JPH03242613A - Actuator for mirror support - Google Patents
Actuator for mirror supportInfo
- Publication number
- JPH03242613A JPH03242613A JP4025090A JP4025090A JPH03242613A JP H03242613 A JPH03242613 A JP H03242613A JP 4025090 A JP4025090 A JP 4025090A JP 4025090 A JP4025090 A JP 4025090A JP H03242613 A JPH03242613 A JP H03242613A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- universal joint
- cell
- slide mechanism
- magnetic fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 10
- 238000013016 damping Methods 0.000 claims description 9
- 230000002238 attenuated effect Effects 0.000 abstract description 5
- 230000006866 deterioration Effects 0.000 abstract description 5
- 230000010355 oscillation Effects 0.000 abstract 6
- 238000010586 diagram Methods 0.000 description 9
- 241000270722 Crocodylidae Species 0.000 description 2
- LNNWVNGFPYWNQE-GMIGKAJZSA-N desomorphine Chemical compound C1C2=CC=C(O)C3=C2[C@]24CCN(C)[C@H]1[C@@H]2CCC[C@@H]4O3 LNNWVNGFPYWNQE-GMIGKAJZSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 235000021395 porridge Nutrition 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 240000004050 Pentaglottis sempervirens Species 0.000 description 1
- 235000004522 Pentaglottis sempervirens Nutrition 0.000 description 1
- 210000003323 beak Anatomy 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Telescopes (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は光学望遠鏡薄型ミラー會支持し。[Detailed description of the invention] [Industrial application field] This invention supports optical telescope thin mirror assembly.
この薄型ミラーの農面貴から最適な荷重で支持すること
により％薄型ミラーの鏡面を所定の形状に保つミラーサ
ポート用アクチュエータに関するものである。This invention relates to a mirror support actuator that maintains the mirror surface of a thin mirror in a predetermined shape by supporting the thin mirror with an optimal load.
第６図は同一出願人による先行出虐人の特願平１−８８
１６１ 号明細書に示されたミラーサポート用アクチュ
エータの原理を示す＃Ｊ ［ｆｉ ＩＩ成図で１図１Ｃ
かいて、…はミラー、信）はミラー…下方に＆けられた
ミラーセル、（Ｓ）はミラーＩｌ＋裏面の穴付近ｉＣ設
けられたロードセル、４１はミラー１１１面穴内を直進
案内する＄１のスライド機構１１ｔ：Ｃ第１のスライド
機４ｉ１＋４１内に取付けられた第１の自在継手、（７
）は第１の自在継手ｔｉｌに回転栢合された支持棒、１
６）は支持棒（７）のミラーセル室１付近に取付けられ
た第８の自在継手、（８１は第８の自在継手（６１に回
転結合され、ミラーセル１！１内を直進案内する第３の
スライド機構、（９１は第２のスライド機構（８）に結
合されたばね、１１０１ばばね（９）に結合され、池端
ｔ＝ラーセル１２）に取付けられた送９磯礪、すυは支
持棒１７１のスライド機構４１と送り側に取付けられた
カウンタウェイト、（１カニミラーセル（２）と＃ｌ！
１のスライド１１１ｍ＋８１の間に取付けられた防振ゴ
ムなどの減衰材である。Figure 6 is a patent application filed by the same applicant in 1999-1-88.
#J showing the principle of the mirror support actuator shown in the specification of No. 161 [fi II diagram 1 Figure 1C
(S) is the mirror Il + the load cell installed near the hole on the back side of the iC, and 41 is the $1 slide that guides the mirror straight through the hole on the 111th surface. Mechanism 11t: C first universal joint installed in the first slide machine 4i1+41, (7
) is a support rod rotatably connected to the first universal joint til, 1
6) is the eighth universal joint attached to the support rod (7) near the mirror cell chamber 1; Slide mechanism, (91 is a spring coupled to the second slide mechanism (8), 1101 is coupled to the spring (9), and is attached to Ikebata t = Lar cell 12), Su υ is the support rod 171 The slide mechanism 41 and the counterweight attached to the feed side, (1 crab mirror cell (2) and #l!
