JPH03248040A - Filtration film for measuring number of minute particles - Google Patents
Filtration film for measuring number of minute particlesInfo
- Publication number
- JPH03248040A JPH03248040A JP4684490A JP4684490A JPH03248040A JP H03248040 A JPH03248040 A JP H03248040A JP 4684490 A JP4684490 A JP 4684490A JP 4684490 A JP4684490 A JP 4684490A JP H03248040 A JPH03248040 A JP H03248040A
- Authority
- JP
- Japan
- Prior art keywords
- particles
- membrane
- filtration
- film
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title claims abstract description 106
- 238000001914 filtration Methods 0.000 title claims abstract description 32
- 239000012528 membrane Substances 0.000 claims description 52
- 239000010419 fine particle Substances 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 15
- 239000007788 liquid Substances 0.000 abstract description 11
- 239000000463 material Substances 0.000 description 12
- 229910021642 ultra pure water Inorganic materials 0.000 description 12
- 239000012498 ultrapure water Substances 0.000 description 12
- 239000000523 sample Substances 0.000 description 10
- 239000010408 film Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000000108 ultra-filtration Methods 0.000 description 5
- 239000004697 Polyetherimide Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229920001601 polyetherimide Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000008399 tap water Substances 0.000 description 4
- 235000020679 tap water Nutrition 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000004745 nonwoven fabric Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229920002492 poly(sulfone) Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 239000002759 woven fabric Substances 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 238000000614 phase inversion technique Methods 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000013441 quality evaluation Methods 0.000 description 1
- 238000001223 reverse osmosis Methods 0.000 description 1
- 239000012488 sample solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は微粒子数測定用濾過膜に係り、特に、試料液中
の微粒子数を短時間で効率的に正確に測定することがで
きる微粒子数測定用濾過膜に関する。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a filtration membrane for measuring the number of particles, and in particular, to a filtration membrane for measuring the number of particles in a sample liquid, which can efficiently and accurately measure the number of particles in a sample liquid. This invention relates to a measurement filtration membrane.
［従来の技術］
電子工業用超純水及び電子工業用薬品の品質評価項目の
一つとして、微粒子数の計数がある。これは、計数しよ
うとする目標粒径の粒子を明らかに表面に捕捉できるフ
ィルタを用いて所定量の超純水或いは薬品の溶液等を濾
過して、液中の微粒子をフィルタの表面に捕捉し、捕捉
した微粒子を適当な方−法で拡大して観察しながら計数
することによって行なわれる。この計数手段としては、
従来、電子顕微鏡を用いたものが公知である（特開昭５
９−８３０３６）。また、従来、微粒子捕捉用フィルタ
としては、ポリカーボネート、ポリエステル或いはセル
ロース系の薄膜フィルタが用いられてきた。[Prior Art] One of the quality evaluation items for ultrapure water for the electronic industry and chemicals for the electronic industry is counting the number of particles. This involves filtering a predetermined amount of ultrapure water or a chemical solution using a filter that can clearly trap particles of the target particle size to be counted on the surface of the filter, and trapping the fine particles in the liquid on the surface of the filter. This is carried out by enlarging and observing the captured particles using an appropriate method and counting them. This counting method is
Conventionally, a method using an electron microscope is known (Japanese Patent Application Laid-Open No.
9-83036). Furthermore, conventionally, polycarbonate, polyester, or cellulose-based thin film filters have been used as particulate trapping filters.
［発明が解決しようとする課題］
近年、超純水の水質や薬品の品質が向上して討たことに
よって、一定の容量の超純水或いは薬品を、微粒子捕捉
用フィルタで濾過したときに捕捉される微粒子数が減少
してきた。このため、捕捉された微粒子数が、もともと
フィルタ表面に存在する微粒子数とほぼ同等程度となる
場合があり、この場合には試料液中の微粒子計数の精度
が著しく悪いものとなる。即ち、従来使用されているフ
ィルタ上には０，２〜０．０５μｍ程度の微粒子が１枚
当り１０８〜１０７個存在している。[Problem to be solved by the invention] In recent years, the quality of ultrapure water and chemicals has improved and the quality of ultrapure water and chemicals has improved. The number of fine particles has decreased. Therefore, the number of captured particles may be approximately the same as the number of particles originally present on the filter surface, and in this case, the accuracy of counting particles in the sample liquid becomes extremely poor. That is, 108 to 107 fine particles of about 0.2 to 0.05 μm exist on each conventionally used filter.
