JPH0325226U - - Google Patents
Info
- Publication number
- JPH0325226U JPH0325226U JP8505589U JP8505589U JPH0325226U JP H0325226 U JPH0325226 U JP H0325226U JP 8505589 U JP8505589 U JP 8505589U JP 8505589 U JP8505589 U JP 8505589U JP H0325226 U JPH0325226 U JP H0325226U
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric element
- exposure
- control system
- exposure amount
- temperature rise
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001186 cumulative effect Effects 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8505589U JPH0325226U (ru) | 1989-07-21 | 1989-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8505589U JPH0325226U (ru) | 1989-07-21 | 1989-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325226U true JPH0325226U (ru) | 1991-03-15 |
Family
ID=31633951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8505589U Pending JPH0325226U (ru) | 1989-07-21 | 1989-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325226U (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000277413A (ja) * | 1999-03-24 | 2000-10-06 | Canon Inc | 露光量制御方法、露光装置およびデバイス製造方法 |
-
1989
- 1989-07-21 JP JP8505589U patent/JPH0325226U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000277413A (ja) * | 1999-03-24 | 2000-10-06 | Canon Inc | 露光量制御方法、露光装置およびデバイス製造方法 |
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