shape of the heating resistor, a slit-shaped cutout pattern is placed in the center of the heating element, or an S-shaped pattern called a meander shape is formed.
(I was working on a pattern to make the temperature distribution of the heating element uniform.
(発明か解決し7ようとする課題]
しかしながら、従来のようなスリ、ト状の抜きパターン
やミアンダ形では、抜きの部分をあまり人きくしてしま
うと自抜けの印字トソトになってしまう事から、この抜
き部分を充分に小さく形成しなりればならず、これら1
敦細パターンを形成する為に、ソ、Aトリングラフィ技
術をようするごとに4iつたり、または、白抜りを防止
する為に印字エネルギーを大きくすることが必要であっ
た。(Problem to be solved by the invention) However, with the conventional slit, T-shaped punching pattern and meander shape, if the punching part is made too sharp, the printing will end up being unevenly printed. , this punched part must be formed sufficiently small, and these 1
In order to form a fine pattern, it was necessary to increase the printing energy by 4i every time the G and A trinography techniques were used, or to increase the printing energy to prevent white spots.
上記課題を解決するために、本発明によれば発芦1砥抗
体の温度が低くなる端部を多層構造に形成し、均一・な
熱分布とすることで発p 抵抗体の矩形発熱1ノドに忠
実な形状の印字[・ノドが得られるようにしたものであ
る。In order to solve the above problems, according to the present invention, the end portion of the p-type resistor where the temperature is low is formed into a multi-layer structure, and a uniform heat distribution is achieved. It is designed so that a print with a shape that is faithful to the original shape can be obtained.
本発明による多層構造のザーマルー・7[・は、発熱ド
ツトの中央部より、その周辺の端部の発熱量が大きくな
るが、本来、発熱抵抗体の端部は放熱し易いので、中央
部と端部の温度とは等しくなるように作用する。Thermaloo 7[, which has a multilayer structure according to the present invention, generates a larger amount of heat at the edges around the heating dot than at the center, but since the edges of the heating resistor naturally dissipate heat easily, It acts so that the temperature at the end is equal.
以下に本発明の実施例を図面に基づいて説明する。第1
図は、本発明の一実施例を示す断面図であり、アルミナ
基板1」二にグレーズ層2を形成し、その上面にTa−
3to2から成る発熱体をスパッタリングにより成膜し
、これをフォトエツチングにより発熱抵抗体の船隊形状
又は部分的にパタニングするごとにより1層目の発熱体
層3を形成している。さらに、前記1層目の発熱体層3
の上方から1層目と同様にTa−3i O2をスパッタ
リングすることにより発熱体を成膜し、この成膜を発熱
抵抗体の全体形状又は部分的にフォトエツチングにより
バクーニングして発熱体層4を形成し、前記発熱体の一
部が2層となるようにしたものである。さらに、前記発
熱体層3及び4の上面には電極5と保護層6を形成して
サーマルヘラドを構成したものである。一方、第5図(
a)、 (b)は、従来の4J−マルλノドに通電した
場合の発熱体部の温度分布を示したものであるが、本発
明に基づくサーマルヘッドによれば第3図に示すような
温度分布となる。第20は、本発明におけるサーマルヘ
ッドの平面図を示すものであるか、第2図において、X
方向の電流の流れから抵抗を考えると、XcよりX、、
XRのほうが抵抗が高く、この為、電圧降下が大きい分
だ+3発%i HJか大きくなる。Embodiments of the present invention will be described below based on the drawings. 1st
The figure is a sectional view showing one embodiment of the present invention, in which a glaze layer 2 is formed on an alumina substrate 1''2, and a Ta-
A heating element consisting of 3 to 2 is formed into a film by sputtering, and the first heating element layer 3 is formed by patterning the heating element into a fleet shape or partially by photoetching. Furthermore, the first heating element layer 3
A heating element is formed by sputtering Ta-3iO2 in the same manner as the first layer from above, and this film is exposed to the entire shape of the heating resistor or a portion thereof by photoetching to form the heating element layer 4. A part of the heating element has two layers. Further, an electrode 5 and a protective layer 6 are formed on the upper surfaces of the heating element layers 3 and 4 to constitute a thermal helad. On the other hand, Fig. 5 (
Figures a) and (b) show the temperature distribution of the heating element when electricity is applied to the conventional 4J-maru lambda throat, but according to the thermal head based on the present invention, the temperature distribution as shown in Figure 3 is shown. Temperature distribution. 20 shows a plan view of the thermal head according to the present invention, or in FIG.
