JPH03245008A - Method and apparatus for measuring angle - Google Patents

Abstract

PURPOSE:To measure the inclination angle of a surface to be measured by projecting planar light on one plane to be measured, and picking up the image of a light-ray pattern caused by the planar light with a CCD sensor and the like on planar coordinates. CONSTITUTION:The crossed axes angle of a work W having two planes 1 and 2 as planes to be measured is measured. At this time, an intersection line 3 between the two planes 1 and 2 is made to agree with the X axis. A CCD camera 4 as a vision sensor is provided on the Z axis which is orthogonally intersected with the X axis. The image is picked up with the camera 4 toward an intersection O of both axes X and Z in a field of view 5. The YZ plane is inclined by an angle beta, and this plane is made to be the plane to be illuminated with planar light. The planar light 7 passing an original point O is projected on this plane. The planar light 7 which is emitted from an light emitting device 8 hits the planes to be measured a 1 and 2, and linear light-ray patterns 9 and 10 passing the original point O are formed on both planes. At this time the crossed axes angle between the two planes 1 and 2 can be expressed as the sum of the inclination angles alpha1 and alpha2 of the planes 1 and 2 with respect to the Z axis.

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention is suitable for measuring the bending angle of a workpiece that has been bent or the current bending angle of a workpiece that is being bent. The present invention relates to an angle measurement method and device.

(Prior Art) Conventionally, for example, when measuring the bending angle of a bent workpiece, it is common to inspect the workpiece by applying an angle measuring jig such as a scorer or protractor having a predetermined angle to the workpiece.

However, these orientations have problems in that individual errors of the measurer occur and measurement takes a lot of time. Additionally, with the trend toward automation in factories, it was impossible to automate the inspection process. Furthermore, bending machines perform bending by moving the upper and lower molds relative to each other, but the angle is measured during the bending process, and the final position of the mold is automatically determined. The bending angle could not be automatically determined to be the target bending angle.

Therefore, conventionally, for example, in Japanese Patent Publication No. 6B-2687 (press brake plate bending angle detection device), the minimum bending angle of the workpiece is detected by capturing an image of the end face of the workpiece during bending with a visual sensor. We are trying to perform automatic bending.

(Problem to be Solved by the Invention) However, in the conventional method of detecting the bending angle of a workpiece using a visual sensor, including the above-mentioned Japanese Patent Publication No. 63-2687, the bending angle at the workpiece end face is imaged and the bending angle at the workpiece end face is detected. Since this method detects the bending angle, there is a problem that the bending angle cannot be detected accurately, and even if automatic bending is performed using this detected value, high-precision bending cannot be performed. Ta.

In other words, when it comes to plate-shaped workpieces that are bent, it is common for the end faces to be distorted in the raw material stage, have cracks, or have a tapered cross section. It is difficult to detect the correct bend angle.

In particular, when imaging the end face of a workpiece using a reflective imaging method,
If the workpiece end face of the material is a tapered surface, the reflected light will be uneven, and the image obtained by this reflected light will differ from the actual shape. In particular, when constructing a transmission type imaging device, a projector must be provided for that purpose, which increases the size of the device and makes it difficult to generalize it.

Further, when detecting the angle of the end face of the workpiece, the setting position of the visual sensor is limited to the direction of the end face of the workpiece, so there is a problem that the frame configuration of the bending machine is limited.

In addition, when detecting the angle at the end face of the workpiece, the workpiece is distorted in a bow shape when viewed from the front side of the bending machine due to the so-called sagging phenomenon, so the detected bending angle is a representative value of the workpiece bending angle. The problem was that it was not.

Therefore, the first object of the present invention is to image a surface to be measured and calculate the total inclination angle flFI of the surface to be measured by two dimensions in the imaging direction.

Second, the purpose is to measure the intersection angle of two planes as surfaces to be measured using one camera.

Thirdly, the purpose is to individually measure the intersection angle of two planes as surfaces to be measured using a pair of cameras facing each surface to be measured, and to obtain the intersection angle of the two planes from both measurement results.

Fourth, it is an object of the present invention to provide an angle measuring device that can measure two planes as surfaces to be measured using one camera.

Fifth, it is an object of the present invention to provide an angle measuring device that can measure the intersection angle of two planes as surfaces to be measured using a pair of cameras facing each surface.