This is a damping material such as anti-vibration rubber installed between slides 111m+81 of 1.
次に動作について説明する。ミラー：１１の自重のうち
、ミラー…の鏡軸Ｖｃ垂直な方向の成分はミラー＋ｌｌ
の自重と釣り合うだけのカウンタウェイ）（１υを支持
棒（７）のミラー…側と逆側に取付けることにより、最
適支持状態に保たれる。−方、ミラー目１の自重のうち
、ミラー…の説紬方向の成分は、送り［１ｍ ｔｌｏｌ
にてばね（９１を伸縮して、それによって生じる力を第
８のスライド機構＋８１、＠８の自在継手（６１，支持
＄ １７１−第１の自在継手＋ｌｉｌ 、 ＄ １のス
ライド機構１４１．ロードセル（３：を介してミラーｉ
ｌ＋に伝え、さらにこの力の大きさをロードセル・３１
にて検出しながら、最適支持荷重にて支持される。Next, the operation will be explained. Mirror: Of the weight of 11, the component in the direction perpendicular to the mirror axis Vc of the mirror is mirror +ll
By attaching 1υ (1υ) on the side opposite to the mirror... side of the support rod (7), the optimal support state is maintained. On the - side, the mirror... The component in the direction of the theory is the feed [1m tlol
The spring (91) is expanded and contracted, and the resulting force is transferred to the eighth slide mechanism + 81, @8 universal joint (61, support $ 171 - first universal joint + lil, $ 1 slide mechanism 141. load cell ( 3: Mirror i through
The magnitude of this force is transmitted to the load cell 31.
It is supported with the optimum support load while detecting the load.
ミラー…の表側からミラー…ｌＣ風が当たって。The LC wind hits the mirror from the front side of the mirror.
ミラー…が鏡軸方向に、ミラー１１）の固有振動数約２
０Ｈｇ８度で振薊したとき、この振鰐の一部は、ロード
セル（３１，第１のスライド機構１４１、第１の自在継
手＋６）、支持Ｊｌｉ１７１％％ｇノ自在継手１６）、
第２のスライド機構（８１、ばね（９）、送り機嘴叫を
介してミラーセル１２１に伝わる。そのｈａロードセル
（３）、第１のスライド機構）４１、粥ｌの自在継手、
６）、支持棒Ｉ７１、粥２の自在継手（６）、第２のス
ライド機構（８）、減衰材ｕ２１１に介してミラーセル
１２１に伝わる。しかし、この［ｆｉは減衰材１２１に
て早く減衰される。The mirror... is in the mirror axis direction, and the natural frequency of the mirror 11) is approximately 2.
When the crocodile is shaken at 0 Hg 8 degrees, a part of this crocodile is the load cell (31, first slide mechanism 141, first universal joint +6), support Jli171%g universal joint 16),
The second slide mechanism (81, spring (9), is transmitted to the mirror cell 121 via the feeder beak. Its ha load cell (3), the first slide mechanism) 41, the universal joint of the gruel l,
6), is transmitted to the mirror cell 121 via the support rod I71, the universal joint (6) of the gruel 2, the second slide mechanism (8), and the damping material u211. However, this [fi is quickly attenuated by the attenuating material 121.
従来のミラーサポート用アクチュエータは以上のように
構成されて訃り、ミラーｎｕ ＩｔＣｆｉｌ＆等の外力
が負荷された時ミラー…の鏡軸方向に生じる振動１に減
衰材０２１で減衰させている。ところが防振ゴム等の減
衰材では減衰能が不十分で、数白μｍオーダの振＃は減
衰させられるが、数μｍ以下の振＃は減衰させられず、
望遠鏡の性能の劣化音生じさせるという問題点があった
。The conventional mirror support actuator is constructed as described above, and the damping material 021 damps the vibration 1 generated in the direction of the axis of the mirror when an external force is applied to the mirror. However, damping materials such as anti-vibration rubber have insufficient damping ability, and although vibrations on the order of several micrometers can be attenuated, vibrations on the order of several micrometers or less cannot be attenuated.