このようなフィルタを用いて微粒子濃度１０個／ｍｆ１
程度の超純水１００ｉＬを濾過して計数しようとすると
、濾過によってフィルタ表面に捕捉される粒子数は１０
６個程度（１０個／ ｍ １１ ｘｌ ０００ｍＪＺ／
ｆＬｘｉ ００１）で、濾過する前から存在している粒
子数と同程度となる。このため水中の微粒子濃度を正し
く測定することができない。このような系において、正
しい測定を行なうためには、１０００ｊ２以上という多
量の試料液を濾過することが必要となり、この場合には
濾過のために膨大な時間が必要となる。Using such a filter, the particle concentration can be reduced to 10 particles/mf1.
When attempting to filter and count 100 iL of ultrapure water, the number of particles captured on the filter surface by filtration is 10.
Approximately 6 pieces (10 pieces/m 11 xl 000mJZ/
fLxi 001), which is approximately the same as the number of particles existing before filtration. For this reason, it is not possible to accurately measure the concentration of particulates in water. In such a system, in order to perform correct measurements, it is necessary to filter a large amount of sample liquid, 1000 j2 or more, and in this case, an enormous amount of time is required for filtration.
この対策として、目標粒径の微粒子を表面捕捉できる限
外濾過膜或いは薄膜フィルタを使用することが考えられ
る。しかし、通常の試験用限外濾過膜や薄膜フィルタは
、通常の雰囲気で、かつ通常の水道水をイオン交換処理
した程度の微粒子を多く含む水を使用して製造されてお
り、しかも滞留した水を使用して製造されているため、
膜が形成される際に粒子の付着が多く、粒子の付着にお
いては上記の従来から使用されているフィルタとほぼ同
様の状況である。As a countermeasure to this problem, it is conceivable to use an ultrafiltration membrane or a thin film filter that can capture particles having a target particle size on the surface. However, normal ultrafiltration membranes and thin film filters for testing are manufactured in a normal atmosphere using water that contains a lot of fine particles equivalent to the ion exchange treatment of normal tap water, and moreover, they are manufactured using water that contains a lot of fine particles. Because it is manufactured using
When the film is formed, many particles adhere to the filter, and the situation in terms of particle adhesion is almost the same as that of the conventional filters described above.
また、濾過膜は通常、支持材として織布や不織布で裏打
ちされることが多く、この支持材から発生する微粒子が
濾過表面を汚染する。Furthermore, filtration membranes are often lined with woven or nonwoven fabric as a support material, and fine particles generated from this support material contaminate the filtration surface.
本発明は上記従来の問題点を解決し、微粒子濃度の著し
く低い試料液中の微粒子数をも、短時間で効率的に高精
度に計測することができる微粒子数計測用濾過膜を提供
することを目的とする。The present invention solves the above conventional problems and provides a filtration membrane for measuring the number of particles that can efficiently and accurately measure the number of particles in a sample liquid with an extremely low concentration of particles in a short time. With the goal.
［課題を解決するための手段］
本発明の微粒子数計測用濾過膜は、膜表面上に、粒子径
０．０５μｍ以上の粒子を、直径２５ｍｍの円に相当す
る面積当り１０５個以下有することを特徴とする。[Means for Solving the Problems] The filtration membrane for measuring the number of particles of the present invention has 105 or less particles with a particle size of 0.05 μm or more per area equivalent to a circle with a diameter of 25 mm on the membrane surface. Features.
即ち、本発明者らは、微粒子濃度の著しく低い試料液中
の微粒子数をも、短時間で効率的に＆精度に計測するこ
とができるフィルタを提供するべく鋭意検討を重ねた結
果、微粒子汚染の少ない、即ち、膜面に付着している微
粒子数の少ないフィルタであれば試料液中に含有される
粒子の数を少ない濾過量にて正確に計数できることを知
見し、本発明を完成させた。In other words, the present inventors have conducted intensive studies to provide a filter that can efficiently and accurately measure the number of particles in sample liquids with extremely low particle concentrations in a short period of time. The present invention was completed based on the finding that a filter with a small number of particles attached to the membrane surface can accurately count the number of particles contained in the sample liquid with a small filtration amount. .