[Structure of the Invention (Means for Solving the Problems) The angle measurement method of the present invention that achieves the first object described above includes irradiating a surface to be measured with planar light by scanning a slit light or a linear beam. Then, a linear light beam pattern appearing on the surface to be measured is imaged on a plane coordinate from an imaging direction that has a certain relationship with the surface to be measured and the surface irradiated with the planar light, and The method is characterized in that the angle of inclination of the surface to be measured with respect to the imaging direction is measured from the angle formed by the light beam pattern with respect to a reference line.

In this orientation, the normal line of one measured surface is set to the plane coordinate Y
Considering three-dimensional coordinates XYZ included in Z, a surface obtained by tilting the YZ plane by an angle β toward the Assuming that the angle of the light beam pattern with respect to the X-axis is θ, the slope angle of the surface to be measured with respect to the Z-axis can be determined by α−jan′ (tanθ·tanβ). In this case, by setting β to 45 degrees, it is possible to set α to θ.

The present invention, which achieves the above-mentioned second object, provides an angle measurement method for measuring the intersection angle of two planes as surfaces to be measured, in which the two planes are irradiated with one planar light by scanning a slit light or a linear beam. and imaging the linear light ray patterns appearing on each of the two planes on one plane coordinate from an imaging direction that is in a fixed relationship with the two planes and the irradiation surface of the planar light,
The method is characterized in that the intersecting angle between the two planes is measured from the angle formed by the light ray pattern on the imaged plane coordinates with respect to a reference line.

At this time, take the intersection line of the two planes as the surfaces to be measured as the X axis, and take the Z axis inward in the direction that allows you to see through these two planes.
Considering the dimensional coordinates XYZ, a surface obtained by tilting the YZ plane by an angle β around the Y axis is set as the irradiation surface of the planar light, and the light ray pattern appearing on the two planes is imaged on the XY plane coordinates,
The angle between the imaged light ray pattern of each surface to be measured and the X axis is θ1. When θ2 is the intersection angle α of the two planes, α-jan −' (tanθ1 ・tanβ)+ja
It can be determined by n −' (tanθ2◆tanβ). In this case as well, by setting β to 45 degrees, it can be calculated as α-01+θ.

The present invention, which achieves the third object described above, is an angle measurement method for measuring the intersection angle of two planes as surfaces to be measured, in which each of the two planes is irradiated with planar light by scanning a slit light or a linear beam. , the linear light ray patterns appearing on each of the two planes are imaged by separate cameras, and the intersection angle of the two planes is measured from each light ray pattern on each imaged plane coordinate.

The present invention, which achieves the fourth object, provides an angle measuring device for measuring the intersection angle of two planes as surfaces to be measured, including a light emitting means for irradiating the two planes with one planar light; The present invention is characterized by comprising a camera that images a linear light beam pattern appearing on the two planes by irradiation on one plane coordinate, and an arithmetic circuit that calculates the intersection angle of the two planes from the imaged light beam pattern.

The present invention, which achieves the above-mentioned fifth object, provides an angle meter JFI device that measures the intersection angle of two planes as surfaces to be measured. a pair of cameras that respectively image the respective light ray patterns appearing on the two planes due to the emitted light;
The present invention is characterized in that it includes an image processing device that calculates the intersection angle of both planes from the imaging results of both cameras.

(Function) In the angle measurement method that achieves the above first objective, one surface to be measured is irradiated with planar light, and the beam pattern of the planar light is imaged on planar coordinates using a CCD sensor or the like. From the relationship between the irradiation direction or attitude of the planar light and the imaging direction, it is possible to measure the inclination angle of the surface to be measured with respect to the imaging direction.

In the angle measurement method that achieves the second objective, one planar light is irradiated onto two planes as measurement surfaces, and a single imaging device images the light ray patterns that appear on each of the two planes due to the planar light. It is possible to measure the intersection angle of two planes.

In the angle measurement method that achieves the third objective, two planes as measurement surfaces are each irradiated with planar light, and the light ray patterns appearing on each surface are individually imaged by each planar light. The intersection angle of two planes can be measured.

In the angle measuring device that achieves the fourth objective, one plane light is irradiated onto two planes as measurement surfaces, and the light ray pattern appearing on each plane by this plane light is imaged on one plane coordinate. By doing so, the intersection angle of two planes can be measured with one camera.

In the angle measuring device that achieves the fifth objective, two planes as measurement surfaces are irradiated with planar light, and the light ray patterns appearing on each surface are imaged by each planar light. The intersection angle of planes can be measured.