There was a problem that the performance of the telescope deteriorated and noise was generated.
この発明は上記のような問題点を解消するためになされ
たもので、数−ｍ以下の橿く微少な振＃Ｉ倉も早く減衰
させ、望遠鏡の性能の劣化を最小限［ｋさえることがで
きるミラーサポート用アクチエエータを得ることを目的
とする・〔課題を解決するための手段〕
この発明に係るミラーサポート用アクチュエータＦｉ減
衰材として磁性流体ダンパを用いたものである。This invention was made to solve the above-mentioned problems, and it is possible to quickly attenuate even minute vibrations of less than a few meters, thereby minimizing the deterioration of telescope performance. [Means for Solving the Problems] A magnetic fluid damper is used as a damping material in the mirror support actuator Fi according to the present invention.
この発明ＩＩ！（かける磁性流体ダンパはミラーに生じ
た数μｍオーダの振＃倉すみやかに減衰させる。而して
望遠鏡の性能の劣化ｔ−最小限に抑える。This invention II! (The applied magnetic fluid damper quickly damps vibrations on the order of several μm that occur in the mirror. Thus, the deterioration of the telescope's performance is kept to a minimum.
以下、この発明の実施！ＰＩＩを図について説明する・
第１図はこの発明の一実施例のミラーサポート用アクチ
エエータ金示す測面４１１成図で、図ＶＣ＆いて、…は
ミラー％１！１はミラー…下方に設けられたミラーセル
、；３：はミラ−＋１１裏面の穴付近にａｆｆられたロ
ードセル、 １４１ｉミラー…の裏面穴内を直進案内す
る第１のスライド機構、（ｉｌはＩＩ！＋１のスライド
機構＋ｉｌ内に取付けられた第１の自在継手％（７）は
第１の自在継手１６１に回転結合された支持棒、（６１
支持＄＋？ｌのくラーセル（！１付近に取付けられた第
８の自在継手、（８）は第２の自在継手１６１ Ｋ回転
結合され、ミラーセル１！１内を直進案内する１ｇのス
ライド機構、（９）は第８のスライド機構１８１に結合
されたばね。Below is the implementation of this invention! Explaining PII with diagrams・
FIG. 1 is a diagram showing a surface 411 of an actuator for mirror support according to an embodiment of the present invention, where VC& is a mirror %1! 1 is a mirror...a mirror cell provided below; 3: a mirror -Load cell attached near the hole on the back side of +11, 141i mirror...first slide mechanism that guides the back side hole in a straight line, (il is II! +1 slide mechanism + first universal joint installed inside il% ( 7) is a support rod rotatably coupled to the first universal joint 161;
Support $+? The eighth universal joint installed near the mirror cell (!1), (8) is the second universal joint 161 K. The 1g slide mechanism is rotatably coupled and guides the mirror cell 1!1 in a straight line, (9) is a spring coupled to the eighth slide mechanism 181;
叫ばばね（９）にＭ合され、他端がミラーセル（！１に
取付けられた送り機構、Ｑυは支持棒（７）の４％１の
スライド機構１４）と逆側に取付けられたカウンタウェ
イト、Ｑ３１はミラーセル（！１と第８のスライド機構
（８）間に取付けられた磁性流体ダンパである。第Ｓ図
はこの一実施例の鳥敞図である。各部の符号は第１図と
同じである。M is fitted to the spring spring (9), and the other end is a mirror cell (! 1 has a feeding mechanism attached to it, Qυ is a 4% 1 slide mechanism 14 of the support rod (7)) and a counterweight attached to the opposite side. Q31 is a magnetic fluid damper installed between the mirror cell (!1) and the eighth slide mechanism (8). Figure S is a bird's-eye view of this embodiment. The numbers of each part are the same as in Figure 1. It is.
次に動作について説明する。ミラー…の自重のうち、ミ
ラー…の競輪に垂直な方向の成分は。Next, the operation will be explained. Of the mirror's own weight, what is the component in the direction perpendicular to the mirror's bicycle race?