Considering the resistance from the direction of current flow, Xc,
XR has higher resistance, so the voltage drop is larger, so the HJ will be larger.
方、X方向についてばYcよりY+−、YRのほうが抵
抗が低く、電流密度が高い分だり発熱量が大きくなる。On the other hand, in the X direction, Y+- and YR have lower resistance than Yc, and the higher the current density, the greater the amount of heat generated.
従って、発熱体中央部より端部のほうの発熱量が大きく
なり、その結果、i:工述の第3図に示すように、中央
部と端部の温度差が小さい温度分布となる。Therefore, the amount of heat generated at the ends of the heating element is larger than that at the center, resulting in a temperature distribution in which the temperature difference between the center and the ends is small, as shown in FIG.
以上のように、本発明によれば均一・な温度分布を持つ
発熱抵抗体を、スリット形やミアンダ形よりも高精度に
かつ、通常の製造技術で作製でき、印字画質の改善を図
ることが可能であると共に、温度分布が均一となるため
、最高温度部分が従来よりも低い温度となり、発熱抵抗
体の長寿命化が機体できる。また、必要以上に高温にな
る部分がなくなるので、低エネルギーで同一濃度を得る
ことができ、高効率のサーマルヘッドが提供できる等の
効果を任する。As described above, according to the present invention, a heating resistor with a uniform temperature distribution can be manufactured with higher precision than a slit type or a meander type using normal manufacturing technology, and the print image quality can be improved. In addition to being possible, the temperature distribution becomes uniform, so the highest temperature part becomes lower than before, and the life of the heating resistor can be extended. Furthermore, since there are no parts that become hotter than necessary, the same concentration can be obtained with less energy, and a highly efficient thermal head can be provided.
第1図は、本発明の一実施例を示す断面図、第2図は、
本発明サーマルヘッドの平面図、第3図は、本発明のサ
ーマルヘッド′の温度分布を示す説明図、第4図は、従
来のサーマルヘッドの断面図、第5図(a)、 fb)
は、従来のサーマルヘッドの温度分布を示す説明図であ
る。
1・・基板
2・・ブレース層
3・・発熱体層
4・・発熱体層
5・・電極
6・ ・保護層FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG. 2 is a sectional view showing an embodiment of the present invention.
FIG. 3 is a plan view of the thermal head of the present invention; FIG. 3 is an explanatory diagram showing the temperature distribution of the thermal head of the present invention; FIG. 4 is a sectional view of a conventional thermal head; FIGS. 5(a), fb)
FIG. 2 is an explanatory diagram showing the temperature distribution of a conventional thermal head. 1... Substrate 2... Brace layer 3... Heat generating layer 4... Heat generating layer 5... Electrode 6... Protective layer
Claims (1)
ズ上面に形成された第1の発熱体層と、該第1の発熱体
層上面に形成される第2の発熱体層と、前記第1、第2
の発熱体層に通電するための電極と、これら電極を含む
発熱体層上面を被覆する保護層とからなり、前記第1又
は第2の発熱体層の形状をそれぞれ異ならしめて発熱む
らを少なく形成したことを特徴としたサーマルヘッドの
構造。a substrate, a craze layer formed on the substrate, a first heating element layer formed on the upper surface of the craze, a second heating element layer formed on the upper surface of the first heating element layer; 1st, 2nd
The heating element layer is composed of electrodes for energizing the heating element layer, and a protective layer that covers the upper surface of the heating element layer including these electrodes, and the shape of the first or second heating element layer is made different to reduce uneven heating. The structure of the thermal head is characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5426690A JPH03254954A (en) | 1990-03-06 | 1990-03-06 | Structure of thermal head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5426690A JPH03254954A (en) | 1990-03-06 | 1990-03-06 | Structure of thermal head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03254954A true JPH03254954A (en) | 1991-11-13 |
Family
ID=12965769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5426690A Pending JPH03254954A (en) | 1990-03-06 | 1990-03-06 | Structure of thermal head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03254954A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012071520A (en) * | 2010-09-29 | 2012-04-12 | Toshiba Hokuto Electronics Corp | Thermal print head and thermal printer |
-
1990
- 1990-03-06 JP JP5426690A patent/JPH03254954A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012071520A (en) * | 2010-09-29 | 2012-04-12 | Toshiba Hokuto Electronics Corp | Thermal print head and thermal printer |
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