Therefore, even if there is an obstacle on the central plane of the two planes,
By taking separate measurements from both sides of the obstacle,
The intersection angle of two planes can be found.

(Example) Hereinafter, an example of the present invention will be described in detail using the accompanying drawings.

1 to 3 are explanatory diagrams showing the angle measurement method of this example.

In Fig. 1, the intersection angle α of the work W (thickness is not considered) having two planes 1.2 as the surfaces to be measured.
In order to measure the X
It is assumed that the image is captured in the field of view 5 with the Z intersection point (origin) 0 facing. Let the optical axis of the camera 4 be Lc. The plane coordinates of the CCD area sensor at this time are equivalent to the plane coordinates XY, where Y is an axis orthogonal to both axes XZ.

On the other hand, a plane obtained by tilting the YZ plane by an angle β is used as the irradiation surface of the planar light, and the planar light 7 passing through the origin 0 is irradiated onto this plane. Such planar light 7 can be emitted from a light emitter 8 such as a laser diode. A slit is provided at the tip of the light emitter 8 in a direction parallel to the irradiation surface, and a laser diode provided inside the slit irradiates laser light toward the irradiation surface. Therefore, the planar light 7 irradiated from the light emitter 8 hits the measured surface 1.2, forming a linear light beam pattern 9.10 passing through the origin O on both surfaces. The irradiation surface does not necessarily have to pass through the origin O, and may be a surface that is translated in parallel to the plane passing through the origin O. The optical axis of the light emitter 8. shall be.

Here, as shown in Fig. 2, the intersection angle α of the two planes 1.2
can be expressed as the sum of the inclination angles αα2 of the plane 1.2 with respect to the Z-axis.

α Snow α1+α2 (1) Therefore, the slope angle α7. By measuring α2 and finding the sum, it is possible to find the intersecting angle α between the two planes.

3(a) is a plan view of FIG. 2, FIG. 3(b) is a front view, and FIG. 3(C) is a right side view.

In the figure, the plan view of FIG. 3(a) can be imaged on the area sensor of the CCD camera 4.

Therefore, in the plan view of FIG. 3(a), the angle between the light beam pattern 910 and the X axis is θ4. θ7, the width of each plane 1.2 is B, , B2, the height of each plane in the front view of Fig. 3(b) is H,, H2, the projected length of each light ray pattern 9, 10 on the X axis Assuming that L12 is L12, the following equation holds true for plane 1.

As a result, α1 is tan α1 tsubo tan θ1 ・tanβa −jan
It can be seen that -' (tan θ1·tan β)−(5).

Similarly, on plane 2, α2-jan −' (tanθ2・tanβ)...(
6〉.

Therefore, the bending angle α of the workpiece can be determined using the formula ((>).

When β=45 degrees, α−θ, +02 is obtained, which is convenient because there is no need to perform the calculations of equations (5) and (6).

In the above measurement direction, the intersection angle α of the two planes 1 and 2 is calculated as one planar light 7. and one CCD camera 4, but using a pair of planar light 7 and CCD camera 4 units, each unit measures the inclination angle of each measured surface using equation (5) (B), The intersecting angle α between the two planes can also be determined from the arrangement relationship of the optical axes Lc of both units. In this case, it is also possible to use only the planar light 7 in common.

Further, in the above embodiment, the planar light 7 is configured as a slit beam, but the planar light can also be obtained by scanning a linear beam on the irradiation surface.

Further, in the above embodiment, the CCD camera 4 is used as the visual sensor, but any other device may be used as long as it can capture a two-dimensional image.

Furthermore, although a slit light beam from a laser diode is used as the light emitter 8, any light emitter 8 may be used as long as it can emit planar light. However, since the linearity of planar light affects angle detection accuracy, a light emitter with high linearity such as a laser beam can detect angles with higher accuracy.

FIG. 4 is a block diagram showing an example of an image processing device connected to the CCD camera 4. As shown in FIG.

The image processing device 11 of this example has a CP on the system bus 12.
U13, ROM14, RAM15, input/output device (Ilo
) 16, a display interface 17, and an image memory 18 are connected, and the image memory 18 has one binarization (A/D) circuit that converts the image signal S of the CCD camera 4 into a binarized signal. It is provided.

A display 20 is connected to the display ink face 17. For example, a control device 21 of a bending machine is connected to the input/output device 16.

In the above configuration, the image memory 18 includes the image shown in FIG. 3(a).
The image shown in FIG. 5 is obtained, the CPU 13 executes the process shown in FIG. 5 to measure the angle α, and the calculation result is output to the display 20 or the control device 21.