従来の装置と同様、ミツ−…の自重と釣シ合うだけのカ
ウンタウェイトｔＵ＋を支持棒１７）のミラー１１ｇ１
４と逆側に取付けることにより、最適支持状態に保たれ
る。一方、ミラーｆｉ＋の０竃のうち、ミラーＩＩＩの
鏡軸方向の取分は、従来の装置と同様、送り機構＋１０
１にてばね＋９１を伸縮して、それによって生じる力を
第１のスライド機構（８）、第８の自在継手１６１、支
持棒（７）、第１の自在継手１）、第１のスライド機構
・４１．ロードセル１３１ ′ｆｒ介してミラーＩｌｌ
に伝え、さらにこの力の大きさをロードセル’３１ Ｋ
て検出しながら最適支持状態にて支持される。ミラーｉ
ｌｌの表側からミラーＩｌｌ ｉｃ風が当たってミラー
…２５：鏡軸方向にミラー…の固有振動数的ｊＯＨｘ程
度で微小振動したとき、この振動の−ｇはロードセル１
ｍｌ、＠１のスライド機構４；、粥ｌの自在継手、６１
、支持、ｌｌ＋７１、第８の自在継手（６１，第８のス
ライド機構（８）、ばね（９）、送り機Ｉｔ １１０１
を介してミラーセル（！１に伝わる。その他はロードセ
ル３１、第１のスライド機構１４１．′＠１の自在継手
Ｉ６１．支持棒＋？ｌ 、 ％ Ｒの自在継手１６）。Similar to the conventional device, the mirror 11g1 of the support rod 17) is loaded with a counterweight tU+ that balances the own weight of the Mitsu...
By attaching it on the opposite side to 4, the optimal support condition can be maintained. On the other hand, of the 0 units of mirror fi+, the share of mirror III in the mirror axis direction is the same as in the conventional device, the feed mechanism + 10
1, the spring +91 is expanded and contracted, and the resulting force is transferred to the first slide mechanism (8), the eighth universal joint 161, the support rod (7), the first universal joint 1), and the first slide mechanism.・41. Mirror Ill through load cell 131'fr
The magnitude of this force is then transmitted to the load cell '31 K.
It is supported in the optimal support state while detecting the mirror i
25: When the mirror Ill ic wind hits the mirror from the front side of the mirror and the mirror vibrates minutely in the direction of the mirror axis at a natural frequency of about jOHx, -g of this vibration is the load cell 1.
ml, @1 slide mechanism 4;, porridge l universal joint, 61
, support, ll+71, 8th universal joint (61, 8th slide mechanism (8), spring (9), feeder It 1101
It is transmitted to the mirror cell (!1.Others are load cell 31, first slide mechanism 141.'@1 universal joint I61. support rod +?l, % R universal joint 16).
第８のスライドＩ！ＩＩＦ＋８）、磁性流体ダンパａＳ
を介してミラーセル＋ｌｌ ＩＣ伝わる。しかし、こ
の振動は磁性流体ダンパＱＩＫて十分早く減衰される。8th slide I! IIF+8), magnetic fluid damper aS
The signal is transmitted through the mirror cell +ll IC. However, this vibration is damped quickly enough by the magnetic fluid damper QIK.
磁性流体ダンパ０３１の原憚倉第３図の説明図に示す。The magnetic fluid damper 031 is shown in the explanatory diagram of FIG. 3.
第３図１ｃかいて、ＱＳぽ磁石、αｓＨ磁石Ｇ四と磁石
Ｑ−の間に配置された磁性体、同ｔ′ｉ磁石ｇ−と磁石
ｔｕｅの周りにある磁性１５１体、ｑ８Ｈ磁性流体ａｒ
ｃ金入れる外筒、Ｇｅ１磁石Ｑ−の上についているピス
トンである。磁性流体ダンパａ３は以上のように構成さ
れているので、筐ず、磁性流体−の７一ル作用ＶＣより
、磁性流体間の洩れがなく、別にシール構機全村ける必
要がない。また、磁石ｌｌ１１は磁性流体間の作用によ
り外筒呻の中心に位置する性質があるので、固体接触が
なく、ピストンａＩｉを機械的にセンタリングする必要
がない。In Figure 3 1c, the QS po magnet, the magnetic body placed between the αsH magnet G4 and the magnet Q-, the magnetic body 151 around the magnet g- and the magnet t'i, and the q8H magnetic fluid ar.