［作用］ 以下に本発明の詳細な説明する。[Effect] The present invention will be explained in detail below.
なお、本明細書においては、直径２５ｍｍの円に相当す
る面積をｒ２５ｍｍ円面積Ｊと称する。Note that in this specification, the area equivalent to a circle with a diameter of 25 mm is referred to as r25 mm circular area J.
本発明の微粒子数計測用濾過膜は、上述の如く２５ｍｍ
円面積当りの膜面上の粒子数（粒子径０．０５μｍ以上
）が１０５個以下と非常に少ない、高清浄なものであれ
ば良く、膜構造、濾過性能等に特に制限はないが、膜構
造としては、通常計数対象となる粒子径０．０３μｍ以
上の粒子が表面で捕捉できるもので、かつ、実用的な濾
過速度、例えば、純水の濾過流束が温度２５℃、圧力１
ｋ ｇ ／ ｃ ｒｎ’において０．５ｃｒｎ”／ｃ
ｎ？・ｍｉｎ以上、特に１ ｃｒｎ”／ｃｒｎ”−ｍ
ｉ ｎ以上、とりわけ１．５ｃｎ？／ｃｒｎ’・ｍｉｎ
以上であることが好ましい。The filtration membrane for measuring the number of particles of the present invention has a diameter of 25 mm as described above.
It is sufficient that the number of particles (particle size 0.05 μm or more) on the membrane surface per circular area is very small, 105 or less, and is highly clean. There are no particular restrictions on membrane structure, filtration performance, etc. The structure is such that particles with a particle size of 0.03 μm or more, which are normally counted, can be captured on the surface, and the filtration rate is practical, for example, the filtration flux of pure water is 25°C and 100m in pressure.
0.5 crn”/c in kg/c rn’
n?・Min or more, especially 1 crn”/crn”-m
i n or more, especially 1.5cn? /crn'・min
It is preferable that it is above.
本発明の微粒子汚染の少ない微粒子数計測用濾過膜は、
次のようにして製造することができる。The filtration membrane for measuring the number of particulates with little particulate contamination of the present invention has the following features:
It can be manufactured as follows.
例えば、限外濾過膜（ＵＦ膜）や薄膜フィルタ（ＭＦ膜
）の中には、高分子溶液を支持材の上に均一に展開し、
水に浸漬する（相転換法）ことによって容易に形成でき
るものがある。この場合には、微粒子の少ない環境で水
透過性を持つ膜を形成することによフて、膜表面付着粒
子の少ない濾過膜を作製することができる。具体的には
、ポリスルフォン、ポリエーテルイミド、ポリアクリロ
ニトリルなどの高分子を適当な溶媒に溶かした溶液を、
クラス１００００ （粒子径０．３μｍ以上の空気中粒
子が１立方フイート中に１００００個以下）又はそれよ
り清浄度の高いクリーンルーム内において、発塵性のな
い支持材、例えば、ガラス板などの上に厚さ１００〜３
００μｍに均一に塗布する。そして、溶液を塗布した支
持材を粒子径０．２μｍ以上の微粒子濃度が１００個／
ｍ ４２以下の水に浸漬する。このようにして形成し
た膜を加熱処理する際も、上記と同様に粒子濃度の低い
水を加温した水に浸漬することによって行なう。For example, in ultrafiltration membranes (UF membranes) and thin membrane filters (MF membranes), a polymer solution is uniformly spread on a support material.
Some can be easily formed by immersion in water (phase inversion method). In this case, by forming a water-permeable membrane in an environment with few particles, a filtration membrane with fewer particles attached to the membrane surface can be produced. Specifically, a solution of polymers such as polysulfone, polyetherimide, and polyacrylonitrile dissolved in an appropriate solvent is
In a clean room of class 10,000 (airborne particles with a particle diameter of 0.3 μm or more: 10,000 or less per cubic foot) or higher, on a non-dust-producing support material, such as a glass plate, etc. Thickness 100~3
Apply uniformly to 00 μm. Then, the support material coated with the solution was coated with a concentration of 100 particles/100 particles with a particle size of 0.2 μm or more.