In this example, when A/D converting the video signal S, the video part of the light beam pattern 9.10 is set to "1", and the other video parts are set to "1".
Binarize it so that it becomes 0'' and store it in the image memory 18,
Regarding this image data, the angle θ1. Let us find θ2. Angle θ1. θ2 is
For example, it can be determined by formulating an equation for an approximate straight line using the least squares method and determining the slope of this straight line.

FIGS. 6 to 11 are explanatory diagrams of an image processing apparatus using the direction code method. In the image processing shown in Fig. 4, it takes a large amount of calculation to set up the equation of the approximate straight line using the least squares annotation, which increases the processing time. It was measured.

The direction code method is described in "Shape Pattern Recognition Technology" by Hidehiko Takano (published October 15, 1980, Information Research Committee, p.
31 to 32), the direction of the outer periphery of the outline of a figure is coded. As shown in FIG. Intersection point AI4. AI
I+l, A1, +++ + AI+1. 0 in I
, 1, horizontal (HORI[-]), right slope (SL
OR[)] ), left tilt (SLOL [(] ), vertical (VERT [1]), body (BoDY[+])
, Space (SPAC), Corner (vERX)
+])) and process them using hardware to speed up the processing.

HORI [−] − 5LOR[)] - (A1.H×A I+1 +(A 1.) X A 1+l 5 LOL [(ko) (A　　　　　　XA.

+(AI XA or VERT [1] - XA,... or +
1 j ten l XA1+1.141) × A × A X A 141.141) XA, and 1 j. 1) BODY [+] − (A 1.+ XA+++, + xAl, +41
XA1+1.1B )SPAC[]- (A, + xAl+1.I XA 11+I X
A+++, +++ )VERX [+] − (AI, jXA+++, IXA+, 1+1xA,,,,
”+1)+ (A1.
, +++ XA++,, +++ )+ (A +,
IXA++1. I X A +, J+ (xA ++1.
I+1 )+ (A 1 , I X A 1 ・
1. HX A I, ) + IXA++
+, + ・ ] )+ (AI, I XA++
+, I x Al, 1+I x Al+1. +++
) + (AI, I XA 1 +1.I
xAl,1++

This coding is applied to the image data window W in Figure 7.
1 and W2, a code as shown in FIG. 10 is generated.

Therefore, in this example, the addition operation of the following formula is performed on this to obtain H and V of the following formula.

H-Σ (HORI [-1+ Σ (SLOR[
) ] ) + Σ (SLOL[(ko + Σ (
VERT [I ko)...(7> ■=Σ (SLOR[)] +Σ (SLOL [
(] )...(8) As a result, the angle θ between the light ray patterns 9 and 10 with the X axis
. , ■ θ, −jan −'
... can be obtained as (9).

FIG. 6 shows the above coding process and (7) (8)
, is a block diagram showing the configuration of an image processing device 22 that performs the processing of equation (9).

This device 22 includes a direction code generation logic 27 that inputs the output of the binarization circuit 19 shown in FIG. have. In addition, a terminal T to which a determination signal indicating that the area is within the window is input, a terminal T2 to which an adder zero clear signal is input, and I(ORI, 5LO
Terminals T, , T4.R, 5LOL, and VERT for inputting the addition result bus output signals, respectively. T, , T6. Furthermore, AND gates 28, 29, which output the signals HORI, 5LOR, and 5LOLVERT output by the direction code generation logic 27 as an in-window determination signal;
30.31 and an adder 32.31 that adds the output of this gate.
33, 34° 35, and gates 36, 37, 38 3 for providing the outputs of each adder to the bus 12 in accordance with each hash output signal.
It has 9. Clear terminals of adders 32.33, 34.35 are connected to the terminal T2.

The CPU 1B calculates the angle θ between the light beam patterns 9 and 10 and the X-axis by calculating equation (9) from the obtained data. seek.

FIG. 11 shows a timing chart for each signal of the image processing device 22. As shown in the figure, the video signal S for ] frames is converted into binary data (1, 0), and after the in-window determination signal is output, the HORI 5
The addition result bus output signals of LOR5LOL VERT are sequentially output, and then the adder zero clear signal is output.

In the image processing device 22 having the above configuration, the CPU 13 (
Since only the calculation of formula 9 is performed and all other processing is performed by hardware, the processing speed is extremely high. This is particularly important when performing automatic bending in a bending machine, since real-time angle measurement is possible without reducing the processing speed.

