JPH0323924U - - Google Patents
Info
- Publication number
- JPH0323924U JPH0323924U JP8552789U JP8552789U JPH0323924U JP H0323924 U JPH0323924 U JP H0323924U JP 8552789 U JP8552789 U JP 8552789U JP 8552789 U JP8552789 U JP 8552789U JP H0323924 U JPH0323924 U JP H0323924U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- gas
- seal portion
- reaction
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000005096 rolling process Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8552789U JPH0323924U (ru) | 1989-07-19 | 1989-07-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8552789U JPH0323924U (ru) | 1989-07-19 | 1989-07-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0323924U true JPH0323924U (ru) | 1991-03-12 |
Family
ID=31634714
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8552789U Pending JPH0323924U (ru) | 1989-07-19 | 1989-07-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0323924U (ru) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180001223U (ko) * | 2016-10-21 | 2018-05-02 | 주식회사 우리애그린 | 포트용 포장지 |
-
1989
- 1989-07-19 JP JP8552789U patent/JPH0323924U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180001223U (ko) * | 2016-10-21 | 2018-05-02 | 주식회사 우리애그린 | 포트용 포장지 |