Immerse in water below m42. Heat treatment of the film thus formed is also carried out by immersing it in heated water with a low particle concentration in the same manner as described above.
上記方法において、膜を形成する際に浸漬する水に含ま
れる微粒子が多いと、これが形成された膜の表面に付着
して粒子汚染の原因となる。また、支持材として織布、
不織布などの発塵性のあるものを使用すると、支持材か
ら発生する粒子が汚染の原因となる。このようなことか
ら、製造にあたっては、微粒子濃度の低い水と発塵性の
ない支持体を使用することが重要である。In the above method, if there are many fine particles contained in the water immersed in forming the membrane, these particles will adhere to the surface of the formed membrane and cause particle contamination. In addition, woven fabric can be used as a support material.
If a dust-generating material such as non-woven fabric is used, the particles generated from the support material will cause contamination. For this reason, during production, it is important to use water with a low concentration of fine particles and a support that does not generate dust.
微粒子濃度の低い水としては、超純水、純水など限外濾
過膜や逆浸透膜を用いて精製した水或いは水道水などか
ら限外濾過膜やメンブレンフィルタで微粒子だけを取り
除いた水を用いることができる。As water with a low concentration of particulates, use water that has been purified using an ultrafiltration membrane or reverse osmosis membrane, such as ultrapure water or pure water, or water that has only particulates removed from tap water using an ultrafiltration membrane or membrane filter. be able to.
また、支持材はガラス板の他、表面が平滑で発塵性がな
い板状のもの、例えば、ステンレス板、アルミニウム板
などでも良い、このような平滑な支持材の上に高分子溶
液を塗布して水に浸漬する方法により膜を形成させると
、膜は支持材から剥れ、支持材による裏打ちのない高清
浄な平板状の膜が得られる。In addition to glass plates, the supporting material may also be a flat surface with a smooth surface and no dust generation, such as a stainless steel plate or an aluminum plate.The polymer solution is applied onto such a smooth supporting material. When a membrane is formed by immersing the membrane in water, the membrane peels off from the support material, and a highly clean flat membrane without backing by the support material is obtained.
本発明の微粒子数測定用濾過膜は、膜面に存在する粒子
径０．０５μｍ以上の粒子数が、２５ｍｍ円面積当り１
０５個以下と著しく少なく、膜面由来の粒子が殆ど問題
とならない数であるため、微粒子濃度の低い試料であっ
ても多量に濾過する必要もなく、少量の濾過で含有され
る微粒子数を正確に計測することが可能とされる。The filtration membrane for measuring the number of fine particles of the present invention has a particle size of 0.05 μm or more existing on the membrane surface of 1 per 25 mm circular area.
0.05 or less, and the number of particles originating from the membrane surface is hardly a problem, so there is no need to filter a large amount even if the sample has a low concentration of particles, and it is possible to accurately determine the number of particles contained by filtration of a small amount. It is said that it is possible to measure
因みに、本発明の微粒子数計測用濾過膜によれば、粒子
径０．０３μｍ以上の粒子を１０個／ｍｆｌ程度の濃度
で含有する超純水中の粒子数を測定する場合、５０β程
度の濾通量で十分に正確な粒子数を求めることができる
。Incidentally, according to the filtration membrane for measuring the number of particles of the present invention, when measuring the number of particles in ultrapure water containing particles with a particle size of 0.03 μm or more at a concentration of about 10 particles/mfl, a filter of about 50β is required. A sufficiently accurate number of particles can be obtained by measuring the number of particles.
［実施例コ
以下に実施例、比較例及び実験例を挙げて本発明の詳細
な説明する。[Example] The present invention will be explained in detail by giving Examples, Comparative Examples, and Experimental Examples below.