Next, a specific example of the configuration of the angle measuring device will be shown.

The measuring device shown in FIG. 12 is housed in a small box 40.
An ultra-small CCD camera 41, a laser diode 43 that emits a slit light 42 as a planar light, and an imaging circuit 44.
A 7-segment display 45 for displaying the measurement angle is provided on the upper surface of the display.

The camera 41 is arranged to capture a vertically downward image at a predetermined focal position distance. The laser diode is arranged so as to irradiate a slit light 42 toward the focal position of the camera 41 at an angle of 45° with respect to the imaging direction.

The imaging circuit 44 enters preparation for imaging after the power is turned on, observes the light beam pattern on the workpiece W obtained by the slit light 42, and uses an image at the time when a part of the light beam pattern passes on the imaging axis for angle measurement. The video signal is then output to an image processing device as shown in FIG. 4 or FIG. 6.

It is also possible to provide the box 40 with a handle to make it portable. In this case, it is preferable that an operation switch is provided on the handle, and that the imaging circuit is provided with a determination circuit that takes an image when the light beam pattern reaches the focal position of the camera 41 based on the up and down operation.

In the above configuration, the angle measuring device can measure the angle using equations (() to (6)).

FIG. 13 shows an example in which the angle measuring device shown in FIG. 12 is used to detect the angle of a product having a V-shaped cross-sectional structure.

That is, the belt converter 48 is connected between the processing machines 46 and 47.
In order to measure the angles of the four workpieces (semi-finished products) being transferred, an angle measuring device 5o similar to the device shown in FIG.
7 and the angle measuring device 50 are connected to the host computer 51 to measure the angles of the four workpieces to make them suitable. The host computer 51 can output a processing command to the processing machine 46, and can output a processing command for correcting the angle to the next processing machine 47 based on the measurement result of the angle measuring device 50.

In the embodiments shown in FIGS. 12 and 13, the angle α of the workpiece W is measured by irradiating the upper surface of the workpiece W with one planar light, but a pair of imaging devices equipped with a camera and a light emitting diode The apparatus may determine the inclination angle of each of the two planes of the workpiece W with respect to the imaging direction, and the intersecting angle α of the two planes may be determined by combining them. In this case, the imaging direction of the re-imaging device is generally arranged in parallel;
Even if the imaging directions of the re-imaging devices are tilted with respect to each other, if the relationship is made clear, the angle α can be determined from that relationship.

Further, in the above embodiment, the angle of the acute angle portion is measured from the top surface of the workpiece W, but the angle α can also be measured by imaging the workpiece W from an obtuse angle direction.

The present invention is not limited to the above embodiments, but can be implemented in any appropriate manner by making appropriate design changes.

[Effects of the Invention] As described above, since the present invention is an angle measuring method and apparatus as described in the claims, the angle measuring method that achieves the first object has a surface shape on one surface to be measured. irradiate light,
By imaging the light ray pattern of this planar light on planar coordinates using a CCD sensor or the like, the inclination angle of the surface to be measured with respect to the imaging direction can be measured from the relationship between the irradiation direction or posture of the planar light and the imaging direction. I can do it.

In the angle measurement method that achieves the second objective, one planar light is irradiated onto two planes as measurement surfaces, and a light ray pattern appearing on each of the two planes is detected by one camera. It is possible to capture an image on the coordinates and measure the intersection angle of two planes.

In the angle measurement method that achieves the third objective, two planes as measurement surfaces are irradiated with planar light, and the light ray pattern appearing on each plane is imaged with a pair of cameras, thereby measuring the intersection of the two planes. Angles can be measured.

The angle measuring device that achieves the fourth objective irradiates two planes as measurement surfaces with one planar light and uses one camera to image the light ray pattern that appears on each surface due to this planar light. The intersection angle of two planes can be easily, quickly, and accurately measured.

In the angle measuring device that achieves the fifth objective, two planes as measurement surfaces are irradiated with planar light, and a pair of cameras captures images of the light ray patterns appearing on each plane. It is possible to measure the intersection angle of Therefore, even if there is an obstacle on the central plane of the two planes, the intersection angle of the two planes can be determined by making individual measurements from both sides of the obstacle.