c This is the outer cylinder that holds the gold, and the piston attached to the top of the Ge1 magnet Q-. Since the magnetic fluid damper a3 is constructed as described above, there is no leakage between the magnetic fluids, and there is no need to completely disassemble the sealing mechanism. Further, since the magnet ll11 has the property of being located at the center of the outer cylinder due to the action between the magnetic fluids, there is no solid contact and there is no need to mechanically center the piston aIi.
よって、他のダンパと比べて、機械的な接触部１？たす
、微小振幅の振動に対して減衰ｔきかせられる。また、
磁性流体ａＧ＃″ｊ、空気やオイルに比べて璋性率が高
く、微小振幅の正編もない。Therefore, compared to other dampers, the mechanical contact part 1? Additionally, vibrations with minute amplitudes are damped by t. Also,
The magnetic fluid aG#''j has a higher tensile strength than air or oil, and there is no normal arc with minute amplitude.
よって磁性流体ダンパは風等の外乱によるミラー…の微
振＃を抑えることができる。Therefore, the magnetic fluid damper can suppress the slight vibration # of the mirror caused by disturbances such as wind.
な釦、上記実施例では、ミラーセル１２１と第２σノス
ライド機構（８）の間に磁性流体ダンパａａｔ設けたも
の倉示したが、ばね（９）と第８のスライド機構（８）
の間に磁性流体ダンパＱ４１設けてもよい。In the above embodiment, a magnetic fluid damper aat is provided between the mirror cell 121 and the second slide mechanism (8), but the spring (9) and the eighth slide mechanism (8)
A magnetic fluid damper Q41 may be provided between the two.
第４図はこの発明の他の実施列七本す６１１戚図で、図
Ｋかいて、…〜αυけ第１図の実施例［示したものと同
一である。ｆ１４Ｈ−ｊ上記ばね（９）と第２のスライ
ド機構１８）との間ＶＣＣ打付られた磁性流体ダンパで
ある。FIG. 4 is a diagram showing seven rows of other embodiments of the present invention. f14H-j is a magnetic fluid damper in which VCC is applied between the spring (9) and the second slide mechanism 18).
ミラー…の低周波数帯域に訃ける微小振動にロードセル
（３１，第ｌのスライド機構＋４１．＠１の自在継手＋
ｉｌ、支持棒１７）、Ｉｌ＋の自在継手１６）、第２の
スライド機構（８）、磁性流体ダンパ１１４．ばね（９
）、送り機構（１０１を介してミラーセル１１に伝わる
。しかし、この振＃ぽ磁性Ｒ＋ダンパｉ＋４にて十分早
く減衰される。The load cell (31, 1st slide mechanism + 41.@1 universal joint +
il, support rod 17), Il+ universal joint 16), second slide mechanism (8), magnetic fluid damper 114. Spring (9
) is transmitted to the mirror cell 11 via the sending mechanism (101). However, this vibration is attenuated sufficiently quickly by the magnetic R+damper i+4.
以上のように、この発明によれば、減衰材として磁性流
体ダンパ金ミラーとミラーセルの間に設け＆ため、外力
（主に風）Ｋよって生じるミラーの極く微小な振＃（１
μｍ以下）七十分早く減衰させ、望遠鏡の性能上劣化さ
せることのないミラーサポート用アクチュエータが得ら
れる効果がある。As described above, according to the present invention, the magnetic fluid damper is provided as a damping material between the gold mirror and the mirror cell, so that extremely small vibrations of the mirror caused by external force (mainly wind) K are suppressed.
μm or less), it is possible to obtain a mirror support actuator that attenuates 70 minutes quickly and does not cause any deterioration in the performance of the telescope.