実施例１
ポリエーテルイミド樹脂をジメチルアセトアミドに溶解
し、ポリエーテルイミドの溶液を調製した。この溶液を
クリーンルームにおいてガラス板上に厚さ２００μｍで
均一に塗布し、超純水（粒子径０．１μｍ以上の微粒子
濃度：１０個／ ｍ １１以下）を満たした容器に浸漬
した。この操作によってガラス板上にポリエーテルイミ
ドのＵＦ膜が形成された。得られたＵＰ膜の一部を円形
に切り採り、乾燥後、金を蒸着した上で走査型電子顕微
鏡にて表面を倍率１５０００で観察し、表面に存在する
粒子径０．０５μｍ以上の粒子の数を計数した。その結
果、殆どの視野において粒子径０．０５μｍ以上の大き
さの粒子は見出せず、２００視野観察して１個の粒子が
見出された。この粒子数は、観察面積と膜面積とから換
算して、２５ｍｍ円面積当りの膜面に４．６Ｘ１０’個
の微粒子が存在することに相当する。Example 1 A polyetherimide solution was prepared by dissolving a polyetherimide resin in dimethylacetamide. This solution was uniformly applied to a thickness of 200 μm on a glass plate in a clean room, and immersed in a container filled with ultrapure water (concentration of fine particles with a particle size of 0.1 μm or more: 10 particles/m 11 or less). By this operation, a polyetherimide UF film was formed on the glass plate. A part of the obtained UP film was cut into a circular shape, dried, gold was deposited on it, and the surface was observed with a scanning electron microscope at a magnification of 15,000 to determine whether particles with a particle diameter of 0.05 μm or more were present on the surface. The number was counted. As a result, no particles with a particle diameter of 0.05 μm or more were found in most of the visual fields, and one particle was found after 200 visual fields were observed. This number of particles corresponds to the presence of 4.6 x 10' particles on the membrane surface per 25 mm circular area, calculated from the observation area and membrane area.
比較例１
実施例１において、製造を通常の実験室内で行なうと共
に、超純水の代りに水道水を用いたこと以外は同様にし
てＵＦ膜を作製し、得られたＵＰ膜について、実施例１
と同様にして表面に存在する粒子径０．０５μｍ以上の
粒子の数を計数した。その結果、１視野平均で５３個の
粒子が観察された。この粒子数は、２５ｍｍ円面積当り
の膜面に４．９Ｘ１０’個の微粒子が存在することに相
当する。Comparative Example 1 A UF membrane was produced in the same manner as in Example 1 except that the production was carried out in a normal laboratory and tap water was used instead of ultrapure water. 1
In the same manner as above, the number of particles with a particle diameter of 0.05 μm or more existing on the surface was counted. As a result, 53 particles were observed on average per field of view. This number of particles corresponds to the presence of 4.9×10′ particles on the film surface per 25 mm circular area.
比較例２
実施例１において、超純水の代りに水道水を用いたこと
以外は同様にしてＵＦ膜を作製し、得られたＵＦ膜につ
いて、実施例１と同様にして表面に存在する粒子径０．
０５μｍ以上の粒子の数を計数した。その結果、１視野
平均で５．４個の粒子が観察された。この粒子数は、２
５ｍｍ円面積当りの膜面に５．０ｘｌＯ’個の微粒子が
存在することに相当する。Comparative Example 2 A UF membrane was produced in the same manner as in Example 1 except that tap water was used instead of ultrapure water, and the particles present on the surface of the obtained UF membrane were treated in the same manner as in Example 1. Diameter 0.
The number of particles larger than 0.05 μm was counted. As a result, 5.4 particles were observed on average per field of view. This number of particles is 2
This corresponds to the presence of 5.0xlO' particles on the film surface per 5 mm circular area.
実施例２
ポリスルフォン樹脂をＮ−メチルピロリドンに溶解し、
この溶液をクリーンルームにおいてガラス板に塗布し、
実施例１で用いたと同様の超純水に浸漬することによっ
てＵＦ膜を作製した。得られたＵＦ膜について、実施例
１と同様にして粒子径０．０５μｍ以上の粒子の数を計
数した。その結果、２００視野の観察で２個の粒子が見
出された。この粒子数は２５ｍｍ円面積の膜面に９．２
×１０４個の粒子が存在することに相当する。Example 2 Polysulfone resin was dissolved in N-methylpyrrolidone,
Apply this solution to a glass plate in a clean room,
A UF membrane was prepared by immersing it in the same ultrapure water as used in Example 1. Regarding the obtained UF membrane, the number of particles having a particle size of 0.05 μm or more was counted in the same manner as in Example 1. As a result, two particles were found in 200 visual fields. The number of particles is 9.2 on a membrane surface with a circular area of 25 mm.