[Brief explanation of drawings]

Figure 1 is a perspective view showing the principle of measuring the intersection angle of two planes;
The figure is an explanatory diagram of the YZ plane, Figure 3 (a) is a plan view of Figure 2, Figure 3 (b) is a front view of Figure 2, and Figure 3 (C) is the right side of Figure 2. 4 is a block diagram showing a configuration example of an image processing device, FIG. 5 is a flowchart showing a measurement method, FIG. 6 is a block diagram showing another configuration example of the image processing device, and FIG. 7 is a light ray pattern. 8 is an explanatory diagram of a 2×2 pixel matrix, FIG. 9 is an explanatory diagram showing the types of direction codes, and FIG. 10 is an image memory coded with direction codes. 11 is a time chart showing the image signal processing method, FIG. 12 is a perspective view of an imaging device equipped with a CCD camera and a laser diode, and FIG. 13 is an example of application of the imaging device to a processing line. FIG. 1.2...Measurement surface 3...Intersection line 4...CCD
Camera 7... Planar light 8... Light emitter 9.1
0...Light ray pattern α...Measurement angle θ...
Detection angle on image memory Figure 1

Claims (9)

[Claims] (1) A surface to be measured is irradiated with planar light by scanning a slit light or a linear beam, and a linear light beam pattern appearing on the surface to be measured is defined as the surface to be measured and the surface irradiated with the planar light. Images are captured on plane coordinates from imaging directions that have a certain relationship,
An angle measuring method comprising: measuring an inclination angle of the surface to be measured with respect to the imaging direction from an angle formed with respect to a reference line of the light ray pattern on the imaged plane coordinates. (2) In claim 1, considering a three-dimensional coordinate XYZ that includes the normal line of one measured surface in the plane coordinate YZ, the irradiation surface is a surface obtained by tilting the YZ plane by an angle β toward the X-axis side, The light ray pattern is imaged on the XY plane coordinates from the Z axis, and the angle of the imaged light ray pattern with respect to the X axis is θ, and the inclination angle α of the measured surface with respect to the Z axis is a=tan^− An angle measurement method characterized by obtaining ^1 (tanθ・tanβ). (3) The angle measuring method according to claim 2, characterized in that α=θ by setting β=45 degrees. (4) In an angle measurement method of measuring the intersection angle of two planes as surfaces to be measured, the two planes are irradiated with one planar light by scanning a slit light or a linear beam, and the lines appearing on each of the two planes are A light ray pattern of the shape is imaged on one plane coordinate from an imaging direction that has a certain relationship with the two planes and the irradiation surface of the planar light, and the image is made with respect to the reference line of the light ray pattern on the imaged plane coordinate. An angle measuring method characterized by measuring an intersection angle of the two planes from a corner. (5) In claim 4, the intersection line of the two planes as the surfaces to be measured is taken as the X axis, and the Z axis is taken in the direction in which these two planes can be seen.
Considering three-dimensional coordinates XYZ that take the axes, a surface obtained by tilting the YZ plane by an angle β around the Y axis is the irradiation surface of the planar light, and the light ray pattern appearing on the two planes is imaged on the XY plane coordinates. However, when the angles made with respect to the X-axis of the imaged light ray pattern for each measured surface are respectively θ_1 and θ_2,
The intersection angle α of the two planes is α=tan^-^1(tanθ_1・tanβ)+ta
An angle measurement method characterized by obtaining n^-^1 (tanθ_2・tanβ). (6) The angle measuring method according to claim 5, characterized in that α=θ_1+θ_2 is determined by setting β=45 degrees. (7) In the angle measurement method of measuring the intersection angle of two planes as surfaces to be measured, each of the two planes is irradiated with planar light by scanning a slit light or a linear beam, and the linear beams appearing on each of the two planes are An angle measuring method comprising: imaging each of the light ray patterns on each of the imaged plane coordinates with a separate camera, and measuring the intersecting angle of the two planes from each of the light ray patterns on each of the imaged plane coordinates. (8) An angle measuring device that measures the intersection angle of two planes as surfaces to be measured, including a light emitting means for irradiating the two planes with one planar light, and a line appearing on the two planes by the irradiation of the planar light. What is claimed is: 1. An angle measuring device comprising: a camera that images a light ray pattern on one plane coordinate; and an image processing device that calculates an intersection angle between the two planes from the imaged light ray pattern. (9) In an angle measuring device that measures the intersection angle of two planes as surfaces to be measured, a light emitting means for irradiating the two planes with different planar lights, and a
An angle measuring device comprising: a pair of cameras that respectively image each light ray pattern appearing on a plane; and an image processing device that calculates an intersection angle between the two planes from the imaging results of both cameras.