第１図および第８図はこの発明の一実施的によるミラー
サポート用アクチュエータの原理七本す構成図及び鳥轍
図５第８図にこの発明に係わる磁性流体ダンパの原理に
示す説明図、第４図はこの発明の他の実施ＰＪ倉七本構
成図、第５図ｆｌ［来のミラーサポート用アクチュエー
タ七本す構成図である。
図中、…はミラー ２１はミラーセル、３）はロードセ
ル、１４）は第１のスライド機構、＋６１は第１の自在
継手、（６１は第８の自在継手、＋７１＃１支持棒、（
８）は粥８のスライド機構、＋９１［ばね、叫は送りＩ
ｉ！構、ｔｌｌｊカウンタウェイト、α１．ａ４は磁性
流体ダンパである。
なか図中同−符−ｊ！は同−筐たは相当部分を示す。
第１図
第３図1 and 8 are seven configuration diagrams showing the principle of a mirror support actuator according to an embodiment of the present invention, and FIG. 8 is an explanatory diagram showing the principle of a magnetic fluid damper according to the present invention. FIG. 4 is a block diagram of another embodiment of the present invention, and FIG. 5 is a block diagram of seven mirror support actuators. In the figure, ... is a mirror, 21 is a mirror cell, 3) is a load cell, 14) is a first slide mechanism, +61 is a first universal joint, (61 is an eighth universal joint, +71 #1 support rod, (
8) is the slide mechanism of porridge 8, +91 [spring, shout is feed I
i! structure, tllj counterweight, α1. a4 is a magnetic fluid damper. Same sign in the figure -j! indicates the same casing or a corresponding part. Figure 1 Figure 3
Claims (1)
ドセルに接合され、上記ミラー裏面穴内を直進案内する
第１のスライド機構、このスライド機構に取付けられた
第１の自在継手、第１の自在継手に回転結合され、上記
ミラー下方に設けられたミラーセル付近に第８の自在継
手を有し、第８の自在継手に対して第１の自在継手と逆
側の端部にカウンタウェイトが取付けられた支持棒、第
８の自在継手に回転結合され、上記ミラーセル内を直進
案内する第８のスライド機構、第８のスライド機構を支
持し、かつこれに力を加えるばね、このばねを伸縮させ
る送り機構、及び第８のスライド機構と上記ミラーセル
との間に設けられる減衰材を備えるミラーを支持する機
構において、上記減衰材として磁性流体ダンパを用いた
ことを特徴とするミラーサポート用アクチュエータ。A load cell installed near the hole on the back side of the mirror, a first slide mechanism connected to this load cell and guided in a straight line through the hole on the back side of the mirror, a first universal joint attached to this slide mechanism, and a rotating mechanism connected to the first universal joint. a support rod that is coupled and has an eighth universal joint near the mirror cell provided below the mirror, and has a counterweight attached to an end of the eighth universal joint on the opposite side of the first universal joint; , an eighth slide mechanism rotatably coupled to the eighth universal joint and guided linearly within the mirror cell; a spring that supports and applies force to the eighth slide mechanism; a feeding mechanism that expands and contracts the spring; An actuator for supporting a mirror, characterized in that a mechanism for supporting a mirror is provided with a damping material provided between an eighth slide mechanism and the mirror cell, and a magnetic fluid damper is used as the damping material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4025090A JPH03242613A (en) | 1990-02-20 | 1990-02-20 | Actuator for mirror support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4025090A JPH03242613A (en) | 1990-02-20 | 1990-02-20 | Actuator for mirror support |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03242613A true JPH03242613A (en) | 1991-10-29 |
Family
ID=12575452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4025090A Pending JPH03242613A (en) | 1990-02-20 | 1990-02-20 | Actuator for mirror support |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03242613A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014507015A (en) * | 2011-02-17 | 2014-03-20 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Optical mount and EUV exposure apparatus |
-
1990
- 1990-02-20 JP JP4025090A patent/JPH03242613A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014507015A (en) * | 2011-02-17 | 2014-03-20 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Optical mount and EUV exposure apparatus |
| US9410662B2 (en) | 2011-02-17 | 2016-08-09 | Carl Zeiss Smt Gmbh | Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus |
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