JPH0324568Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] The present invention is an effective hermetic sealing method for semiconductors in dry boxes.
It concerns gloves.

[Summary of the invention] The present invention uses a double-layered glove, which is used for hermetically sealing semiconductors in a dry box, with an outer layer and an inner layer, the base ends of which are hermetically sealed together. In addition to providing a gas inlet near the end, a large number of ventilation holes are also drilled in the inner layer. During hermetic work, an inert gas such as nitrogen is introduced through the gas inlet and passes between the inner layer and the arms through the vents. This not only cools the skin, but also dries any sweat that may have been produced.

[Conventional technology] In order to achieve high reliability in packaging semiconductors, there is a hermetic sealing method in a dry box filled with dry inert gas, and the work is usually done using rubber gloves installed in the dry box. It is done through.

[Problems to be solved by the invention] Therefore, sweat generated from the hands and arms during work accumulates on the skin of the hands and arms and inside the gloves, which is extremely unhygienic and uncomfortable, and may lead to work errors.

Also, even though rubber gloves are said to be impermeable, they are not perfect as they have tiny pinholes scattered throughout, and when the hands and arms are sweating heavily, some moisture can enter the dry box.

[Means for Solving the Problems] The present invention has a glove with a double structure of an outer layer and an inner layer, the proximal ends are hermetically sealed together, a gas inlet is provided near the proximal end of the outer layer, and a gas inlet is provided in the inner layer. The above-mentioned problem was solved by drilling a large number of ventilation holes and introducing inert gas through the gas inlet during hermetic work.

[Function] During work, the gloves of the present invention allow the inert gas that flows in from the gas inlet in the outer layer to pass between the inner layer and the hands and arms through the ventilation holes and flow out into the outside air. The skin is slightly cooled and sweating is suppressed, and even if a little sweat does occur, it dries immediately and sweat does not accumulate on the skin or inside the gloves.

Furthermore, even if there are some pinholes in the outer layer of the glove, what enters the drybox through these pinholes is dry inert gas, which will not degrade the quality of the semiconductor.

[Embodiment of the invention] The drawings show an embodiment of the invention. In FIG. 2, 1 is a transparent dry box, and 2 is a glove of the invention provided in the dry box 1.

As shown in FIG. 1, each glove 2 has a double structure of a poorly impermeable outer layer 3 and an inner layer 4, and the outer layer 3 and the inner layer 4 have a base end (left end in FIG. 1).
It is airtightly sealed, and a gas inlet 5 is provided at the base of the outer layer 3.
is attached, and a large number of ventilation holes 6 are bored in the inner layer 4.

Although not shown, during hermetic sealing work, connect the gas inlet 5 with a gas hose.
Connected to an inert gas source, such as a nitrogen cylinder,
The work is carried out while a small amount of gas is allowed to flow between the outer layer 3 and the inner layer 4.

[Effects of the invention] As mentioned above, during work, the inert gas that flows in from the gas inlet in the outer layer passes between the hands and arms in the inner layer through the ventilation hole and flows out into the outside air. During this time, the airflow cools the skin of the hands and arms, suppressing sweating, and even if you sweat a little, it dries immediately, preventing sweat from accumulating on your skin or inside the gloves, which is both hygienic and prevents sweat from slipping. There is no need for work errors to occur.

Furthermore, even if there are some pinholes in the outer layer of the glove, the material that enters the drybox through the holes is dry inert gas, which will not degrade the quality of the semiconductor.

[Brief explanation of the drawing]

Figure 1 is a central longitudinal sectional front view of the glove of the present invention;
The figure is a perspective view of a dry box using the gloves of the present invention. 1...Dry box, 2...Gloves, 3...Outer layer, 4...Inner layer, 5...Inlet, 6...Vent.

Claims (1)

[Scope of utility model registration request] Gloves for dryboxing have a double structure consisting of a soft impermeable outer layer and an inner layer, the proximal ends of which are airtightly sealed together, and a gas inlet is provided near the proximal end of the outer layer, as well as numerous ventilation holes in the inner layer. Gloves for dryboxing, characterized by having perforations.