This corresponds to the presence of ×104 particles.
比較例３
実施例２において、ガラス板の代りに不織布を用いたこ
と以外は同様にしてＵＦ膜を作製し、得られたＵＰ膜に
ついて、実施例２と同様にして表面に存在する粒子径０
２０５μｍ以上の粒子の数を計数した。その結果、１視
野平均で０．８個の粒子が見出された。この粒子数は２
５ｍｍ円単位面積の膜面に７．４Ｘ１０’個の粒子が存
在することに相当する。Comparative Example 3 A UF membrane was produced in the same manner as in Example 2 except that a nonwoven fabric was used instead of the glass plate, and the obtained UP membrane was treated in the same manner as in Example 2 to reduce the particle size of particles present on the surface to 0.
The number of particles larger than 205 μm was counted. As a result, 0.8 particles were found on average per field of view. This number of particles is 2
This corresponds to the presence of 7.4×10′ particles on a membrane surface with a unit area of 5 mm circle.
実験例１
実施例１．２及び比較例１〜３で得られた膜を用いて、
それぞれ、予め粒子数が判明している試料液（粒子径０
．０３μｍ以上の粒子数が１０個／ ｍ ＪＺの超純水
）の粒子数の測定を常法に従って行ない、正確な粒子数
が求められるために必要とされる濾過量を調べた。Experimental Example 1 Using the membranes obtained in Example 1.2 and Comparative Examples 1 to 3,
For each sample solution, the number of particles is known in advance (particle size 0
．． The number of particles (JZ ultrapure water) with a particle size of 0.3 μm or more was 10/m was measured according to a conventional method, and the amount of filtration required to determine the accurate number of particles was investigated.
結果を第１表に示す。The results are shown in Table 1.
第１表より、本発明の微粒子数測定用濾過膜によれば、
少ない濾過量で微粒子数を正確に測定できることが明ら
かである。From Table 1, it is clear that according to the filtration membrane for measuring the number of fine particles of the present invention, the number of fine particles can be accurately measured with a small amount of filtration.
［発明の効果］
以上詳述した通り、本発明の微粒子数計測用濾過膜によ
れば、含有される粒子数の少ない試料液中の粒子数をも
少ない濾過量により、即ち、少ない濾過時間にて容易に
かつ正確に求めることが可能とされる。[Effects of the Invention] As detailed above, according to the filtration membrane for measuring the number of particles of the present invention, the number of particles in a sample liquid containing a small number of particles can be reduced by a small filtration amount, that is, in a short filtration time. can be easily and accurately determined.
従って、本発明の微粒子数計測用濾過膜によれば、試料
液中の粒子数の測定効率が大幅に向上され、その工業的
有用性は極めて犬である。Therefore, according to the filtration membrane for measuring the number of particles of the present invention, the efficiency of measuring the number of particles in a sample liquid is greatly improved, and its industrial usefulness is extremely high.
Claims (1)
直径２５ｍｍの円に相当する面積当り１０＾５個以下有
することを特徴とする微粒子数測定用濾過膜。(1) Particles with a particle size of 0.05 μm or more on the membrane surface,
A filtration membrane for measuring the number of fine particles, characterized in that it has 10^5 or less particles per area equivalent to a circle with a diameter of 25 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4684490A JPH03248040A (en) | 1990-02-27 | 1990-02-27 | Filtration film for measuring number of minute particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4684490A JPH03248040A (en) | 1990-02-27 | 1990-02-27 | Filtration film for measuring number of minute particles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03248040A true JPH03248040A (en) | 1991-11-06 |
Family
ID=12758654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4684490A Pending JPH03248040A (en) | 1990-02-27 | 1990-02-27 | Filtration film for measuring number of minute particles |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03248040A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012154648A (en) * | 2011-01-21 | 2012-08-16 | Nomura Micro Sci Co Ltd | Method and apparatus for measuring number of microparticle in ultrapure water |
-
1990
- 1990-02-27 JP JP4684490A patent/JPH03248040A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012154648A (en) * | 2011-01-21 | 2012-08-16 | Nomura Micro Sci Co Ltd | Method and apparatus for measuring number of microparticle in ultrapure water |
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